CN207337074U - The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine - Google Patents
The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine Download PDFInfo
- Publication number
- CN207337074U CN207337074U CN201721422921.2U CN201721422921U CN207337074U CN 207337074 U CN207337074 U CN 207337074U CN 201721422921 U CN201721422921 U CN 201721422921U CN 207337074 U CN207337074 U CN 207337074U
- Authority
- CN
- China
- Prior art keywords
- light source
- source module
- led
- led light
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a kind of LED exposure device of ultraviolet exposure machine, including sliding substrate, LED light source module is fixed with sliding substrate, the exposure significant surface of the exposure significant surface edge LED light source module corresponding with another row of the wherein LED light source module of a row of two rows of LED light source modules overlaps；The size of plane of illumination X-direction needed for target face is Lx, the size of Y-direction is Ly, the exposure significant surface of LED light source module is L in the size of X-directionx1, the size of Y-direction is Ly1；If Lx＜ Ly, the quantity N=L of required LED light source modulex/Lx1, the glide direction of sliding substrate is identical with Y-direction；If Lx＞ Ly, the quantity N=L of required LED light source moduley/Ly1, the glide direction of sliding substrate is identical with X-direction.The exposure device scans to form the uniform illumination spot of large area using mutually staggered LED light source module, reduces cost.
Description
Technical field
A kind of LED exposure device is the utility model is related to, belongs to exposure technique field, meanwhile, the utility model also relates to
And a kind of ultraviolet exposure machine.
Background technology
Parallel exposing machine is the key equipment of fine pattern structure fabrication, is had extensively in PCB circuit board manufacturing field
Application.Effective exposure area and uniformity of showing up are two important indicators of exposure machine performance.Manufactured for pcb board, it is ultraviolet
Exposure light source need it is higher show up uniformity to ensure that lines are uniform, while also need to big exposure area.It is existing parallel
Light exposure machine realizes that the mode of large format exposure mainly has scan-type and the spliced both of which of array, the exposure of scan-type directional light
Machine generally forms a strip light hot spot using a row or multi-row ultraviolet LED lamp bead by connecting method, then passes through driving device
Strip LED array is scanned to form large area lighting hot spot.Scan-type scheme can largely reduce the number of ultraviolet LED lamp bead
Amount, reduces cost, if but a wherein LED break down, whole lighting system can not use, and system stability is poor.And
Array splicing parallel exposing machine, as light source, it is accurate to carry out light beam generally using high power ultraviolet LED array to every LED
Directly, an illumination spot is formed, the illumination spot after all LED collimations can be spliced into large area lighting face.However, large area is spelled
Scheme is connect there are substantial amounts of stitching position, it is very uneven in each stitching portion Illumination Distribution, and splice and need a large amount of LED, into
This is higher.
Utility model content
Technical problem to be solved in the utility model is：A kind of LED exposure device of ultraviolet exposure machine, the exposure are provided
Device scans to form the uniform illumination spot of large area using mutually staggered LED light source module, reduces cost.
Technical problem to be solved in the utility model is：A kind of ultraviolet exposure machine is provided, which uses
Above-mentioned exposure device, forms the uniform illumination spot of large area by way of scanning, reduces LED lamp bead quantity, reduces
Cost.
In order to solve the above technical problems, the technical solution of the utility model is：A kind of LED exposure dress of ultraviolet exposure machine
Put, including sliding substrate, the sliding substrate is slidably mounted on firm banking and drives linear slide by driving device, described
The identical LED light source module of multiple sizes is fixed with sliding substrate, each LED light source module is spaced into two rows, often arranges LED
Spacing between light source module is equal；Two rows of LED light source module mutual dislocations are set and the wherein exposure of the LED light source module of a row
The exposure significant surface coincident of light significant surface edge LED light source module corresponding with another row；Plane of illumination X needed for target face
The size in direction is Lx, the size of Y-direction is Ly, the exposure significant surface of each LED light source module is L in the size of X-directionx1, Y
The size in direction is Ly1；If Lx＜ Ly, the quantity N=L of required LED light source modulex/Lx1, glide direction and the Y side of sliding substrate
To identical；If Lx＞ Ly, the quantity N=L of required LED light source moduley/Ly1, the glide direction of sliding substrate is identical with X-direction.
