JP2003234066A - Method for manufacturing shadow mask and apparatus for coating etching-resistant layer for manufacturing shadow mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for coating an etching-resistant layer for manufacturing a shadow mask in which the life of a gravure roll is prolonged. <P>SOLUTION: The gravure roll 16 is formed of a ceramic material 18 of chromium oxide of 1000 kg/mm<SP>2</SP>or higher in hardness and 5% or less in porosity around a metal roll 17 by sputtering. A carved section 19 having spiral grooves filled with a coating solution 22 for an etching-resistant layer is formed on the periphery of the ceramic material 18 by laser processing. The coating solution 22 is coated on a belt-like metal sheet 12 by speedily rotating the gravure roll 16 oppositely to the running direction of the metal sheet 12. The wear of the gravure roll 16 is reduced due to the surface hardness of the ceramic material 18 of 1000 kg/mm<SP>2</SP>or higher and the chipping thereof is prevented due to the porosity of 5% or less. Since the carved section 19 of the ceramic material 18 is carved by laser processing, the damage to the metal sheet 12 is small, resulting in the long life of the gravure roll 16 itself. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shadow mask manufacturing method for forming an etching resistant layer on a strip-shaped thin metal plate and an etching resistant layer coating apparatus for manufacturing a shadow mask.

[0002]

2. Description of the Related Art In recent years, there has been a strong demand for higher definition and higher quality in shadow masks used in color display tubes, but with the start of digital broadcasting, shadow masks used in color picture tubes similarly have higher definition and higher quality. There is a strong demand for quality improvement, and miniaturization of the aperture size of the shadow mask and reduction of the aperture size variation are being pursued.

Further, the shadow mask has a circular aperture shape in a color display tube for displaying characters and figures, and has a rectangular aperture shape in a color picture tube used at home.

The openings of the shadow mask are formed by the photo etching method, and the shadow mask which requires high definition and high quality is mainly formed by the two-step etching method.

In this two-step etching, a concave portion corresponding to a small hole on the electron gun side is formed by etching on one main surface which is the first main surface of the strip-shaped metal thin plate. An etching resistant layer is formed on the surface on which the concave portion corresponding to the small hole is formed. After that, the other main surface opposite to the one main surface which becomes the second main surface is etched in a pattern corresponding to the large holes,
An opening is formed by penetrating a recess corresponding to the small hole from the large hole side. The aperture diameter of these apertures is controlled on the small aperture side.

In the double-sided etching method in which small holes and large holes are simultaneously etched from both sides, it is difficult to control the side etching phenomenon in which the opening size of the recess obtained by etching is larger than the opening size of the resist. Since the etching of the small holes proceeds even after the small holes and the large holes are connected,
It is difficult to control the aperture size. On the other hand, in the two-step etching method, in order to prevent the small holes from being etched again in the second etching step, the recesses on the small hole side are filled with the etching resistant layer, and the accurate small hole pattern in the first etching step is formed. Is maintained, and an opening smaller than the thin metal plate thickness is possible.

In the two-stage etching of a shadow mask for a color display tube, a method of forming an etching resistant layer combining an ultraviolet curable resin and a gravure coater using a gravure roll has a high filling performance of the etching resistant layer coating liquid and saves energy. It is also possible and the process cost is low, so it is attracting attention.

However, a shadow mask for a color picture tube has a thicker thickness than a shadow mask for a color display tube, the depth of a recess corresponding to a small hole in the first etching is deep, and the shape of the opening is an isotropic circle. Rather, it has a rectangular shape with anisotropy, and thus is easy to apply in the etching resistant layer forming step.

Therefore, the gravure roll has a diameter of about 20 m.
A small diameter of m to 60 mm is used to increase the pushing force for forming the etching resistant layer in the concave portion of the shadow mask and easily replace the air in the concave portion of the shadow mask to ensure that the concave portion of the shadow mask is coated with the etching resistant layer coating solution. Is filled.

