KR100515440B1 - LCD glass washer and dryer using hot D.I Water and Infra-Red Lamp - Google Patents
LCD glass washer and dryer using hot D.I Water and Infra-Red Lamp Download PDFInfo
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- KR100515440B1 KR100515440B1 KR10-2002-0020329A KR20020020329A KR100515440B1 KR 100515440 B1 KR100515440 B1 KR 100515440B1 KR 20020020329 A KR20020020329 A KR 20020020329A KR 100515440 B1 KR100515440 B1 KR 100515440B1
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- lcd glass
- pure water
- infrared lamp
- lcd
- infrared
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/10—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source
- F21S41/12—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source characterised by the type of emitted light
- F21S41/13—Ultraviolet light; Infrared light
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Abstract
본 발명은 온 순수와 적외선 램프를 이용한 엘씨디 글라스 세척 및 건조 장치에 관한 것으로, 더욱 상세하게는 소정의 온도로 가열된 온 순수(Hot D.I Water)가 저장된 탱크에 엘씨디 글라스를 인입시켜 초음파를 이용하여 세척한 후, 상부에 설치된 적외선 램프(Infra-Red Lamp) 측으로 서서히 상승시키면서 건조시키도록 하여 세척 후, 즉시 엘씨디 글라스 표면의 불순물을 제거함으로써 엘씨디 표면에 잔류하는 온 순수에 불순물이 부착되는 것을 방지함과 동시에 표면 얼룩 발생을 방지하도록 하는 온 순수와 적외선 램프를 이용한 엘씨디 글라스 세척 및 건조 장치에 관한 것이다.The present invention relates to a device for cleaning and drying an LCD glass using warm pure water and an infrared lamp, and more particularly, by introducing LCD glass into a tank storing hot DI water heated to a predetermined temperature using ultrasonic waves. After washing, it is allowed to dry while gradually rising to the Infra-Red Lamp side installed at the top, and immediately after washing, it removes impurities from the LCD glass surface to prevent impurities from adhering to the warm pure water remaining on the LCD surface. And at the same time relates to an LCD glass cleaning and drying device using a warm pure water and infrared lamp to prevent the occurrence of surface stains.
이를 위한 본 발명은 온 순수를 이용한 엘씨디 글라스 세척 또는 적외선 램프를 이용한 엘씨디 글라스 건조 장치에 있어서, 온 순수 저장 탱크 상부에 적외선 램프를 설치하여 트레이(Tray)에 삽입되어 승강 장치에 의해 상, 하로 엘리베이팅(elevating)되는 엘씨디 글라스를 세척 후, 즉시 건조시키도록 이루어짐을 특징으로 한다.To this end, the present invention, in the LCD glass cleaning using the pure water or the LCD glass drying apparatus using an infrared lamp, an infrared lamp is installed on the upper pure storage tank and inserted into a tray (Tray) up and down by the elevating device After washing the elevating LCD glass, it is characterized in that it is made to dry immediately.
Description
본 발명은 온 순수와 적외선 램프를 이용한 엘씨디 글라스 세척 및 건조 장치에 관한 것으로, 더욱 상세하게는 소정의 온도로 가열된 온 순수(Hot D.I Water)가 저장된 탱크에 엘씨디 글라스를 인입시켜 초음파를 이용하여 세척한 후, 상부에 설치된 적외선 램프(Infra-Red Lamp) 측으로 서서히 상승시키면서 건조시키도록 하여 세척 후, 즉시 엘씨디 글라스 표면의 불순물을 제거함으로써 엘씨디 표면에 잔류하는 온 순수에 불순물이 부착되는 것을 방지함과 동시에 표면 얼룩 발생을 방지하도록 하는 온 순수와 적외선 램프를 이용한 엘씨디 글라스 세척 및 건조 장치에 관한 것이다.The present invention relates to a device for cleaning and drying an LCD glass using warm pure water and an infrared lamp, and more particularly, by introducing LCD glass into a tank storing hot DI water heated to a predetermined temperature using ultrasonic waves. After washing, it is allowed to dry while gradually rising to the Infra-Red Lamp side installed at the top, and immediately after washing, it removes impurities from the LCD glass surface to prevent impurities from adhering to the warm pure water remaining on the LCD surface. And at the same time relates to an LCD glass cleaning and drying device using a warm pure water and infrared lamp to prevent the occurrence of surface stains.
