KR100428035B1 - Limit sensor assembly for tray transfer of handler for testing semiconductor devices - Google Patents

Abstract

The present invention relates to a limit sensor assembly for a tray feeder of a semiconductor device test handler, according to the present invention, a base plate provided on one side of the chamber of the handler, an installation plate installed perpendicularly to one end of the base plate, and A tray conveying apparatus comprising a holder assembly for horizontally horizontally oriented along a base plate and holding a test tray and pushing and transferring it from one chamber position to another chamber position, wherein the through hole formed in the mounting plate is fixed to the through hole. An installed hollow boss, an actuating member movably inserted along the hollow portion of the boss, and a front end coupled with a rear end of the actuating member, the rear end of which is opposed to the holder assembly by the action of the holder assembly Push member for pushing the moving member and the rear end and the push portion of the boss An elastic member interposed between the front end portions of the elastic member for elastically supporting the push member with respect to the boss, and a sensing means fixedly installed at the front end of the boss of the mounting plate to detect movement of the operating member. A limit sensor assembly for a tray feeder of a semiconductor device test handler is provided.

Description

Limit sensor assembly for tray transfer of handler for testing semiconductor devices}

The present invention relates to a limit sensor assembly for a tray feeder of a handler for testing a semiconductor device, and in particular, sets the initial position of the tray feeder in the chamber of the handler and prevents the process from progressing beyond the initial position set during the tray feed. A limit sensor assembly for a tray feeder is provided.

In general, devices such as a memory or non-memory semiconductor device, and modules that are appropriately configured on a single substrate, are shipped after undergoing various test procedures after production. Refers to the device being used to automatically test the same device and module.

In general, many of these handlers not only perform general performance tests at room temperature but also create a high temperature and low temperature extreme temperature environment by an electrothermal heater and a liquefied nitrogen injection system in a sealed chamber, such as semiconductor devices and modules. It is also capable of performing high and low temperature tests, which test whether they can function under extreme temperature conditions.

In the handler capable of the temperature test, a plurality of semiconductor devices are mounted in one test tray, and then the test tray is moved between the plurality of chambers having a specific temperature condition, and the test is performed. The tray is provided with a tray transfer device that serves to transfer the test trays from one chamber position to the other chamber position.

Such tray transfer devices hold one side edge of the test tray in an upright state with a tray holder assembly provided therein, and then linearly move the holder assembly by a driving means to slide the test tray while sliding the test tray to move the other side of the chamber. After conveying to the side, the drive means is operated in reverse to convey the holder assembly to the initial transfer standby position to perform the next tray conveying operation.

By the way, the conventional tray transfer apparatus controls the drive means when conveying the holder assembly by the reverse operation of the driving means (for example, the ball screw and the servo motor which rotates it) after conveying the test tray using the holder assembly described above. If the assembly is not made correctly, the holder assembly may move to the inner wall of the chamber and collide with the inner wall of the chamber or other components, thereby causing damage to the components.

In addition, a home checking operation for positioning the holder assembly of the tray feeder to an initial position must be performed before the handler is operated to perform the test. The conventional tray feeder is provided with an appropriate device for performing the test. There was a problem that the user has to perform the home checking of the holder assembly manually.

Accordingly, the present invention has been made in order to solve the above problems, and detects that the holder assembly is moved beyond the set position by the malfunction of the drive means of the tray feeder, and performs the home check before operation of the handler It is an object of the present invention to provide a limit sensor assembly for a tray transfer device of a semiconductor device test handler which facilitates a groove checking operation for setting an initial position of the holder assembly.

1 is a perspective view showing the configuration of a tray feeder for a handler with a limit sensor assembly according to the present invention

Figure 2 is a perspective view showing a state in which the limit sensor assembly of Figure 1 is installed

3 is an exploded perspective view of the limit sensor assembly of FIG.

4A and 4B schematically show the operation of the limit sensor assembly of FIG. 1, respectively.

Explanation of Reference Symbols in Major Parts of Drawings

101a-Mounting Plate 105-Moving Block

120-Holder 201-Through Hole

202-Boss 204-Pushbara

206-Actuator 207-Compression Spring

208-Sensor Base 209-Sensors

In order to achieve the above object, the present invention, the base plate is installed on one side of the chamber of the handler, the mounting plate vertically installed on one end of the base plate, and horizontally from side to side along the base plate to the test tray A tray conveying device comprising a holder assembly for holding and transporting from one chamber position to another chamber position, comprising: a through hole formed in the mounting plate, a hollow boss fixedly fixed to the through hole, and a hollow part of the boss. An actuating member inserted movably along the axial direction, a front end coupled to the rear end of the actuating member, and a rear end opposing the holder assembly to push and move the actuating member by the action of the holder assembly; It is interposed between the rear end of the boss and the front end of the push member to elastically push the push member with respect to the boss. The base member provides a limit sensor assembly for a tray transfer device of a semiconductor device test handler, characterized in that it comprises an elastic member and a sensing means fixed to the front end of the boss of the mounting plate to detect the movement of the operating member. do.

Hereinafter, an embodiment of a limit sensor assembly for a tray feeder according to the present invention will be described in detail with reference to the accompanying drawings.

