KR100270783B1 - Device for unloading semiconductor device according to grade in horizontal handler - Google Patents

Abstract

PURPOSE: An apparatus for unloading device is provided to reduce the size remarkably by allowing classification of defective articles into customer trays with only one stacker. CONSTITUTION: A pair of guide rails(14) installed on an installation plate in the vertical direction. An elevation plate(15) is installed elevated along the guide rails(14). A plurality of loading plates(16) having the shape of cantilevers are installed on the elevation plate(15) for loading customer trays. Driving means elevates the elevation plate(15). Movable blocks(20) are installed at one sides of the loading plates(16), and movable horizontally. Elevation blocks(22) are installed elevatable in the movable blocks(20), and elevated in response to the driving of the third cylinder(21). A pair of fingers(23) are installed in the elevation blocks(22) for holding the customer trays(3) on the loading plates(16). Finger driving means rock the pair of fingers.

Description

Grade device unloading device of horizontal handler

The present invention relates to a horizontal handler for horizontally transferring a device to test the performance of the device. More specifically, after completing the test of the device suspended from the carrier module of the test tray, the customer tray is classified according to the test result. The present invention relates to a device unloading device according to a grade of a horizontal handler which is unloaded within.

In general, the devices produced in the manufacturing process are sequentially transferred by horizontal or vertical handlers, classified as good or bad according to the test result of the tester, and the good is shipped, and the bad is discarded.

The unloader part of the handler which sequentially transfers the devices is provided with a plurality of stackers on which a customer tray containing devices classified according to grades is placed according to test results.

In particular, the defective goods are put in different customer trays according to the cause of the defect to identify the cause of the defect.

FIG. 1 is a vertical cross-sectional view showing a conventional apparatus, and FIG. 2 is a side view showing a portion of FIG. 1 in cross section, wherein the customer tray 3 is placed inside a plurality of stackers 2 installed in the unloading portion 1. Elevator plate 4 which raises by one (1 customer tray height) is provided so that it may elevate according to the drive of a linear motor (not shown), and the side plate 5 provided in the back of the elevator plate 4 The transfer 7 for holding the customer trays 3 located on the unloader unit one by one and placing them on the seating plate 6 or holding the customer trays placed on the seating plate and placing them inside the stacker 2 is a horizontal LM. It is installed to be movable horizontally along the guide (8), the transfer is moved up and down by the first cylinder (9).

The seating plate 6 on which the customer tray 3 is placed and exposed upward through the through hole 1a of the unloader unit 1 is fixed in a cantilever shape to the rod of the second cylinder 10 as shown in FIG. 2. Ascend and descend.

Therefore, when a plurality of empty customer trays 3 are stacked in the stacker 2 of the unloader unit 1 in order to classify the tested devices by class, the uppermost customer trays loaded in the stacker 2 ( Until the 3) is detected, the elevator plate 4 is raised by driving the linear motor and the driving of the linear motor is stopped.

Thus, after the elevator plate 4 is raised until the uppermost customer tray 3 loaded on the stacker 2 is detected by the sensor 11, the transfer 7 fixed to the side plate 5 is removed. It is conveyed to the upper part of the customer tray 3 mounted in the stacker 2 along the horizontal LM guide 8.

In the above operation, the transfer 7 is positioned at the top dead center as shown on the left side of FIG. 1 by the first cylinder 9, and a seating plate fixed in a cantilever shape to the rod of the second cylinder 10 ( 6) is in close contact with the bottom surface of the unloader 1 as shown by the dashed-dotted line on the right side of FIG. 1 and FIG. 2 so as not to cause mutual interference.

In this state, the transfer 7 transferred to the upper portion of the customer tray 3 has a customer tray having a sensor 11 fixed to the transfer at the top of the stacker 2 driven by the first cylinder 9. It will descend until it senses (3).

After the lowered transfer 7 holds the uppermost customer tray 3, the first cylinder 9 is driven to raise the transfer 7 to the top dead center, so that the separation operation of the customer tray is completed.

In this way, once one of the customer trays 3 of the plurality of customer trays placed on the stacker 2 is separated, the transfer 7 does not cause interference on one side along the horizontal LM guide 8. And the second cylinder 10 fixed to the support plate 12 is driven at the same time, thereby lowering the seating plate 6 which is in close contact with the bottom surface of the unloader 1.

