KR100267981B1 - method of fabricating liquid crystal display device - Google Patents

method of fabricating liquid crystal display device Download PDF

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KR100267981B1
KR100267981B1 KR1019970035159A KR19970035159A KR100267981B1 KR 100267981 B1 KR100267981 B1 KR 100267981B1 KR 1019970035159 A KR1019970035159 A KR 1019970035159A KR 19970035159 A KR19970035159 A KR 19970035159A KR 100267981 B1 KR100267981 B1 KR 100267981B1
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semiconductor layer
region
forming
substrate
exposed
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KR1019970035159A
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KR19990011905A (en
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장석필
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구자홍
엘지전자주식회사
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Thin Film Transistor (AREA)

Abstract

PURPOSE: A method of manufacturing liquid crystal display is provided to improve an aperture rate by making light be penetrated even at a common electrode line of a pixel region. CONSTITUTION: An island-shaped semiconductor layer is formed on a transparent substrate. A gate insulation film is formed on the semiconductor layer, and a photoresist film is coated on an entire surface. The gate insulation film where a bottom electrode is to be formed is exposed by patterning the photoresist film. Impurity is implanted on the semiconductor layer by use of the photoresist film as a mask. After removing the photoresist film, a polysilicon material and a silicide material are sequentially stacked on an entire surface of the substrate. A gate electrode and a common electrode line are formed by patterning the polysilicon material and the silicide material. Source an drain regions are formed by implanting ions on the exposed semiconductor layer. A part of the common electrode line is etched so that a part of the polysilicon may remain. The first interlayer insulation film(16) is deposited on an entire surface of the substrate(11) comprising the gate electrode. A source region of the semiconductor layer(12) is exposed by selectively removing the gate insulation film and the first interlayer insulation film(16). A data line(17) is formed so as to be connected to the source region of the exposed substrate. The second interlayer insulation film(18) is deposited on an entire surface of the substrate(11) comprising the data line(17). A drain region of the semiconductor layer(12) is exposed by selectively removing the gate insulation film and the first and second interlayer insulation films(16,18). A pixel electrode(19) is formed so as to be connected to the drain region of the exposed substrate.

Description

액정표시장치 제조방법{method of fabricating liquid crystal display device}Method of fabricating liquid crystal display device

본 발명은 액정표시장치에 관한 것으로 특히, 개구율을 효과적으로 향상시킬 수 있는 액정표시장치 제조방법에 관한 것이다.The present invention relates to a liquid crystal display device, and more particularly, to a method for manufacturing a liquid crystal display device that can effectively improve the aperture ratio.

일반적으로 액정표시장치는 박막트랜지스터와 화소전극이 배열되어 있는 하판과, 색상을 나타내기 위한 칼라필터 및 공통전극으로 구성된 상판과, 그리고 이 두 유리기판 사이에 채워져 있는 액정으로 구성되어 있으며 두 유리기판의 양쪽면에는 가시광선(자연광)을 선편광 시켜주는 편광판이 각각 부착되어 있다.In general, a liquid crystal display device is composed of a bottom plate on which a thin film transistor and a pixel electrode are arranged, a top plate composed of a color filter and a common electrode for displaying color, and a liquid crystal filled between the two glass substrates. Polarizing plates for linearly polarizing visible light (natural light) are attached to both sides of the substrate.

이와 같이 구성되는 종래기술에 따른 액정표시장치 제조방법을 첨부된 도면을 참조하여 설명하면 다음과 같다.Referring to the accompanying drawings, a liquid crystal display manufacturing method according to the related art, which is configured as described above, is as follows.

도 1a 내지 1f는 종래 기술에 따른 액정표시장치의 제조공정을 보여주는 공정단면도이다.1A to 1F are cross-sectional views illustrating a manufacturing process of a liquid crystal display according to the related art.

