KR100501478B1 - Method of manufacturing shadow mask and apparatus for depositing etching resistance layer therefor - Google Patents

Abstract

The present invention relates to a method for manufacturing a shadow mask and to an inner etching layer coating device for manufacturing a shadow mask, the method comprising: a first layer having a plurality of recesses and a resist layer having a plurality of openings opposite to the first main surface; A step of applying the inner layer coating liquid 22 with the first gravure roll 16 to the first main surface of the strip-shaped metal sheet 7 having two main surfaces, and the strip-shaped metal sheet 7 with the second main surface. A step of filling the etched layer coating liquid 22 in the recessed portion of the first main surface by the press-in roll 28 in a state supported by the backup roll 29 on the side and the agent of the band-shaped metal thin plate 7. It is characterized by including the process of controlling the film thickness of the etch-in layer coating liquid 22 of one main surface by the 2nd gravure roll 16. It is characterized by the above-mentioned.

Description

TECHNICAL FIELD OF MANUFACTURING SHADOW MASK AND APPARATUS FOR APPLICATION OF SHADOW MASK TECHNICAL FIELD

The present invention relates to a method for producing a shadow mask which forms an etching layer on a strip-shaped metal sheet, and to an apparatus for applying an etching layer for shadow mask production.

Recently, high definition and high quality have been strongly demanded in the shadow mask used for the color display tube.However, high definition and high quality are also required in the shadow mask used in the color water pipe as well, with the start of digital broadcasting. Miniaturization of the opening dimension of a mask and reduction of the opening dimension deviation are aimed at.

The shadow mask has a circular shape in a color display tube displaying characters, graphics, and the like, and a rectangular shape in a color water tube used in a general home.

The opening of the shadow mask is formed by the photoetching method, and the shadow mask requiring high definition and high quality is mainly formed by the two-stage etching method.

In this two-stage etching, the recessed part corresponding to the small hole of the electron gun side is formed in one main surface used as the 1st main surface of a strip-shaped metal thin plate by etching. A etched layer is formed on the surface in which the recessed part corresponding to this small hole was formed. Thereafter, the other main surface on the side opposite to one main surface serving as the second main surface is etched in a pattern corresponding to the large hole, and the opening is formed by passing through the recess corresponding to the small hole on the large hole side. In addition, the diameter of the said opening is controlled on the small hole side.

In addition, in the double-sided etching method in which small and large holes are simultaneously etched on both sides, it is difficult to control the side etching phenomenon in which the opening dimension of the concave portion obtained by etching becomes larger than that of the resist, and even after the small and large holes are connected, Since the etching proceeds, it is difficult to control the opening diameter. In contrast, in the two-stage etching method, the etching layer is filled in the recesses on the small hole side so that the small holes are not reetched in the second etching step, so that the accurate small hole pattern of the first etching process can be maintained. The opening smaller than the thickness of the metal sheet is made possible. Moreover, a spray coater, a die coater, a bar coater, a roll coater, a gravure coater, a pipe duct nozzle (PDN) coater, etc. are used for application | coating of an etching-resistant layer coating liquid.

In the two-stage etching of the shadow mask for color display tubes, a method of forming a etch-resistant layer using a combination of an ultraviolet curable resin and a gravure coater using a gravure roll has a high filling performance of the etch-resistant layer coating liquid, and energy saving is also possible. The process cost is also attracting attention because it is cheap. In gravure coaters using gravure rolls, gravure rolls use a small diameter of about 20 mm to 60 mm in diameter to increase the pressing force of the formation of the etched layer into the recesses of the shadow mask, so that the air in the recesses of the shadow mask is easily It substitutes and fills the recessed part with quenching layer coating liquid reliably.

However, the shadow mask for color water pipes is thicker than the shadow mask for color display tubes, and the depth of the concave portion corresponding to the small diameter in the initial etching is deep, and the opening shape is not an isotropic circular shape but an anisotropic rectangular shape. The coating becomes very difficult even in the etching-resistant layer forming step.

Therefore, as described in, for example, Japanese Unexamined Patent Application Publication No. 11-92962, an application portion for applying an excessive anti-etching layer coating liquid to a strip-shaped metal sheet along the conveying direction of the strip-shaped metal sheet by gravure rolls. And a film-thickness control part which controls the gravure roll so that the film thickness of the excess etch-resistant layer coating liquid apply | coated in the conveyance direction downstream of this application part and apply | coated by the application part is fixed to predetermined | prescribed film pressure.

