KR100501479B1 - Method of manufacturing shadow mask and apparatus for depositing etching resistance layer therefor - Google Patents

Abstract

The present invention relates to a method of manufacturing a shadow mask and to an apparatus for applying an inner etching layer for manufacturing a shadow mask, the method comprising: forming a first main surface having a plurality of recesses and a resist layer having a plurality of openings opposite to the first main surface; A step of providing a strip-shaped metal thin plate 12 having a second main surface, at least the surface of which is formed by a ceramic material 18 having a Vickers hardness of 1000 or more and a porosity of 5% or less. The process of applying the etch-resistant layer coating liquid 22 to the surface of the gravure roll 16 which has the engraving part 19 which hold | maintains the etch-resistant layer coating liquid 22 on the surface of the ash 18, and the said gravure roll 16 ) And contacting the first main surface of the strip-shaped metal thin plate 12 to apply the etch-resistant layer coating liquid 22 to the first main surface of the strip-shaped metal thin plate 12. It is about a method.

Description

TECHNICAL FIELD OF MANUFACTURING SHADOW MASK AND APPARATUS FOR APPLICATION OF SHADOW MASK TECHNICAL FIELD

The present invention relates to a method for producing a shadow mask which forms an etched layer on a strip-shaped metal sheet, and to an apparatus for applying a etched layer for producing a shadow mask.

Recently, the shadow mask used for the color display tube is strongly required for high precision and high quality.However, with the start of digital broadcasting, the shadow mask used for the color water tube is also required to be highly precise and high quality, and the opening of the shadow mask I) Miniaturization of dimensions and reduction of opening dimension deviations have been made.

In addition, the shadow mask has a circular opening in a color display tube displaying characters, graphics, and the like, and a rectangular opening in a color receiving tube used in a general home.

In addition, the opening of the shadow mask is formed by the photoetching method, and the shadow mask which requires high precision and high quality is mainly formed by the two-stage etching method.

This two-stage etching forms a recess corresponding to the small hole on the electron gun side by etching on one main surface serving as the first main surface of the strip-shaped metal sheet. A etched layer is formed on the surface in which the recessed part corresponding to this small hole was formed. Thereafter, the other main surface opposite to one main surface serving as the second main surface is etched in a pattern corresponding to the large hole, and the opening is formed by passing through the recess corresponding to the small hole in the large hole. In addition, the opening diameter of these openings is controlled from the small hole side.

In addition, the double-sided etching method for etching both small and large holes simultaneously on both sides makes it difficult to control the side etching phenomenon in which the opening size of the concave portion obtained by etching becomes larger than the opening size of the resist, and even after the small and large holes are connected. Since the etching of the small holes proceeds, it is difficult to control the pore diameter. On the other hand, in the two-stage etching method, the etching layer is filled in the concave portion of the small hole so that the small hole is not etched again in the second etching process, so that the accurate small hole pattern can be maintained in the initial etching process. Opening smaller than thickness is enabled.

In the two-stage etching of the shadow mask for color display tubes, a method of forming a etch-resistant layer in which a gravure coater using a UV-curable resin and a gravure roll is combined has a high filling performance of the etch-resistant layer coating liquid, and also saves energy. Attention is also paid to the low cost of the process.

However, the shadow mask for color water pipes is thicker than the shadow mask for color display tubes, and the depth of the concave portion corresponding to the small hole in the first etching is deep, and the opening shape is not an isotropic circular shape but an anisotropy having an anisotropy. There is anisotropy in the ease of application | coating in the etching-resistant layer formation process.

For this reason, the gravure roll uses a small diameter of about 20 mm to 60 mm in diameter to increase the pressure input when forming the etching layer in the recess of the shadow mask, and easily replaces the air with the air in the recess of the shadow mask. The part is filled with the etching-resistant layer coating liquid reliably.

On the other hand, since the plate thickness of the strip-shaped metal sheet for forming the shadow mask is thick and the tension of driving increases, the consumption of the gravure roll is intense, and if the gravure roll is consumed, the strip-shaped metal sheet may be damaged. The life of the gravure roll becomes very short.

