KR100445059B1 - Method of fabricating capacitor of semiconductor device for improving physical property of capacitor bottom electrode - Google Patents

Method of fabricating capacitor of semiconductor device for improving physical property of capacitor bottom electrode Download PDF

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KR100445059B1
KR100445059B1 KR1019970029060A KR19970029060A KR100445059B1 KR 100445059 B1 KR100445059 B1 KR 100445059B1 KR 1019970029060 A KR1019970029060 A KR 1019970029060A KR 19970029060 A KR19970029060 A KR 19970029060A KR 100445059 B1 KR100445059 B1 KR 100445059B1
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South Korea
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capacitor
layer
interlayer oxide
lower electrode
metal layer
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KR1019970029060A
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Korean (ko)
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KR19990004900A (en
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김재환
이세종
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주식회사 하이닉스반도체
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3215—Doping the layers

Abstract

PURPOSE: A method of fabricating a capacitor of a semiconductor device is provided to improve the physical property and the adhesive strength of the capacitor bottom electrode by forming a capacitor bottom electrode on an interlayer oxide layer and implanting atoms into a bottom part of a bottom metal connected to the interlayer oxide layer. CONSTITUTION: A metal layer for capacitor bottom electrode is formed on a BPSG interlayer oxide layer(204) and a plug(205). Ti atoms for improving adhesive strength between the metal layer and the BPSG interlayer oxide layer are implanted into a bottom part of the metal layer connected with the BPSG interlayer oxide layer and the plug. A dielectric layer and a capacitor top electrode are formed on the metal layer.

Description

반도체 장치의 캐패시터 제조 방법Capacitor Manufacturing Method of Semiconductor Device

본 발명은 반도체 소자 제조 공정중, 캐패시터 제조 방법에 관한 것으로, 특히 금속 또는 비금속 전도막을 전극으로 사용하고 고유전체 또는 강유전체를 유전체로 사용하는 캐패시터 제조 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a capacitor during a semiconductor device manufacturing process, and more particularly, to a method of manufacturing a capacitor using a metal or non-metal conductive film as an electrode and using a high dielectric or ferroelectric as a dielectric.

초고집적 소자에서 캐패시터용 유전체로서 유전상수가 큰 (Ba,Sr)TiO3(통상 BST라고 함)을 사용하고 있고, 이러한 고유전체 또는 강유전체를 사용한 캐패시터에서는 하부전극 및 상부전극으로써 Pt, Ru, Ir, IrO2, RuO2와 같은 금속 또는 전도성을 갖는 산화금속막을 사용하고 있다.In the highly integrated device, (Ba, Sr) TiO 3 (commonly referred to as BST) having a large dielectric constant is used as a dielectric for a capacitor. In a capacitor using a high dielectric or ferroelectric, Pt, Ru, Ir are used as the lower and upper electrodes. , Metal such as IrO 2 , RuO 2 , or a metal oxide film having conductivity is used.

도 1은 종래기술에 따라 캐패시터가 형성된 일예를 나타내는 단면도로서, 도면에 도시된 바와같이, 종래에는 실리콘 기판(11)의 드레인 접합층(12)이 노출되도록 층간산화막(14)을 선택 식각하여 콘택홀을 형성한 다음, 콘택홀 내를 전도층으로 매립하여 플러그(15)를 형성한 상태에서, Pt층이 층간산화막에 용이하게 접착되도록 하기 위한 Ti층(16), 하부전극용 Pt층(17), 예컨데 BST와 같은 고유전체층(18), 및 상부전극용 Pt층(19)을 차례로 적층하여 캐패시터를 제조한다. 미설명 도면부호 "13" 은 게이트 전극을 나타낸다.1 is a cross-sectional view illustrating an example in which a capacitor is formed according to the prior art. As shown in the drawing, a conventional interlayer oxide film 14 is selectively etched to expose a drain junction layer 12 of a silicon substrate 11, and then contacted. After the hole is formed, the Ti layer 16 and the lower electrode Pt layer 17 for easily bonding the Pt layer to the interlayer oxide film in a state where the plug 15 is formed by filling the inside of the contact hole with a conductive layer. ), For example, a high-k dielectric layer 18 such as BST, and a Pt layer 19 for the upper electrode are sequentially stacked to manufacture a capacitor. Unexplained reference numeral 13 denotes a gate electrode.