On the other hand, since the strip-shaped metal thin plate forming the shadow mask is thick and the running tension is high,
The wear of the gravure roll is severe, and the wear of the gravure roll may damage the strip-shaped metal thin plate, resulting in a very short life of the gravure roll.

Therefore, for example, Japanese Patent Laid-Open No. 2001-1048
As described in Japanese Patent Laid-Open No. 52-52, there is known a structure in which a ceramic gravure roll is used and an etching resistant layer is formed by the ceramic gravure roll.

[0012]

[Patent Document 1] Japanese Unexamined Patent Application Publication No.
Even when a ceramic gravure roll is used as described in Japanese Patent Application Laid-Open No. 001-104852, the life of the gravure roll cannot be extended depending on the hardness, or the gravure roll is chipped depending on the porosity, and the life is rather short. It has a problem that may occur.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for manufacturing a shadow mask in which a gravure roll has a long life and an etching resistant layer coating apparatus for manufacturing a shadow mask.

[0014]

According to the present invention, there is provided a first main surface having a plurality of recesses formed by etching, and the first main surface.
Of the strip-shaped metal thin plate having a second main surface on which a resist layer having a plurality of openings is formed on the surface opposite to the main surface of the ceramic material having a Vickers hardness of 1000 or more and a porosity of 5% or less. The gravure roll having the engraved portion formed on the surface of the ceramic material is applied to the surface of the gravure roll by applying the etching resistant layer coating liquid, and the surface of the gravure roll is brought into contact with the first main surface. To form an etching resistant layer on the first main surface by applying an etching resistant layer coating solution, or the first main surface having a plurality of recesses formed by etching and the side opposite to the first main surface. Etching-resistant layer for producing a shadow mask for applying a coating solution for etching-resistant layer to the concave portion of the first principal surface of the strip-shaped metal thin plate having the second principal surface on which the resist layer having a plurality of openings is formed. In the cloth device, at least around it is formed by pores of 5% or less of the ceramic material in the Vickers hardness of 1000 or more, has an engraving unit that holds the ceramic material etching resistant layer-coating solution is formed on the surface of,
A gravure roll that forms an etching resistant layer on the first main surface is provided, and the ceramics material is brought into contact with the strip-shaped metal thin plate to rotate by setting the Vickers hardness of the ceramics material at least around the gravure roll to 1000 or more. The wear of the ceramic material is suppressed to 5% or less, and when the ceramic material comes into contact with the strip-shaped thin metal plate and is prevented from chipping when rotating, the life of the gravure roll is extended. Try.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings.

First, the color picture tube 1 will be described with reference to FIG.

As shown in FIG. 4, the color picture tube 1 has a glass bulb 2 as a vacuum envelope for keeping the inside vacuum, and three electron beams are provided on the base end side of the glass bulb 2. An electron gun 3 for forming, modulating and converging is provided, and a panel 4 forming a part of the glass bulb 2 is provided at the tip end side of the glass bulb 2. Further, on the inner surface side of the panel 4, a fluorescent screen 5 having a phosphor layer that emits three colors of red, green, and blue by being hit by three electron beams is disposed. .
Further, between the electron gun 3 and the fluorescent screen 5,
A deflection yoke (not shown) for controlling the position of the electron beam and scanning the electron beam over the entire screen is provided.
Furthermore, facing the fluorescent screen 5 at a predetermined interval,
A shadow mask 6 is arranged as a color selection electrode in which a large number of rectangular openings are arranged on the entire surface at a predetermined size and pitch. In addition, the shadow mask 6 is emitted from the electron gun 3 which selects three electron beams emitted from the electron gun 3 through these holes and geometrically makes a one-to-one correspondence with the corresponding fluorescent resistant layers. Each of the electron beams accurately strikes a predetermined phosphor layer.

Since the shadow mask 6 is used as a photomask when forming the fluorescent screen 5 in the manufacturing process of the color picture tube 1, the quality of the variation and unevenness of the aperture diameter of the shadow mask 6 remains the same. Will appear in the stripe diameter and unevenness of. Therefore, in order to improve the display quality of the color picture tube 1, it is necessary to improve the quality of the shadow mask 6.