Then, for example, as described in Japanese Unexamined Patent Application Publication No. 2001-104852, a method of forming a etched layer with a ceramic gravure roll using a ceramic gravure roll is known.

However, as described in Japanese Unexamined Patent Application Publication No. 2001-104852, even if the ceramic gravure roll is used, the service life may not be very long depending on the hardness, or chips may form on the gravure roll due to the porosity. There is a problem such as a quality concern.

The present invention has been made in view of the above problems, and an object thereof is to provide a method for producing a shadow mask which extends the life of a gravure roll and an apparatus for applying a etch-resistant layer for producing a shadow mask.

According to the 1st aspect of this invention, the process of providing the strip | belt-shaped metal thin plate which has the 1st main surface which has a some recessed part, and the 2nd main surface in which the resist layer which has the some opening opposite to this 1st main surface was formed, At least the surface It is formed of a ceramic material having a Vickers hardness of 1000 or more and a porosity of 5% or less, and the etching resistant layer coating liquid is applied to the surface of a gravure roll having an engraving portion for holding the etching resistant coating liquid on the surface of the ceramic material. There is provided a method of manufacturing a shadow mask comprising the step of contacting the gravure roll with the first main surface of the strip-shaped metal sheet and applying the etch-resistant layer coating liquid to the first main surface of the strip-shaped metal sheet.

Moreover, according to the 2nd aspect of this invention, the 1st main surface of the strip | belt-shaped metal thin plate which has the 1st main surface which has a some recessed part, and the 2nd main surface in which the resist layer which has a some opening opposite to this 1st main surface was formed. In the etch-resistant layer coating apparatus for shadow mask manufacture which apply | coats a etch-resistant layer coating liquid to a recessed part, WHEREIN: At least the surface is formed of the ceramic material which has the Vickers hardness of 1000 or more and the porosity of 5% or less, and is made to the surface of this ceramic material. A gravure roll having an engraving portion for holding the anti-etching layer coating liquid, a means for applying the anti-etching layer coating liquid to the surface of the gravure roll, and the gravure roll is brought into contact with the first main surface of the strip-shaped metal sheet to form the band-shaped metal An anti-etching layer coating apparatus for producing a shadow mask is provided which has a means for applying the above-mentioned anti-etching layer coating liquid to a first main surface of a thin plate.

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

First, the color water pipe 1 is demonstrated with reference to FIG.

As shown in FIG. 4, the color water pipe 1 has a glass valve 2 as a vacuum appearance container which keeps the inside vacuum, and three electron beams are formed, modulated, and convergent on the proximal end of the glass valve 2. (I) The electron gun 3 to be arrange | positioned is arrange | positioned, and the panel 4 which comprises a part of glass valve 2 is arrange | positioned at the front end side of the glass valve 2. As shown in FIG. In addition, a fluorescent screen 5 having a phosphor layer that emits three colors of red, green, and blue, respectively, is disposed on the inner surface of the panel 4 when three electron beams from the electron gun 3 collide with each other. Moreover, the deflection yoke (not shown) which controls the position of an electron beam and scans an electron beam in the whole screen is arrange | positioned outside the glass valve 2 between this electron gun 3 and the fluorescent screen 5.

In addition, a shadow mask 6 serving as a color selection electrode, which faces away from the fluorescent screen 5 at a predetermined interval, and has a plurality of rectangular openings arranged at a predetermined size and pitch, is disposed on the front surface. In addition, the shadow mask 6 selects three electron beams emitted from the electron gun 3 by these openings, and predetermined predetermined to correspond to the corresponding fluorescent inner layer geometrically one-to-one. It has a role of accurately colliding with the phosphor layer.

Since the shadow mask 6 is also used as a photomask when forming the fluorescent screen 5 in the manufacturing process of the color receiving tube 1, the variation of the opening diameter of the shadow mask 6 and the quality of spots are still intact. This affects the stripe diameter of the fluorescent screen 5 and the quality of spots. For this reason, it is necessary to raise the quality of the shadow mask 6 in order to raise the display quality of the color water pipe 1.