일반적으로, 엘씨디 글라스 세척 장치는 세척액이 저장된 탱크 내로 엘씨디 글라스를 인입시켜 소정의 시간 동안 초음파 세척을 통해 엘씨디 글라스 표면의 불순물을 이탈, 제거시키도록 하는 장치이다. In general, the LCD glass cleaning device is a device for introducing the LCD glass into the tank in which the cleaning liquid is stored to remove and remove impurities on the LCD glass surface by ultrasonic cleaning for a predetermined time.
또한, 엘씨디 패널 건조 장치는 엘씨디 세척 장치를 통해 세척된 엘씨디 글라스의 표면에 증발되지 않고 잔류하는 세척액을 건조시키도록 하는 것으로, 이송 롤러로 이송되는 엘씨디 패널이 건조 장치의 건조실 내로 이송되면 외부의 공기 호스로부터 유입되는 공기를 분사 노즐을 통해 분사하는 건조기가 상, 하 각각 1, 2차 한쌍으로 구비되어 공기압으로 엘씨디 글라스의 표면에 잔류하는 세척액이나 불순물 입자를 제거하도록 하는 에어 분사식과, 소정의 온도를 갖는 챔버(Chamber) 내에서 가열하여 세척액을 건조시키는 가열식 건조 장치로 구분된다.In addition, the LCD panel drying device is to dry the washing liquid remaining on the surface of the LCD glass washed through the LCD cleaning device without evaporation. When the LCD panel transferred to the conveying roller is transferred into the drying room of the drying device, the external air A dryer for injecting air from the hose through the injection nozzle is provided with a pair of upper and lower, respectively, an air jet type to remove the cleaning liquid or impurity particles remaining on the surface of the LCD by air pressure, and a predetermined temperature. It is divided into a heating drying apparatus for drying the washing liquid by heating in a chamber having a (Chamber).
그러나, 상기와 같이 종래에는 엘씨디 글라스의 세척 장치와 건조 장치가 별도로 이루어져 있으므로, 세척 장치에서 세척 후 건조 장치로 별도의 이송 공정이 불가결하게 진행되어야 하는데, 이는 엘씨디 장치의 생산 시간 지연과 이송 도중 엘씨디 글라스의 파손 위험성 내포 및 엘씨디 글라스 표면에의 불순물 입자가 부착되는 문제점이 있는 것이었다.However, as described above, since the washing apparatus and the drying apparatus of the LCD are separately formed in the related art, a separate transfer process must be inevitably performed after the washing in the washing apparatus, which is delayed in the production time of the LCD apparatus and during the transfer. There was a problem of inclusion of a risk of breakage of the glass and adhesion of impurity particles to the LCD glass surface.
특히, 엘씨디 패널의 건조 장치는 공기압에 의해 세척액의 물방울 및 불순물 입자가 건조실 내부에 와류하면서 무분별하게 날리게 되고 이때, 건조 조건이 밀폐된 건조실이라는 점을 감안하면 건조기의 위치를 벗어났다 하더라도 건조실 내에 위치하는 한은 엘씨디 패널 표면에 떨어지게 되어 세척액이 증발하면서 얼룩지게 되고 불순물 입자 또한 세척액이 증발하면서 엘씨디 표면 또는 회로 소자에 그대로 부착되어 엘씨디 패널의 특성에 영향을 미쳐 불량이 증가하므로 수율이 저하되는 문제점이 있는 것이었다. In particular, the drying apparatus of the LCD panel is blown indiscriminately while the water droplets and the impurity particles of the washing liquid vortex inside the drying chamber by air pressure. As long as it falls on the surface of the LCD panel, the cleaning solution is stained as it evaporates, and impurity particles are also attached to the surface of the LCD or the circuit element as the cleaning solution evaporates, affecting the characteristics of the LCD panel and increasing the defects. Was.
