KR100525497B1 - Uv exposure apparatus - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for irradiating ultraviolet rays to a large area panel, such as a plasma display panel (PDP), wherein a mask is provided on the front side of the panel and the ultraviolet ray is irradiated to the panel between the masks. An apparatus, comprising: a main body having a plurality of ultraviolet lamps installed on a front side at regular intervals; It is integrally coupled to the main body; a transfer unit for moving the main body left and right; consisting of the main body is moved to irradiate a panel of a large area.

According to the present invention, the loss of the light source is low, the illuminance can be irradiated uniformly, can be easily applied to a large-area panel, does not require much space, saves the time required for work and provides a good quality product. It is a very useful invention that can be obtained.

Description

Large Area Ultraviolet Exposure Equipment {UV EXPOSURE APPARATUS}

The present invention relates to an exposure apparatus for irradiating ultraviolet rays to a large area panel such as a plasma display panel (PDP) panel, and more particularly, the structure is simple and uniformity of illuminance is uniform, thereby minimizing deviation. It relates to a large-area ultraviolet exposure apparatus capable of producing a panel.

In general, in order to form a predetermined pattern by irradiating a large area of the PDIP panel 1 and the like, the light source of the ultraviolet lamp is irradiated in one direction by an elliptical reflector 3, and the light source irradiated in this way is again collected by a light concentrator The light source is collected through the lens (4). The light source thus collected is reflected in the other direction by the folding mirror 5 and the light source reflected by the reflecting mirror is irradiated to the panel 1 by the off-axis parabolic mirror 6 again. The light source irradiated at this time becomes parallel light having a wide width, and is irradiated between the masks 2 installed on the front surface of the panel 1.

However, in the conventional exposure apparatus as described above, since the light source irradiated from one lamp is irradiated over a large area, the intensity of the light source is weak, so that a long time is required, and the structure for irradiating the light source to the panel is too complicated. As the structure is complex as described above, a large space is required, and as it is irradiated through various steps, the loss of the light source and the illuminance are also weakened, resulting in poor efficiency.

In addition, since the size of the panel is gradually increasing, the production of the large spherical mirror 6 and the like is difficult and limited, so it is difficult to adequately cope with this, and there is also a problem of low efficiency.

The present invention provides an exposure apparatus that more efficiently improves the above-mentioned conventional problems and provides a light source with a low loss of light and a constant illuminance so that uniformity is small and can be easily applied to a large area panel. There is a purpose.

In addition, it is another object of the present invention to reduce the time required for work without much space and to obtain a good quality quality.

The present invention is to provide a mask on the front side of the panel to achieve the above object, the exposure apparatus for irradiating ultraviolet rays to the panel between the mask, the main body is provided with a plurality of ultraviolet lamps at regular intervals on the front side; ; It is integrally coupled to the main body; a transfer unit for moving the main body left and right; consisting of the main body is moved to irradiate a panel of a large area.

In addition, the ultraviolet lamp is equipped with a parabola mirror around the lamp, the parabolic mirror is characterized in that it is provided with a shielding socket at the end of the parabola mirror, and a shielding flange of a predetermined diameter at the end of the central lamp. .

In addition, the present invention, the UV lamp is installed in two rows, two UV lamps are installed in the center between the UV lamps of one row, or installed in three rows, UV lamps of two rows 1/3 of the UV lamps of one row It is positioned at the point, it characterized in that the three rows of UV lamps are installed so as to be located at two-thirds point between the one row of UV lamps.

In addition, the transfer part is provided in parallel with both sides of the LM (LM) guide is fastened to the main body, and the rotating screw is fastened to the main shaft is coupled to the axis of the motor provided in the central portion, the main body, the upper main body And the lower block, wherein the upper body and the lower block are coupled by a vertical transfer unit, characterized in that the upper body is made to move vertically.

Hereinafter, described in detail according to the accompanying drawings in order to more clearly understand the configuration of the present invention.

2 is a partially cutaway perspective view of the exposure apparatus according to the present invention, FIG. 3 is a lamp perspective view of the exposure apparatus according to the present invention, and FIG. 4 is a partially cutout front view of the exposure apparatus according to the present invention. 5 is a partially cutaway perspective view of the upper body of the exposure apparatus according to the present invention in a raised state, and FIG. 6 is a partially cutaway side cross-sectional view of the exposure apparatus and the panel according to the present invention.

The exposure apparatus of the present invention is provided with a main body 10 that is substantially rectangular, and is arranged on the front surface of the main body 10 so that the ultraviolet lamps 20 are aligned at regular intervals. In addition, the lower part of the main body 10 is provided with a transfer part 30 to move the main body 10 to the left and right, and the main body 10 is provided with a vertical transfer part 40 to enable vertical movement. .

The main body 10 has a substantially rectangular shape and is formed long up and down, and the inside is hollow, and a plurality of UV lamps 20 are installed at the front plate side at predetermined intervals up and down, and the UV lamps on the side thereof. Install a plurality of heat radiating fan 11 to cool the heat emitted from the (20).