The shadow mask 6 obtained by the manufacturing method and the manufacturing apparatus of this embodiment has no variation in the shape and diameter of the apertures and has good uneven quality, so that the color picture tube 1 with good display quality is obtained. Can be obtained.

Next, with reference to FIG. 1, an etching resistant layer coating apparatus for manufacturing the shadow mask 6 for manufacturing the shadow mask 6 will be described.

As shown in FIG. 1, this etching-resistant layer coating apparatus for producing a shadow mask is a two-stage coating apparatus 10, 11
These coating apparatuses 10 and 11 are continuously provided with a strip-shaped metal thin plate of an amber material of an iron-nickel alloy containing, for example, 36% by weight of nickel, which is a base material of a shadow mask.
12 have been passed over. That is, each coating device
10 and 11 have two spreading rolls 13 and 14 which can be moved in the vertical direction by a driving device (not shown), and a strip-shaped metal thin plate 12 is arranged on the lower surfaces of these spreading rolls 13 and 14,
The spreading rolls 13 and 14 convey the strip-shaped metal thin plate 12 in a state in which it is urged downward, and the strip-shaped metal thin plate 12 runs substantially horizontally in the portions of the coating devices 10 and 11.

Further, a strip-shaped metal thin plate between the spreading rolls 13 and 14
Below the 12 is a gravure roll 16 having a diameter of about 20 mm to about 60 mm. This gravure roll
16 is a metal roll at the center, as shown in FIG. 2 and FIG.
The metal roll 17 is provided with a Vickers hardness of 10 on the periphery of the metal roll 17 by subjecting the periphery of the metal roll 17 to a base treatment as required.
The ceramic material 18 of chromium oxide having a porosity of 00 or more, preferably 1100 or more and a porosity of 5% or less, preferably 3.5% or less is sprayed and the surface is polished to form. further,
On the outer periphery of the ceramic material 18, an engraved portion 19 for filling the coating liquid for the etching resistant layer is formed by laser processing. Then, the engraving part of the gravure roll 16 of the coating device 10 on the upstream side
19 has a pitch of about 0.35 mm to 0.50 mm,
A groove having a depth of about 0.15 mm to 0.3 mm and inclined at about 45 ° to 70 ° with respect to the central axis of the gravure roll 16 is provided in a spiral shape. On the other hand, the coating device 11 on the downstream side
The engraving part 19 of the gravure roll 16 has a pitch of about 0.1.
5mm to 0.20mm, depth about 0.04mm to 0.08mm, about 4 to the center axis of the gravure roll 16.
The grooves inclined 5 ° to 70 ° are provided spirally.

The gravure roll 16 is rotated directly or indirectly by a drive motor (not shown) at a high speed in the direction opposite to the traveling direction of the strip-shaped metal sheet 12. The peripheral speed of the gravure roll 16 is preferably 4 to 25 times the running speed of the strip-shaped metal sheet 12.

Below the gravure roll 16,
A container 21 that receives an overflow of the etching-resistant layer coating liquid placed on a base (not shown) is fixed.

On the container 21, a coating liquid supply nozzle 23 for supplying the gravure roll 16 with, for example, a solvent-free type UV-curable resin anti-etching layer coating liquid 22 is provided. In addition, the coating liquid supply nozzle 23 is provided with a surplus at a position immediately before the etching-resistant layer coating liquid 22 supplied from the coating liquid supply nozzle 23 on the engraving portion 19 of the gravure roll 16 moves to the strip-shaped metal thin plate 12. The doctor blade 24, which scrapes off the coating liquid 22 for the etching resistant layer, holds down the doctor blade.
It is held down by 25. On the other hand, below the coating liquid supply nozzle 23, a nylon blade 26 is attached that regulates the supply amount of the etching resistant layer coating liquid 22 and prevents dripping.

