KR100623719B1 - Vapor deposition source for organic material - Google Patents

Abstract

The present invention relates to a source for depositing an organic material, a housing having one side opened, an organic substance storage unit located inside the housing, the organic substance being stored therein, and having one side opened, and a heating heater interposed between the organic substance storage unit and the housing. And a nozzle portion connected to the opened portion of the organic substance storage portion to spray the organic substance and having an exposed surface exposed to the heating heater portion. Therefore, the heating heater unit can directly heat the nozzle unit as well as the organic substance storage unit. Thus, the temperature of the nozzle portion and the temperature of the organic substance storage portion are almost the same without temperature deviation. Therefore, according to the present invention, it is possible to prevent the clogging of the nozzle due to the temperature deviation of the organic material storage unit and the nozzle unit in advance.

Organic matter, evaporation source

Description

Organic deposition source {Vapor deposition source for organic material}

1 is a schematic view showing an organic vapor deposition apparatus having an organic vapor deposition source of the present invention.

2 is a perspective view illustrating an organic material deposition source according to the present invention.

3 is a cross-sectional view taken along line AA of FIG. 2.

4 is an enlarged cross-sectional view of a portion B of FIG. 3.

** Explanation of symbols for main parts of drawings **

100 ... Organic Deposition Equipment

300.Organic Deposition Source

310 ... Insulation member

320 ... Housing

330 ... heat reflector

340 ... Bobplate

350 nozzle part

The present invention relates to an organic material deposition source for forming an organic film such as an organic light emitting device, and more particularly, to an organic material deposition source in which an organic material is stored and the organic material is evaporated.

In general, an organic film of an organic light emitting device (OLED) is largely a method of forming an organic film by evaporating a low molecular organic material in a vacuum, and dissolving a high molecular organic material in a solvent, followed by spin coating, There is a method of forming an organic thin film using dip coating, doctor blading, inkjet printing, or the like.

In particular, low molecular weight organic materials are sublimable and are capable of evaporating at relatively low temperatures of 200-400 ° C. Therefore, when forming a thin film made of such a low molecular weight organic material, a shadow mask pattern having a thin film-shaped opening is aligned in front of the substrate, and then a thin film is formed by spraying the evaporated organic molecules toward the substrate. Thus, the predetermined pattern thin film by the shadow mask pattern is formed on the substrate.

On the other hand, the evaporation and spraying of the low molecular weight organic material is performed by an organic material deposition source in the form of a crucible capable of heating the organic material to a predetermined temperature. At this time, the organic material deposition source is provided with a heater or the like to heat the organic material, one side is provided with a nozzle for injecting the organic molecules evaporated by the heater or the like to the substrate side. Therefore, organic molecules evaporated by a heater or the like are sprayed to the substrate side through this nozzle to form a predetermined pattern thin film.

However, such a conventional organic material deposition source has a problem that a large temperature deviation occurs in the crucible portion in which the organic material is evaporated and the nozzle portion in which the evaporated organic molecules are injected.

Therefore, organic molecules evaporated in the crucible are condensed inside the nozzle before being sprayed to the outside through the nozzle, causing the nozzle to be clogged.

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide an organic material deposition source that can prevent the clogging of the nozzle due to the temperature variation of the crucible and the nozzle in advance.

In addition, another object of the present invention to provide an organic material deposition source that can minimize the temperature variation of the crucible and the nozzle.

According to a first aspect of the present invention for realizing such an object, a housing having one side opened, an organic substance storage unit having an organic substance stored therein, and having one side opened therebetween, between the organic substance storage unit and the housing There is provided an organic material deposition source including a heating heater portion interposed therebetween, and a nozzle portion connected to an opened portion of the organic material storage portion to inject organic material and having an exposed surface exposed to the heating heater portion.

In this case, the nozzle unit may include a nozzle body that seals the opened portion of the organic storage unit, and an organic injection nozzle formed through the nozzle body and spraying organic molecules inside the organic storage unit to the outside of the organic storage unit. In this case, the exposed surface is preferably provided on the outer peripheral surface of the nozzle body.