In this case, the ultraviolet lamp 20 includes a parabola mirror 22 around the lamp 21 to reflect the light source irradiated in parallel to the front side, and a shielding socket having the same diameter at the end of the parabola mirror 22. 24 to block the light source at an angle outside the parabolic mirror 22. In addition, the end of the lamp 21 is provided with a shielding flange 23 to a predetermined diameter to block all the light source irradiated at a predetermined angle from the lamp 21 to the front side.

The present invention may be provided with the above-described ultraviolet lamp 20 in one row to irradiate the ultraviolet lamp 20 to the panel 1, but may be arranged in two rows at regular intervals, in this case, one UV lamp ( 20 is preferably provided so as to be located at the center portion between the other two-row UV lamps 20a. In addition, when the UV lamp 20 is arranged in three rows, the two UV lamps 20a are arranged at a third point between the UV lamps 20 in one row, and the UV lamps 20b in three rows are arranged. It is preferable to arrange | position so that it may be located in the 2/3 position between the ultraviolet ray lamps 20 of the said 1 row.

In addition, the lower portion of the main body 10 is provided with a conveying portion 30 for conveying the main body 10 to the left and right, the conveying portion 30 is parallel to the (LM) guide 31 and the LM (LM) is provided in the central portion of the guide 31 is composed of a rotating screw 33 that is extended to the axis of the separate drive motor (32). Therefore, the LM guide 31 is coupled to the fastening groove 12 formed on the bottom surface of the main body 10, and the rotating screw 33 is a coupling hole 13 formed in the lower center portion of the main body 10. And screws are combined. In addition, the upper side of the main body 10 is provided with a guide rail 34 for smoothly guiding the left and right movement of the main body 10, the roller 35 between the main body 10 and the guide rail 34 )).

In another embodiment of the transfer part 30, the guide rod 36 is penetrated to the upper portion of the main body 10, and the lower side of the main body 10 is screwed to the transfer screw 37 to one side of the transfer screw 37. By extending the drive motor 32a at the end, it is possible to allow the main body 10 to be transferred to one side when driving the drive motor 32a.

On the other hand, after irradiating ultraviolet rays while moving the main body 10 to one side, when moving to the opposite side again and irradiated with ultraviolet rays the main height of the main body 10 between the ultraviolet lamp 20 and the ultraviolet lamp 20, In other words, raise by 1/2 to investigate.

To this end, the main body 10 is separated into an upper main body 10a and a lower block 10b, and the upper main body 10a and the lower block 10b are coupled to the vertical transfer unit 40. The vertical transfer unit 40 can be presented in various ways, in the present invention, the cylinder 41 and the cylinder rod 42 is applied, the cylinder 41 is in the lower block (10b), the cylinder rod 42 ) Is coupled to the upper body (10a). In addition, at least one supporter 14 is provided on a bottom surface of the upper body 10a to guide the lifting and lowering of the upper body 10a and the lower block 10b. By forming a support groove 14a at a position facing the support 14 on the upper surface, the support 14 is coupled to the support groove 14a even when the upper body 10a is raised by a predetermined height. To be supported.

Hereinafter, the operation of the present invention in detail.

When power is applied to the ultraviolet lamp 20 of the exposure apparatus according to the present invention, part of the light source irradiated from the lamp 21 is reflected by the parabola mirror 22 and irradiated with parallel light, and the parabola mirror 22 Some of the light sources deviating from are blocked by the shielding socket 24, and some of the light sources irradiated to the front side of the lamp 21 are blocked by the shielding flange 23, so that the UV lamp 20 Only parallel light is irradiated to obtain a good product.

Thus, a plurality of ultraviolet lamps 20 for irradiating parallel light are arranged in one row, two rows, and three rows to irradiate the light, and the irradiated light source is overlapped with the mask 2 through a mask 2 having a mesh shape. It is evenly irradiated to the panel 1 of the part which is not.

In addition, the main body 10 in which the ultraviolet lamp 20 is arranged is irradiated while moving to a left and right side at a constant speed, and when the driving motor 32 of the transfer unit 30 is driven, a rotating screw ( While the 33 is integrally rotated, the screwed main body 10 moves to one side and is guided by the LM guide 31 coupled to the bottom surface.

At this time, when the ultraviolet lamp 20 is arranged in two rows, the two rows of ultraviolet lamps 20a are located at the middle part of the portion that the ultraviolet lamp 20 of one row cannot irradiate and move and irradiate integrally. . Therefore, when irradiating with only one row of ultraviolet lamps 20 as shown in FIG. 7, the uniformity of illuminance was more than 90%, resulting in a uniform illuminance with a deviation of about 56% as shown in FIG. 8. It became.