When the coating liquid 22 for etching resistant layer is applied, the lower surfaces of the spreading rolls 13 and 14 are positioned below the upper surface of the strip-shaped metal sheet 12 which is in contact with the gravure roll 16. Roll 16 and strip 12
The angle formed by and the contact area are regulated, and since a supporting member such as a back roll is not disposed in a portion facing the gravure roll 16 above the strip-shaped metal thin plate 12, the first strip of the strip-shaped metal thin plate 12 that is running. The main surface of 2 is a free state. On the other hand, when the etching-resistant layer coating liquid 22 is not applied, the spreading rolls 13 and 14 move upward and separate the lower surface of the strip-shaped metal thin plate 12 from the gravure roll 16.

Next, the operation of the etching resistant layer coating apparatus for manufacturing a shadow mask according to the above embodiment will be described with reference to FIGS. 5 to 13.

First, rolling oil or rust preventive oil adhering to the surface of the strip-shaped metal thin plate 12 is degreased, washed, and dried. After that, FIG.
As shown in, the main components of the lower surface of the strip-shaped metal sheet 12 are, for example, casein and dichromate as main components on both the first main surface and the second main surface which is the upper surface opposite to the first main surface. By applying a water-soluble photosensitizer having a predetermined thickness and drying, the photosensitive films 31 and 32 having a thickness of several μm are formed.

Next, the electron gun 3 having the aperture of the shadow mask 6 is formed.
FIG. 6 shows a pair of photomasks having an original plate 34 having a pattern corresponding to the small holes 33 which are concave portions on the side and an original plate 36 having a pattern corresponding to the large holes 35 on the fluorescent screen 5 side. To the photosensitive film 31, 32 on both sides
34 and 36 are closely contacted and exposed, and the patterns of these original plates 34 and 36 are printed.

After that, the photosensitive films 31 and 32 having the respective patterns printed thereon are developed with water to remove the unexposed portions to expose a part of the surface of the strip-shaped metal thin plate 12, and as shown in FIG. Resist patterns 37 and 38 corresponding to the patterns of the pair of original plates 34 and 36 are formed.

Further, as shown in FIG. 8, a protective film 41 having a structure in which an adhesive material is applied to an etching resistant resin film such as CPP is adhered to the second main surface side where the resist pattern 38 is formed. . On the other hand, the first main surface side where the resist pattern 37 is formed as the first etching is etched by spraying a ferric chloride solution as an etching solution, and the etching is performed on the first main surface side where the resist pattern 37 is formed. A small hole 33 on the electron gun 3 side of the shadow mask 6 is formed in the metal exposed portion on the main surface side of 1.

After the completion of the first etching, industrial water is sprinkled on the strip-shaped metal sheet 12, and as shown in FIG. 9, it remains on the first main surface of the strip-shaped metal sheet 12, particularly in the small holes 33. The etching solution is uniformly and rapidly replaced and cleaned, and small holes 33
The etching liquid remaining inside is removed.

Next, the resist pattern 37 serving as the resist layer on the first main surface side after the first etching is peeled off with a high temperature aqueous solution containing sodium hydroxide as a main component,
A protective film 41 formed on the resist pattern 38 side after spray washing with industrial water and pure water and drying.
And remove the coating device inside the small hole 33 as shown in FIG.
Using 10 and 11, apply the etching resistant layer coating liquid 22,
The etching resistant layer coating liquid 22 is irradiated with ultraviolet rays by a UV curing lamp (not shown) to form the etching resistant layer 42.