One side of the nozzle body may be fitted inside the organic material storage part, and the other side of the nozzle body may be formed to extend a predetermined length to the outside of the organic material storage part. In this case, the exposed surface is preferably provided on the outer peripheral surface of the nozzle body formed to extend a predetermined length to the outside of the organic storage.

In addition, the exposed surface may be provided on any portion of the upper or lower portion of the outer peripheral surface of the nozzle body is formed to extend a predetermined length to the outside of the organic storage.

In addition, the exposed surface may directly contact the heating heater.

On the other hand, according to a second aspect of the present invention for achieving the above object, a housing having one surface opened; An organic material storage unit located in the housing and having an organic material stored therein and opening at one surface thereof; A heating heater part interposed between the organic material storage part and the housing; The nozzle body is connected to the opened portion of the organic matter storage unit, and is formed through the nozzle body to seal the opened portion of the organic matter storage part and to expose the heating heater on the outer circumferential surface thereof, and to form organic molecules inside the organic matter storage part. A nozzle unit including an organic spray nozzle spraying toward the substrate and a splash prevention film formed integrally with the nozzle body to prevent splashing of organic substances in the organic storage unit; A heat reflecting plate installed on an inner wall of the housing to reflect heat from the heating heater part to the organic material storage part; And a heat shield member attached to the outer surface of the nozzle body in the substrate direction.

  At this time, one side of the nozzle body may be fitted inside the organic material storage portion and the other side of the nozzle body may be formed to extend a predetermined length to the outside of the organic material storage portion. In this case, the exposed surface is preferably provided on the outer circumferential surface of the nozzle body extending a predetermined length to the outside of the organic storage.

In addition, the exposed surface may be in direct contact with the heating heater.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

An organic material deposition apparatus provided with an organic material deposition source according to the present invention, as shown in FIG. 1, a chamber 200 constituting the body of the organic material deposition apparatus 100 and at least one for injecting organic particles onto the substrate S. The organic material deposition source 300 of the.

The chamber 200 is configured to maintain a vacuum inside the vacuum pump (not shown). In addition, an organic material deposition source transfer device 400 capable of moving the organic material deposition source 300 in the vertical direction is installed in the chamber 200 to move the organic material deposition source 300 in the deposition direction.

The organic material deposition source transport apparatus 400 is a vertical transport apparatus suitable for use in the chamber 200 maintained in a vacuum, and is capable of controlling the moving speed of the organic material deposition source 300 according to process conditions.

The configuration includes a ball screw 401 and a motor 403 for rotating the ball screw 401, and a guide 402 for guiding the organic material deposition source 300. In addition, the organic material deposition source transfer apparatus 400 may be implemented to drive at a constant speed using a linear motor in another embodiment.

On the other hand, the substrate (S) located inside the chamber 200 is located in a substantially vertical direction for the deposition of the organic material. Preferably at an angle of approximately 70 ° to 110 ° relative to the ground.

In addition, a mask pattern M that determines a shape of an organic material to be deposited is disposed between the entire surface of the substrate S, that is, between the organic material deposition source 300 and the substrate S. Therefore, the organic material evaporated from the organic material deposition source 300 is deposited on the substrate S while passing through the mask pattern M so that an organic film having a predetermined shape is formed on the substrate S.

On the other hand, the organic material deposition source 300 accommodates the organic material to be deposited on the substrate (S) in the chamber 200, and heated and evaporated the received organic material and sprayed onto the substrate (S) substrate (S) The organic film is formed on the substrate.

2 is a perspective view of an organic material deposition source according to the present invention. 3 is a cross-sectional view A-A of the organic material deposition source according to FIG. 2.

As illustrated in FIGS. 2 and 3, the organic material deposition source 300 includes a housing 320 which stores organic material and has one surface opened, and has an organic storage unit 360 (or “crucible” inside the housing 320. (crucible) ”is installed.

Here, the housing 320 is formed to surround the organic storage unit 360, and serves to isolate the organic storage unit 360 from the external environment.

In addition, the organic storage unit 360 is smaller than the housing 320 to be installed in the housing 320, and secures an opening surface that is opened in the same direction as the opening surface of the housing 320.