However, as described in Japanese Patent Application Laid-Open No. 11-92962, an excessive anti-etching layer coating liquid is applied to a strip-shaped metal sheet by means of a gravure roll of the coating portion, and a film of the excess etching-resistant layer coating liquid applied at the coating portion. In the shadow mask used for the color water pipe used for digital broadcasting, even if the thickness is controlled by the gravure roll of the film thickness control unit so that the thickness is fixed at a predetermined film pressure, since the concave portion is rectangular and small diameter in the effective surface, the effective surface Outside, it has a problem that there is a possibility that the etching-resistant coating liquid cannot be sufficiently filled into the recess because it becomes a large and deep recess.

The present invention has been made in view of the above problems, and improves the filling property of the etch-resistant layer coating liquid, and forms a etch-resistant layer with no residual residue, thereby improving the quality and applying the etch-resistant layer for shadow mask production. It is an object to provide a device.

According to the 1st aspect of this invention, a 1st main surface of the strip | belt-shaped metal thin plate which has a 1st main surface which has a some recessed part, and the 2nd main surface in which the resist layer which has a some opening on the opposite side to this 1st main surface was formed was 1st. A step of applying the etching layer coating liquid with a gravure roll and filling the etching layer coating liquid into the recessed portion of the first main surface by a press-in roll while the band-shaped metal thin plate is supported by the supporting material on the second main surface side. Provided is a method of manufacturing a shadow mask having a step.

Moreover, according to the 2nd aspect of this invention, in the 1st main surface of the strip | belt-shaped metal thin plate which has the 1st main surface which has a some recessed part, and the 2nd main surface in which the resist layer which has a some opening on the opposite side to this 1st main surface was formed. The step of applying the etching layer coating liquid with the first gravure roll, the etching layer coating liquid is applied to the recessed portion of the first main surface by the indentation roll while the band-shaped metal thin plate is supported by the supporting material on the second main surface side. There is provided a method for producing a shadow mask, comprising a step of filling and a step of controlling the film thickness of the coating layer coating liquid on the first main surface of the strip-shaped metal sheet with a second gravure roll.

According to the third aspect of the present invention, the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings on the side opposite to the first main surface. An anti-etching layer coating device for producing a shadow mask, wherein the anti-etching layer coating liquid is applied to a recess, wherein the coating portion has a gravure roll for applying the anti-etching layer coating liquid to the first main surface of the strip-shaped metal sheet and the strip shape. Application of an etching-resistant layer for shadow mask production, comprising a press-fitting part having a press-fitting roll for filling the coating layer coating liquid into the concave portion of the first main surface of the strip-shaped metal sheet in a state where the second main surface of the metal thin plate is supported by the support material. An apparatus is provided.

Further, according to the fourth aspect of the present invention, the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings on the side opposite to the first main surface is formed. An anti-etching layer coating apparatus for producing a shadow mask, wherein the anti-etching layer coating liquid is applied to a recess, wherein the coating portion has a gravure roll for applying the anti-etching layer coating liquid to the first main surface of the strip-shaped metal sheet and the strip shape. A press-fitting part having a press-in roll for filling the coating layer coating liquid into the concave portion of the first main surface of the strip-shaped metal sheet in a state in which the second main surface of the sheet metal is supported by a supporting material and the first of the strip-shaped sheet metal An anti-etching layer coating apparatus for producing a shadow mask having a film thickness control unit having a gravure roll for controlling the film thickness of the etching-resistant layer coating liquid on the main surface is provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

First, the color water pipe will be described with reference to FIG. 4.

As shown in Fig. 4, the color water pipe 1 has a glass bulb 2 serving as a vacuum outer container which holds the interior in a vacuum, and three electron beams are provided on the base end side of the glass bulb 2. The electron gun 3 for forming, modulating and converging is provided, and the panel 4 which comprises a part of the glass bulb 2 is arrange | positioned at the front-end side of the glass bulb 2. In addition, a fluorescent screen 5 having a phosphor layer that emits three colors of red, green, and blue is provided on the inner surface of the panel 4 by three electron beams from the electron gun 3 respectively. Moreover, the deflection yoke (not shown) which controls the position of an electron beam and scans an electron beam in the whole screen is provided in the outer side of the glass bulb 2 between this electron gun 3 and the fluorescent screen 5.

In addition, a shadow mask 6 serving as a color discriminating electrode, which faces away from the fluorescent screen 5 at a predetermined interval, and has a plurality of rectangular openings arranged in a predetermined size and pitch on the entire surface thereof, is provided. In addition, the shadow mask 6 selects three beams emitted from the electron gun 3 by the opening and accurately rounds each predetermined phosphor layer so as to correspond to the corresponding phosphor layer in a geometrical one-to-one correspondence. Has

Since the shadow mask 6 is also used as a photomask when forming the fluorescent screen 5 in the manufacturing process of the color receiving tube 1, the variation or unbalanced quality of the opening diameter of the shadow mask 6 is maintained as it is. It affects stripe diameter and imbalance quality of (5). For this reason, it is necessary to raise the quality of the shadow mask 6 in order to raise the display quality of the color water pipe 1.