When the seating plate 6 reaches the bottom dead center, the transfer 7, which has been moved to one side, moves to the upper portion of the seating plate 6 again and is lowered by the driving of the first cylinder 9 and the customer tray 3. Since the holding state of the) is released, the empty customer tray is placed on the seating plate (6).

After the empty customer tray is placed on the seating plate 6 by the above-described operation, the transfer 7 rises to the top dead center again by driving of the first cylinder 9 and at the same time, when the seating plate 6 is raised, It is moved to one side along the horizontal LM guide (8) so as not to cause.

As described above, when the transfer 7 removes one customer tray 3 from the stacker 2 and places it on the seating plate 6 and moves to one side, the seating plate 6 is driven by the driving of the second cylinder 10. Since it rises up to the top dead center, the empty customer tray 3 is exposed to the upper side of the unloader unit 1 through the through hole 1a, and is classified according to the test result and waits in the buffer (not shown). The pickup means holds the plurality of elements that were present and is placed on the customer tray 3.

However, such a conventional apparatus has a problem in that the equipment becomes larger than necessary because the stacker 2 of the unloader part which classifies and stores the elements according to the test result is provided.

This is because, even in the case of a good quality device, it should be classified and contained in the customer tray 3 according to the grade, but even in the case of a defective product, it must be classified in different customer trays for each cause in order to retest and identify the cause of the failure.

However, in recent years, even though the yield of the device is improved and the quantity of defective products is significantly reduced compared to the good products, a large number of stackers must be separately provided to classify the defective products, thereby inevitably increasing the equipment. .

The present invention has been made in order to solve such a problem in the prior art, so that even if there is only one stacker to classify and store defective products can be classified into grades to be contained in the customer tray, greatly reducing the size of the equipment The purpose is to make it possible.

Another object of the present invention is to be able to more quickly contain the tested device in the customer tray on the mounting plate.

According to an aspect of the present invention for achieving the above object, a pair of guide rails installed in a vertical direction on the mounting plate, a lifting plate installed to be elevated along the guide rail, and installed in the cantilever plate on the lifting plate in the customer tray A plurality of mounting plates on which the plurality of mounting plates are mounted, driving means for elevating the lifting plate, a movable block mounted on one side of the mounting plate so as to be movable horizontally, and mounted on the movable block so as to move up and down according to the driving of the third cylinder. Leveling element of a horizontal handler comprising a lifting block for lifting and lowering, a pair of fingers installed on the lifting block to hold the customer tray on a loading plate, and finger driving means for operating the pair of fingers left and right. A loading device is provided.

Figure 1 is a longitudinal cross-sectional view showing a conventional device

Figure 2 is a side view showing a part of Figure 1 in cross section

Figure 3 is a side view showing the configuration of the present invention

4 is a top view of FIG. 3

5 is a schematic diagram for explaining a process of transferring a customer tray placed on a loading plate onto an unloading stage;

6 is a state in which the transfer is installed on the side plate

Explanation of symbols for main parts of the drawings

13: mounting plate 14: guide rail

15: lifting plate 16: loading plate

20: moving block 21: third cylinder

22: lifting block 23: finger

27: rotating plate 30a 30b: sensor

Hereinafter, with reference to Figures 3 to 6 showing an embodiment of the present invention in more detail as follows.

Figure 3 is a side view showing the configuration of the present invention, Figure 4 is a plan view of Figure 3 and Figure 5 is a schematic diagram for explaining the process of transferring the customer tray mounted on the loading plate on the unloading stage, the present invention is an installation plate A pair of guide rails 14 are installed in the vertical direction of the pair 13, and the guide rails are provided with a lifting plate 15 for elevating by a driving means such as a motor or a cylinder. A plurality of stacking plates 16 on which the tray 3 is mounted are fixed in a cantilevered shape.

Therefore, the lifting plate 15 provided with the plurality of loading plates 16 at equal intervals moves up and down one pitch (gap between the loading plates) as the driving means is operated.