상기와 같은 문제점을 고려하여 이루어진 본 발명은 소정의 온도로 가열된 온 순수(Hot D.I Water)가 저장된 탱크에 엘씨디 글라스를 인입시켜 초음파를 이용하여 세척한 후, 상부에 설치된 적외선 램프(Infra-Red Lamp) 측으로 서서히 상승시키면서 건조시키도록 하여 세척 후, 즉시 엘씨디 글라스 표면의 불순물을 제거함으로써 엘씨디 표면에 잔류하는 온 순수에 불순물이 부착되는 것을 방지함과 동시에 표면 얼룩 발생을 방지하도록 하는 온 순수와 적외선 램프를 이용한 엘씨디 글라스 세척 및 건조 장치를 제공함을 기술적 과제로 삼는다.The present invention made in consideration of the above problems is introduced into the LCD glass tank stored hot DI water heated to a predetermined temperature and washed using ultrasonic waves, the infrared lamp (Infra-Red) installed on the top Warm and infrared rays to prevent impurities from adhering to the warm pure water remaining on the LCD surface by immediately removing the impurities on the LCD glass surface immediately after washing by drying by gradually rising to the lamp side. It is a technical task to provide an LCD glass cleaning and drying apparatus using a lamp.
상기와 같은 기술적 과제를 달성하기 위한 본 발명은 온 순수를 이용한 엘씨디 글라스 세척 또는 적외선 램프를 이용한 엘씨디 글라스 건조 장치에 있어서, 온 순수 저장 탱크 상부에 적외선 램프를 설치하여 트레이(Tray)에 삽입되어 승강 장치에 의해 상, 하로 엘리베이팅(elevating)되는 엘씨디 글라스를 세척 후, 즉시 건조시키도록 이루어짐을 특징으로 한다.The present invention for achieving the technical problem as described above in the LCD glass cleaning device using the LCD or the infrared lamp using warm pure water, an infrared lamp is installed on the upper pure storage tank and inserted into the tray (Tray) to lift It is characterized in that it is made to dry immediately after washing the LCD glass which is elevating (elevating) up and down by the device.
본 발명의 이해를 돕기 위한 첨부도면 도 1은 본 발명의 구성을 보인 사시도이고, 도 2는 본 발명의 세척 상태를 보인 개략도이며, 도 3은 본 발명의 건조 상태를 보인 개략도로서 이중 도면 부호 10은 본 발명의 세척 장치를 나타낸 것이고, 20은 건조 장치를 나타낸 것이다. Figure 1 is a perspective view showing the configuration of the present invention, Figure 2 is a schematic view showing a washing state of the present invention, Figure 3 is a schematic diagram showing a dry state of the present invention double reference numeral 10 Represents a washing apparatus of the present invention, 20 represents a drying apparatus.
본 발명은 도 1 내지 도 3에서 보는 바와 같이, 온 순수를 이용한 엘씨디 글라스(1) 세척 또는 적외선 램프(21)를 이용한 엘씨디 글라스(1) 건조 장치에 있어서, 세척 장치(10)의 온 순수 저장 탱크(11) 상부에 적외선 램프(21)를 이용한 건조장치(20)를 설치하여 트레이(30)에 삽입되어 승강 장치(40)에 의해 상, 하로 엘리베이팅되는 엘씨디 글라스(1)를 세척 후, 즉시 건조시키도록 이루어진 것이다.In the present invention, as shown in Figures 1 to 3, in the LCD glass (1) washing using the warm pure water or the LCD glass (1) drying device using the infrared lamp 21, the warm pure water storage of the cleaning device (10) After installing the drying apparatus 20 using the infrared lamp 21 on the tank 11, and inserted into the tray 30 to wash the LCD glass 1, which is elevated up and down by the elevating device 40, It is intended to dry immediately.