The shadow mask 6 obtained by the manufacturing method and the manufacturing apparatus of the present embodiment has no variation in the shape and diameter of the opening, and because of the unbalanced quality, it is possible to manufacture the color water pipe with good display quality.

In addition, as shown in Fig. 5, the shadow mask 6 is formed in plural in succession along the longitudinal direction from the strip-shaped metal thin plate 7. Then, at the circumferential edge of the shadow mask 6, an edge tip 8 serving as a boundary to be cut into unnecessary portions is formed, and the shadow mask 6 is cut out of the band-shaped metal thin plate 7 by the edge tip 8. Serve In addition, there is an effective portion 9, which is an area in which a plurality of openings are formed in a substantially rectangular shape in the inner central portion of the edge line portion 8, and a half-etch portion, notch portion or manufacturing information for securing press formability is described. There are other parts 10, such as an accessory part.

Subsequently, with reference to FIG. 1, the etching-resistant layer coating apparatus for shadow mask manufacture which manufactures the shadow mask 6 is demonstrated.

As shown in FIG. 1, this etch-resistant layer coating apparatus for shadow mask manufacture has the upstream coating apparatus 11 used as a two-stage coating part, and the downstream coating apparatus 12 used as a film thickness control part, and The upstream coating device 11 and the downstream coating device 12 are formed of a strip-shaped metal sheet 7 made of an invar material, for example, an iron nickel alloy containing 36% by weight of nickel, which is a substrate of a shadow mask. ) Is hanging. That is, each coating device 11, 12 has two full length rolls 13, 14 which can be moved up and down with respect to the drive device which is not shown in figure, and each of these full length rolls 13, 14 A strip-shaped metal thin plate 7 is provided on the lower surface thereof, and is conveyed in a state where a force is applied downward by these electric rolls 13 and 14, and a band-shaped metal thin plate ( 7) runs almost horizontally.

Further, a gravure roll 16 having a diameter of about 20 mm to about 60 mm is disposed below the band-shaped metal thin plate 7 between the electric rolls 13 and 14. As shown in Figs. 2 and 3, the gravure roll 16 has a metal roll 17 made of, for example, stainless steel at the center thereof, and a background treatment is applied around the metal roll 17 as necessary. Then, by spraying the ceramic material 18 made of chromium oxide having a Vickers hardness of 1000 or more and a porosity of 5% or less, preferably 3.5% or less, around the ground metal roll 17, It is formed by polishing the surface. Moreover, on the outer periphery of the ceramic material 18, the engraving part 19 which fills a etch-resistant layer coating liquid is formed by laser processing.

The engraving portion 19 of the gravure roll 16 of the upstream coating device 11 has a pitch of about 0.35 mm to 0.50 mm, a depth of about 0.15 mm to 0.3 mm, and the gravure roll 16. The grooves inclined at about 45 ° to 70 ° with respect to the central axis are formed in a spiral shape. On the other hand, the engraving 19 of the gravure roll 16 of the downstream coating device 12 has a closer eye than the gravure roll 16 of the upstream coating device 11, for example, a pitch of about 0.15 mm. A groove is formed in a spiral shape with a diameter of about 0.20 mm, a depth of about 0.04 mm to 0.08 mm, and inclined at about 45 ° to 70 ° with respect to the central axis of the gravure roll 16.

The gravure roll 16 is rotated in the opposite direction to the traveling direction of the strip-shaped metal sheet 7 at high speed directly or indirectly by a drive motor (not shown).

Moreover, below this gravure roll 16, the container 21 which receives the excessive part of the etch-resistant layer coating liquid provided on the base which is not shown in figure is being fixed.

And on this container 21, the coating liquid supply nozzle 23 which supplies the etch-resistant layer coating liquid 22 containing the non-solvent type ultraviolet curable resin, for example to the gravure roll 16 is provided. In addition, in this coating liquid supply nozzle 23, the anti-etching layer coating liquid 22 supplied from the coating liquid supply nozzle 23 on the engraving part 19 of the gravure roll 16 turns into the strip | belt-shaped metal thin plate 7. In the position just before moving, the duct blade 24 which wipes off the excess internal etching layer coating liquid 22 is pressed down by the duct blade presser 25, and is provided. On the other hand, a nylon blade 26 is attached to the lower portion of the coating liquid supply nozzle 23 to regulate the supply amount of the etching resistant layer coating liquid 22 and to prevent the liquid from falling off.

At the time of application of the anti-etching layer coating liquid 22, the lower surface of the electrical-length rolls 13 and 14 is located below the upper surface of the strip-shaped metal thin plate 7 which contact | connects the gravure roll 16, and the gravure roll Since the angle and contact area which the 16 and the strip | belt-shaped metal plate 7 make | forms are regulated, the part which opposes the gravure roll on the upper side of the strip | belt-shaped metal plate 7 is provided because support members, such as a back roll, are running. The second main surface of the strip-shaped metal thin plate 7 is free. On the other hand, when the anti-etching layer coating liquid 22 is not coated, the electrical rolls 13 and 14 move upward, and the lower surface of the strip-shaped metal thin plate 7 is separated from the gravure roll 16.

There is a press-fitting portion 27 between the upstream coating device 11 and the downstream coating device 12.

The press-fitting part 27 is provided with a press-fit roll 28 facing the first main surface of the band-shaped metal thin plate 7, and the band-shaped metal thin plate 7 is inserted directly opposite the press-fit roll 28. On the second main surface, which is the upper surface of the strip-shaped metal thin plate 7, a backup roll 29 as a supporting material of the press-in roll 28 is provided. In addition, as for the gravure roll 16, the indentation roll 28 is sprayed with an innocent ceramic material, such as chromium oxide, around the metal roll.

On the other hand, the backup roll 29 is formed with an elastic body. The gap between the press-in roll 28 and the backup roll 29 can be adjusted, and the etch-in layer coating liquid by the press-in roll 28 is adjusted by adjusting the gap between the press-in roll 28 and the backup roll 29. The pressing force of 22 is set. In addition, the press-in roll 28 and the backup roll 29 are free to rotate, and rotate in the same direction as the conveying direction of the strip-shaped metal sheet 7 at a circumferential speed substantially the same as the conveying speed of the strip-shaped metal sheet 7. .

Then, the etched layer coating liquid 22 that is excessively filled and coated with the gravure roll 16 of the upstream coating device 11 is made of the upper surface of the strip-shaped metal thin plate 7 by the backup roll 29. 2 The main surface side is supported, and the filling residue is supplemented and filled by pressing the etching layer coating liquid 22 by the press-in roll 28, and the filling remaining portion is forcibly etched by the gravure roll 16 of the upstream application device 11. Substitution of the coating liquid 22 is performed by replacing with the coating liquid.

Subsequently, the operation of the etching-resistant layer coating device for producing the shadow mask of the above embodiment will be described with reference to FIGS. 6 to 14.

First, the rolling oil and antirust oil adhering to the surface of the strip-shaped metal thin plate 7 are degreased, washed and dried. Then, as shown in FIG. 6, the water-soluble photosensitive agent which has casein and dichromate as a main component on both surfaces of the 1st main surface of the lower surface of the strip | belt-shaped metal thin plate 7, and the 2nd main surface which is the upper surface on the opposite side to the said 1st main surface. Is applied to a predetermined thickness and dried to form photosensitive films 31 and 32 having a thickness of several micrometers.

Subsequently, the disk 34 and the large hole 35 on the side of the fluorescent screen 5, on which the pattern corresponding to the small hole 33, which is a recess on the electron gun 3 side of the opening of the shadow mask 6, were formed, were formed. Using a pair of photomasks having a patterned disk 36 formed thereon, as shown in FIG. 7, the disks 34 and 36 are exposed to each other in a state where the disks 34 and 36 are brought into close contact with each other. The pattern of (34, 36) is printed.

Thereafter, the photosensitive films 31 and 32, each pattern of which is printed, are developed with water, and the unsensed portion is removed to expose a part of the surface of the band-shaped metal thin plate 7, and as shown in FIG. The resist patterns 37 and 38 as a resist layer corresponding to the pattern of (34, 36) are formed.

Moreover, as shown in FIG. 9, the protective film 41 which has a structure which apply | coated the adhesive material to the etch-resistant resin film, such as CPP, is adhere | attached on the 2nd main surface side in which the resist pattern 38 was formed. On the other hand, an etching solution made of ferric chloride solution is sprayed on the first main surface side on which the resist pattern 37 is formed, and the first etching is performed, and the metal on the first main surface side on which the resist pattern 37 is formed by this first etching. In the exposed portion, a small hole 33 on the electron gun 3 side of the shadow mask 6 is formed.

After the end of the first etching, water is dispersed in the band-shaped metal thin plate 7 and remains in the first main surface of the band-shaped ultrafast thin plate 7, particularly in the small hole 33, as shown in FIG. Subsequently, the etching liquid to be substituted and washed at a high speed is removed to remove the etching liquid remaining in the small hole 33.

Subsequently, the resist pattern 37 on the first main surface side where the first etching is completed is peeled off with an aqueous sodium hydroxide solution, washed with water and dried, and then the protective film 41 formed on the resist pattern 38 side is removed. Remove As shown in FIG. 11, the etching-resistant layer coating liquid 22 is applied to the first main surface side including the inside of the small hole 33 by using the coating devices 11 and 12 and the press-fitting portion 27. Subsequently, ultraviolet rays are irradiated to the applied etch-resistant layer coating liquid 22 with a UV lamp not shown, and the etch-resistant layer coating liquid is UV cured to form the etch-resistant layer 42.

When forming the etch-resistant layer 42, the etch-resistant layer coating liquid 22 is hold | maintained in a large quantity in the dense part 19 of the gravure roll 16 of the upstream coating apparatus 11, The air in the small hole 33 and the etching-resistant layer coating liquid 22 are fully substituted, while injecting the etching-resistant coating liquid 22 into the small hole 33 of one main surface. Subsequently, the anti-etching layer coating liquid 22 applied excessively by the gravure roll 16 of this upstream application apparatus 11 which is the upper surface of the strip | belt-shaped metal thin plate 7 by the backup roll 29 is carried out. Into the small hole 33 of the portion remaining filled in the upstream coating device 11 while press-fitting the etching-resistant layer coating liquid 22 by the press-in roll 28 while supporting the second main surface side, and Outside the effective surface, the etching layer coating liquid 22 is supplemented and filled in the deeper and deeper recesses.

Thereafter, the eye of the gravure roll 16 of the downstream coating device 12 is wiped off by the dense engraving 19, and the excess etching-resistant layer coating liquid 22 is wiped off. Control film thickness.

In this way, when the two coating devices 11 and 12 and the press-fitting portion 27 are used, the deep concave portion of the small hole 33, the deeper notch portion of the deeper area, the large half dot portion of the skirt portion, and other accessory portions Sufficient filling of the etching resistant layer coating liquid 22 becomes possible. In addition, the engraving portion 19 of the gravure roll 16 of the upstream side coating apparatus 11 has a larger eye than the engraving portion 19 of the gravure roll 16 of the downstream side coating apparatus 12, Since the etch-in layer coating liquid 22 can hold | maintain a lot in large quantities, even if the small hole 33 is deep, the etch-in layer coating liquid 22 is carried out with the gravure roll 16 of the upstream application apparatus 11. FIG. We can supply enough. On the other hand, the gravure roll 16 of the downstream coating apparatus 12 can wipe off the excess etching-resistant coating liquid 22 because the eye of the engraving part 19 is dense. In this manner, the etching-resistant layer coating liquid 22 can be flattened to uniformly control the film thickness.

Thereafter, the protective film 43 is adhered on the etching-resistant layer 42.

Subsequently, as shown in FIG. 12, the second main surface is formed by spraying the etching solution of the ferric chloride solution on the second main surface side on which the resist pattern 38 is formed, and the resist pattern 38 is formed. The large hole 35 on the side of the fluorescent screen 5 of the shadow mask 6 is formed on the second main surface side, and the opening 44 is formed by passing through the small hole 33.

After the completion of the second etching, water is dispersed in the strip-shaped metal thin plate 7 and remains in the surface of the strip-shaped metal thin plate 7, particularly in the large hole 35, as shown in FIG. 13. The etching layer coating liquid 22 is replaced with water uniformly and at high speed, and the etching resistant layer coating liquid 22 is removed.

Subsequently, the protective film 43 adhered to the first main surface side of the strip-shaped metal thin plate 7 is removed, and then, a large hole 35 is formed by a hot sodium hydroxide aqueous solution in a peeling apparatus (not shown). 2 The etch-out layer 42 of the 1st main surface side in which the resist pattern 38 and the small hole 33 on the main surface side were formed is peeled off. In addition, as the strip-shaped metal thin plate 7 is washed with water and dried, a plurality of rectangular openings 44 in which the small holes 33 and the large holes 35 communicate with each other are formed in a band shape. It is formed in the metal foil (7).

According to the above embodiment, the gravure roll 16 has a small diameter of about 20 mm to about 60 mm in diameter to reduce the contact area with the strip-shaped metal thin plate 7, and the conveyance direction of the strip-shaped metal thin plate 7. By rotating the gravure roll 16 at high speed in the reverse direction, a large shear force is generated, increasing the pressing force of the etched layer coating liquid 22 into the small diameter 33, and the air in the small diameter 33. When the substitution is easy, and even when the strip-shaped metal thin plate 7 having irregularities is used, the small-diameter 33 can be easily filled with the anti-etching layer coating liquid 22, and the filling is insufficient even therewith. Since the replenishment filling is possible in the indentation roll 28, the formation of the etching-resistant layer becomes easy.