One side of the plurality of loading plates 16 selectively holds the customer tray 3 mounted on the loading plate and transfers it onto the unloading stage, or transfers the customer tray 3 on the unloading stage to any one loading plate. A transfer for transferring onto (16) is provided to be movable horizontally.

In the embodiment of the present invention, the transfer moves up and down the movable block 20 and the movable block 20 horizontally moving along the horizontal LM guide 19 fixed to the side plate 18 by the drive of the rodless cylinder 17. A pair of fingers which are installed to be able to move up and down according to the driving of the third cylinder 21 and to be movable left and right on the lifting block and hold the customer tray 3 on the mounting plate 16. 23 and finger drive means for operating the pair of fingers from side to side.

On the inner surface of the finger 23, a pair of locking pieces 24 are fitted into the locking grooves 3a formed on both sides of the customer tray 3 to hold the customer trays, respectively.

The finger driving means is provided between the divided fingers 23, the elastic member 25, such as a coil spring for retracting the finger in the state that no external force is applied, and the fourth cylinder 26 is installed between the fingers Rotating plate 27 is rotated in accordance with the driving of the rotating plate 27 and the LM guide 28 is installed on the connecting surface of the rotating plate and the lifting block to guide the left and right movement of the finger, the rotating plate Pins 29 connected to both ends of the finger 23 are fixed to 27, and a rod of a cylinder is fixed to one end of the rotating plate.

The finger 23 of the above-described structure is set such that the top dead center is positioned in the same manner as the unloading stage.

This means that the sorted elements can be directly transferred to the customer tray or above by the suction means without placing the customer tray held in the state where the finger 23 holds the customer tray 3 on the loading plate 16 and is transferred onto the unloading stage. The purpose is to reduce the cycle time as much as possible.

Transfer of the transfer of the structure as described above is controlled by the sensor 30a, 30b installed on both sides of the horizontal LM guide 19 to detect the transfer of the moving block 20, the finger 23 of the customer As the sensor 30a installed on the loading plate 16 side detects the moving block 20 while the tray 3 is held, the third and fourth cylinders 21 ( 26) are operated in sequence.

Referring to the operation of the present invention configured as described above is as follows.

First, one empty customer tray 3 is placed on the upper surface of each loading plate 16 and the fingers 23 of the transfer are opened as shown in FIG. 4 so that mutual interference does not occur when the loading plate 16 is elevated. Will work on.

For example, a defective product caused by "A" in the customer tray 3 placed on the uppermost loading plate among the plurality of loading plates 16, and "B" in the customer tray on the loading plate which is located below. Assume that the defective items caused by "," C "--- are contained one after another.

Therefore, when the defective device, which is caused by "A", is moved into the buffer in order as the device which is determined to be defective according to the test of the device is sequentially transferred into the buffer (not shown), the stacking plate located on the top side 16 The customer tray 3) is held by the transfer and transferred onto the unloading stage to contain the element filled in the buffer in the customer tray 3.

At this time, the central processing unit (CPU) issues a command to transfer the customer tray 3 mounted on the loading plate 16 located on the uppermost side to the unloading stage by the initially set program.

To this end, when the lifting plate 15 is driven along the guide rail 14 by the driving means, and the customer tray 3 mounted on the uppermost loading plate 16 reaches the holding point by transfer, the lifting plate 15 The rise of (15) is stopped.

The driving means is controlled as a sensor (not shown) installed at a customer tray holding point senses the customer tray.

In this way, after the customer tray 3 is raised to the holding position by the transfer, the third cylinder 21 is operated to pull the lifting block 22 downward, so that the locking piece fixed to the inner side of the finger 23 is fixed. 24 is located on the horizontal line of the locking groove 3a.

In this state, when the fourth cylinder 26 operates to rotate the pivoting plate 27, the fingers 23 which are opened to both sides while being pushed by the pin 29 fixed to the pivoting plate 25 are tensioned. Since the LM guide 28 is retracted inward by each other by the restoring force of the elastic member, the locking piece 24 is fitted into the locking groove 3a of the customer tray 3.