In addition, the organic storage unit 360 stores an organic material that is a raw material of the organic thin film to be deposited on the substrate S. The organic storage unit 360 is formed of graphite having excellent thermal conductivity. At this time, graphite is a hexagonal porous material, and has excellent thermal insulation efficiency. Therefore, the heating temperature inside the organic storage 360 may be stably maintained. However, in such graphite, leakage of organic matter may occur. Therefore, the organic material storage unit 360 may be coated with an organic material leakage preventing member (not shown) made of nickel or a high melting point metal.

On the other hand, the inside of the open surface of the organic material storage unit 360 is provided with a nozzle unit 350 for injecting the organic material is evaporated and discharged inside the organic material storage unit 360, the organic material storage unit 360 and the housing ( The heating heater 370 is interposed between the 320.

The nozzle unit 350 sprays the organic particles evaporated from the organic storage unit 360 onto the substrate S that is substantially vertical, and determines the form in which the organic particles are deposited and distributed on the substrate S. Perform. In this case, the nozzle unit 350 may be made of graphite having excellent thermal conductivity, and an organic material leakage preventing member (not shown) may be coated on a surface thereof to prevent leakage of the organic material.

Specifically, the nozzle unit 350 is formed through the nozzle body 353 and the nozzle body 353 to seal the open portion of the organic storage unit 360, and forms organic molecules inside the organic storage unit 360. Organic spray nozzle 351 for spraying to the substrate (S) side, the organic material of the organic storage unit 360 is prevented from splashing and the splash prevention film 352 formed integrally with the nozzle body 353, the organic storage unit ( And an open portion of 360. Therefore, the organic material that is evaporated inside the organic storage unit 360 and discharged to the substrate S side through the organic material spray nozzle 351 is not sprayed in the form of a cluster due to the anti-fogging film 352, and sprayed in the form of particles. It is done.

In this case, a portion of the nozzle body 353 may be coupled to the inside of the organic material storage unit 360. Therefore, one side of the nozzle body 353 is fitted to the inside of the organic storage unit 360, the other side of the nozzle body 353 is formed to extend a predetermined length to the outside of the organic storage unit 360.

In addition, the organic spray nozzle 351 is formed through the nozzle body 353 so as to spray the organic molecules, it is formed of a plurality extending in the side of the spray direction. Here, the number of the organic injection nozzles 351 may be formed more densely toward both sides from the center portion of the nozzle unit 350. Therefore, the organic material spray nozzle 351 is sprayed and deposited on the substrate S with a uniform density.

Meanwhile, the nozzle unit 350 may have an exposed surface 355 exposed to the heating heater 370 to be directly heated by the heating heater 370. At this time, the exposed surface 355 is preferably provided on the outer circumferential surface of the nozzle body 353, that is, on the outer circumferential surface of the nozzle body 353 extending a predetermined length to the outside of the organic matter storage unit 360.

Specifically, the exposed surface 355 exposed to the heating heater 370 may be formed only on any portion of the upper or lower portion of the outer circumferential surface of the nozzle body 353 extending a predetermined length to the outside of the organic storage unit 360. It may be formed on both parts. Preferably, the exposed surface 355 is preferably formed on both the upper and lower outer circumferential surfaces of the nozzle body 353 extending a predetermined length to the outside of the organic storage unit 360. In addition, the exposed surface 355 exposed to the heating heater 370 may not only be exposed, but may be in direct contact with the heating heater 370. In this case, the entire nozzle unit 350 including the nozzle body 353 is quickly heated to a predetermined temperature by the heating of the heating heater unit 370, the temperature of the nozzle unit 350 is the temperature of the organic storage unit 360 It will be the same or almost no temperature.

On the other hand, the heating heater unit 370 is interposed between the organic storage unit 360 and the housing 320 serves to heat the organic material of the organic storage unit 360 to enable evaporation. 370 is composed of a hot wire that is a heat source to enable the evaporation of the organic material, and a hot wire support that is formed in a rib-like shape, but not to sag and accommodates the hot wire, although not shown in the drawing.

That is, the heating heater 370 has a kind of heater tunnel structure consisting of a hot wire and a hot wire support, and a heater tunnel is formed to surround the organic material storage unit 360. Therefore, the heating heater 370 is not formed in the organic material deposition source 300 in the form of being integrated with other components, in particular, the organic matter storage unit 360, or attached to other components, separate and replace independently Would be possible.