In addition, since the surface of the gravure roll 16 is made of the ceramic material 18 having a Vickers hardness of 1000 or more and a porosity of 5% or less, wear is reduced and generation of debris is prevented. Moreover, since the engraving part 19 holding the etching-resistant layer coating liquid 22 of the ceramic material 18 is carved by laser processing, there is little damage to the strip | belt-shaped metal thin plate 7, and the gravure roll 16 is carried out. It also has a long lifespan.

In addition, it is not necessary to form the ceramic material 18 on the surfaces of all the gravure rolls 16 of all the coating apparatuses 11 and 12, and the ceramic material 18 is formed only on the surface of the gravure roll 16 with abrasion. Also good. In addition, if the ceramic material 18 can be easily sprayed on the metal roll 17, the surface treatment is performed on the outer circumferential surface of the metal roll 17 before spraying the ceramic material 18 on the surface of the gravure roll 16. You do not have to.

Moreover, all the gravure rolls 16 also processed the engraving part which hold | maintains a coating layer coating liquid with a metal roll or a rolled piece to a metal roll, or wear-resistant treatment, such as hard chromium plating, on the metal roll 16 is carried out. It doesn't matter if you do it.

In addition, the use of chromium oxide in the ceramic material 18 of the gravure roll 16 provides economical efficiency and wear resistance, and facilitates laser processing. However, other than chromium oxide may be used if laser processing is possible.

In addition, the press-in roll 28 and the back-up roll 29 may use a metal roll for any one or both, and the press-in roll 28 is not limited to chromium oxide as a ceramic material, but may be zirconia, and press-fitting property and idling are good. If it is not good.

In addition, the duct blades 24 always adjust the thickness of the etch-in layer coating liquid 22 on the engraving portion 19 of the gravure roll 16 to a predetermined uniform thickness, and then onto the strip-shaped metal thin plate 7. Since it supplies, a stable film thickness and a coating state are obtained.

In the above embodiment, as the anti-etching layer coating liquid 22, a solvent-free type UV curable resin was used, but a water-soluble thermosetting resin, a water-soluble casein resin, a mixture of casein and acrylic resin, a solvent type thermosetting resin or hot melt resin, etc. It can also be used.

In addition, although the duct blades 24 used both the upstream coating apparatus 11 and the downstream coating apparatus 12 in the said Example, in the upstream coating apparatus 11, the etching-resistant layer coating liquid 22 was used. In this case, the etched layer coating liquid 22 may be excessively supplied onto the strip-shaped metal thin plate 7 without providing a duct blade.

Here, the experimental result based on the said Example is demonstrated with reference to Table 1 below.

Coating device object Plate thickness [mm] Depth [μm] % Filled Effective part Etc Example 1 2-stage CPT 0.20 130 100 100 Example 2 2-stage CPT 0.25 160 100 100 Example 3 2-stage CPT 0.25 200 100 100 Comparative Example 1 2-stage CPT 0.12 50 100 100 Comparative Example 2 2-stage CPT 0.20 130 95 50 Comparative Example 3 2-stage CPT 0.25 160 90 35

First, the experiment was performed about Example 1, 2, 3 which provided the press-fit part 27, and Comparative Example 1, 2, 3 which did not install the press-fit part.

In Comparative Example 1, the etching solution coating layer 22 was applied to a shadow mask of a color display tube (CDT) having a strip-shaped sheet metal having a sheet thickness of 0.12 mm and having a small hole 33 having a thickness of 50 μm and other concave portions. The etched layer coating liquid 22 was filled in 100% of all the effective parts 9 and the edge part 8 in which the opening 44 is formed, and other parts 10, such as the edge part 8, the notch part, and the accessory part.

Subsequently, in Example 1 and Comparative Example 2, the etched layer coating liquid was applied to a shadow mask of a color water pipe (CPT) having a strip-shaped thin metal plate having a plate thickness of 0.20 mm and having a small hole 33 having a depth of 130 µm and other concave portions. Was applied.

As a result, in the apparatus which does not have the indentation part of the comparative example 2, in the effective part 9 in which the opening 44 is formed, only 95% of the etching-resistant layer coating liquid 22 is filled, and the edge line part 8 and the furnace are filled. In other portions 10 such as teeth and accessories, only 50% of the etching-resistant layer coating liquid 22 was filled.

In contrast, in the apparatus having the press-fit portion 27 of the first embodiment, all of the other portions 10, such as the effective portion 9 and the edge portion 8, the notch portion and the accessory portion, in which the opening 44 is formed, are provided. Etching layer coating liquid 22 was 100% filled, and by providing press-fitting part 27, filling of etching resistance layer coating liquid 22 was ensured.