먼저, 도 1a에 도시된 바와 같이 유리 또는 석영 등의 투명기판(1)상에 다결정 실리콘 등의 반도체층(2)을 형성하고 패터닝하여 섬모양의 반도체층(2)을 형성한다.First, as shown in FIG. 1A, a semiconductor layer 2 such as polycrystalline silicon is formed and patterned on a transparent substrate 1 such as glass or quartz to form an island-like semiconductor layer 2.

이때, 반도체층(2)은 박막트랜지스터의 활성영역으로 이용되며 또한 스토리지 커패시터의 하부전극으로도 이용된다.In this case, the semiconductor layer 2 is used as an active region of the thin film transistor and is also used as a lower electrode of the storage capacitor.

그리고, 반도체층(2)상에 게이트 절연막(3)을 형성한 후, 도 1b에 도시된 바와 같이 전면에 감광막(4)을 도포하고 패터닝하여 스토리지 커패시터의 하부전극이 될 영역의 반도체층(2)상에 형성된 게이트 절연막(3)을 노출시킨다.After the gate insulating film 3 is formed on the semiconductor layer 2, the photoresist film 4 is coated and patterned on the entire surface as shown in FIG. 1B to pattern the semiconductor layer 2 in the region to be the lower electrode of the storage capacitor. The gate insulating film 3 formed on the top surface is exposed.

그리고, 감광막(4)을 마스크로 노출된 게이트 절연막(3)의 하부에 있는 반도체층(2)에 불순물(P 또는 B)을 이온주입한다.An impurity (P or B) is ion-implanted into the semiconductor layer 2 under the gate insulating film 3 with the photosensitive film 4 exposed as a mask.

이어, 도 1c에 도시된 바와 같이 감광막(4)을 제거하고 게이트 절연막(3)을 포함한 기판(1) 전면에 다결정 실리콘(5a) 및 실리사이드(silicide)물질(5b)을 차례로 증착하고 패터닝하여 게이트 전극(게이트 라인)(5) 및 공통전극 라인(5')을 형성한다.Subsequently, as illustrated in FIG. 1C, the photoresist film 4 is removed, and the polycrystalline silicon 5a and silicide material 5b are sequentially deposited and patterned on the entire surface of the substrate 1 including the gate insulating film 3. An electrode (gate line) 5 and a common electrode line 5 'are formed.

여기서, 공통전극 라인(5')은 스토리지 커패시터의 상부전극으로 이용된다.Here, the common electrode line 5 ′ is used as an upper electrode of the storage capacitor.

그리고, 도 1d에 도시된 바와 같이 게이트 전극(5)을 마스크로 반도체층(2)에 불순물(P 또는 B)을 이온주입하고 열처리하여 소오스 영역과 드레인 영역을 형성한다.1D, impurities (P or B) are ion-implanted into the semiconductor layer 2 using the gate electrode 5 as a mask and heat-treated to form a source region and a drain region.

이어, 도 1e에 도시된 바와 같이 게이트 전극(5)을 포함한 기판(1) 전면에 제 1 층간 절연막(6)을 증착하고 게이트 절연막(3) 및 제 1 층간 절연막(6)을 선택적으로 제거하여 반도체층(2)의 소오스 영역을 노출시킨 후, 제 1 층간 절연막(6)을 포함한 기판(1) 전면에 금속을 증착하고 패터닝하여 노출된 반도체층(2)의 소오스 영역과 연결되도록 데이터 라인(7)을 형성한다.Subsequently, as illustrated in FIG. 1E, the first interlayer insulating film 6 is deposited on the entire surface of the substrate 1 including the gate electrode 5, and the gate insulating film 3 and the first interlayer insulating film 6 are selectively removed. After exposing the source region of the semiconductor layer 2, the data line may be connected to the source region of the exposed semiconductor layer 2 by depositing and patterning a metal on the entire surface of the substrate 1 including the first interlayer insulating layer 6. 7) form.