In addition, when the UV lamps 20 are arranged in three rows, two UV lamps 20a and three UV lamps may be spaced apart from each other by one row of UV lamps 20 (one third intervals apart). As 20b) is positioned, the uniformity of illuminance is further improved, and as shown in FIG. 9, only a deviation of about 25% occurs. Of course, the present invention is not limited thereto, and it may be possible to provide the ultraviolet lamp in a plurality of rows such as four rows and five rows.

Meanwhile, as another embodiment of the present invention, when the main body 10 is divided into the upper main body 10a and the lower block 10b, the irradiation is performed while moving to one side as described above, and the vertical transfer unit 40 again. The cylinder rod 42 is pulled out from the cylinder 41 of the head), and the upper body 10a is separated from the lower block 10b so that the center point between the single row ultraviolet lamp 20 and the ultraviolet lamp 20, namely , Raise to 1/2 height. In this case, the support 14 of the upper main body 10a is also drawn out by a predetermined height from the support groove 14a of the lower block 10b, and the cylinder 41, the cylinder rod 42, and the support By 14, the upper main body 10a and the lower block 10b are firmly supported.

Therefore, after irradiating while moving in one direction, it is raised to the middle between the ultraviolet lamp 20 and the ultraviolet lamp 20 and irradiated in the opposite direction again. It has the effect of heat, and when it is arranged and irradiated with two rows of ultraviolet lamps 20 and 20a, the effect of four rows is returned while the three rows of ultraviolet lamps 20, 20a and 20b are arranged again. Since it has an effect, the uniformity of roughness becomes further high and a deviation can be almost reduced.

The present invention has the advantage of low loss of the light source as described above, uniform illumination of illuminance, and easy application to large area panels.

In addition, the present invention does not require much space, is a very useful invention that can save time required for work and obtain a good quality product.

1 is a conceptual view briefly showing a conventional exposure apparatus

2 is a partially cutaway perspective view of an exposure apparatus according to the present invention;

3 is a perspective view of a lamp of the exposure apparatus according to the present invention;

4 is a partially cutaway front view of the exposure apparatus according to the present invention;

5 is a partially cutaway perspective view of the upper body of the exposure apparatus according to the present invention in a raised state;

6 is a partially cutaway side cross-sectional view of the exposure apparatus and the panel according to the present invention installed;

7 is a graph showing the uniformity deviation of illuminance when the exposure apparatus according to the present invention is irradiated with an ultraviolet lamp arranged in one row;

8 is a graph showing the uniformity deviation of illuminance when the exposure apparatus according to the present invention is irradiated with two rows of ultraviolet lamps;

9 is a graph showing the uniformity deviation of illuminance when the exposure apparatus according to the present invention is irradiated with three rows of ultraviolet lamps;

<Code Description of Main Parts of Drawing>

10: main body 10a: upper main body

10b: lower block 11: heat radiating fan

12: fastening groove 13: coupling hole

14: support 14a: support groove

20,20a, 20b: UV lamp 21: lamp

22 parabolic mirror 23 shielding flange

24: shielded socket 30: transfer part

31: LM guide 32: drive motor

33: rotating screw 34: guide rail

35 roller 40 vertical feed part

41: cylinder 42: cylinder rod

Claims (6)

delete An exposure apparatus for installing a mask (2) on the front side of the panel (1) and irradiating ultraviolet rays to the panel (1) between the masks (2), wherein a plurality of ultraviolet lamps (20) are arranged on the front side at regular intervals. The main body 10; Large area ultraviolet light that is integrally coupled to the main body 10 and configured to move the main body 10 to the left and right, and to irradiate the panel 1 of a large area while the main body 10 moves. In the exposure apparatus. The ultraviolet lamp 20 mounts a parabolic mirror 22 around the lamp 21, extends the shielding socket 24 at the end of the parabolic mirror 22, and a predetermined end at the end of the central lamp 21. The large-area ultraviolet exposure apparatus characterized by including the shielding flange 23 of diameter. The method of claim 2, The UV lamps 20 are installed in two rows, and the two-row UV lamps 20a are installed so that they are positioned in the center between the UV lamps 20 in one row. The method of claim 2, The ultraviolet lamp 20 is installed in three rows, so that two rows of ultraviolet lamps 20a are positioned at a third point between one row of ultraviolet lamps 20, and three rows of ultraviolet lamps 20b are one row of ultraviolet lamps. A large-area ultraviolet exposure apparatus, characterized in that it is installed so as to be located at the 2/3 point between the (20). The method of claim 2, wherein the transfer unit 40, LM guide 31 provided in parallel to both sides and fastened to the main body 10, and a rotating screw 33 which is extended to the shaft of the driving motor 32 provided in the center and fastened to the main body 10. A large area ultraviolet exposure apparatus, characterized in that consisting of. The method of claim 5, wherein the main body 10, The upper main body 10a and the lower block 10b are divided, and the upper main body 10a and the lower block 10b are coupled by the vertical transfer part 40 so as to vertically move the upper main body 10a. A large-area ultraviolet exposure apparatus, characterized in that.