The organic material deposition source 300 may further include an internal heat reflection plate 330 attached to an inner wall of the housing 320. The internal heat reflection plate 330 reflects the heat generated by the heating heater 370 to increase the thermal efficiency of the heating heater 370.

In addition, the organic material deposition source 300 may further include a heat shield plate 340 attached to the outer surface in the direction of the substrate (S) of the nozzle unit 350. The heat shield plate 340 prevents heat from being emitted through the nozzle unit 350 and affecting the substrate S.

In addition, the organic material deposition source 300 may further include a heat insulating member 310 installed on the outer wall of the housing 320. The heat insulating member 310 prevents heat generated from the heating heater 370 from being discharged to the outside through the housing 320.

The heat reflection plate 330, the heat shield plate 340 and the heat insulating member 310 serves to further improve the thermal efficiency of the organic material deposition source 300.

Although the organic material deposition source 300 is not shown in the drawing, the organic material deposition source 300 may further include a measuring device that serves to measure the deposition rate of the organic material deposited on the substrate S and the deposition thickness of the organic material.

In the organic material deposition apparatus 100 as described above, the organic material storage unit 360 is interposed in the heating heater unit 370 having a heater tunnel structure, and the nozzle unit in the opened portion of the organic material storage unit 360. The 350 is partially inserted, and the heating heater 370 is inserted into the housing 320, so that the organic matter storage unit 360, the nozzle unit 350, and the heating heater unit 370 are easily assembled and disassembled. It consists of a structure.

A method of forming an organic film using the organic material deposition apparatus 100 as described above will be described below.

First, the substrate S is mounted in the chamber 200 of the organic vapor deposition apparatus 100 so as to be approximately perpendicular to the ground, preferably 70 ° to 110 ° with the ground.

Then, the organic material storage unit 360 containing the organic material to be deposited on the substrate S of the organic material deposition source 300 is heated through the heating heater unit 370. At this time, the organic material stored in the organic matter storage unit 360 through the heating heater 370 is heated to evaporate to the organic matter particle state.

Therefore, the evaporated organic particles flow into the nozzle unit 350, are sprayed through the nozzle unit 350, and are deposited on the substrate S. At this time, the organic particles deposited on the substrate S is determined by the mask pattern (M).

The organic material deposition source 300 may be transferred through the transfer device 400, and the organic material may be deposited on the substrate S to more uniformly deposit the organic material.

On the other hand, the nozzle unit 350 is because the organic injection nozzle 351 and the splash prevention plate 352 is integrated, it is possible to prevent the organic material in the form of a cluster splashing in the organic storage unit 360.

In addition, since the nozzle unit 350 is made of a material having excellent thermal conductivity such as graphite, it is possible to prevent condensation of organic particles sprayed through the nozzle unit 350 even without a separate heating device. In particular, since the nozzle unit 350 is provided with an exposed surface 355 so as to be directly exposed to the heating heater unit 370 that is a heating device, the temperature of the nozzle unit 350 is the same as or similar to that of the organic storage unit 360. You lose. Therefore, no condensation of organic molecules injected through the nozzle unit 350 occurs.

In addition, since organic material leakage preventing members 361 and 353 are coated on both the organic material storage unit 360 and the nozzle unit 350 during the organic material deposition in the organic material deposition source 300, leakage of the organic material is effectively prevented.

On the other hand, the organic material deposition source further comprises a measuring device (not shown in the figure), so that the deposition rate of the organic material deposited on the substrate S and the deposition thickness of the organic material while the organic material is deposited on the substrate (S) can do. The measuring device may employ a laser sensor or the like, and other various sensors, a data processing unit for processing measured data values of these sensors, and a display device for displaying a measurement state may be used.

Therefore, by using the measuring device, by controlling the deposition rate of the organic particles and the organic deposition thickness during the formation of the organic thin film, it is possible to realize the reproducibility of the uniform thickness of the organic thin film.

