KR100480575B1 - Dry pump having bypass line & method for gas ventilation in line - Google Patents

Abstract

Disclosed is a dry pump used to remove residual gas used in a semiconductor manufacturing process. The dry pump according to the present invention further includes a bypass line capable of sending residual gas to the gas filtration device connected to the dry pump even if the motor of the dry pump fails. The bypass line is automatically opened by an alarm generated when the motor stops, so that residual gas enters the residual gas supply line and exits the residual gas exhaust line through the bypass line. By exiting, it is finally collected by the gas filtration device, preventing the backflow problem.

Description

Dry pump having bypass line & method for gas ventilation in line

The present invention relates to a plant used in the manufacturing process of a semiconductor device, and more particularly, a dry pump used to discharge residual gas used in the process in chemical vapor deposition (CVD) and dry etching (dry etching) equipment to the outside. The present invention relates to a dry pump and a method for discharging residual gas in a pipe using the same.

In the manufacturing process of semiconductor integrated circuits, various kinds of explosive, flammable and toxic gases are used in various processes. Typical processes include gases such as phosphine (PH3), silane (SiH4), dichloro silane (SiH2Cl2), ammonia (NH3) and nitrogen oxide (N2O) in various chemical vapor deposition (CVD) and dry etching processes. Use These gases are mixed with each other in the chamber of the equipment and used in the process, and the residual gas remaining in the remaining form is sucked into the dry pump and discharged to the gas scrubber. . Dry pumps may also be used as devices for forming low pressure or vacuum in chemical vapor deposition and dry etching facilities. However, the motor of the dry pump often stops during the discharge of residual gas due to the problem of the dry pump. In this case, when the gas used in the process is an explosive, flammable and toxic gas, the residual gas is not normally discharged to the gas scrubber through a dry pump. Therefore, residual gas used in the process flows back to the semiconductor equipment and remains in chemical vapor deposition equipment or dry etching equipment, or gas leakage accidents can lead to serious events such as explosion, fire and human injuries due to human inhalation. Can be.

1 is a schematic diagram illustrating a dry pump according to the prior art.

Referring to FIG. 1, a conventional dry pump is largely composed of a residual gas supply line 50, a motor unit 60, and a residual gas exhaust line 50. Here, the direction of the arrow indicates the flow direction of the residual gas when the motor of the motor unit 60 is stopped. In this case, the residual gas is not collected by a gas filtration device (Gas Scrubber, not shown) connected to the residual gas exhaust line 70 connected through the motor unit, and flows back to the chemical vapor deposition equipment (CVD) or the dry etching equipment. There is a problem that can lead to a serious situation such as a human life due to explosion, fire and human inhalation.

The technical problem to be achieved by the present invention is to provide a bypass line-mounted dry pump that can prevent accidents such as explosion, fire and human inhalation caused by the motor stops in the dry pump used in the semiconductor manufacturing process It is.

Another object of the present invention is to provide a gas discharge method in a pipe using the bypass line-mounted dry pump.

In order to achieve the above technical problem, the present invention is connected to the residual gas supply line, the residual gas supply line, which is used in the process, the motor part is connected to the residual gas supply line to increase the effect of discharging the residual gas, and A drain pump including a residual gas exhaust line for discharging residual gas to the outside, wherein the dry pump includes: a bypass line connecting the residual gas supply line and the residual gas exhaust line, and the bypass. It provides a bypass line-mounted dry pump characterized in that it further comprises an automatic valve installed in the line.

According to a preferred embodiment of the present invention, it is preferable that the bypass line-mounted dry pump further includes a gas scrubber connected to the residual gas exhaust line, and an automatic valve mounted on the bypass line. ) Is shut off when the motor of the motor unit operates normally, and is opened when the motor stops.

Preferably, the bypass line may be installed in the residual gas supply pipe and the residual gas exhaust line in the dry pump or in the residual gas supply pipe and the residual gas exhaust line outside the dry pump.

In order to achieve the above technical problem, the present invention provides a residual gas supply line into which the residual gas used in the process enters, a motor part connected to the residual gas supply line and increasing a discharge effect of the residual gas, and connected to the motor part. A dry pump including a residual gas exhaust line for discharging residual gas to the outside, a bypass line connecting the residual gas supply line and the residual gas exhaust line, and an automatic valve installed in the bypass line. A method of discharging gas in a line, the method comprising: supplying residual gas to the residual gas supply pipe, opening an automatic valve of the bypass line, and removing residual gas entering the bypass line. In-line using a dry pump comprising the step of discharging through the residual gas exhaust line The method provides a gas discharge.

According to a preferred embodiment of the present invention, the step of opening the automatic valve of the bypass line is suitable to open when the motor of the motor unit is stopped, and after discharging the residual gas through the residual gas exhaust line, It is suitable to further comprise the step of collecting the discharged residual gas in a gas scrubber (gas scrubber).

According to the present invention, when a motor failure occurs in a dry pump, it is possible to prevent human accidents due to explosion, fire, and inhalation of human body, which may occur due to backflow of residual gas. Maintenance time can be shortened by eliminating residual gas in the pipe.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Example 1

Figure 2 is a schematic diagram for explaining the bypass line-mounted draft pump according to a first embodiment of the present invention.