이와 같이 이루어진 본 발명은 첨부 도면 도 2에서 보는 바와 같이, 세척 장치(10)는 외부로부터 공급되는 순수(D.I Water)가 인라인 히터(Inline heater(12))를 거치면서 가열되어 온 순수 저장 탱크(11)로 공급되며, 오버플로우(Overflow)되는 온 순수 및 배출되는 온 순수는 드레인 라인(Drain Line(13))을 통해 외부로 배출되거나 인라인 히터(12)측으로 재 공급되어 가열 후, 온 순수 저장 탱크(11) 내로 재 공급되도록 구성되어 있다.The present invention made as described above, as shown in Figure 2, the washing apparatus 10 is a pure water storage tank (DI water) is heated while passing through the inline heater (Inline heater 12) ( 11) supplied to the overflow (Overflow) and the discharged on the pure water is discharged to the outside through the drain line (Drain Line (13)) or supplied back to the in-line heater 12 side after heating, stored pure pure water It is configured to resupply into the tank (11).
건조 장치(20)는 세척 장치(10)의 직 상부 양측에 설치되는 것으로, 적외선을 방사하는 적외선 램프(21)와 적외선 램프(21)로부터 방사되는 적외선을 반사시키면서 적외선 램프(21) 주변의 열량을 보존하여 적외선과 함께 엘씨디 글라스(1)에 조사토록 하는 반사판(22)과, 적외선 램프(21)로부터 적외선이 발생되도록 하는 저외선 발생 유닛(23)으로 구성되어 있다.The drying apparatus 20 is installed on both sides of the upper part of the washing apparatus 10 directly, and the amount of heat around the infrared lamp 21 reflects the infrared lamp 21 emitting infrared light and the infrared light emitted from the infrared lamp 21. It is composed of a reflecting plate 22 for preserving the light and irradiating the LCD glass 1 together with the infrared rays, and a low-ultraviolet generating unit 23 for generating infrared rays from the infrared lamp 21.
승강 장치(40)는 승강 구동 수단(41)에 의해 상, 하 직선 운동하는 피스톤(42)과, 피스톤(42) 상부에 구비되어 전방에 고정파이프(43)가 직하부로 설치된 연결 브라켓(44)이 세척 장치(10)의 양측면에 대칭으로 설치되고, 양측의 고정파이프(43) 단부에 구비되어 트레이(30)를 탑제토록 하는 안착판(45)으로 구성되어 있다.The elevating device 40 includes a piston 42 linearly moving up and down by the elevating driving means 41, and a connecting bracket 44 provided above the piston 42 and provided with a fixed pipe 43 directly underneath. It is symmetrically provided in the both sides of this washing | cleaning apparatus 10, and is comprised by the mounting board 45 provided in the both ends of the fixed pipe 43, and mounting the tray 30 on top.