그리고, 도 1f에 도시된 바와 같이 데이터 라인(7)을 포함한 기판(1) 전면에 제 2 층간 절연막(8)을 증착하고 게이트 절연막(3) 및 제 1, 제 2 층간 절연막(6,8)을 선택적으로 제거하여 반도체층(2)의 드레인 영역을 노출시킨 후, 제 2 층간 절연막(8)을 포함한 기판(1) 전면에 ITO와 같은 투명한 도전물질을 증착하고 패터닝하여 반도체층(2)의 드레인 영역과 연결되도록 화소 전극(9)을 형성하여 하판 제작을 완료한다.As shown in FIG. 1F, the second interlayer insulating film 8 is deposited on the entire surface of the substrate 1 including the data line 7, and the gate insulating film 3 and the first and second interlayer insulating films 6 and 8 are formed. Is selectively removed to expose the drain region of the semiconductor layer 2, and then a transparent conductive material such as ITO is deposited and patterned on the entire surface of the substrate 1 including the second interlayer insulating film 8 to form the semiconductor layer 2 The pixel electrode 9 is formed to be connected to the drain region to complete the lower plate fabrication.

종래 기술에 따른 액정표시장치 제조방법에 있어서는 다음과 같은 문제점이 있었다.The liquid crystal display device manufacturing method according to the prior art has the following problems.

화소영역에 형성되고 스토리지 커패시터의 상부전극으로 이용되는 공통전극 라인이 다결정 실리콘막과 실리사이드막의 이중막으로 이루어져 있으므로 빛이 통과하지 못하여 공통전극 라인이 차지하는 영역만큼 개구율이 감소된다.Since the common electrode line formed in the pixel area and used as the upper electrode of the storage capacitor is formed of a double layer of a polycrystalline silicon film and a silicide film, light does not pass and the aperture ratio is reduced by the area occupied by the common electrode line.

본 발명은 이와 같은 문제점을 해결하기 위하여 안출한 것으로 화소영역의 공통전극 라인에도 빛이 투과되도록 하여 개구율을 향상시킬 수 있는 액정표시장치 제조방법을 제공하는데 그 목적이 있다.An object of the present invention is to provide a method for manufacturing a liquid crystal display device which can improve aperture ratio by allowing light to pass through a common electrode line of a pixel region.

도 1a 내지 1f - 종래 기술에 따른 액정표시장치의 제조공정을 보여주는 공정단면도1A to 1F-Process cross-sectional view showing a manufacturing process of a liquid crystal display device according to the prior art

도 2a 내지 2g - 본 발명에 따른 액정표시장치의 제조공정을 보여주는 공정단면도2A to 2G-Process sectional view showing a manufacturing process of a liquid crystal display according to the present invention

도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings

11 : 기판 12 : 반도체층11 substrate 12 semiconductor layer

13 : 게이트 절연막 14 : 감광막13 gate insulating film 14 photosensitive film

15 : 게이트 전극 15a : 다결정 실리콘15 gate electrode 15a polycrystalline silicon

15b : 실리사이드 물질 15' : 공통전극 라인15b: silicide material 15 ': common electrode line

16 : 제 1 층간 절연막 17 : 데이터 라인16: first interlayer insulating film 17: data line

18 : 제 2 층간 절연막 19 : 화소 전극18. Second interlayer insulating film 19: Pixel electrode