In Example 2 and Comparative Example 3, the anti-etching layer coating liquid was applied to a shadow mask of a color water pipe (CPT) having a strip-shaped thin metal plate having a plate thickness of 0.25 mm and having a small diameter 33 and other concave portions having a depth of 160 µm. Applied.

As a result, in the apparatus which does not have the indentation part of the comparative example 3, in the effective part 9 in which the opening 44 is formed, only 90% of the etching-resistant layer coating liquid 22 is filled, and the edge part 8 and the furnace are filled. In other portions 10, such as teeth and accessories, only 35% of the etching-resistant layer coating liquid 22 was filled.

In contrast, in the apparatus having the press-fitting portion 27 of the second embodiment, the effective portion 9 and the edge portion 8 in which the opening 44 is formed, and all other portions 10 such as the notch portion and the accessory portion are provided. The etching resistant layer coating liquid 22 was 100% filled and the press fitting part 27 was provided, and the filling of the etching resistant layer coating liquid 22 was ensured.

Further, in Example 3, the coating layer coating liquid was applied to a shadow mask of a color water pipe (CPT) having a small hole 33 and other concave portions having a depth of 200 μm in a strip-shaped metal sheet having a plate thickness of 0.25 mm. The etched layer coating liquid 22 is 100% filled in the effective part 9 and the edge part 8 in which the opening 44 is formed, and all other parts 10, such as the edge part 8, the notch part, and the accessory part, By providing (27), filling of the etching-resistant layer coating liquid 22 was assured.

Since the diameter of the opening 44 of the shadow mask 6 is controlled by the small hole 33 in the case of the two-stage etching, the etching layer coating liquid (reliably in the small hole 33 of the effective portion 9). By filling 22), the diameter of the small hole 33 can be made constant, and the shadow mask 6 with a good unbalanced quality with little diameter variation of the opening hole 44 can be formed.

In addition, all the other portions 10, such as the edge portion 8, the notch portion, and the accessory portion, are reliably filled with the etching solution coating layer 22, such as the edge portion 8, the notch portion, and the accessory portion. The other part 10 can be prevented from being etched and separated in the manufacturing process, and the manufacturing yield was improved.

In addition, in the present embodiment, the resist pattern 37 on the first main surface side where the first etching is completed is peeled off and removed with an aqueous sodium hydroxide solution, washed with water, and dried, followed by the protective film 41 formed on the resist pattern 38 side. Although the etch-resistant layer 42 was formed and the etch-resistant layer 42 was formed, you may perform a 1st etching, without attaching the protective film 41 before a 1st etching.

Moreover, you may form a etch-resistant layer, without peeling and removing the resist pattern 37 of the 1st main surface side in which 1st etching was complete | finished.

As mentioned above, according to the aspect of this invention, after filling and apply | coating excess etching coating liquid with a gravure roll, the bubble of a recessed part remain | survives by replenishing and filling a etching-layer coating liquid in the recessed part of a 1st main surface with a press-in roll. The etched coating liquid can be forcibly filled in the concave portion without filling, so that there is no filling imbalance, and the film thickness of the etched layer coating liquid on the first main surface of the strip-shaped metal sheet filled with the etching resistant layer coating liquid is eliminated. By controlling with a gravure roll, a etch-resistant layer coating liquid can be further flattened and apply | coated, and the dispersion | variation of a shadow mask becomes small by this, and quality improves.

1 is a schematic view showing a etch-resistant layer coating device for producing a shadow mask according to an embodiment of the present invention,

FIG. 2 is a perspective view showing the appearance of a gravure roll of the apparatus shown in FIG. 1;

3 is a cross-sectional view showing a gravure roll of the apparatus shown in FIG.

4 is a schematic view showing a color water pipe;

5 is a schematic view showing a shadow mask formed on a strip-shaped metal sheet;

6 is a cross-sectional view showing one manufacturing process of a shadow mask;

7 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 6;

8 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 7;

9 is a sectional view showing a manufacturing process following the manufacturing process shown in FIG. 8;

10 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 9;

11 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 10;

12 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 11;

FIG. 13 is a sectional view showing a manufacturing process following the manufacturing process shown in FIG. 12;

FIG. 14 is a cross-sectional view showing the manufacturing process following the manufacturing process shown in FIG.

