KR100603144B1 - 광학 장치 - Google Patents

광학 장치 Download PDF

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Publication number
KR100603144B1
KR100603144B1 KR1020047014765A KR20047014765A KR100603144B1 KR 100603144 B1 KR100603144 B1 KR 100603144B1 KR 1020047014765 A KR1020047014765 A KR 1020047014765A KR 20047014765 A KR20047014765 A KR 20047014765A KR 100603144 B1 KR100603144 B1 KR 100603144B1
Authority
KR
South Korea
Prior art keywords
optical waveguide
optical
insertion plate
magnet
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020047014765A
Other languages
English (en)
Korean (ko)
Other versions
KR20040095303A (ko
Inventor
쿠루마다카쯔히코
타마무라토시아키
카나야마사토시
사토마코토
스즈키요시히코
Original Assignee
엔티티 엘렉트로닉스 가부시키가이샤
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엔티티 엘렉트로닉스 가부시키가이샤, 가부시키가이샤 니콘 filed Critical 엔티티 엘렉트로닉스 가부시키가이샤
Publication of KR20040095303A publication Critical patent/KR20040095303A/ko
Application granted granted Critical
Publication of KR100603144B1 publication Critical patent/KR100603144B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Integrated Circuits (AREA)
KR1020047014765A 2002-03-28 2003-03-27 광학 장치 Expired - Fee Related KR100603144B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00091405 2002-03-28
JP2002091405 2002-03-28
JP2003081362A JP2004004649A (ja) 2002-03-28 2003-03-24 光学装置
JPJP-P-2003-00081362 2003-03-24
PCT/JP2003/003877 WO2003083550A1 (fr) 2002-03-28 2003-03-27 Dispositif optique

Publications (2)

Publication Number Publication Date
KR20040095303A KR20040095303A (ko) 2004-11-12
KR100603144B1 true KR100603144B1 (ko) 2006-07-20

Family

ID=28677554

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047014765A Expired - Fee Related KR100603144B1 (ko) 2002-03-28 2003-03-27 광학 장치

Country Status (7)

Country Link
US (1) US7082251B2 (enExample)
EP (1) EP1489450A4 (enExample)
JP (1) JP2004004649A (enExample)
KR (1) KR100603144B1 (enExample)
CN (1) CN1294441C (enExample)
AU (1) AU2003220849A1 (enExample)
WO (1) WO2003083550A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100693415B1 (ko) * 2004-12-14 2007-03-12 엘지전자 주식회사 프로젝션 ｔｖ용 광량조절 개폐장치
KR101395167B1 (ko) 2008-01-31 2014-05-16 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 회로 보드 실장 광학 도파관용 광학 탭
CN102089638A (zh) * 2009-09-02 2011-06-08 康达尔芯片设计有限公司 用于微机电系统传感器的微机电系统应力集中结构
US9075566B2 (en) 2012-03-02 2015-07-07 Microsoft Technoogy Licensing, LLC Flexible hinge spine
KR102373724B1 (ko) * 2019-11-13 2022-03-14 한국과학기술원 전자기력에 의한 이동형 광 도파관을 이용한 광 스위칭 소자 및 시스템

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794702A (en) * 1980-12-04 1982-06-12 Oval Eng Co Ltd Optical lead switch
FR2618914B1 (fr) * 1987-07-31 1991-12-06 Alain Souloumiac Perfectionnements apportes aux interrupteurs optomagnetiques
JPH02131210A (ja) 1988-11-11 1990-05-21 Nippon Telegr & Teleph Corp <Ntt> 光導波路スイッチ
FR2660444B1 (fr) * 1990-03-27 1992-10-16 Commissariat Energie Atomique Commutateur et systeme de commutation optiques multivoies integres et procede de fabrication du commutateur.
JPH05257069A (ja) 1992-03-16 1993-10-08 Nippon Telegr & Teleph Corp <Ntt> 光スイッチ
JPH10227986A (ja) * 1997-02-17 1998-08-25 Hitachi Ltd 光スイッチとその製造方法及び光スイッチを用いた光通信機器
JPH11119123A (ja) 1997-10-20 1999-04-30 Tdk Corp 光スイッチ及びその製造方法
US6404942B1 (en) 1998-10-23 2002-06-11 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6301425B1 (en) * 1999-02-22 2001-10-09 Agere Systems Optoelectronics Guardian Corp. Magnetically tunable optical attenuator and method of attenuating signals
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
KR20020064909A (ko) * 1999-11-23 2002-08-10 나노베이션 테크놀로지즈, 인크. 평면 도파관 및 셔터 액츄에이터를 포함하는 광학 스위치
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
JP2001264652A (ja) * 2000-03-17 2001-09-26 Mitsubishi Electric Corp 光スイッチ
US20010051014A1 (en) * 2000-03-24 2001-12-13 Behrang Behin Optical switch employing biased rotatable combdrive devices and methods
JP2002023069A (ja) * 2000-07-12 2002-01-23 Sumitomo Electric Ind Ltd 光スイッチ
TW531669B (en) * 2000-09-15 2003-05-11 Ibm Optical devices
JP2003035875A (ja) 2001-07-24 2003-02-07 Hitachi Ltd 光スイッチ
JP4089215B2 (ja) * 2001-09-17 2008-05-28 株式会社ニコン マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー

Also Published As

Publication number Publication date
EP1489450A4 (en) 2006-08-30
JP2004004649A (ja) 2004-01-08
CN1294441C (zh) 2007-01-10
WO2003083550A1 (fr) 2003-10-09
KR20040095303A (ko) 2004-11-12
CN1643433A (zh) 2005-07-20
EP1489450A1 (en) 2004-12-22
US7082251B2 (en) 2006-07-25
US20050163428A1 (en) 2005-07-28
AU2003220849A1 (en) 2003-10-13

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