본 발명에 따른 액정표시장치 제조방법은 기판상의 소정영역에 반도체층을 형성하고 반도체층상에 게이트 절연막을 형성하는 스텝과, 반도체층의 스토리지 커패시터 형성영역에 불순물을 이온주입하는 스텝과, 게이트 절연막상에 제 1 전극 물질과 제 2 전극 물질을 차례로 형성하고 패터닝하여 반도체층의 박막트랜지스터 형성영역 상부에 게이트 전극을 형성하고 반도체층의 스토리지 커패시터 형성영역 상부에 공통전극 라인을 형성하는 스텝과, 게이트 전극을 마스크로 반도체층에 불순물을 이온주입하여 박막트랜지스터의 소오스 영역과 드레인 영역을 형성하는 스텝과, 스토리지 커패시터 형성영역에 있는 공통전극 라인의 일정부분을 일정깊이만큼 제거하여 제 1 전극 물질의 일부분을 남기는 스텝과, 게이트 전극을 포함한 전면에 제 1 층간 절연막을 형성하고 패터닝하여 반도체층의 소오스 영역을 노출시키는 스텝과, 노출된 소오스 영역에 연결되도록 제 1 층간 절연막상에 데이터 라인을 형성하는 스텝과, 데이터 라인을 포함한 전면에 제 2 층간 절연막을 형성하고 패터닝하여 반도체층의 드레인 영역을 노출시키는 스텝과, 노출된 드레인 영역에 연결되도록 제 2 층간 절연막상의 화소영역에 화소전극을 형성하는 스텝으로 이루어짐에 그 특징이 있다.A method of manufacturing a liquid crystal display device according to the present invention includes the steps of forming a semiconductor layer in a predetermined region on a substrate, forming a gate insulating film on the semiconductor layer, implanting impurities into the storage capacitor formation region of the semiconductor layer, and forming a gate insulating film. Forming a gate electrode over the thin film transistor forming region of the semiconductor layer by sequentially forming and patterning a first electrode material and a second electrode material in the semiconductor layer, and forming a common electrode line over the storage capacitor forming region of the semiconductor layer; Implanting impurities into the semiconductor layer using a mask to form a source region and a drain region of the thin film transistor, and removing a portion of the common electrode line in the storage capacitor forming region to a predetermined depth to remove a portion of the first electrode material. Step left and the first layer on the front surface including the gate electrode Forming and patterning a smoke layer to expose a source region of the semiconductor layer, forming a data line on the first interlayer insulating layer so as to be connected to the exposed source region, and forming a second interlayer insulating layer on the entire surface including the data line. And patterning the semiconductor substrate to expose the drain region of the semiconductor layer, and forming a pixel electrode in the pixel region on the second interlayer insulating layer to be connected to the exposed drain region.

상기와 같은 특징을 갖는 액정표시장치 제조방법을 첨부된 도면을 참조하여 설명하면 다음과 같다.Referring to the accompanying drawings, a method of manufacturing a liquid crystal display device having the above characteristics is as follows.

도 2a 내지 2f는 본 발명에 따른 액정표시장치의 제조공정을 보여주는 공정단면도이다.2A through 2F are cross-sectional views illustrating a manufacturing process of a liquid crystal display according to the present invention.

여기서, 도 2a 내지 2d는 종래 기술인 도 1a 내지 1d와 제조 공정이 동일하므로 설명은 생략하도록 하고, 본 발명의 특징인 도 2e의 공정부터 설명하기로 한다.Here, FIGS. 2A to 2D are the same as those of the prior art FIGS. 1A to 1D, and thus the description thereof will be omitted and will be described from the process of FIG. 2E.

도 2e에 도시된 바와 같이, 다결정 실리콘(15a)과 실리사이드(silicide)물질(15b)로 이루어진 공통전극 라인(15')의 일정부분을 일정깊이만큼 제거하여 다결정 실리콘(15a)의 일부분을 남긴다.As shown in FIG. 2E, a portion of the common electrode line 15 ′ formed of the polycrystalline silicon 15a and the silicide material 15b is removed to a certain depth to leave a portion of the polycrystalline silicon 15a.

여기서, 공통전극 라인(15')의 일정부분이 제거되는 영역은 화소내에서 스토리지 커패시터 상부전극으로 사용되는 영역이다.Here, an area where a portion of the common electrode line 15 ′ is removed is an area used as a storage capacitor upper electrode in the pixel.