Since the shadow mask 6 obtained by the manufacturing method and the manufacturing apparatus of this embodiment has no variation in the shape and diameter of the opening and the stain quality is good, it is possible to manufacture the color receiving tube 1 having good display quality. Let's do it.

Next, with reference to FIG. 1, the etching-resistant layer coating apparatus for shadow mask manufacture which manufactures the shadow mask 6 is demonstrated.

As shown in FIG. 1, this etch-etching layer coating apparatus for shadow mask manufacture has two stages of coating apparatuses 10 and 11, and these coating apparatuses 10 and 11 are the bases of a shadow mask successively, for example. For example, the strip | belt-shaped metal thin plate 12 of the iron nickel containing amber material containing 36 weight% nickel hangs. That is, each coating device 10, 11 has two extension rolls 13 and 14 which can be moved up and down by a driving device (not shown), and the strips on the lower surfaces of these extension rolls 13 and 14 are shown. The shaped metal thin plates 12 are disposed, and are conveyed in a state where a force is applied downward by the extension rolls 13 and 14, and the band-shaped metal thin plates 12 are provided at the portions of these coating apparatuses 10 and 11. ) Is running almost horizontally.

Further, a gravure roll 16 having a diameter of about 20 mm to about 60 mm is provided below the band-shaped metal thin plate 12 between the extension rolls 13 and 14. As shown in Figs. 2 and 3, the gravure roll 16 has a metal roll 17 made of, for example, stainless steel at the center thereof, and a base treatment is performed around the metal roll 17 as necessary. The surface of the metal roll 17 was sprayed by polishing a ceramic material 18 made of chromium oxide having a Vickers hardness of 1000 or more, preferably 1100 or less, porosity 5% or less, preferably 3.5% or less. It is formed by doing. In the outer periphery of the ceramic material 18, an engraving portion 19 for filling the internal etching layer coating liquid is formed by laser processing.

The engraving portion 19 of the gravure roll 16 of the upstream side coating device 10 has a pitch of about 0.35 mm to 0.50 mm and a depth of about 0.15 mm to 0.3 mm, for example, of the gravure roll 16. The groove is inclined about 45 ° to 70 ° with respect to the central axis. On the other hand, the engraving portion 19 of the gravure roll 16 of the downstream coating device 11 has a pitch of about 0.15 mm to 0.20 mm and a depth of about 0.04 mm to 0.08 mm with respect to the central axis of the gravure roll 16. It is installed in a spiral shape with an angle of about 45 ° to 70 °.

The gravure roll 16 is rotated in the opposite direction to the traveling direction of the strip-shaped metal sheet 12 at high speed directly or indirectly by a drive motor (not shown). The circumferential speed of the gravure roll 16 is preferably 4 to 25 times the traveling speed of the strip-shaped metal thin plate 12.

Moreover, below this gravure roll 16, the container 21 which receives the overflow amount of the etching-resistant layer coating liquid mounted on the base which is not shown in figure is fixed.

And on this container 21, the coating liquid supply nozzle 23 which supplies the etch-resistant layer coating liquid 22 containing the non-solvent type UV hardening resin, for example to the gravure roll 16 is It is arranged. In addition, in this coating liquid supply nozzle 23, the etching-resistant layer coating liquid 22 supplied from the coating liquid supply nozzle 23 on the engraving part 19 of the gravure roll 16 is carried out to the strip | belt-shaped metal thin plate 12. The doctor blade 24 which scrapes the excess etching-resistant layer coating liquid 22 in the position just before moving is pressed and installed by the doctor blade press 25. As shown in FIG. On the other hand, the lower part of the coating liquid supply nozzle 23 is equipped with the nylon blade 26 which regulates the supply amount of the etching-resistant layer coating liquid 22, and prevents liquid fall.