In forming the etching resistant layer 42, the excess coating material 22 for etching resistant layer is pushed into the small holes 33 on the first main surface by the coating device 10 on the upstream side while the small holes 33 are formed.
The air inside is sufficiently replaced, and after this, the downstream coating device 11
Thus, the film thickness of the etching resistant layer coating liquid 22 can be controlled. Also,
When the two coating devices 10 and 11 are used in this manner, the deep recesses of the small holes 33, the fine and deep recesses of a finer mask, the deep recesses having a large area outside the effective portion, and the small remaining resist The holes 33 can also be sufficiently filled with the etching resistant layer coating liquid 22. The engraved portion 19 of the gravure roll 16 of the coating device 10 on the upstream side is rougher than the engraved portion 19 of the gravure roll 16 of the coating device 11 of the coating device 11 on the downstream side, and a larger amount of the etching resistant layer coating liquid 22 is provided. Since it can be held, the etching-resistant layer coating liquid 22 is sufficiently supplied by the gravure roll 16 of the coating device 10 on the upstream side, and the etching-resistant layer coating liquid 22 of the gravure roll 16 of the coating device 11 on the downstream side is supplied. The film thickness is controlled.

Thereafter, a protective film 43 is attached on the etching resistant layer 42, if necessary.

Further, as shown in FIG. 11, the second main surface side on which the resist pattern 38 is formed is second-etched by spraying an etching solution of a ferric chloride solution to form the resist pattern 38. A large hole 35 on the side of the fluorescent screen 5 of the shadow mask 6 is formed on the side of the second main surface on which is formed, and an opening 44 is formed so as to penetrate the small hole 33.

After completion of this second etching,
Industrial water is sprinkled on the strip-shaped metal sheet 12, and as shown in FIG. 12, the etching solution 22 remaining on the surface of the strip-shaped metal sheet 12, particularly in the large holes 35 is uniformly and rapidly replaced with industrial water. Remove 22.

After that, the protective film 43 attached to the first main surface side of the strip-shaped metal thin plate 12 is removed, and then a large hole 35 is formed by a high temperature aqueous solution mainly containing sodium hydroxide by a peeling device (not shown). The resist pattern 38 formed on the second main surface side and the etching resistant layer 42 on the first main surface side where the small holes 33 are formed are peeled off. Further, by washing the strip-shaped metal thin plate 12 with water and drying the strip-shaped metal thin plate 12, as shown in FIG. 13, a plurality of rectangular apertures communicating with the small holes 33 and the large holes 35 are formed.
44 is formed on the strip metal sheet 12.

According to the above embodiment, the gravure roll
A large shearing force can be obtained by reducing the contact area of the strip-shaped metal sheet 12 with the gravure roll 16 at a high speed in the opposite direction to the conveying direction of the strip-shaped metal sheet 12 by reducing the diameter of the strip 16 to a small diameter of about 20 mm to about 60 mm. A force is generated, the pushing force of the etching resistant layer coating liquid 22 into the small holes 33 is increased, the air in the small holes 33 is easily replaced, and the small holes 33 are formed even if the uneven metal strip 12 is used. The etching resistant layer coating liquid 22 can be easily filled.

Further, since the surface of the gravure roll 16 is made of a ceramic material 18 having a Vickers hardness of 1000 or more and a porosity of 5% or less, wear of the gravure roll 16 can be reduced and chipping occurs. And the coating material 22 for the etching resistant layer of the ceramic material 18
Since the engraving portion 19 for holding is engraved by laser processing, damage to the strip-shaped metal thin plate 12 is small, and the gravure roll 16 itself has a long life.

Note that it is not necessary to form the ceramic material 18 on the surfaces of all the gravure rolls 16 of all the coating devices 10 and 11, and the ceramic material 18 may be formed only on the surface of the gravure roll 16 which is worn a lot. .

If the ceramic material 18 can be easily sprayed onto the metal roll 17 and the ceramic roll 18 can be surely provided, the outer peripheral surface of the metal roll 17 is subjected to a surface treatment before the ceramic material 18 is sprayed onto the surface of the gravure roll 16. You don't have to.

Further, by using chromium oxide for the ceramic material 18 of the gravure roll 16, it is economical, has abrasion resistance and facilitates laser processing. However, if laser processing is possible, other than chromium oxide can be used. The thing of can also be used.

Further, the thickness of the etching resistant layer coating liquid 22 on the engraved portion 19 of the gravure roll 16 is always adjusted to a predetermined uniform thickness by the doctor blade 24 and then supplied to the strip-shaped metal thin plate 12. Therefore, a stable film thickness and coating state can be obtained.