화소영역내의 공통전극 라인(15')을 제거하는 이유는 공통전극 라인(15')을 이루는 실리사이드 물질(15b)과 다결정 실리콘(15a)의 일부분이 제거되면 다결정 실리콘(15a)의 일부분만이 얇은 두께로 남게 되어 빛이 투과되기 때문이다.The reason for removing the common electrode line 15 'in the pixel region is that when the silicide material 15b and the portion of the polycrystalline silicon 15a constituting the common electrode line 15' are removed, only a portion of the polycrystalline silicon 15a is thin. This is because light is transmitted through the remaining thickness.

빛이 투과된다는 것은 그 만큼 개구율이 향상됨을 의미한다.Transmitting light means that the aperture ratio is improved by that amount.

이어, 도 2f에 도시된 바와 같이, 게이트 전극(15)을 포함한 기판(11) 전면에 제 1 층간 절연막(16)을 증착하고 게이트 절연막(13) 및 제 1 층간 절연막(16)을 선택적으로 제거하여 반도체층(12)의 소오스 영역을 노출시킨 후, 제 1 층간 절연막(16)을 포함한 기판(11) 전면에 금속을 증착하고 패터닝하여 노출된 반도체층(12)의 소오스 영역과 연결되도록 데이터 라인(17)을 형성한다.Subsequently, as shown in FIG. 2F, the first interlayer insulating film 16 is deposited on the entire surface of the substrate 11 including the gate electrode 15, and the gate insulating film 13 and the first interlayer insulating film 16 are selectively removed. To expose the source region of the semiconductor layer 12, and then deposit and pattern a metal on the entire surface of the substrate 11 including the first interlayer insulating layer 16 to connect the source line of the exposed semiconductor layer 12. (17) is formed.

그리고, 도 2g에 도시된 바와 같이 데이터 라인(17)을 포함한 기판(11) 전면에 제 2 층간 절연막(18)을 증착하고 게이트 절연막(13) 및 제 1, 제 2 층간 절연막(16,18)을 선택적으로 제거하여 반도체층(12)의 드레인 영역을 노출시킨 후, 제 2 층간 절연막(18)을 포함한 기판(11) 전면에 ITO와 같은 투명한 도전물질을 증착하고 패터닝하여 반도체층(12)의 드레인 영역과 연결되도록 화소 전극(19)을 형성하여 하판 제작을 완료한다.As shown in FIG. 2G, the second interlayer insulating film 18 is deposited on the entire surface of the substrate 11 including the data line 17, and the gate insulating film 13 and the first and second interlayer insulating films 16 and 18 are formed. Is selectively removed to expose the drain region of the semiconductor layer 12, and then a transparent conductive material such as ITO is deposited and patterned on the entire surface of the substrate 11 including the second interlayer insulating film 18 to form the semiconductor layer 12. The lower electrode is completed by forming the pixel electrode 19 to be connected to the drain region.

본 발명에 따른 액정표시장치 제조방법에 있어서는 다음과 같은 효과가 있다.The liquid crystal display device manufacturing method according to the present invention has the following effects.

실리사이드막과 다결정 실리콘으로 이루어져 빛의 투과를 차단하는 화소영역 내의 공통전극 라인의 일부분이 일정깊이로 제거되어 빛이 투과되므로 개구율이 향상된다.A portion of the common electrode line in the pixel region, which is made of the silicide film and the polycrystalline silicon to block the light transmission, is removed to a predetermined depth so that the light transmits the aperture ratio.

Claims (2)