상기와 같이 구성된 본 발명은 트레이(30)에 삽입된 엘씨디 글라스(1)를 승강 장치(40)가 세척 장치(10)의 온 순수 저장 탱크(11) 내로 하강 인입시키면, 온 순수 저장 탱크(11)에 구비된 초음파 발생장치(미도시)로부터 발생되는 초음파에 의해 진동하는 온 순수가 엘씨디 글라스(1)의 표면에 부착된 불순물을 이탈, 제거하게 되며, 소정의 시간 경과 후, 첨부 도면 도 3에서 보는 바와 같이, 승강 장치(40)가 엘씨디 글라스(1)가 삽입된 트레이(30)를 상부로 상승시키게 되고, 상승됨과 동시에 적외선 램프(21)가 점등하여 고온의 열을 발산하고, 적외선 램프(11)를 지나게 되는 엘씨디 글라스(1)는 온 순수에 의해 가열된 상태로서 엘씨디 글라스(1) 자체의 열과 적외선으로부터 발산되는 고온의 열에 의해 표면에 잔류하는 온 순수의 증발(기화)이 촉진된다.According to the present invention configured as described above, when the elevating device 40 lowers and pulls the LCD glass 1 inserted into the tray 30 into the warm pure water storage tank 11 of the washing device 10, the warm pure water storage tank 11 is provided. The pure water vibrating by the ultrasonic wave generated from the ultrasonic wave generator (not shown) included in the) removes and removes impurities attached to the surface of the LCD glass 1, and after a predetermined time elapses, FIG. As can be seen from the above, the elevating device 40 raises the tray 30 into which the LCD glass 1 is inserted upward, and at the same time, the infrared lamp 21 lights up to dissipate high temperature heat, and the infrared lamp The LCD glass 1 passing through (11) is heated by warm pure water, and the evaporation (vaporization) of the warm pure water remaining on the surface is promoted by the heat of the LCD glass 1 itself and the high temperature heat emitted from infrared rays. .
상기와 같이, 적외선 램프(21) 위치로 상승하는 엘씨디 글라스(1) 표면에 묻어 있는 온 순수는 수평 상태로, 즉, 수평의 선을 그리며 서서히 증발하게 되는데, 수평의 온 순수 증발선상에는 표면 장력이 발생하여 엘씨디 글라스(1) 표면에 부착되어 있는 잔류 불순물을 온 순수 내로 잡아당기게 되며, 온 순수는 증발하게 되며, 승강 장치(40)에 의해 트레이(30)가 완전히 상승하여 정지하게 되면 적외선 램프(21)는 소등된다. As described above, the warm pure water buried on the surface of the LCD glass 1 rising to the infrared lamp 21 position is gradually evaporated in a horizontal state, that is, drawing a horizontal line, and the surface tension on the horizontal warm pure evaporation line. When this occurs, the residual impurities adhering to the surface of the LCD glass 1 are pulled into the warm pure water, and the warm pure water is evaporated. When the tray 30 is completely raised and stopped by the elevating device 40, the infrared lamp 21 is turned off.
이와 같이, 본 발명은 세척 즉시 바로 건조시키게 되므로, 어떠한 크린-룸(Clean-Room)에도 존재하는 불순물이 온 순수 등 세척액에 부착되기 전에 신속히 건조시키게 되어 이후 가공 공정을 거쳐 생산되는 엘씨디 장치 완제품의 불량률을 낮추게 된다. As such, the present invention is immediately dried immediately after washing, so that impurities present in any clean-room are quickly dried before they are attached to the washing liquid such as warm pure water, and are then processed through the manufacturing process of the finished LCD device. The failure rate is lowered.
본 발명에서는 세척 및 건조되는 대상을 엘씨디 글라스(1)로 하고 있으나, 타 기술의 권리 범위에 속하지 않는 기타 어떠한 반도체 부품도 세척 및 건조의 대상이 됨을 밝혀두는 바이며, 엘씨디 글라스(1)가 삽입된 트레이(30)의 탑제의 용이를 위해 건조 장치(20)가 세척 장치(10) 상부로부터 상, 하로 승강 작동하는 것도 바람직한 것이다. In the present invention, the object to be washed and dried as the LCD glass (1), but any other semiconductor components that do not belong to the scope of the other technology is to be clear that the object of the washing and drying, the LCD glass (1) is inserted It is also preferable that the drying device 20 is elevated up and down from the top of the cleaning device 10 for ease of mounting the tray 30.