이와같이, 층간산화막은 통상적으로 평탄화가 용이한 BPSG막을 사용하고 있는데, 이러한 산화막은 하부전극 금속막(특히, Pt)과 접착력이 좋지 않으므로, 접착력을 향상시키기 위해 Ti층(16)을 그 계면에 형성하였으나, 이로인해 하부전극 Pt층(17)의 물성이 열화된다. 즉, 층간절연막 상에 Pt층이 바로 증착될 경우, 그 Pt는 물성이 매우 우수한 것으로 실험적으로 증명되었으나, 산화막상에 Pt를 바로 형성할 경우 이 두물질간의 접착력이 매우 약하여 여러 가지 문제점이 발생된다.As such, the interlayer oxide film generally uses a BPSG film that is easily planarized. Since the oxide film has poor adhesion with the lower electrode metal film (especially Pt), the Ti layer 16 is formed at the interface to improve adhesion. However, this deteriorates the physical properties of the lower electrode Pt layer 17. That is, when the Pt layer is directly deposited on the interlayer insulating film, the Pt has been experimentally proved to have excellent physical properties. However, when Pt is formed directly on the oxide film, the adhesion between the two materials is very weak, and various problems are caused. .

따라서, 종래에는 하부전극 Pt의 물성이 떨어지더라도 부득이하게 Ti를 하부전극 Pt와 산화간의 계면에 형성할 수밖에 없었다.Therefore, conventionally, even though the physical properties of the lower electrode Pt were inevitably, Ti was inevitably formed at the interface between the lower electrode Pt and the oxidation.

본 발명은 캐패시터의 하부전극과 층간산화막 간의 접착력을 유지하면서, 하부전극의 물성을 향상시킬 수 있는 반도체 장치의 캐패시터 제조 방법을 제공함을 그 목적으로 한다.An object of the present invention is to provide a method for manufacturing a capacitor of a semiconductor device which can improve the physical properties of the lower electrode while maintaining the adhesion between the lower electrode of the capacitor and the interlayer oxide film.

도 1은 종래기술에 따라 캐패시터가 형성된 상태의 단면도,1 is a cross-sectional view of a capacitor formed state according to the prior art,

도 2A 내지 도 2D는 본 발명의 일실시예에 따른 캐패시터 제조 공정도,2A to 2D are capacitor manufacturing process diagrams according to one embodiment of the present invention;

도 3A 내지 도 3D는 본 발명의 다른 실시예에 따른 캐패시터 제조 공정도.3A to 3D are capacitor manufacturing process diagrams according to another embodiment of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

204: 층간산화막 205: 플러그204: interlayer oxide film 205: plug

206: 하부전극 Pt 207: Ti 이온주입206: lower electrode Pt 207: Ti ion implantation

208: Ti 도핑 영역 209: 포토레지스트 패턴208 Ti doped region 209 photoresist pattern

상기 목적을 달성하기 위한 본 발명의 캐패시터 제조 방법은, BPSG 층간산화막 및 플러그상에 캐패시터 하부전극용 금속층을 형성하는 단계; 상기 BPSG 층간산화막 및 플러그와 접하는 상기 금속층의 저부에, 상기 금속층과 상기 BPSG 층간산화막의 접착력 증대를 위한 Ti 원자를 이온주입하는 단계; 및 상기 금속층 상에 유전막 및 캐패시터의 상부전극을 형성하는 단계를 포함하여 이루어진다.Capacitor manufacturing method of the present invention for achieving the above object comprises the steps of forming a metal layer for the capacitor lower electrode on the BPSG interlayer oxide film and plug; Ion implanting a Ti atom on the bottom of the metal layer in contact with the BPSG interlayer oxide film and a plug to increase adhesion between the metal layer and the BPSG interlayer oxide film; And forming an upper electrode of a dielectric layer and a capacitor on the metal layer.