When applying the anti-etching layer coating liquid 22, the lower surface of the extension rolls 13 and 14 is located below the upper surface of the strip | belt-shaped metal thin plate 12 which the gravure roll 16 contact | connected, and the gravure roll A support member such as a back roll is not disposed at a portion of the strip-shaped metal sheet 12 that faces the upper gravure roll 16 so as to restrict the angle and contact area between the strip 16 and the strip-shaped metal sheet 12. Therefore, the 2nd main surface of the strip | belt-shaped metal thin plate 12 which is running is in a free state. On the other hand, when the anti-etching layer coating liquid 22 is uncoated, the extension rolls 13 and 14 move upwards, and the lower surface of the strip-shaped metal thin plate 12 is removed from the gravure roll 16.

Next, the operation of the etching application apparatus for producing the shadow mask of the above embodiment will be described with reference to FIGS. 5 to 13.

First, the rolled oil or rust preventive oil adhering to the surface of the strip-shaped metal thin plate 12 is degreased, washed and dried. Subsequently, as shown in FIG. 5, for example, casein and dichromate are mainly used on both surfaces of the first main surface of the lower surface of the strip-shaped metal thin plate 12 and the second main surface of the upper surface opposite to the first main surface. A water-soluble photosensitive agent is applied to a predetermined thickness and dried to form photosensitive films 31 and 32 having a thickness of several micrometers.

Next, the disk 34 in which the pattern corresponding to the small hole 33 which is the recessed part of the electron gun 3 side of the opening of the shadow mask 6 was formed, and the large hole 35 to the fluorescent screen 5 side were formed. Using a pair of photomasks having a patterned disk 36 formed thereon, as shown in FIG. 6, the disks 34 and 36 are exposed to light on both sides of the photosensitive films 31 and 32, respectively. 34, 36).

Thereafter, the photosensitive films 31 and 32 imprinted with each pattern are developed with water, and the unsensitized portion is removed to expose a portion of the surface of the strip-shaped metal thin plate 12, and as shown in FIG. , Resist patterns 37 and 38 corresponding to the pattern of 36 are formed.

Moreover, as shown in FIG. 8, the protective film 41 which has a structure which apply | coated the adhesive material to the etching-resistant resin film, such as CPP, is adhere | attached on the 2nd main surface side in which the resist pattern 38 was formed. On the other hand, an etching solution made of ferric chloride solution is sprayed onto the first main surface side on which the resist pattern 37 is formed to perform a first etching, and the metal on the first main surface side on which the resist pattern 37 is formed by this first etching. In the exposed portion, a small hole 33 toward the electron gun 3 of the shadow mask 6 is formed.

After the end of the first etching, industrial water is dispersed in the band-shaped metal thin plate 12, and as shown in FIG. 9, remaining in the first main surface of the band-shaped metal thin plate 12, in particular, the small hole 33. The etching solution is substituted and washed uniformly and at high speed, and the etching solution remaining in the small hole 33 is removed.

Next, the resist pattern 37 on the first main surface side where the first etching is completed is peeled off with a high temperature aqueous solution mainly composed of sodium hydroxide, spray-washed and dried with industrial water and pure water, and then the resist pattern 38. The protective film 41 formed in the side is removed. And as shown in FIG. 10, after apply | coating the etching-resistant layer coating liquid 22 in the small hole 33 using the coating apparatuses 10 and 11, it is not shown in the etching-resistant layer coating liquid 22. Ultraviolet rays are irradiated with a UV curing wrap, and the etch-resistant layer coating liquid is UV-cured to form the etch-resistant layer 42.

In forming the etch-resistant layer 42, the inside of the small hole 33 is press-fitted with the excess etch-in layer coating liquid 22 in the small hole 33 of a 1st main surface by the upstream coating apparatus 10. As shown in FIG. Substituting with air sufficiently, the film thickness of the etching-resistant coating liquid 22 can be controlled in the downstream coating apparatus 11 after that.

When the two coating devices 10 and 11 are used in this way, the deep recessed portion of the small hole 33, the tighter and deeper recessed portion of the high-precision mask, the deeper recessed portion having the larger area outside the effective portion, and the state of resist remaining Even the small hole 33 of the inside can be sufficiently filled with the etching-resistant layer coating liquid 22. In addition, the engraving portion 19 of the gravure roll 16 of the upstream coating device 10 is coarser than the engraving portion 19 of the gravure roll 16 of the downstream coating device 11. Since the etching layer waveguide liquid 22 can be held, the internal layer coating liquid 22 is sufficiently supplied from the gravure roll 16 of the upstream coating device 10, and the downstream coating device 11 is supplied. The film thickness of the etch-resistant layer coating liquid 22 is controlled by the gravure roll 16 of FIG.