1 of the accompanying drawings is a view showing the configuration of the tray feeder installed behind the chamber of the handler for testing the semiconductor device, the tray feeder is a base horizontally installed laterally on the chamber rear surface constituting the test site of the handler Plate 101, a mounting plate 101a which is installed perpendicular to one end of the base plate 101 and forms a chamber sidewall surface, and a guide horizontally installed laterally along a longitudinal direction of the base plate 101. A rail 102, a movable block 105 installed to be movable along the guide rail 102, and a holder 120 fixedly mounted to the movable block 105 to hold and transport one side edge of the test tray. And, the driving means for moving the movable block 105 and the holder 120, and the mounting plate 101a parallel to the guide rail 102 is rotatably installed within a predetermined angle range The spline 110 is coupled to the holder 120 to engage and release the holder 120 with respect to the side edge of the test tray.

The driving means is fixed to the ball screw 103 and the movable block 105 installed in parallel with the guide rail 102 on the upper side of the base plate 101 and to move along the ball screw 103 It consists of a ball housing 104 and a servomotor 106 installed on the mounting plate 101a to rotate the ball screw 103.

In addition, a rotation means for rotating the spline 110 is installed on the outer surface of the mounting plate 101a, and the rotation means extends radially outwardly of the spline 110 at the end of the spline 110. And a cylinder 112 which is installed to be linked with the protrusion 111 to reciprocate the spline 110 within a predetermined angle range by advancing the protrusion 111 forward and backward.

As shown in Figure 2 to 4b, the mounting plate 101a is provided with a limit sensor assembly for limiting the movement of the holder assembly of the tray feeder, the mounting plate 101a is a moving block of the tray feeder A through hole 201 is formed on the same line as 105, and a boss 202 having a hollow portion is fixedly installed in the through hole 201, and the hollow portion of the boss 202 is slightly smaller than the inner diameter of the hollow portion. An approximately cylindrical actuating member 206 having a small outer diameter is built to be movable back and forth in the axial direction.

The rear end of the actuating member 206 is fixedly coupled to the front end of the push bar 204 which is installed to face the end of the moving block 105 of the tray feeder, and the rear end of the boss 202 and the push bar ( A compression spring 207 is provided between the 204 to elastically support the push bar 204 with respect to the boss 202.

In addition, the sensor base 208 is fixedly attached to the outer surface of the mounting plate 101a at a position immediately forward of the operation member 206, and the sensor base 208 is moved forward and backward in the front end of the operation member 206. An approximately U-shaped optical sensor 209 for detecting movement is attached.

A beam is flowing between the U-shaped openings of the optical sensor 209. When the front end of the operating member 206 is inserted between the U-shaped openings of the optical sensor 209, the beam is blocked. The movement of the operating member 206 is detected.

The operation of the limit sensor assembly configured as described above is made as follows.

The limit sensor assembly of the present invention detects that the holder 120 of the tray feeder moves to the set initial position while the handler is in operation, and stops the movement of the holder 120 at the initial position. While the holder 120 of the tray feeder returns to the initial position after completing the transfer of the test tray from one chamber position to the other chamber position, the movable block 105 to which the holder 120 is attached is connected to the limit sensor assembly. Upon contact with the pushbar 204, the actuating member 206 coupled to the pushbar 204 moves forward within the hollow of the boss 202 such that its front end passes through the open portion of the optical sensor 209. Accordingly, the optical sensor 209 detects this and sends a signal to the control unit (not shown) of the handler to stop the operation of the servomotor 106 to stop the moving block 105 and the holder 120.

Then, when the coupling between the movable block 105 and the push bar 204 is released, the push bar 204 and the operating member 206 coupled thereto are returned to their original state by the elastic force of the compression spring 207.

In addition, the limit sensor assembly as described above is also used to set the initial position of the holder 120 of the tray feeder at the initial operation of the handler. In this case, the tray feeder is similarly carried out by the operator by operating the handler. When operating the limit sensor assembly by operating the holder 120 and the moving block 105 of the device, the control unit (not shown) of the handler sets the position of the holder 120 and the moving block 105 at this time to the initial position. The tray transfer operation will be performed.

As described above, according to the present invention, the holder assembly of the tray feeder can always return to the correct initial position during the tray feed operation, thereby preventing damage to the tray feeder and other components due to malfunction of the driving means, and Test delay can be prevented.

In addition, there is an effect that the groove checking operation for setting the initial position of the tray feeder before the handler can be easily performed.

Claims (3)

A base plate installed on one side of the chamber of the handler, an installation plate installed vertically on one end of the base plate, and horizontally moved horizontally along the base plate and holding the test tray to transfer from one chamber position to another chamber position In the tray feeder configured to include a holder assembly, A through hole formed in the mounting plate, a hollow boss fixedly fixed to the through hole, an operating member axially movable in the hollow portion of the boss, a front end coupled with the operating member, and a rear end of the holder A push member movably installed at the rear end of the boss to protrude toward the assembly, the push member being pushed forward in contact with the holder assembly, and fixedly installed outside the front end of the boss to be operated by the push member. Limit sensor assembly for a tray transfer device of the semiconductor device test handler, characterized in that it comprises a sensing means for detecting the movement of the member. The limit sensor of claim 1, wherein an elastic member is disposed between the rear end of the boss and the front end of the push member to elastically support the push member with respect to the boss. assembly. The tray conveying apparatus of claim 1, wherein the sensing unit comprises a sensor base fixed to an installation plate, and a sensor installed on the sensor base to sense a movement of a front end of an operating member. Limit sensor assembly.