이하, 첨부된 도 2A 이하를 참조하여 본 발명의 실시예를 상세히 설명한다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 2A 내지 도 2D는 본 발명의 일실시예에 따른 캐패시터 제조 공정도로서, 도면부호 "204" 는 층간산화막, "205" 는 플러그, "206" 은 하부전극 Pt, "207" 은 Ti 이온주입, "208" 은 Ti 도핑 영역, "209" 는 포토레지스트 패턴을 각각 나타낸다. 도면을 참조하여 본 발명의 일실시예를 상세히 설명한다.2A to 2D are capacitor manufacturing process diagrams according to one embodiment of the present invention, reference numeral “204” denotes an interlayer oxide film, “205” denotes a plug, “206” denotes a lower electrode Pt, “207” denotes Ti ion implantation, "208" represents a Ti doped region and "209" represents a photoresist pattern, respectively. An embodiment of the present invention will be described in detail with reference to the drawings.

먼저, 도 2A와 같이, 층간산화막(204)을 선택적으로 식각하여 콘택홀을 형성한 다음, 콘택홀 내를 전도층으로 매립하여 플러그(205)를 형성한 다음, Pt층을 증착하여 플러그(205)와 층간산화막(204) 상에 하부전극 Pt층(206)을 형성한다.First, as shown in FIG. 2A, the interlayer oxide layer 204 is selectively etched to form a contact hole. Then, the contact hole is filled with a conductive layer to form a plug 205, and then a Pt layer is deposited to form a plug 205. And the lower electrode Pt layer 206 are formed on the interlayer oxide film 204.

이어서, 도 2B와 같이, 층간산화막(204)과 접하는 하부전극 Pt층(206)의 저부에 Ti 도핑 영역(208)이 형성되도록, 이온주입 에너지와 양을 조절하여 Ti 이온을 이온주입(207)한다. 이 Ti 도핑 영역(208)은 층간산화막(204)과 하부전극 Pt층(206)의 접착력을 향상시킨다.Subsequently, as shown in FIG. 2B, the ion implantation energy and amount are controlled so that the Ti doping region 208 is formed at the bottom of the lower electrode Pt layer 206 in contact with the interlayer oxide film 204. do. This Ti doped region 208 improves the adhesion between the interlayer oxide film 204 and the lower electrode Pt layer 206.

이어서, 도 2C와 같이, 하부전극 식각 마스킹을 위한 포토레지스트 패턴(209)을 형성하고, 도 2D와 같이 하부전극 Pt층(206)과 그 저부의 Ti 도핑 영역(208)을 식각하고, 포토레지스트 패턴(209)을 제거한다.Subsequently, as shown in FIG. 2C, the photoresist pattern 209 for masking the lower electrode is formed, and as shown in FIG. 2D, the lower electrode Pt layer 206 and the Ti doped region 208 at the bottom thereof are etched, and the photoresist is etched. The pattern 209 is removed.

이어서, 이온주입에 의해 손상 받아 발생됨 결함을 제거하기 위해 열처리를 실시한다.Subsequently, heat treatment is performed to remove defects generated by damage by ion implantation.

이상에서 설명한 바와같이, 본 발명의 일실시예에서는 Ti 상부가 아닌 층간산화막상에 바로 하부전극 Pt가 증착되므로, 하부전극 Pt는 그 물성이 매우 우수하며, 하부전극 Pt을 증착한 다음에 이온주입에 의해 층간산화막과 접하는 하부전극 Pt층의 저부에 Ti 도핑 영역 층을 형성하므로, 층간산화막과 하부전극 Pt층의 접착력을 유지할 수 있다. 즉, 하부전극 Pt의 물성 및 접착력 모두를 만족할 수 있다.As described above, in one embodiment of the present invention, since the lower electrode Pt is deposited directly on the interlayer oxide film instead of the upper Ti, the lower electrode Pt has excellent physical properties, and after ion deposition, the lower electrode Pt is deposited. By forming a Ti doped region layer on the bottom of the lower electrode Pt layer in contact with the interlayer oxide film, the adhesion between the interlayer oxide film and the lower electrode Pt layer can be maintained. That is, both the physical properties and the adhesion of the lower electrode Pt can be satisfied.