Thereafter, the protective film 43 is adhered on the etching-resistant layer 42 as necessary.

As shown in Fig. 11, the second etching is performed by spraying the etching solution of the ferric chloride solution on the second main surface side on which the resist pattern 38 is formed, so that the resist pattern 38 is formed. A large hole 35 on the side of the fluorescent screen 5 of the shadow mask 6 is formed on the second main surface side, and penetrates through the small hole 33 to form the opening 44.

After the end of the second etching, industrial water is dispersed in the band-shaped metal thin plate 12, and as shown in FIG. 12, the etchant remaining in the surface of the band-shaped metal thin plate 12, particularly, the large hole 35. The etching liquid 22 is removed by uniformly and rapidly replacing the 22 with industrial water.

Thereafter, the protective film 43 adhered to the first main surface side of the strip-shaped metal thin plate 12 is removed, and a large hole 35 is formed by a high temperature aqueous solution mainly composed of sodium hydroxide in a peeling apparatus (not shown). The resist pattern 38 on the side of the formed second main surface and the etched layer 42 on the side of the first main surface on which the small holes 33 are formed are peeled off. Moreover, as shown in FIG. 13, by water-washing and drying the strip | belt-shaped metal thin plate 12, the plurality of rectangular openings 44 through which the small hole 33 and the large hole 35 communicated is strip | belt-shaped metal. It is formed in the thin plate 12.

According to the above embodiment, the gravure roll 16 is made into a small diameter of about 20 mm to about 60 mm in diameter to reduce the contact area with the band-shaped metal thin plate 12, and further, in the conveying direction of the band-shaped metal thin plate 12. By rotating the gravure roll 16 in the reverse direction at a high speed, a large shear force is generated to increase the pressure input of the etched layer coating liquid 22 into the small holes 33 so as to replace air with the small holes 33. Even if using the strip | belt-shaped metal thin plate 12 with an unevenness | corrugation easily, the small hole 33 can be easily filled with the etch-in layer coating liquid 22. FIG.

In addition, since the surface of the gravure roll 16 is formed of the ceramic material 18 of Vickers hardness of 1000 or more and porosity of 5% or less, the wear of the gravure roll 16 can be reduced, and the occurrence of debris can be reduced. Is prevented. In addition, since the engraving portion 19 holding the internal etching layer coating liquid 22 of the ceramic material 18 is carved by laser processing, the gravure roll 16 has little damage to the strip-shaped metal thin plate 12. It also extends its life.

Moreover, it is not necessary to form the ceramic material 18 on the surface of all the gravure rolls 16 of all the coating apparatuses 10 and 11, and even if the ceramic material 18 is formed only on the surface of the gravure roll 16 with abrasion, good.

In addition, if the ceramic material 18 can be easily sprayed on the metal roll 17 and is reliably installed, the exterior of the metal roll 17 before spraying the ceramic material 18 on the surface of the gravure roll 16. It is not necessary to have a base treatment on the circumference.

In addition, the use of chromium oxide for the ceramic material 18 of the gravure roll 16 is economical and abrasion resistant, and laser processing is also easy. If laser processing is possible, other than chromium oxide can be used.

In addition, the depth of the etching-resistant layer coating liquid 22 on the engraving portion 19 of the gravure roll 16 is always adjusted to a predetermined uniform thickness by the doctor blade 24, and then the band-shaped metal thin plate 12 Since it supplies, a stable film thickness and a coating state can be obtained.

In the above embodiment, as the anti-etching layer coating liquid 22, a solvent-free type of UV-curable resin was used, but any of water-soluble heat-drying resin, thermosetting resin, solvent-type thermosetting resin or hot melt resin can be used. .

Next, another Example is described.