상기와 같이 되는 본 발명은 소정의 온도로 가열된 온 순수가 저장된 탱크에 엘씨디 글라스를 인입시켜 초음파를 이용하여 세척한 후, 상부에 설치된 적외선 램프 측으로 서서히 상승시키면서 건조시키도록 하여 세척 후, 즉시 엘씨디 글라스 표면의 불순물을 제거함으로써 엘씨디 글라스 표면에 잔류하는 온 순수에 불순물이 부착되는 것을 방지함과 동시에 표면 얼룩 발생을 방지하도록 하는 효과를 갖음과 동시에 이에 따른 완제품 수율을 향상시키는 효과를 갖는다.In the present invention as described above, the LCD glass is introduced into a tank in which the warm pure water heated to a predetermined temperature is washed using ultrasonic waves, and then gradually dried while rising to the infrared lamp side installed on the upper side. By removing impurities on the glass surface, it is possible to prevent impurities from adhering to the warm pure water remaining on the LCD glass surface and to prevent surface staining, and at the same time, to improve the finished product yield.
도1은 본 발명의 구성을 보인 사시도1 is a perspective view showing the configuration of the present invention
도 2는 본 발명의 세척 상태를 보인 개략도2 is a schematic view showing a washing state of the present invention
도 3은 본 발명의 건조 상태를 보인 개략도3 is a schematic view showing a dry state of the present invention
<도면의 주요부분에 대한 부호설명><Code Description of Main Parts of Drawing>
10 : 세척 장치 11 : 온 순수 저장 탱크10: washing device 11: warm pure storage tank
12 : 인라인 히터 13 : 드레인 라인 12: inline heater 13: drain line
20 : 건조 장치 21 : 적외선 램프20: drying apparatus 21: infrared lamp
22 : 반사판 23 : 적외선 발생 유닛22: reflector 23: infrared ray generating unit
30 : 트레이 40 : 승강 장치30 tray 40 lifting device
1 : 엘씨디 글라스 1: LCD glass
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0020329A KR100515440B1 (en) | 2002-04-15 | 2002-04-15 | LCD glass washer and dryer using hot D.I Water and Infra-Red Lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0020329A KR100515440B1 (en) | 2002-04-15 | 2002-04-15 | LCD glass washer and dryer using hot D.I Water and Infra-Red Lamp |
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| Publication Number | Publication Date |
|---|---|
| KR20030081884A KR20030081884A (en) | 2003-10-22 |
| KR100515440B1 true KR100515440B1 (en) | 2005-09-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR10-2002-0020329A KR100515440B1 (en) | 2002-04-15 | 2002-04-15 | LCD glass washer and dryer using hot D.I Water and Infra-Red Lamp |
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| KR101041775B1 (en) * | 2010-05-26 | 2011-06-17 | 주식회사 메디사랑 | Sterilizing apparatus using water washing and lighting |
| KR101134526B1 (en) * | 2010-12-31 | 2012-04-13 | 스마트론 주식회사 | Apparatus and method drying the substarate |
| KR102020665B1 (en) * | 2016-02-01 | 2019-09-10 | 엘가이드 주식회사 | Ball lens cleaning apparatus capable of cleaning and drying |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03147325A (en) * | 1989-11-01 | 1991-06-24 | Sonitsuku Fueroo Kk | Drying of precision cleaning |
| JPH10321583A (en) * | 1997-05-20 | 1998-12-04 | Kaijo Corp | Method for drying substrate |
| KR20010016507A (en) * | 2000-12-15 | 2001-03-05 | 신원호 | Device for wash of LCD glass |
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2002
- 2002-04-15 KR KR10-2002-0020329A patent/KR100515440B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03147325A (en) * | 1989-11-01 | 1991-06-24 | Sonitsuku Fueroo Kk | Drying of precision cleaning |
| JPH10321583A (en) * | 1997-05-20 | 1998-12-04 | Kaijo Corp | Method for drying substrate |
| KR20010016507A (en) * | 2000-12-15 | 2001-03-05 | 신원호 | Device for wash of LCD glass |
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