도 3A 내지 도 3D는 본 발명의 다른 실시예에 따른 캐패시터 제조 공정도로서, 앞서 설명된 도면부호와 동일 도면부호는 같은 기능 및 작용을 갖는 것이다.3A to 3D are capacitor manufacturing process diagrams according to another embodiment of the present invention, in which the same reference numerals as those described above have the same functions and functions.

본 발명의 다른 실시예에서는 하부전극 Pt를 룰(Rule)에 맞는 두께로 두껍게 증착한 다음 Ti 이온주입을 실시하면, Pt의 저부에 Ti 도핑 영역을 형성하여야 하기 때문에 Ti 이온주입 에너지가 매우 커야 한다는 점을 개선하기 위한 것으로, 도 3A와 같이 룰(Rule) 상의 두께보다 적은 두께로 하부전극 Pt층(206a)을 형성한 다음, 도 3B와 같이 Ti 이온주입(207)을 실시하여 Ti 도핑 영역(208)을 형성하고, 도 3C와 같이, 잔류두께의 하부전극 Pt층(206b)을 형성한다. 그리고, 도 3D와 같이 마스크 및 식각 공정으로 그 저부에 Ti 도핑 영역(208)을 갖는 하부전극 Pt층(206a, 206b)을 패터닝한다.In another embodiment of the present invention, when the lower electrode Pt is deposited to a thickness that meets the rule and then Ti ion implanted, a Ti doped region must be very large because Ti doped regions should be formed at the bottom of Pt. In order to improve the point, as shown in FIG. 3A, the lower electrode Pt layer 206a is formed to have a thickness smaller than that on the rule, and then Ti ion implantation 207 is performed as shown in FIG. 208 is formed, and the lower electrode Pt layer 206b of the remaining thickness is formed as shown in Fig. 3C. 3D, the lower electrodes Pt layers 206a and 206b having the Ti doped region 208 at the bottom thereof are patterned by a mask and an etching process.

본 발명의 일실시예 및 다른 실시예에서, Ti 원자와 N(질소) 원자를 각각 이온주입하여 Ti 및 N(질소) 도핑 영역을 형성하는 방법을 사용할 수 있으며, 하부전극용 물질은 Pt 뿐만 아니라 Ru, Ir, 또는 이들의 산화물을 사용할 수 있다. 또한, 유전체 물질은 고유전체 물질인 BST, 또는 도핑 및 비도핑된 강유전체 물질인 PZT, 또는 페로스카이트 구조를 갖는 유전물질을 사용할 수 있다.In one embodiment and another embodiment of the present invention, a method of forming Ti and N (nitrogen) doped regions by ion implantation of Ti atoms and N (nitrogen) atoms, respectively, may be used. Ru, Ir, or oxides thereof can be used. In addition, the dielectric material may be BST, which is a high dielectric material, or PZT, which is a doped and undoped ferroelectric material, or a dielectric material having a perovskite structure.

이렇듯, 본 발명은 전술한 실시예 및 첨부된 도면에 의해 한정되는 것이 아니고, 본 발명이 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능함이 본 발명이 속하는 기술 분야에서 통상의 지식을 가진자에게 있어 명백할 것이다.As such, the present invention is not limited to the above-described embodiments and the accompanying drawings, and various changes, modifications, and alterations can be made without departing from the spirit of the present invention. It will be apparent to those who have knowledge.

본 발명은 층간산화막 상에 캐패시터의 하부 전극을 먼저 층착한 다음, 접착력 향상을 위한 원자를 층간산화막과 접하는 하부 금속의 저부에 이온주입하므로써, 하부전극의 물성 및 접착력을 모두 만족시킬 수 있다.According to the present invention, the lower electrode of the capacitor is first deposited on the interlayer oxide film, and then ion implantation into the bottom of the lower metal in contact with the interlayer oxide film improves adhesion, thereby satisfying both the physical properties and the adhesion of the lower electrode.