A solventless type UV-curable resin was used as the etching resistant layer coating liquid 22, but a water-soluble heat-drying resin, thermosetting resin, solvent-type thermosetting resin, or hot-melt resin was used. Any material such as resin can be used.

Next, another embodiment will be described.

In the above embodiment, the coating device 10 on the upstream side is used.
Although the doctor blade 24 is used in both the coating device 11 on the downstream side and the coating device 11 on the downstream side, the coating device 10 on the upstream side does not include a doctor blade to sufficiently supply the etching-resistant layer coating liquid 22, and the etching-resistant layer. Apply the coating liquid 22 to the thin metal strip 12
It may be supplied in excess.

Although the upstream coating device 10 and the downstream coating device 11 are provided in two stages, the etching resistant layer is used when the small holes 33 are not small in diameter or deep and the thin metal strip 12 has few irregularities. Since the application of the application liquid 22 is easy, the number of application devices may be one in order to simplify the device.

In this case, an auxiliary roll for pressing the strip-shaped metal sheet 12 from above is provided on the second main surface on the downstream side of the gravure roll 16 and in front of the spreading roll 14, and the air in the small hole 33 is replaced or the film is replaced. The thickness may be controlled more effectively.

In the case of one coating device, a slit coater is provided on the upstream side of the coating device in order to excessively supply the etching resistant layer coating liquid 22, and the etching resistant layer coating liquid 22 is provided on the strip-shaped metal thin plate 12. May be applied in advance.
In this case, in the upstream side of the coating device, the strip-shaped metal thin plate
It is preferable that the strip coater 12 is turned upside down, a slit coater is arranged on the surface side of the strip metal thin plate 12, and the etching resistant layer coating liquid 22 is applied from the upper surface of the strip metal thin plate 12. Then, the slit coater excessively supplies the etching-resistant layer coating liquid 22 on the strip-shaped metal thin plate 12, while pushing the etching-resistant layer coating liquid 22 excessively supplied by the coating device into the concave portion,
In addition, the film thickness is controlled to make it uniform at a desired thickness.

Here, the effect based on the above embodiment will be described with reference to Table 1.

[0052]

[Table 1]

First, Examples 1 and 2 in which a ceramic material 18 made of chromium oxide having a Vickers hardness of 1250 and a porosity of 3% was formed around the metal roll 17, and hard chromium (Cr) plating around the metal roll. The applied comparative examples 1, 2, and 3 were used.

In Comparative Example 1, a color display tube (CD
When the etching-resistant layer coating liquid was applied to the shadow mask of T), the life was 600,000 m, and a sufficient life was obtained.

Next, in Example 1 and Comparative Example 2, a color picture tube formed of a strip-shaped metal thin plate having a plate thickness of 0.22 mm.
When the etching resistant layer coating liquid was applied to the (CPT) shadow mask, the life of the gravure roll obtained by plating the metal roll of Comparative Example 2 with hard chromium was reduced to 11,250 m, but the metal roll of Example 1 was The life of the gravure roll 16 having the ceramic material 18 formed on it is 675,00
It was 0 m, and a sufficient life was obtained.

Furthermore, in Example 2 and Comparative Example 3, when the etching-resistant layer coating liquid was applied to the shadow mask of the color picture tube formed of a strip-shaped metal thin plate having a plate thickness of 0.25 mm, the metal roll of Comparative Example 3 was applied. Although the life of the hard chrome-plated gravure roll was reduced to 9,000 m, the life of the gravure roll 16 in which the ceramic material 18 was formed on the metal roll 17 of Example 2 was 450,000 m, and a sufficient life was obtained. It was

As is clear from these experimental results, the gravure roll 16 in which the ceramic material 18 is formed on the metal roll 17 has a sufficient life even if it is used for the belt-shaped thin metal plate 12 having a large thickness used for the color picture tube 1. Can be obtained.