기판상의 소정영역에 반도체층을 형성하고 상기 반도체층상에 게이트 절연막을 형성하는 스텝;Forming a semiconductor layer in a predetermined region on the substrate and forming a gate insulating film on the semiconductor layer; 상기 반도체층의 스토리지 커패시터 형성영역에 불순물을 이온주입하는 스텝;Implanting impurities into the storage capacitor formation region of the semiconductor layer; 상기 게이트 절연막상에 제 1 전극 물질과 제 2 전극 물질을 차례로 형성하고 패터닝하여 상기 반도체층의 박막트랜지스터 형성영역 상부에 게이트 전극을 형성하고 상기 반도체층의 스토리지 커패시터 형성영역 상부에 공통전극 라인을 형성하는 스텝;A first electrode material and a second electrode material are sequentially formed and patterned on the gate insulating layer to form a gate electrode on the thin film transistor forming region of the semiconductor layer, and a common electrode line on the storage capacitor forming region of the semiconductor layer. Step to do; 상기 게이트 전극을 마스크로 상기 반도체층에 불순물을 이온주입하여 박막트랜지스터의 소오스 영역과 드레인 영역을 형성하는 스텝;Implanting impurities into the semiconductor layer using the gate electrode as a mask to form a source region and a drain region of the thin film transistor; 상기 스토리지 커패시터 형성영역에 있는 공통전극 라인의 일정부분을 일정깊이만큼 제거하여 제 1 전극 물질의 일부분을 남기는 스텝;Removing a portion of the common electrode line in the storage capacitor forming region to a predetermined depth to leave a portion of the first electrode material; 상기 게이트 전극을 포함한 전면에 제 1 층간 절연막을 형성하고 패터닝하여 상기 반도체층의 소오스 영역을 노출시키는 스텝;Forming and patterning a first interlayer insulating film on the entire surface including the gate electrode to expose a source region of the semiconductor layer; 상기 노출된 소오스 영역에 연결되도록 상기 제 1 층간 절연막상에 데이터 라인을 형성하는 스텝;Forming a data line on the first interlayer insulating layer to be connected to the exposed source region; 상기 데이터 라인을 포함한 전면에 제 2 층간 절연막을 형성하고 패터닝하여 상기 반도체층의 드레인 영역을 노출시키는 스텝;Forming and patterning a second interlayer insulating film on the entire surface including the data line to expose a drain region of the semiconductor layer; 상기 노출된 드레인 영역에 연결되도록 상기 제 2 층간 절연막상의 화소영역에 화소전극을 형성하는 스텝을 포함하여 이루어짐을 특징으로 하는 액정표시장치 제조방법.And forming a pixel electrode in the pixel region on the second interlayer insulating layer so as to be connected to the exposed drain region. 제 1 항에 있어서, 상기 공통전극 라인의 제 1 전극 물질은 다결정 실리콘이고 제 2 전극 물질은 실리사이드막임을 특징으로 하는 액정표시장치 제조방법.The method of claim 1, wherein the first electrode material of the common electrode line is polycrystalline silicon and the second electrode material is a silicide film.
KR1019970035159A 1997-07-25 1997-07-25 method of fabricating liquid crystal display device KR100267981B1 (en)

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US7612377B2 (en) 2005-01-31 2009-11-03 Samsung Electronics Co., Ltd. Thin film transistor array panel with enhanced storage capacitors
US7935581B2 (en) 2006-08-11 2011-05-03 Samsung Mobile Display Co., Ltd. Method of fabricating thin film transistor array substrate

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TW493282B (en) * 2000-04-17 2002-07-01 Semiconductor Energy Lab Self-luminous device and electric machine using the same

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JPH03101715A (en) * 1989-09-14 1991-04-26 Fujitsu Ltd Thin film transistor matrix and its manufacture
JPH0444014A (en) * 1990-06-11 1992-02-13 Toshiba Corp Active matrix type liquid crystal display device

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JPH03101715A (en) * 1989-09-14 1991-04-26 Fujitsu Ltd Thin film transistor matrix and its manufacture
JPH0444014A (en) * 1990-06-11 1992-02-13 Toshiba Corp Active matrix type liquid crystal display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7612377B2 (en) 2005-01-31 2009-11-03 Samsung Electronics Co., Ltd. Thin film transistor array panel with enhanced storage capacitors
US7935581B2 (en) 2006-08-11 2011-05-03 Samsung Mobile Display Co., Ltd. Method of fabricating thin film transistor array substrate

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