Claims (4)

BPSG 층간산화막 및 플러그상에 캐패시터 하부전극용 금속층을 형성하는 단계;Forming a metal layer for a capacitor lower electrode on the BPSG interlayer oxide film and the plug; 상기 BPSG 층간산화막 및 플러그와 접하는 상기 금속층의 저부에, 상기 금속층과 상기 BPSG 층간산화막의 접착력 증대를 위한 Ti 원자를 이온주입하는 단계; 및Ion implanting a Ti atom on the bottom of the metal layer in contact with the BPSG interlayer oxide film and a plug to increase adhesion between the metal layer and the BPSG interlayer oxide film; And 상기 금속층 상에 유전막 및 커패시터의 상부전극을 형성하는 단계Forming an upper electrode of a dielectric layer and a capacitor on the metal layer 를 포함하여 이루어지는 반도체 장치의 캐패시터 제조 방법.Capacitor manufacturing method of a semiconductor device comprising a. 제1항에 있어서,The method of claim 1, Ti 원자를 이온주입하는 단계후에, 상기 Ti 원자의 이온주입에 의한 상기 금속층의 손상부위를 제거하기 위한 열처리 단계를 더 포함하여 이루어지는 반도체 장치의 캐패시터 제조 방법.And a heat treatment step for removing a damaged portion of the metal layer by ion implantation of the Ti atoms after the ion implantation of Ti atoms. 제1항 또는 제2항에 있어서,The method according to claim 1 or 2, 상기 하부전극용 금속층은 Pt, Ru, Ir, 및 이들의 산화물들 중 적어도 어느 하나를 포함하는 반도체 장치의 캐패시터 제조 방법.The metal layer for the lower electrode includes at least one of Pt, Ru, Ir, and oxides thereof. 제1항 또는 제2항에 있어서,The method according to claim 1 or 2, 상기 하부전극은 상기 이온주입 전에 룰(Rule)상에 전체두께중 일부 두께로 형성되고,The lower electrode is formed to a thickness of a part of the total thickness on the rule (Rule) before the ion implantation, 상기 이온주입 후에 상기 룰(Rule)상의 전체두께중 잔류두께를 형성하는 것을 특징으로 하는 반도체 장치의 캐패시터 제조 방법.And a residual thickness of the entire thickness on the rule after the ion implantation.
KR1019970029060A 1997-06-30 1997-06-30 Method of fabricating capacitor of semiconductor device for improving physical property of capacitor bottom electrode KR100445059B1 (en)

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KR101212446B1 (en) 2010-07-20 2012-12-14 (주)비에이치세미콘 Manufacturing method of metal plated substrate with advanced adhesive force and the substrate

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US6046059A (en) * 1998-05-08 2000-04-04 Siemens Aktiengesellschaft Method of forming stack capacitor with improved plug conductivity

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JPH0714993A (en) * 1993-06-18 1995-01-17 Mitsubishi Electric Corp Semiconductor device and manufacturing thereof
KR960036048A (en) * 1995-03-20 1996-10-28 김광호 Manufacturing method of ferroelectric capacitor
JPH08306881A (en) * 1995-05-11 1996-11-22 Oki Electric Ind Co Ltd Method of fabricating dram memory cell

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JPH0714993A (en) * 1993-06-18 1995-01-17 Mitsubishi Electric Corp Semiconductor device and manufacturing thereof
KR960036048A (en) * 1995-03-20 1996-10-28 김광호 Manufacturing method of ferroelectric capacitor
JPH08306881A (en) * 1995-05-11 1996-11-22 Oki Electric Ind Co Ltd Method of fabricating dram memory cell

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101212446B1 (en) 2010-07-20 2012-12-14 (주)비에이치세미콘 Manufacturing method of metal plated substrate with advanced adhesive force and the substrate

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