Further, in the test using the gravure roll 16 on which the ceramic material 18 is formed, no defects such as streaks due to chipping of the ceramic were found at all.

[0059]

According to the present invention, the Vickers hardness of the ceramic material at least around the gravure roll is 100.
When it is 0 or more, wear due to the ceramic material coming into contact with the strip-shaped metal thin plate and rotating is suppressed, and when the porosity is 5% or less, when the ceramic material comes into contact with the strip-shaped metal thin plate and rotates. It is possible to prevent the occurrence of chipping in the gravure roll and extend the life of the gravure roll.

[Brief description of drawings]

FIG. 1 is a schematic view showing an etching resistant layer coating apparatus for manufacturing a shadow mask according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an appearance of the same gravure roll.

FIG. 3 is a sectional view showing the same gravure roll.

FIG. 4 is a schematic view showing a color picture tube of the same.

FIG. 5 is a cross-sectional view showing one manufacturing process of the above shadow mask.

FIG. 6 is a cross-sectional view showing the next manufacturing step of the above shadow mask of FIG. 5;

FIG. 7 is a cross-sectional view showing the next manufacturing process of the shadow mask shown in FIG.

FIG. 8 is a cross-sectional view showing the next manufacturing step of the above shadow mask of FIG. 7;

9 is a cross-sectional view showing the next manufacturing process of the shadow mask shown in FIG. 8 next to FIG.

10 is a cross-sectional view showing the next manufacturing step of the shadow mask shown in FIG. 9 following the same.

FIG. 11 is a cross-sectional view showing the next manufacturing step of the above shadow mask of FIG.

FIG. 12 is a cross-sectional view showing the next manufacturing process of the above shadow mask of FIG.

13 is a cross-sectional view showing the next manufacturing process of the shadow mask shown in FIG. 12 next to the same.

[Explanation of symbols]

12 strip metal sheet 16 Gravure roll 17 metal roll 18 Ceramics material 19 Sculpture Department 22 Etching-resistant layer coating liquid 33 Small hole that is a recess 37 Resist pattern as resist layer 42 Etching resistant layer

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kenji Kumamoto             Hyogo Prefecture Himeji City Yobu Ward Kamamiyobe 50 Stock Association             Company Toshiba Himeji Factory F-term (reference) 4K057 WA11 WB02 WB03 WC05 WM10                       WM18 WN03                 5C027 HH11

Claims (5)

[Claims] 1. A first main surface having a plurality of recesses formed by etching, and a second main surface having a resist layer having a plurality of openings formed on the surface opposite to the first main surface. Vickers hardness of at least 1 on the periphery of a thin metal strip
000 or more and a porosity of 5% or less is used for the ceramic material, and a gravure roll having an engraved portion formed on the surface of the ceramic material is used. A method for producing a shadow mask, characterized in that the surface of the roll is brought into contact with the first main surface to apply an etching resistant layer coating liquid to form an etching resistant layer on the first major surface. 2. A first main surface having a plurality of recesses formed by etching and a second main surface having a resist layer having a plurality of openings formed on the surface opposite to the first main surface. In an etching-resistant layer coating device for manufacturing a shadow mask, which coats an etching-resistant layer coating liquid on the concave portion of the first main surface of a strip-shaped metal thin plate, at least the periphery is made of a ceramic material having a Vickers hardness of 1000 or more and a porosity of 5% or less. And a gravure roll having an engraving portion formed on the surface of the ceramic material for holding an etching resistant layer coating liquid, and a gravure roll for forming an etching resistant layer on the first main surface. Etching-resistant layer coating device. 3. The gravure roll comprises a metal roll and a ceramic material having an engraving portion formed around the metal roll and in a state in which the metal roll is not exposed. An etching resistant apparatus for manufacturing a shadow mask as described above. 4. The etching resistant apparatus for manufacturing a shadow mask according to claim 2, wherein the ceramic material is chromium oxide. 5. The etching resistant apparatus for manufacturing a shadow mask according to claim 2, wherein the engraved portion is formed by laser processing.