KR100544778B1 - 질화붕소층이 피복된 열실드가 구비된 실리콘 단결정 잉곳성장장치 - Google Patents
질화붕소층이 피복된 열실드가 구비된 실리콘 단결정 잉곳성장장치 Download PDFInfo
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- KR100544778B1 KR100544778B1 KR1020030092085A KR20030092085A KR100544778B1 KR 100544778 B1 KR100544778 B1 KR 100544778B1 KR 1020030092085 A KR1020030092085 A KR 1020030092085A KR 20030092085 A KR20030092085 A KR 20030092085A KR 100544778 B1 KR100544778 B1 KR 100544778B1
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- KR
- South Korea
- Prior art keywords
- single crystal
- heat shield
- boron nitride
- crystal ingot
- growth apparatus
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (6)
- 실리콘 융액으로부터 단결정을 인상시키면서 성장시켜 단결정 잉곳을 성장시키는 실리콘 단결정 잉곳 성장장치로서,상기 실리콘 융액이 담겨지는 도가니의 외측에서 도가니로 열을 방사하는 발열체와;상기 실리콘 융액으로부터 인상되면서 성장되는 단결정 잉곳에 상기 발열체에 의해 전달되는 열을 차폐시키는 열실드와;상기 열실드 표면에 피복되는 질화붕소 피복층을 포함하여 구성되는 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
- 청구항 1에 있어서, 상기 질화붕소 피복층은 CVD(Chemical Vapour Deposition) 방법에 의해 증착되는 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
- 청구항 2에 있어서, 상기 질화붕소 피복층은 파이롤리틱 구조로 2~10㎛의 두께로 증착 피복되는 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
- 청구항 1에 있어서, 상기 질화붕소 피복층은 상기 열실드의 외측표면에 증착 피복되는 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
- 청구항 1에 있어서, 상기 질화붕소 피복층은 상기 열실드의 상단부가 상기 잉곳성장장치의 상단부에 고정 지지되게 하는 부분인 지지대에도 증착 피복되는 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
- 청구항 1 또는 5 중 어느 한 항에 있어서,상기 질화붕소 피복층은 각이 져서 오목한 부위에 피복된 것을 특징으로 하는 질화붕소층이 피복된 실리콘 단결정 잉곳 성장장치.
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KR1020030092085A KR100544778B1 (ko) | 2003-12-16 | 2003-12-16 | 질화붕소층이 피복된 열실드가 구비된 실리콘 단결정 잉곳성장장치 |
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KR1020030092085A KR100544778B1 (ko) | 2003-12-16 | 2003-12-16 | 질화붕소층이 피복된 열실드가 구비된 실리콘 단결정 잉곳성장장치 |
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KR20050060459A KR20050060459A (ko) | 2005-06-22 |
KR100544778B1 true KR100544778B1 (ko) | 2006-01-23 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101105950B1 (ko) | 2008-08-01 | 2012-01-18 | 주식회사 엘지실트론 | 단결정 잉곳 제조장치 |
KR101252924B1 (ko) | 2010-10-18 | 2013-04-09 | 주식회사 엘지실트론 | 단결정 성장장치 |
KR20200060984A (ko) * | 2018-11-23 | 2020-06-02 | 주식회사 영도글로발 | 고품질 결정 인상용 열차단 에셈블리 및 이를 갖는 인상기 |
KR102532226B1 (ko) | 2022-08-26 | 2023-05-16 | 제이에이취엔지니어링주식회사 | 단결정 성장로의 열차폐 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101467688B1 (ko) * | 2013-07-08 | 2014-12-01 | 주식회사 엘지실트론 | 단결정 잉곳 제조장치 |
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2003
- 2003-12-16 KR KR1020030092085A patent/KR100544778B1/ko active IP Right Grant
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101105950B1 (ko) | 2008-08-01 | 2012-01-18 | 주식회사 엘지실트론 | 단결정 잉곳 제조장치 |
KR101252924B1 (ko) | 2010-10-18 | 2013-04-09 | 주식회사 엘지실트론 | 단결정 성장장치 |
KR20200060984A (ko) * | 2018-11-23 | 2020-06-02 | 주식회사 영도글로발 | 고품질 결정 인상용 열차단 에셈블리 및 이를 갖는 인상기 |
KR102171170B1 (ko) | 2018-11-23 | 2020-10-28 | 주식회사 영도글로발 | 고품질 결정 인상용 열차단 에셈블리 및 이를 갖는 인상기 |
KR102532226B1 (ko) | 2022-08-26 | 2023-05-16 | 제이에이취엔지니어링주식회사 | 단결정 성장로의 열차폐 장치 |
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KR20050060459A (ko) | 2005-06-22 |
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