As a preferred solution, the structure of each LED light source module is identical, and the LED light source module includes shell,
Circuit board, several LED lamp beads, first fly's-eye lens, the first standard are fixed with successively along the transmission direction of light in the shell
Straight lens, the second fly's-eye lens and the second collimation lens, the LED lamp bead are fixed on circuit boards, the power supply of the circuit board
Interface is stretched out outside shell, and the cooling device cooled down to circuit board and LED lamp bead, each LED light are provided with the shell
The emission side of pearl is provided with preliminary collimation lens, first fly's-eye lens, the first collimation lens, the second fly's-eye lens and the second collimation
Lens are arranged in parallel.
As a preferred solution, the inside of the shell sets inner cavity chamber, and parallel first is provided with inner cavity chamber
Annular partition, the second annular partition, the 3rd annular partition and fourth annular partition plate, first annular partition plate, the second annular partition,
Inner cavity chamber is separated into first chamber, second chamber, the 3rd chamber, the 4th chamber by three annular partitions and fourth annular partition plate successively
With the 5th chamber, the circuit board and cooling device are arranged in first chamber, and the first fly's-eye lens are fixed on the second ring
On shape partition plate, first collimation lens is arranged on the 3rd annular partition, and second fly's-eye lens is fixed on fourth annular
On partition plate, the second collimation lens insertion is fixed in the locular wall of the 5th chamber in opening's edge.
As a preferred solution, the cooling device includes a cooling substrate, and the cooling substrate is fixed on the
On one annular partition, the LED lamp bead is fixed on cooling substrate, is cooled down and is provided with water-cooling channel on substrate, the water-cooling channel
Connected with cooling water circulation supply system.
As a preferred solution, the firm banking includes the first pedestal and the second pedestal, first pedestal and
The illumination avoiding space for facilitating LED light source module to irradiate is constituted between second pedestal, on first pedestal and the second pedestal
Parallel line slideway is both provided with, the bottom of the sliding substrate is provided with coordinates sliding block, the driving dress with line slideway
Put including motor and ball screw framework, the output shaft of the motor and the lead screw transmission of ball screw framework connect, the rolling
The nut of screw mechanism is fixedly connected with sliding substrate.
In addition, the invention also discloses a kind of ultraviolet exposure machine, which has used above-mentioned LED exposure
Device, therefore all effects with above-mentioned LED exposure device.
After employing above-mentioned technical proposal, the effect of the utility model is：It is identical that the exposure device includes multiple sizes
LED light source module, each LED light source module are spaced into two rows, and the spacing often arranged between LED light source module is equal；Two rows of LED
Light source module mutual dislocation is set and the exposure significant surface edge LED corresponding with another row of the wherein LED light source module of a row
The exposure significant surface coincident of light source module, in this way, whole sliding substrate, which slides, just drives LED light source module scanning, and it is each
The bar shaped laser spot that LED light source module produces is uniform hot spot, and the Illumination Distribution of stitching portion is uniform, caused by avoiding splicing gap
Influence of the blackening to uniformity, the exposure device is in plane of exposure scan-type moving exposure, the use of reduction ultraviolet LED light source module
Quantity, reduces cost, reduces the volume of light source, once some LED light source module goes wrong, can replace module, more
Change quick and convenient.In addition, the exposure device can realize the exposure of a variety of exposure areas by adjusting the quantity of adjustment concatenation module
Light, adaptability are stronger.
Again since the structure of each LED light source module is identical, the LED light source module includes shell, edge in the shell
The transmission direction of light is fixed with circuit board, several LED lamp beads, first fly's-eye lens, the first collimation lens, second multiple successively
Eyelens and the second collimation lens, the LED lamp bead are fixed on circuit boards, and the power supply interface of the circuit board stretches out shell
Outside, the cooling device cooled down to circuit board and LED lamp bead is provided with the shell, the emission side of each LED lamp bead is set
It is equipped with preliminary collimation lens, first fly's-eye lens, the first collimation lens, the second fly's-eye lens and the second collimation lens is parallel sets
Put, which solves ultraviolet LED light source using preliminary collimation lens, two fly's-eye lenses and two collimation lenses
The problem of module angle of divergence is big, uniform illumination degree are more preferable.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the three-dimensional structure diagram of the utility model embodiment；
Fig. 2 is the sectional view of the LED light source module of the utility model embodiment；
Fig. 3 is the layout drawing of the exposure significant surface of the LED light source module of the utility model embodiment；
In attached drawing：1.LED light source modules；11. power supply interface；12. circuit board；13. cool down substrate；14.LED lamp beads；15.