As described above, since the nozzle surface of the organic material deposition source according to the present invention is provided with an exposed surface to be exposed to the heating heater, the heating heater unit can directly heat the nozzle unit as well as the organic storage unit. Therefore, the temperature of the nozzle portion and the temperature of the organic substance storage portion are almost the same without temperature deviation. Thus, according to the present invention, there is an effect that can prevent the clogging of the nozzle due to the temperature variation of the crucible and the nozzle unit, which is an organic storage unit.

As mentioned above, although the present invention has been described with reference to the illustrated embodiments, it is only an example, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the scope of the present invention should be defined by the appended claims and their equivalents.

Claims (15)

A housing having one surface open; An organic material storage unit located in the housing and having an organic material stored therein and opening at one surface thereof; A heating heater part interposed between the organic material storage part and the housing; And, A nozzle unit connected to the opened portion of the organic material storage unit and spraying the organic material, And the nozzle part has an exposed surface exposed to the heating heater part. According to claim 1, wherein the nozzle unit is a nozzle body for sealing the opened portion of the organic material storage portion, the organic material injection through the nozzle body formed to spray the organic molecules inside the organic material storage portion to the outside of the organic material storage portion A nozzle, The exposure surface is an organic material deposition source, characterized in that provided on the outer peripheral surface of the nozzle body. According to claim 2, One side of the nozzle body is fitted to the inside of the organic material storage portion and the other side of the nozzle body is formed to extend a predetermined length to the outside of the organic material storage portion, The exposure surface is an organic material deposition source, characterized in that provided on the outer peripheral surface of the nozzle body extending a predetermined length to the outside of the organic material storage. The organic material deposition source according to claim 3, wherein the exposed surface is provided on a portion of the upper or lower portion of the outer circumferential surface of the nozzle body, which is formed to extend a predetermined length to the outside of the organic storage portion. The organic material deposition source according to claim 4, wherein the exposed surface is provided on an outer circumferential surface of the nozzle body which is formed to extend a predetermined length to the outside of the organic storage. The organic material deposition source according to claim 4, wherein the exposed surface is provided under the outer circumferential surface of the nozzle body which is formed to extend a predetermined length to the outside of the organic material storage part. The organic material deposition source according to any one of claims 1 to 6, wherein the exposed surface is in direct contact with the heating heater. The organic material deposition source according to any one of claims 1 to 6, wherein the nozzle unit further comprises a splash prevention film for preventing the organic material from splashing in the organic matter bottom part. The organic material deposition source according to claim 8, wherein the splash prevention film is formed integrally with the nozzle body. A housing having one surface open; An organic material storage unit located in the housing and having an organic material stored therein and opening at one surface thereof; A heating heater part interposed between the organic material storage part and the housing; An organic injection nozzle connected to an opened portion of the organic storage portion, formed through the nozzle body and the nozzle body to seal the opened portion of the organic storage portion, and spraying organic molecules inside the organic storage portion toward the substrate; A nozzle unit having a splash prevention film formed integrally with the nozzle body to prevent the organic material from splashing in the organic storage unit; A heat reflecting plate installed on an inner wall of the housing to reflect heat from the heating heater part to the organic material storage part; And, It includes a heat shield member attached to the outer surface of the nozzle body in the substrate direction, The organic material deposition source, characterized in that the exposed surface exposed to the heating heater portion is provided on the outer peripheral surface of the nozzle body. The method of claim 10, wherein one side of the nozzle body is fitted inside the organic material storage portion and the other side of the nozzle body is formed to extend a predetermined length to the outside of the organic material storage portion, The exposure surface is an organic material deposition source, characterized in that provided on the outer peripheral surface of the nozzle body extending a predetermined length to the outside of the organic material storage. The organic material deposition source according to claim 11, wherein the exposed surface is provided on a portion of an upper portion or a lower portion of an outer circumferential surface of the nozzle body having a predetermined length extending outside the organic storage portion. The organic material deposition source according to claim 12, wherein the exposed surface is provided on an outer circumferential surface of the nozzle body extending a predetermined length to the outside of the organic storage. The organic material deposition source according to claim 12, wherein the exposed surface is provided under the outer circumferential surface of the nozzle body which is formed to extend a predetermined length to the outside of the organic material storage portion. The organic material deposition source according to any one of claims 10 to 14, wherein the exposed surface is in direct contact with the heating heater.

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