* Explanation of symbols for the main parts of the drawings

7: strip-shaped metal sheet 13, 14: electric field roll

17 metal roll 21 container

22: coating liquid 23: coating liquid supply nozzle

24: duct blades 27: indentation

28: indentation roll 29: backup roll

31, 32: photosensitive film 34, 36: disc

38: resist pattern 42: etched layer

Claims (16)

Into a first gravure roll on a first main surface of a strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings opposite to the first main surface. Applying the etching layer coating liquid and Manufacturing a shadow mask, comprising: filling a coating layer coating liquid into a concave portion of the first main surface by a press-in roll in a state in which the band-shaped thin metal plate is supported by a supporting material on the second main surface side; Way. The etching layer coating liquid was applied to the first gravure roll on the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings on the side opposite to the first main surface. Application process, A step of filling the coating layer coating liquid into the concave portion of the first main surface by a press-in roll in a state in which the band-shaped thin metal plate is supported by the supporting material on the second main surface side; and And a step of controlling the film thickness of the coating layer coating liquid on the first main surface of the strip-shaped metal thin plate with a second gravure roll. The method according to claim 1 or 2, At least one of the first and second gravure rolls is rotated in a direction opposite to the conveying direction of the strip-shaped metal sheet at a circumferential speed of 4 to 25 times the conveying speed of the strip-shaped metal sheet. . The method according to claim 1 or 2, At least one of the said 1st and 2nd gravure roll is formed in the surface of the ceramic material provided in the outer peripheral surface, The manufacturing method of the shadow mask characterized by including the engraving part which hold | maintains a etching-resistant layer coating liquid. The method of claim 2, Each of the first and second gravure rolls has an engraving portion for retaining the coating layer coating solution on the surface thereof, and the shadow portion of the surface of the first gravure roll has a thinner eye than the engraving portion of the second gravure roll. Method of manufacturing a mask. The method according to claim 1 or 2, The support material is composed of a backup roll, the backup roll and the press-in roll is a method of manufacturing a shadow mask, characterized in that rotating in the same direction as the conveying direction of the strip-shaped metal sheet at a circumferential speed substantially the same as the conveying speed of the band-shaped metal sheet. . The method of claim 6, The backup roll is a method of manufacturing a shadow mask, characterized in that the elastic body. The method according to claim 1 or 2, The press-in roll is a method of manufacturing a shadow mask, characterized in that it comprises a metal roll and a ceramic material coated on the outer peripheral surface of the metal roll. A coating layer coating liquid is applied to the recesses of the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings on the side opposite to the first main surface. In the shadow mask coating device for producing a shadow mask, An applicator having a gravure roll for coating the coating layer coating liquid on the first main surface of the strip-shaped metal sheet; and And a press-fitting part having a press-in roll for filling the coating layer coating liquid into the concave portion of the first main surface of the strip-shaped metal sheet in a state in which the second main surface of the strip-shaped metal sheet is supported by a supporting material. Apparatus for applying a etch-resistant layer for the manufacture of shadow masks. A coating layer coating liquid is applied to the concave portion of the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings on the side opposite to the first main surface. In the shadow mask coating device for producing a shadow mask, An applicator having a gravure roll for applying an anti-etching layer coating liquid to the first main surface of the strip-shaped metal sheet; A press-fitting part having a press-in roll for filling the coating layer coating liquid into the concave portion of the first main surface of the strip-shaped metal sheet in a state in which the second main surface of the strip-shaped metal sheet is supported by a support material; And a film thickness control unit having a gravure roll for controlling the film thickness of the coating layer coating liquid on the first main surface of the strip-shaped metal thin plate. The method according to claim 9 or 10, At least one of the first and second gravure rolls is rotated in the opposite direction to the conveying direction of the strip-shaped metal sheet at a circumferential speed of 4 to 25 times the conveying speed of the strip-shaped metal sheet. Coating device. The method according to claim 9 or 10, At least one of said 1st and 2nd gravure roll is formed in the surface of the ceramic material provided in the outer peripheral surface, The etched layer coating apparatus for shadow mask manufacture characterized by including the engraving part which hold | maintains a etch-resistant layer coating liquid. The method of claim 10, Each of the first and second gravure rolls has an engraving portion for retaining the coating layer coating solution on the surface thereof, and the shadow portion of the surface of the first gravure roll has a thinner eye than the engraving portion of the second gravure roll. Anti-etching layer coating apparatus for mask manufacture. The method according to claim 9 or 10, The support member is composed of a backup roll, and the backup roll and the press-in roll are etched in the same direction as the conveying direction of the strip-shaped metal sheet at a circumferential speed substantially the same as the conveying speed of the strip-shaped metal sheet. Layer applicator. The method of claim 14, The back-up roll is an etching-resistant layer coating device for producing a shadow mask, characterized in that the elastic body. The method according to claim 9 or 10, The press-in roll includes a metal roll and a ceramic material coated on the outer circumferential surface of the metal roll.