In the above embodiment, the upstream coating device 10 and the downstream coating device 11 use the doctor blades 24, but the upstream coating device 10 is sufficiently filled with the etching-resistant layer coating liquid 22. In order to supply, the etch-resistant layer coating liquid 22 may be excessively supplied on the strip | belt-shaped metal thin plate 12, without providing a doctor blade.

In addition, when the upstream coating device 10 and the downstream coating device 11 are made into two stages, when the small hole 33 is not small diameter or deep, when the strip | belt-shaped metal thin plate 12 has few unevenness, Since the application of the etching-resistant layer coating liquid 22 is easy, the coating device may be one in order to simplify the apparatus.

In this case, the auxiliary roll which presses the strip | belt-shaped metal thin plate 12 from the upper side on the 2nd main surface immediately in front of the extending | stretching roll 14 downstream from the gravure roll 16 is replaced, and the air replacement of the small hole 33 is carried out. Alternatively, the film thickness may be controlled more effectively.

In the case where there is only one coating device, in order to supply excessively the etching resistant layer coating liquid 22, a slit coater is provided upstream of the coating device, and the etching resistant layer coating liquid 22 is formed on the band-shaped metal thin plate 12. ) May be applied in advance. In this case, the slit coater is placed on the upper surface side of the band-shaped metal thin plate 12 by inverting the band-shaped metal thin plate 12 on the upstream side of the coating apparatus, and the anti-etching layer is applied on the upper surface of the band-shaped metal thin plate 12. It is preferable to apply the liquid 22. Then, the etched layer coating liquid 22 is excessively supplied onto the strip-shaped metal thin plate 12 by the slit coater, and the etched layer coating liquid 22 supplied excessively by the coating device is pressed into the recess. In addition, the film thickness is controlled to be uniform to a desired thickness.

Here, the effect based on the said Example is demonstrated with reference to Table 1.

Gravure roll object Plate thickness [mm] Service life [m] Example 1 Metal roll + ceramic material CPT 0.22 675,000 Example 2 Metal roll + ceramic material CPT 0.25 450,000 Comparative Example 1 Metal Roll + Hard Cr Plating CPT 0.12 600,000 Comparative Example 2 Metal Roll + Hard Cr Plating CPT 0.22 11,250 Comparative Example 3 Metal Roll + Hard Cr Plating CPT 0.25 9,000

First, Examples 1 and 2 in which a ceramic material 18 made of Vickers hardness 1250 and chromium oxide having a porosity of 3% were formed around the metal roll 17, and hard chromium (Cr) plating was applied around the metal roll. The experiment was performed about the comparative examples 1, 2, and 3.

In Comparative Example 1, when the coating layer coating liquid was applied to the shadow mask of the color display tube (CDT) formed of a strip-shaped metal sheet having a sheet thickness of 0.12 mm, the service life was 600,000 m, and thus, a sufficient lifetime was obtained.

Next, in Example 1 and Comparative Example 2, a quenching layer coating liquid was applied to a shadow mask of a color water pipe (CPT) formed of a strip-shaped metal sheet having a plate thickness of 0.22 mm, and hard chromium was applied to the metal roll of Comparative Example 2. Although the life of the gravure roll which plated was reduced to 11,250 m, the life of the gravure roll 16 in which the ceramic material 18 was formed in the metal roll 17 of Example 1 was 675,000 m, and sufficient life was obtained.

In addition, in Example 2 and Comparative Example 3, when the anti-etching layer coating liquid was applied to the shadow mask of the color water pipe formed of a strip-shaped metal sheet having a plate thickness of 0.25 mm, hard chromium plating was performed on the metal roll of Comparative Example 3. Although the life of the gravure roll fell to 9,000 m, the life of the gravure roll 16 which provided the ceramic material 18 in the metal roll 17 of Example 2 was 450,000 m, and sufficient life was obtained.

As can be seen from these experimental results, the gravure roll 16 in which the ceramic material 18 is formed on the metal roll 17 is formed using a thick metal strip 12 having a thick thickness used for the color water pipe 1. Even a sufficient lifespan can be obtained.

Moreover, in the test using the gravure roll 16 in which the ceramic material 18 was formed, all defects, such as the stem by a ceramic fragment, were not recognized at all.