After holding the customer tray 3 placed on the uppermost side in the above-described operation, the lifting and lowering block 22 which is lowered rises with the driving of the third cylinder 21 and simultaneously drives the rodless cylinder 17. When the moving block 20 moves to the unloading stage side, the sensor 30b installed at one end of the horizontal LM guide 19 detects the transfer of the transfer and stops the drive of the rodless cylinder. A plurality of elements of which A ″ is a cause of failure are adsorbed and contained in the customer tray 3 supported by the pair of fingers 23.

On the other hand, if the defective product caused by "C" differs in the buffer in accordance with the test of the device which is continued after the above-described operation, the customer tray 3 placed on the loading plate 16 located at the third from the upper side is as described above. The operation must be exposed on the unloading stage, as described below.

First, the customer tray 3, which is held by the fingers 23 of the transfer and exposed on the unloading stage, is transferred to the top loading plate 16, and then on the loading plate 16 located third from the top. The customer tray must be held.

To this end, when the rodless cylinder 17 is driven to transfer the moving block 20 to the loading plate 16 side, the sensor 30a detects the transfer of the moving block so that the transfer of the moving block is stopped. .

When the transfer of the moving block is stopped, the third cylinder 21 is driven to lower the customer tray 3 held by the finger 23 to the bottom dead center, and at the same time, the finger 23 is driven by the fourth cylinder 26. ) Is spread on both sides, so that the customer tray 3 containing "A" defective product is placed on the top loading plate 16 as in the initial state.

In this state, the drive means is driven again by the control unit to contain the elevating plate 15 by the control unit, in order to contain the element having the cause of failure "C" in the customer tray 3 mounted on the third loading plate 16 from above. If not, the sensor is raised until it detects the customer tray 3 on the loading plate located third from the top.

As described above, after the elevating plate 15 is raised, the elevating block 22 is lowered to the bottom dead center by the driving of the third cylinder 21, and the fingers 23, which are spread on both sides of the elevating plate 22, are moved to the fourth cylinder ( The customer tray 3 of the stacking plate 16 located in the third position from the upper side is separated from the stacking plate because it is retracted inward by the driving of 26 and then rises again by the driving of the third cylinder 21.

As described above, the stroke of the elevating block 22 that is lifted and lowered by the driving of the third cylinder 21 separates the customer tray 3 mounted on each loading plate 16 and then moves the finger when the movable block 20 moves. Since the 23 and the loading plate 16 are set in a range not causing mutual interference, they are mutually interfered when the moving block 20 is moved to the unloading stage, which is the unloading position of the device, by the drive of the rodless cylinder 17. Will not cause.

After separating the customer tray 3 from the stacking plate 16 located in the third way as described above, the customer tray is transferred by the same operation as described above, so that the element "C" is the cause of the defect in the customer tray 3. Will be.

Thereafter, the operation of transferring the customer tray 3 exposed on the unloading stage onto the loading plate 16 and reducing the loading plate 16 to the initial state is the same as described above, and thus a detailed description thereof is omitted. Let's do it.

As described above, in the present invention, a plurality of stacking plates may be installed in a space in which one stacker is installed, and thus the defective devices may be classified and stored in a class, thereby making the size of the equipment compact and of course reducing the manufacturing cost. You get an effect.

Claims (3)

A pair of guide rails installed in a vertical direction on the mounting plate, a lifting plate provided to be elevated along the guide rails, a plurality of loading plates installed on the lifting plate in the form of a cantilever, on which a customer tray is placed, and the lifting plate Drive means for moving up and down, a movable block installed horizontally on one side of the loading plate, a lifting block mounted on the movable block to move up and down and moving up and down according to the driving of a third cylinder, and movable left and right on the lifting block. And a pair of fingers holding the customer tray on the mounting plate and a finger driving means for operating the pair of fingers from side to side. The method of claim 1, An unloading device for each class of a horizontal handler in which a top dead center of a finger is set to be positioned in the same manner as an unloading stage. The method of claim 1, An elastic member installed between the divided fingers to allow the fingers to retract in a state where no external force is applied, a rotating plate installed between the fingers to rotate the finger while rotating according to the driving of the fourth cylinder, and the rotating plate; Device unloading device for each level of a horizontal handler composed of LM guides installed on the connection surface of the elevating block to guide the left and right movement of the finger.