Preliminary collimation lens；16. first fly's-eye lens；17. the first collimation lens；18. the second fly's-eye lens；19. the second collimation lens；
110. shell；1101. first annular partition plate；1102. the second annular partition；1103. the 3rd annular partitions；1104. fourth annular
Partition plate；1105. first chamber；1106. second chamber；1107. the 3rd chambers；1108. the 4th chambers；1109. the 5th chambers；2.
Sliding substrate；3. first straight line guide rail；4. the first pedestal；5. second straight line guide rail；6. sliding block；7. the second pedestal；8. light source light
Spot；9. expose significant surface；10. spliced effectively illumination band.
Embodiment
The utility model is described in further detail below by specific embodiment.
As shown in Figure 1 to Figure 3, the LED exposure device of a kind of ultraviolet exposure machine, including sliding substrate 2, the sliding substrate
2 are slidably mounted on firm banking and drive linear slide by driving device.The firm banking includes the first pedestal 4 and second
Pedestal 7, the illumination avoiding space for facilitating LED light source module 1 to irradiate, institute are constituted between 4 and second pedestal 7 of the first pedestal
State and be respectively arranged with first straight line guide rail 3 and second straight line guide rail 5, first straight line guide rail 3 on the first pedestal 4 and the second pedestal 7
Be parallel to each other before second straight line guide rail 5, the bottom of the sliding substrate 2 is provided with straight with first straight line guide rail 3 and second
Line guide rail 5 coordinates sliding block 6, and the driving device includes motor and ball screw framework, the output shaft and ball wire of the motor
The lead screw transmission connection of thick stick mechanism, the nut of the ball screw framework are fixedly connected with sliding substrate 2.Motor and ball-screw
Mechanism is the current prior art, can bought on the market, those skilled in the art can obtain its structure from reference book
And principle, for example,《Mechanical design handbook the 5th edition》In just have a detailed description, therefore structure is clear.Therefore, in Fig. 1 simultaneously
Motor and ball screw framework are not described, the nut of ball screw framework can be fixed on the top of sliding substrate 2, motor and rolling
Screw mechanism driving can be accurately controlled shift position and distance.
The identical LED light source module 1 of multiple sizes, each interval of LED light source module 1 row are fixed with the sliding substrate 2
Two rows are arranged into, the spacing often arranged between LED light source module 1 is equal；Two rows of 1 mutual dislocations of LED light source module settings and wherein one
The exposure significant surface edge weight of 9 edge of the exposure significant surface LED light source module 1 corresponding with another row of the LED light source module 1 of row
Close；The fixed hole with 1 shape adaptation of LED light source module is provided with sliding substrate 2, LED light source module 1 is installed on fixed logical
At hole, light is facilitated to pass through.
The size of plane of illumination X-direction needed for sets target face is Lx, the size of Y-direction is Ly, each LED light source module 1
Exposure significant surface 9 in the size of X-direction be Lx1, the size of Y-direction is Ly1；If Lx＜ Ly, the quantity of required LED light source module
N=Lx/Lx1, sliding substrate 2 slides along Y-direction；If Lx＞ Ly, the quantity N=L of required LED light source moduley/Ly1, sliding substrate 2
Slide in X direction.The quantity of LED light source module 1 can be saved as far as possible, and extend LED light source mould by above-mentioned optimization
The scanning distance of block 1.
As shown in figure 3, the quantity of LED light source module 1 arranges for 7 and into two rows in Fig. 3, wherein the LED light source of a row
The exposure significant surface coincident of 9 edge of the exposure significant surface LED light source module 1 corresponding with another row of module 1,7 LED lights
The exposure significant surface 9 of source module 1 forms continuous spliced effectively illumination band 10.
As depicted in figs. 1 and 2, the structure of each LED light source module 1 is identical, and the LED light source module 1 includes shell
110, the shell 110 is interior to be fixed with circuit board 12, several LED lamp beads 14, the first compound eye successively along the transmission direction of light
Lens 16, the first collimation lens 17, the second fly's-eye lens 18 and the second collimation lens 19, the LED lamp bead 14 are fixed on circuit
On plate 12, the power supply interface 11 of the circuit board 12 is stretched out outside shell 110, is provided with the shell 110 to 12 He of circuit board
The cooling device that LED lamp bead 14 is cooled down, the emission side of each LED lamp bead 14 are provided with preliminary collimation lens 15, and first is multiple
Eyelens 16, the first collimation lens 17, the second fly's-eye lens 18 and the second collimation lens 19 are arranged in parallel.LED lamp bead 14 is sent
Light first pass through preliminary collimation lens 15 and tentatively collimated, light ray parallel is projected in optical axis after collimation processing, is successively passed through
Once homogenize, once collimation, it is secondary homogenize with secondary collimation, ultimately form more uniform light source hot spot 8.