Referring to FIG. 2, the bypass line-mounted dry pump according to the present invention includes a residual gas supply line 100 into which residual gas used in connection with a chemical vapor deposition facility and a dry etching facility is introduced, and the residual gas. A motor unit 102 for turning the gas into a motor to enhance the discharge effect, and a residual gas exhaust line 104 serving as a pipe through which the gas passing through the motor unit 102 is discharged to the outside of the dry pump 116; A bypass line 106 connecting the residual gas supply line 100 and the residual gas exhaust line 104 to each other in the dry pump external pipe, and an automatic valve 108 installed at one end of the bypass line 106. And a gas scrubber connected to the residual gas exhaust line 104 to finally collect the residual gas.

Here, the bypass line 106 and the automatic valve 108 play a key role in achieving the object of the present invention, and a problem occurs in the dry pump 116, so that the motor of the motor unit 102 At the time of stopping, as in the prior art, the residual gas flows back to prevent a problem. That is, when an error occurs in the motor of the motor unit 102 and stops, the automatic valve 108 may open the closed bypass line 106 to discharge residual gas to the outside without passing through the motor unit 102. It is to open the way. This can be realized by adjusting the automatic valve 108 by using an alarm signal generated when the motor is stopped. Therefore, even if an abnormality occurs in the motor portion of the dry pump 116, the gas is collected by the gas filtering device 110 through the bypass line 106 and the residual gas exhaust line 104 without backflow.

Therefore, in the exhaust gas exhaust method using the bypass line-mounted dry pump according to the present invention, the residual gas flows in the second exhaust direction 112 of the drawing. Here, reference numeral 114 denotes the first exhaust direction 114 showing the exhaust direction of the normal residual gas when the motor portion 102 has no abnormality. Referring to the second exhaust direction 112 in detail, first, the residual gas used in the semiconductor equipment is introduced into the residual gas supply line. At this time, when a failure of the motor of the motor unit 102 occurs, the automatic valve 108 of the bypass line 106 is opened so that the residual gas flows into the bypass line 106. The gas from the bypass line 106 is discharged to the outside through the residual gas exhaust line 104 without necessarily passing through the motor unit 102 of the dry pump 116, and is a gas which is the final collection place of the residual gas. The filter medium 110 is to be collected.

Example 2

3 is a schematic diagram illustrating a bypass line mounted dry pump according to a second exemplary embodiment of the present invention.

Referring to FIG. 3, the configuration is the same as that of the dry pump described in the first embodiment, but the difference is that the bypass line 206 and the automatic valve 208 are configured inside the dry pump 216. . The roles and reference numerals of the other members are the same as those described in the first embodiment, and are omitted to avoid duplication. In this case, since the bypass line 206 and the automatic valve 208 are installed by modifying the dry pump 216 itself, it is not necessary to install an additional bypass line, so that time is set at set-up time. There is an additional advantage to shorten and improve productivity.

The present invention is not limited to the above embodiments, and it is apparent that many modifications can be made by those skilled in the art within the technical spirit to which the present invention belongs.

Therefore, according to the present invention described above, it is possible to prevent human accidents due to explosion, fire and human inhalation, which may occur due to the backflow of residual gas when a failure of the motor occurs in the dry pump, and the equipment and dry of the semiconductor manufacturing process Maintenance time can be shortened by removing residual gas in the pipe when the pump is restarted.

1 is a schematic diagram illustrating a dry pump according to the prior art.

2 is a schematic view illustrating a bypass line mounted dry pump according to a first embodiment of the present invention.

3 is a schematic diagram illustrating a bypass line mounted dry pump according to a second exemplary embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: residual gas supply line, 102: motor unit,

104: residual gas exhaust line, 106: bypass line,

108: auto valve, 110: gas scrubber,

112: second exhaust direction, 114: first exhaust direction,

116: dry pump.

Claims (6)

Residual gas supply line into which residual gas used in the process enters; A motor unit connected to the residual gas supply line to increase a discharge effect of the residual gas; And In the draft pump connected to the motor unit and including a residual gas exhaust line for discharging the residual gas to the outside, The dry pump, A bypass line connecting the residual gas supply line and the residual gas exhaust line; An automatic valve installed in the bypass line, And a gas scrubber connected to the residual gas exhaust line. The bypass line mounting type according to claim 1, wherein the automatic valve mounted on the bypass line is closed when the motor of the motor unit is normally operated, and is opened when the motor is stopped. Dry pump. The bypass line of claim 1, wherein the bypass line is installed in the residual gas supply pipe and the residual gas exhaust line in the dry pump or in the residual gas supply pipe and the residual gas exhaust line outside the dry pump. Mountable dry pump. A residual gas supply line into which residual gas used in the process enters, A motor unit connected to the residual gas supply line and increasing a discharge effect of the residual gas; A residual gas exhaust line connected to the motor unit to discharge residual gas to the outside; A bypass line connecting the residual gas supply line and the residual gas exhaust line; In the gas discharge method in the line using a dry pump comprising an automatic valve installed in the bypass line, Supplying a residual gas to the residual gas supply pipe; Opening an auto valve of the bypass line; And And discharging the residual gas entering the bypass line through the residual gas exhaust line. The method of claim 1, wherein the step of opening the automatic valve of the bypass line is to open when the motor of the motor unit is stopped. The method of claim 1, further comprising, after discharging the residual gas through the residual gas exhaust line, collecting the discharged residual gas in a gas filtration device. .

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