As mentioned above, according to the aspect of this invention, in the 1st main surface of the strip | belt-shaped metal thin plate which has the 1st main surface which has a some recessed part, and the 2nd main surface in which the resist layer which has a some opening opposite to this 1st main surface was formed. When applying the anti-etching layer coating liquid, gravure at least the surface is formed of a ceramic material having a Vickers hardness of at least 1000 and a porosity of 5% or less, and having a engraving portion for holding the anti-etching layer coating liquid on the surface of the ceramic material. I am using a roll. Therefore, abrasion due to the rotation of the ceramic material in contact with the strip-shaped thin metal sheet is suppressed, and debris is prevented from occurring when the ceramic material is in contact with the strip-shaped metal thin plate and rotated. As a result, the life of the gravure roll can be extended. Can be.

Since the shadow mask 6 obtained by the manufacturing method and the manufacturing apparatus of this embodiment has no variation in the shape and diameter of the opening and the stain quality is good, it is possible to manufacture the color receiving tube 1 having good display quality. Let's do it.

In addition, abrasion due to the rotation of the ceramic material in contact with the strip-shaped metal sheet is suppressed, and debris is prevented from occurring when the ceramic material is in contact with the strip-shaped metal sheet and rotated. As a result, the life of the gravure roll can be extended. have.

1 is a schematic view showing a etch-resistant layer coating apparatus for producing a shadow mask according to an embodiment of the present invention,

2 is a perspective view showing the appearance of the gravure roll of the apparatus shown in FIG.

3 is a cross-sectional view showing a gravure roll of the apparatus shown in FIG. 1;

4 is a schematic view showing a color water pipe;

5 is a cross-sectional view showing a manufacturing process of a shadow mask;

6 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 5;

7 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 6;

8 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 7;

9 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 8;

10 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 9;

11 is a cross-sectional view showing a manufacturing process following the manufacturing process shown in FIG. 10;

12 is a sectional view showing a manufacturing process following the manufacturing process shown in FIG. 11;

FIG. 13 is a cross-sectional view showing the manufacturing process following the manufacturing process shown in FIG.

* Explanation of symbols for main parts of the drawings

10, 11: coating device 12: metal sheet

13, 14: kidney roll 16: gravure roll

17: metal roll 18: ceramic material

19: engraving 21: container

22: coating liquid 23: coating liquid supply nozzle

24: doctor blade 26: nylon blade

Claims (5)

Providing a strip-shaped metal thin plate having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings opposite to the first main surface; At least the surface is formed of a ceramic material having a Vickers hardness of 1000 or more and a porosity of 5% or less, and the anti-etching layer coating liquid is applied to the surface of the gravure roll having an engraving portion that holds the etching-resistant coating liquid on the surface of the ceramic material. Coating process, and And contacting the gravure roll with the first main surface of the strip-shaped metal sheet to apply the etch-resistant layer coating liquid to the first main surface of the strip-shaped metal sheet. A coating layer coating liquid is applied to the recesses of the first main surface of the strip-shaped metal sheet having a first main surface having a plurality of recesses and a second main surface having a resist layer having a plurality of openings opposite to the first main surface. In the shadow-etching layer coating apparatus for shadow mask production, A gravure roll formed with a ceramic material having at least a surface having a Vickers hardness of 1000 or more and a porosity of 5% or less, the engraving part having a etched layer coating liquid on the surface of the ceramic material, Means for applying a etching-resistant layer coating liquid to the surface of the gravure roll, and A means for applying the etch-resistant layer coating liquid to the first main surface of the strip-shaped metal sheet by contacting the gravure roll with the first main surface of the strip-shaped metal sheet. Device. The method of claim 2, And said gravure roll comprises a metal roll and a ceramic material having a engraving formed on the surface of said metal roll so that said metal roll is not exposed. The method of claim 2 or 3, The ceramic material is etched layer coating apparatus for producing a shadow mask, characterized in that the chromium oxide. The method of claim 2 or 3, The engraving portion is formed by laser processing, the etching-resistant layer coating device for producing a shadow mask.