The inside of the shell 110 sets inner cavity chamber, and parallel first annular partition plate 1101, second is provided with inner cavity chamber
Annular partition 1102, the 3rd annular partition 1103 and fourth annular partition plate 1104, first annular partition plate 1101, the second annular partition
1102nd, inner cavity chamber is separated into first chamber 1105, the second chamber by the 3rd annular partition 1103 and fourth annular partition plate 1104 successively
Room 1106, the 3rd chamber 1107, the 4th chamber 1108 and the 5th chamber 1109, the circuit board 12 and cooling device are arranged at
In one chamber 1105, the first fly's-eye lens 16 are fixed on the second annular partition 1102, and first collimation lens 17 is set
It is placed on the 3rd annular partition 1103, second fly's-eye lens 18 is fixed on fourth annular partition plate 1104, and described second is accurate
The straight insertion of lens 19 is fixed in the locular wall of the 5th chamber 1109 in opening's edge.The cooling device includes a cooling substrate 13,
The cooling substrate 13 is fixed on first annular partition plate 1101, and the LED lamp bead 14 is fixed on cooling substrate 13, cools down base
Water-cooling channel is provided with plate 13, which connects with cooling water circulation supply system, and cooling water circulation supply system is adopted
Cooled down with the cooling system of current conventional LED lamp bead 14.
The present embodiment also discloses a kind of exposure machine, which uses above-mentioned LED exposure device, which slides
Dynamic substrate 2, which slides, just drives LED light source module 1 to scan, and the bar shaped laser spot that each LED light source module 1 produces is uniform hot spot,
The Illumination Distribution of stitching portion is uniform, avoids influence of the blackening to uniformity caused by splicing gap, the exposure device is in plane of exposure
Scan-type moving exposure, reduces the usage quantity of ultraviolet LED light source module 1, reduces cost, reduce the volume of light source, the exposure
Device can realize the exposure of a variety of exposure areas, adaptability is stronger by adjusting the quantity of adjustment concatenation module.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as the limit to the scope of the invention
Fixed, the various modifications made on the basis of design spirit of the present invention is not departed to technical solution of the present invention and transformation, should all fall
Enter in the protection domain that claims of the present invention determines.
Claims (6)
- A kind of 1. LED exposure device of ultraviolet exposure machine, it is characterised in that：Including sliding substrate, the sliding substrate slides peace Loaded on linear slide is driven on firm banking and by driving device, the identical LED of multiple sizes is fixed with the sliding substrate Light source module, each LED light source module are spaced into two rows, and the spacing often arranged between LED light source module is equal；Two rows of LED lights Source module mutual dislocation is set and the exposure significant surface edge LED light corresponding with another row of the wherein LED light source module of a row The exposure significant surface coincident of source module；The size of plane of illumination X-direction needed for target face is Lx, the size of Y-direction is Ly, The exposure significant surface of each LED light source module is L in the size of X-directionx1, the size of Y-direction is Ly1；If Lx＜ Ly, required LED The quantity N=L of light source modulex/Lx1, the glide direction of sliding substrate is identical with Y-direction；If Lx＞ Ly, required LED light source module Quantity N=Ly/Ly1, the glide direction of sliding substrate is identical with X-direction.
- A kind of 2. LED exposure device of ultraviolet exposure machine as claimed in claim 1, it is characterised in that：Each LED light source module Structure it is identical, the LED light source module includes shell, and circuit is fixed with successively along the transmission direction of light in the shell Plate, several LED lamp beads, first fly's-eye lens, the first collimation lens, the second fly's-eye lens and the second collimation lens, the LED Lamp bead is fixed on circuit boards, and the power supply interface of the circuit board is stretched out outside shell, be provided with the shell to circuit board and The cooling device that LED lamp bead is cooled down, the emission side of each LED lamp bead are provided with preliminary collimation lens, first fly's-eye lens, First collimation lens, the second fly's-eye lens and the second collimation lens are arranged in parallel.
- A kind of 3. LED exposure device of ultraviolet exposure machine as claimed in claim 2, it is characterised in that：The inside of the shell Inner cavity chamber is set, parallel first annular partition plate, the second annular partition, the 3rd annular partition and Fourth Ring are provided with inner cavity chamber Inner cavity chamber is separated into by shape partition plate, first annular partition plate, the second annular partition, the 3rd annular partition and fourth annular partition plate successively First chamber, second chamber, the 3rd chamber, the 4th chamber and the 5th chamber, the circuit board and cooling device are arranged at first In chamber, the first fly's-eye lens are fixed on the second annular partition, first collimation lens be arranged at the 3rd annular every On plate, second fly's-eye lens is fixed on fourth annular partition plate, and the second collimation lens insertion is fixed on the 5th chamber Locular wall in opening's edge.
- A kind of 4. LED exposure device of ultraviolet exposure machine as claimed in claim 3, it is characterised in that：The cooling device bag A cooling substrate is included, the cooling substrate is fixed on first annular partition plate, and the LED lamp bead is fixed on cooling substrate, Water-cooling channel is provided with cooling substrate, which connects with cooling water circulation supply system.
- A kind of 5. LED exposure device of ultraviolet exposure machine as claimed in claim 4, it is characterised in that：The firm banking bag The first pedestal and the second pedestal are included, the light for facilitating LED light source module to irradiate is constituted between first pedestal and the second pedestal According to avoiding space, parallel line slideway, the bottom of the sliding substrate are both provided with first pedestal and the second pedestal It is provided with and coordinates sliding block with line slideway, the driving device includes motor and ball screw framework, the output shaft of the motor It is connected with the lead screw transmission of ball screw framework, the nut of the ball screw framework is fixedly connected with sliding substrate.
- A kind of 6. ultraviolet exposure machine, it is characterised in that：The ultraviolet exposure machine has been used as in any one of claim 1 to 5 LED exposure device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721422921.2U CN207337074U (en) | 2017-10-31 | 2017-10-31 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721422921.2U CN207337074U (en) | 2017-10-31 | 2017-10-31 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207337074U true CN207337074U (en) | 2018-05-08 |
Family
ID=62364383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721422921.2U Active CN207337074U (en) | 2017-10-31 | 2017-10-31 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207337074U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
-
2017
- 2017-10-31 CN CN201721422921.2U patent/CN207337074U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102686941B (en) | For the refrigerating module of multiple light courcess projection arrangement | |
| EP2516920B1 (en) | Light collector with extended center lens | |
| JP3153647U (en) | LED optical lens and illumination device using the optical lens | |
| CN107589636A (en) | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine | |
| US6598994B1 (en) | Multi-angle inspection of manufactured products | |
| CN104698579A (en) | Projecting light fixture with a plurality of lenslets packed in an optimized dense circular pattern | |
| CN104696882A (en) | Illumination device with different distances between light sources and lenslets | |
| CN102927473B (en) | The lighting device that a kind of beam and focus is controlled | |
| JP6670561B2 (en) | Seamless fusion of telecentric brightfield and annular darkfield illumination | |
| US10724708B2 (en) | Spotlight comprising a support and at least one light module to produce a light beam and a light device comprising said spotlight | |
| CN207337074U (en) | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine | |
| CN102890430A (en) | Device and method for adjusting power uniformity of exposure surface of direct-writing exposure machine | |
| CN104696883A (en) | Light collector with a plurality of merged lenslets having different optical power | |
| US20190093860A1 (en) | Spotlight adapted for a light device comprising at least one light module with an adjustable position and a light device comprising said spotlight | |
| CN112240867A (en) | Detection light source module and detection device | |
| EP3786522B1 (en) | Multi-angle shifting structure and linear lamp | |
| CN114911126A (en) | Laser three-dimensional projection device based on binocular vision and galvanometer scanning | |
| CN105242495B (en) | Photoetching exposure device | |
| CN211176626U (en) | Slope indicator | |
| CN207094367U (en) | A kind of multi partition area source | |
| KR101808419B1 (en) | Apparatus of exposure for scan type using LED light source having cooling parts and optical partition wall | |
| KR20190031226A (en) | Optical recording apparatus | |
| US11300721B2 (en) | Lighting apparatus having an oblong optic corresponding to multiple light sources | |
| CN114083798B (en) | Light source assembly and printer | |
| US10851967B2 (en) | Lens, corresponding lighting device, lighting installation and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |