KR100255912B1 - Injurious material removing device - Google Patents

Abstract

The present invention is configured so that the harmful substances contained in the gas generated in the semiconductor device manufacturing process and the like contact with the entire harmful substance treatment material filled in the casing effectively, thereby increasing the utilization rate of the hazardous substance treatment material, thereby realizing high processing capacity and long life. It is an object of the present invention to provide a pest removal device.

The present invention provides a hazardous substance removal device including a conventional casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or agglomerate processing material filled in the casing and simultaneously adsorbing or decomposing harmful substances. Inlet inlet is provided with an inlet obstruction plate covering the inlet from the inside, and at the same time, a chargeable part of the treatment material is provided with a peripheral obstruction plate protruding in the inlet of the treatment material from the inner circumferential surface of the casing at least at an upper portion of the upper portion, an upper middle portion, or a lower portion thereof. It is characterized by.

Description

Pest removal device

1 is a cross-sectional view of a pest removing device according to an embodiment of the present invention.

Figure 2 is an enlarged cross-sectional view of the support plate of the pest removing device according to an embodiment of the present invention.

3 is a cross-sectional view of a pest removing device according to another embodiment of the present invention.

4 is a block diagram of a pest removal system to which the present invention and the prior art are applied.

5 is a cross-sectional view of a conventional example.

* Explanation of symbols for main parts of the drawings

4: pest removal device 41: casing

42: pesticide 43: inlet

44 outlet 46 support plate

47: hole plate 48: foot

49: entrance block 50,51: surrounding block

[Industrial use]

The present invention relates to an apparatus for removing harmful substances effectively removing harmful substances contained in a gas generated in a semiconductor device manufacturing process.

[Prior art]

In recent years, computers and electronic control devices using the same have been developed to open eyes, and the direction and scope of the development are considered to be infinitely spread.

For this reason, the manufacturing technology and production volume of semiconductor electronic devices, which occupy a major position as electronic parts used in computers, are also growing rapidly.

Germanium (Ge) and silicon (Si) are widely used as semiconductors used as raw materials for these semiconductor devices, and gallium arsenide (GaAs), gallium phosphorus (GaP), and the like are also used as special devices.

The semiconductor device manufacturing process includes, for example, a semiconductor pillar forming step of forming a cylinder of a semiconductor, a wafer forming step of slicing the semiconductor wafer, and a plurality of steps by repeating masking, thin film formation, doping, and etching on the semiconductor wafer. An element forming step of forming an element, and a cutting process of dividing the semiconductor wafer on which the element is formed into each element.

In such a semiconductor manufacturing process, it is known that very fine particulate dust of, for example, about 0.01 to 50 µm is generated, and the particulate dust is itself a harmful substance which is prohibited from dispersing in view of pollution prevention or contains it. It is known that the gas to be adsorbed or adsorbs or adsorbs harmful substances in the atmosphere.

Examples of the harmful substances used or produced in the semiconductor manufacturing process include silicon, arsenic, phosphorus, boron, metal hydrogen, fluorine, halogen, halides, nitrogen oxides, and the like.

Silicon-based noxious gases include mono-silane (SiH ₄ ), dichlorosilane (SiHCl ₂ ), silicon trichloride (SiHCl ₃ ), silicon tetrachloride (SiCl ₄ ), hydrogen tetrafluoride (SiF ₄ ), and disilane (Si ₂ H ₆ ), TEOS (Si (OC ₂ H ₅ ) ₄ ), and the like.

Arsenic harmful gases include arsine (AsH ₃ ), arsenic fluoride (III) (AsF ₃ ), arsenic fluoride (V) (AsF ₅ ), arsenic chloride (III) (AsCl ₃ ), and arsenic chloride (V) ( AsCl ₅ ) and the like, phosphine (PH ₃ ), phosphorus (III) fluoride (PF ₃ ), phosphorus (V) (PF ₅ ), phosphorus (III) (PCl ₃ ), chloride Phosphorus (V) (PCl ₅ ), phosphorus oxychloride (POCl ₃ ), and the like are representative.

Boron-based noxious gases include diboron (B ₂ H ₆ ) and boron trifluoride (BF ₃ ). Boron trichloride (BCl ₃ ), boron tribromide (BBr ₃ ), and the like are typical, and examples of the metal-based toxic gases include hydrogen serene (H ₂ Se), monogerman (GeH ₄ ), and hydrogen teroxide (H ₂ Te). ), Styrene (SbH ₃ ), tin hydride (SnH ₄ ) and the like, and examples of fluorinated toxic gases include methane tetrafluoride (CF ₄ ), methane trifluoride (CHF ₃ ) and methane difluoride (CH _2). the F _2), 6-fluorinated propane _{(C 3 H 2 F 6)} , 8 -fluorinated propane (C ₃ F _8), etc. can be cited as an example.

Halogens and halides that are hazardous gases include fluorine (Fa), hydrogen fluoride (HF), chlorine (Cl ₂ ), hydrogen chloride (HCl), carbon tetrachloride (CCl ₄ ), hydrogen bromide (HBr), and nitrogen trifluoride (NF). ₃ ), sulfur tetrafluoride (SF ₄ ), sulfur hexafluoride (SF ₆ ), tungsten hexafluoride (VI) (WF ₆ ), molybdenum hexafluoride (VI) (MoF ₆ ), germanium tetrachloride (GeCl ₄ ), tin tetrachloride (SnCl ₄ ), antimony pentachloride (V) (SbCl ₅ ), tungsten hexachloride (VI) (WCl ₆ ), molybdenum hexachloride (MoCl ₆ ), and the like.

Nitrogen oxides, which are harmful gases, include nitrogen monoxide (NO), nitrogen dioxide (NO ₂ ), and dinitrogen monoxide (N ₂ O). Other harmful gases include hydrogen sulfide (H ₂ S) and ammonia (NH _3). ), Trimethylamine (CH ₃ ) ₃ N and the like.

In addition, the fine particles in the atmosphere containing flammable ethane (C ₂ H ₆ ), propane (C ₃ H ₈ ), nitrogen (N ₂ ), oxygen (O ₂ ), argon (Ar), carbon dioxide (CO ₂ ) It is known that dust is produced.

Today, when the spirit of pollution prevention is thorough, these harmful components and dust containing dust are not allowed to be released into the atmosphere as they are, and as shown in FIG. 4, from the exhaust gas generating source 1 to the pump 2 The exhaust gas is taken out, dust is removed from the exhaust gas by the dust collector 3, and further oxidized, reduced, sorbed, and adsorbed by the harmful component removal apparatus 4 to be discharged as a safe and clean gas. Is required.

As the dust collector, a known dust collector such as a cyclone, a scrubber, a venturi scrubber, a bag filter, an electrostatic precipitator, a louver, a settling chamber may be used, but the particle size that can be collected is finer, the dust collection capability is higher, and the laying area is more than that. It is preferable to use the fine particle dust processing apparatus concerning this small applicant's source (Japanese Patent Application Laid-Open No. 5-113927).

As shown in FIG. 5, the above-mentioned harmful substance removal apparatus is used by filling the hazardous substance treatment material 102 in the cylindrical casing 101. As shown in FIG.

The casing 101 has an inlet 103 at the lower end, an outlet 104 at the upper end, and is provided with a retaining frame 105 fixed to the lower part of the inner circumference.

And the support plate 106 which consists of a perforated plate is provided in this holding | maintenance frame 105, and the harmful substance treatment material 102 is supported by this support plate 106. As shown in FIG.

The pest treatment material 102 is composed of, for example, a substrate formed in a granular form or agglomerate with a particle diameter of about 5 to 18 mm, and a pest treatment material supported thereon. The substrate is made of, for example, activated carbon ceramics, synthetic resin, or the like. Platinum catalysts, alkali metal silicates, metal phosphates, and the like are often used as the treatment materials.

[Problems that the invention tries to solve]

In this conventional harmful substance removal device, the flow path in which exhaust gas containing harmful components is directed from the inlet 103 of the casing 101 to the outlet 104 directly (indicated by the fine hatching of the pitch in FIG. 5) Although it is easy to flow while forming the 108, the efficiency is poor because the flow path formation range is narrow, and furthermore, the ability to remove the pests decreases within a short time with little treatment ability of the hazardous material 102 around the flow path 108 being exhibited. There is a drawback to destroy and shorten the life.

In addition, in the conventional harmful substance removal device, the inlet 103 is provided at the lower end of the casing 101, the outlet 104 is provided at the upper end, and the exhaust gas is prevented from exiting the flow path 108 by the action of atmospheric pressure. The exhaust gas is also brought into contact with the noxious substance treatment material 102 other than the flow path 108 in the casing 101. However, since the pressure of the pump 2 acts on the exhaust gas, there is almost no effect on increasing the effect.

Further, in the conventional hazardous substance removing apparatus, since the support plate 106 supporting the hazardous substance treatment material is a perforated plate, no exhaust gas flows into the portion corresponding to the non-opening portion, and the opening portion has granular or lump-like treatment material. As a result of the abutment prevention, the utilization efficiency of the harmful treatment material is lowered, which is disadvantageous in terms of increasing the efficiency, and at the same time, it is disadvantageous in terms of extending the breakdown time and extending the life.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described technical problem, and in that the harmful substances contained in the gas generated in the semiconductor device manufacturing process or the like are configured to contact the whole harmful substance treatment material filled in the casing most effectively, thereby increasing the utilization rate of the harmful substance treatment material, It is an object of the present invention to provide an apparatus for removing harmful substances that can realize high processing capacity and long life.

[Means for solving the problem]

In order to achieve the above object, the apparatus for removing harmful substances of the present invention takes the technical means described below.

That is, the first pest removal device of the present invention includes a normal casing having an inlet at one end and an outlet at the other end, and a filling part of granular or lump-like processing material for adsorbing or pulverizing the pest at the same time. In one pest removal apparatus, an inlet obstruction plate is provided at the inlet of the casing to cover the inlet from the inside thereof, and at the same time, the filling part of the treatment material is filled with the treatment material on the inner circumferential surface of the casing at least in the upper part, the upper and lower middle part, or the lower part. It is characterized in that a peripheral disturbance plate protruding from the member is provided.

The second pest removal device of the present invention includes a normal casing having an inlet at one end and an outlet at the other end, and a filling part of granular or lump-like processing material filled in the casing and adsorbing or decomposing harmful substances at the same time. In a noxious substance removal device, a support plate for receiving a noxious substance treatment material is disposed in the lower portion of the casing, and the support plate has a perforated plate and a foot protruding upward from the upper surface thereof.

The third pest removal device of the present invention has a conventional casing having an inlet at one end and an outlet at the other end, and a filling part of granular or agglomerate treatment material filled in the casing and adsorbing or decomposing the pest at the same time. In the removal apparatus, an inlet obstruction plate covering the inlet at the inlet of the casing, and a support plate receiving the hazardous substance treatment material at the lower portion of the casing are disposed so that the support plate protrudes upward from the upper plate and the upper surface thereof. Characterized in having a.

The fourth pest removal device of the present invention includes a conventional casing having an inlet at one end and an outlet at the other end, and a filling part of granular or agglomerate treatment material filled in the casing and adsorbing or decomposing the pest at the same time. In the removal apparatus, the filling part of the processing material includes a peripheral blockage plate protruding into the filling part of the processing material on the inner circumferential surface of the casing on at least an upper portion, an upper middle portion or a lower portion thereof, and a support tube receiving the hazardous material treatment material on the lower portion of the casing. It is arrange | positioned and this support plate is characterized by having a perforated plate and the foot which protrudes upwards from the upper surface of this.

The fifth pest removal device of the present invention has a conventional casing having an inlet at one end and an outlet at the other end, and a filling part of granular or agglomerate treatment material filled in the casing and adsorbing or decomposing the pest at the same time. In the removal device, the entrance of the casing is an inlet obstruction plate covering the inlet from the inside, and in the charging portion of the processing material, the peripheral obstruction protruding into the charging portion of the processing material from the inner circumferential surface of the casing on at least an upper portion of the upper or upper middle portion or lower portion thereof. A plate and a support plate which receives a hazardous substance treatment material are arranged in the lower part of the said casing, and this support plate has a perforated plate and the foot which protrudes upwards from the upper surface thereof.

According to the sixth hazardous substance removing apparatus of the present invention, in each of the hazardous substance removing apparatuses, the outlet is provided at one end and the outlet is installed at one end instead of having the inlet at one end and the outlet at the other end. Characterized in that the filling section is provided by a passage communicating from the outlet side of the processing gas to the outlet of the one end.

It will be described below in more detail to clarify the present invention.

The inlet of the harmful substance removing device of the present invention is connected to a harmful substance generating source for generating exhaust gas including harmful substances.

The source of harmful substances is not particularly limited as long as it generates exhaust gas containing harmful substances. For example, the source of harmful substances is used in the gas phase growth processing chamber, the plasma gas phase growth processing chamber, and the element formation process used in the semiconductor pillar forming process in the semiconductor manufacturing process. As a typical example, a thin film formation process chamber, a doping process chamber, an etching process chamber, a plasma etching process chamber, the washing process chamber used in the washing process in each process or between each process are mentioned.

The inlet of the pest removal device of the present invention may be directly connected to these sources, but when the source of issue of the pests generates dust at the same time, clogging caused by dust or dust attached to the pests is prevented from passing through the pest removal device. Therefore, it is preferable to connect the dust generating source with the dust collector in between.

This dust collector is not a direct problem in the present invention, and its detailed description is omitted.

The outlet of the harmful substance removal device of the present invention may be directly communicated with the atmosphere, or may be communicated with another hazardous substance removal device and a silencer.

The phenomenon of the casing may be a tubular shape, for example, a polygonal tubular shape of 4, 6, or 8 angles may be good, and an elliptic cylindrical shape may be used, but the center of the shaft is centered so as to proceed evenly as the degradation of the pest treatment material may occur. Therefore, it is preferable to form the cylindrical shape equally in all directions, and it is preferable that the inlet and the outlet are provided coaxially with the casing.

Although the material of the casing is not particularly limited, it is preferable to have airtightness, chemical resistance, acid resistance, alkali resistance, weather resistance and sufficient mechanical strength, for example, iron subjected to corrosion treatment such as fiber reinforced synthetic fiber, rubber lining, Metals, such as steel bars containing stainless steel, can be used. In these, it is more preferable that the process of cleaning etc. inside and outside is easy or unnecessary, for example, many stainless steels are used.

It is sufficient that the above-mentioned hazardous substance treatment material is used conventionally, for example, the thing which supported the processing agent on the lump-like base material in granular form is used.

Although the substrate itself may be one that does not have the ability to adsorb or soak the harmful substances, it is preferable to use one having the ability to adsorb or soak the harmful substances by itself in terms of enhancing the treatment capacity. As a base material which has the ability to adsorb | suck a pest or adsorb | sucks a harmful substance, activated carbon, ceramics, a zeolite, alumina, an acidic clay, etc. are mentioned, for example.

Moreover, you may use what formed the processing agent mentioned later as a base material in granular form or lump form.

As the treatment agent, metal phosphates such as aluminum phosphate, aluminosilicates, alkali metal silicates, platinum catalysts and the like are frequently used.

As another processing agent, the following are mentioned as the example.

That is, as an oxide of group I, group II, group III, or group IV of the periodic table such as Na ₂ O, K ₂ O, CaO, MgO, CuO, Ag ₂ O, alumina, zirconium oxide, or a compound containing these oxides , (Mc ₁ ) x (Mc ₂ ) y (O) z, and the like are used.

However, Mc ₁ is an element of Group I, II or III, and Mc ₂ is Group III carbon (C) such as aluminum (An), silicon (Si), titanium (Ti), zirconium (Zr), or the like. Is a Group V element such as Group IV, phosphorus (P), vanadium (V), O is oxygen, and x, y, and z are each an integer.

In the first noxious substance removal device of the present invention, an appropriate distance is provided between the inlet of the casing and the charging portion of the treatment material filled with the hazardous treatment material, and is disposed at appropriate distances from the inlet and the charging portion of the treatment material, respectively. The inlet baffle plate and the filling part of the processing material are provided by at least an upper part of the upper part, an upper middle part or a lower part of the lower part of the processing material.

The inlet baffle plate is required to cover the inlet of the casing from the inside, but it is not necessary to cover the inlet entirely, and it is sufficient that the inlet baffle is formed to have a size that can disperse the flow of exhaust gas flowing from the inlet in the center of the casing.

In addition, the shape of the inlet baffle plate is not particularly limited, and may be formed in a net shape, a polygonal shape or an oval shape when viewed from the inlet side, and it is preferable that the inlet baffle plate is formed concentrically with the inlet to distribute the exhaust gas evenly.

Further, the entrance barrier plate may be, for example, a three-dimensional plate such as a cone or a seat plate, but is preferably formed in a flat plate shape that can simplify the shape and reduce the cost.

In this way, the inlet baffle covers the inlet of the casing from the inside, so that the exhaust gas containing the harmful substances is spread over the whole of the filling portion of the treatment material and is prevented from passing through only a specific portion of the filling portion of the treatment material, and the removal efficiency of the harmful substance is satisfactorily. Will be.

In addition, since the inner circumferential surface of the casing is smooth, a flow path having a smaller flow resistance is formed between the inner circumferential surface of the casing and the pesticide treatment material than the flow path formed between the pesticide treatment material in the filling portion of the treatment material depending on the shape of the treatment material. Exhaust gas flows through the flow path between the inner circumferential surface of the casing with a low resistance and the pesticide treatment material, thereby degrading the treatment efficiency and causing the periphery of the filling part of the treatment material to be easily broken in a short time.

In the first harmful substance removal apparatus of the present invention, the charging section of the treatment material is provided with a peripheral disturbance plate protruding into the charging section of the treatment material from the inner circumferential surface of the casing at least at an upper portion, an upper middle portion, or a lower portion thereof.

In this case, it is preferable that the peripheral disturbance plate is provided at an angle from the base end toward the tip so that the movement of the exhaust gas is directed to the inside of the processing material.

In addition, in the case of the perforated plate of the support plate for supporting the hazardous substance treatment material, no exhaust gas flows into the portion corresponding to the non-opening portion, and the opening portion is directly contacted and prevented by the granular or lump-like treatment material. It is disadvantageous in that the utilization efficiency is lowered and the efficiency is increased, and at the same time, it is disadvantageous in that the breakdown time is extended and the life is extended.

Here, in the second noxious substance removal device of the present invention, the most important feature is that a supporting plate receiving the hazardous material is disposed in the lower portion of the casing, and the support plate has a foot that protrudes upward from the perforated plate and its upper surface. Have

In this way, since the filling part of the processing material is supported by the foot from the perforated plate, most of the flow paths formed in the filling part of the processing material are not blocked by the non-opening part of the perforated plate, but are opened and collected between the eyes of the foot (Euro collection effect). In addition, the inflow of the exhaust gas into the filling portion of the treating material and the outflow of the filling portion rotor of the treating material of the exhaust gas are not partially blocked, thereby allowing the exhaust gas to flow on an average throughout the filling portion of the filling material of the treating material.

In addition, the height of the foot needs to be set so as to support the pest treatment material from the perforated plate, and the height of the foot is preferably 3 to 30 mm, particularly 5 to 15 mm.

If the height of the foot is less than 3 mm, the eyes of the foot need to be made small and the flow resistance may increase, which is undesirable. On the other hand, when the height of the foot exceeds 30 mm, the flow path effect by the foot reaches its limit. It is not preferable because the material cost of the foot is higher than that can not be increased further.

In the third harmful substance removal device of the present invention, in particular, an inlet obstruction plate covering the inlet from the inside of the casing and a support plate receiving the hazardous substance treatment material in the lower portion of the casing are disposed, and the support plate includes a perforated plate, It has the biggest feature in that it installs the foot which protrudes upwards from the upper surface.

In other words, this includes the inlet obstruction plate and the support plate receiving the pest treatment material in the lower part of the casing, and further includes the harmful substances by the synergistic effect by installing the perforated plate of the support plate and the foot protruding upward from the upper surface thereof. Since the exhaust gas can be distributed to the entire filling part of the treatment material, the utilization rate of the hazardous substance treatment material can be increased, and thus, high treatment capacity and long life can be realized. Examples of the inlet obstruction plate and the support plate include the above.

In the fourth harmful substance removing device of the present invention, in particular, in the charging portion of the hazardous material treatment, at least an upper portion, an upper middle portion, or a lower portion, a peripheral blockage plate protruding from the inner circumferential surface of the casing into the charging portion of the treatment material and the lower portion in the casing. The support plate which receives a pesticide processing material is arrange | positioned at this, and this support plate has the largest characteristic in that it has a hole and the foot which protrudes upwards from the upper surface.

That is, this is made by placing a support plate receiving the pest treatment material at the lower part of the surrounding obstruction plate and the casing, and the support plate is provided with a perforated plate and a foot protruding upward from the upper surface thereof to further contain the harmful matter by the synergistic effect. Since the exhaust gas can be distributed to the whole filling part of the treatment material, the utilization rate of the hazardous substance treatment material can be increased, and therefore, high treatment capacity and long life can be realized.

The above-mentioned thing can be mentioned here as a peripheral obstruction plate and a support plate.

In the fifth noxious substance removal device of the present invention, an inlet obstruction plate covering the inlet of the inlet at the inlet of the casing, and a filling part of the treatment material at the inner circumferential surface of the casing at least at an upper portion of the casing or at the upper or lower middle portion thereof. A peripheral obstruction plate protruding in the live part, and a support plate receiving the hazardous treatment material at the lower portion of the casing are disposed so that the support plate has a perforated plate and a foot protruding upward from the upper surface thereof.

That is, this means that the inlet baffle plate and the charging part of the processing material have a peripheral baffle projecting from the inner circumferential surface of the casing into the charging part of the processing material on at least an upper part of the upper or upper middle part or the lower part thereof, and a support plate receiving the hazardous material on the lower part of the casing. And the support plate has a foot that protrudes upward from the perforated plate and its upper surface, and the synergistic effect thereof makes it possible to further distribute the exhaust gas containing the harmful substance to the whole filling part of the treatment material. In addition, the higher processing capacity and longer lifespan can be realized.

Here, the above-mentioned ones can be mentioned as the entrance barrier plate, the peripheral barrier plate, and the support plate.

The sixth hazardous substance removing device of the present invention includes the inlet at one end and the outlet at the same time, instead of having the inlet at one end and the outlet at the other end, the outlet is installed at the one end and the filling part of the treatment material. In this case, a passage communicating with the outlet of one end is provided on the outlet side of the processing gas, and in addition to the above effects of the respective harmful removal devices, the installation space is further reduced, or the attachment of each harmful removal device is further eliminated. It is to be easy.

In the apparatus for removing harmful substances of the present invention, it has the above-described configuration, and the inlet baffle plate and the treatment material filling part have a peripheral baffle that protrudes into the filling part of the treatment material from the inner circumferential surface of the casing on at least an upper portion thereof, an upper middle portion, or a lower portion thereof. Since the exhaust gas containing the harmful substance can be distributed to the whole filling part of the processing material, the contact between the harmful processing material and the exhaust gas can be effectively performed.

In the apparatus for removing harmful substances of the present invention, when a support plate receiving a pest treatment material is disposed in the lower part of the casing, and the support plate has a foot protruding upward from the hole plate and its upper surface, the filling part of the treatment material is lifted by the foot from the hole plate. Since most of the flow path formed in the filling portion of the processing material is not blocked by the non-opening portion of the perforated plate, it is opened and collected between the eyes of the foot (euro aggregation effect) so that the exhaust gas flows into the filling portion of the treating material or exhausts. It has the effect | action which can make exhaust gas flow on the average throughout the whole filling part of processing material, without the outflow from the filling part of the processing material of gas being partially blocked.

In the apparatus for removing harmful substances of the present invention, in particular, an inlet obstruction plate covering the inlet is provided at the inlet of the casing, and a support plate receiving the hazardous substance treatment material at the lower portion of the casing is disposed, and the support plate is upwardly from the perforated plate and its upper surface. By providing a protruding foot, the synergistic effect makes it possible to further distribute the exhaust gas containing the harmful substances to the whole filling part of the treatment material, so that the contact with the exhaust gas and the hazardous substance treatment material becomes better and the harmful substances can be efficiently removed. It has action.

In the harmful substance removing device of the present invention, in particular, the charging portion of the hazardous substance treatment material includes a peripheral blockage plate protruding into the charging portion of the treatment material from the inner circumferential surface of the casing on at least an upper portion thereof, an upper middle portion, or a lower portion thereof, and a harmful substance at the lower portion of the casing. A support plate receiving the treatment material is disposed, and the support plate is formed by installing a perforated plate and a foot protruding from the upper surface to the upper surface thereof, so that the synergistic effect allows the exhaust gas containing harmful substances to be distributed to the whole filling part of the treatment material. As a result, the contact between the exhaust gas and the harmful treatment material becomes better, and thus, it is possible to efficiently remove the harmful substances.

In addition, in the apparatus for removing harmful substances of the present invention, an inlet obstruction plate covering the inlet at the inlet of the casing and the treatment filling part protrude in the filling part of the treatment material on the inner circumferential surface of the casing at least at the upper or upper and lower middle portions or the lower portion thereof. And a support plate receiving the hazardous treatment material at the lower portion of the casing, and the support plate has a foot which protrudes upwardly from the perforated plate and its upper surface, thereby further including the harmful substance. Since the exhaust gas can be distributed to the entire charging portion of the treatment material, the contact between the exhaust gas and the pest treatment material is particularly good, and the harmful gas can be removed more efficiently.

In the pest removal device of the present invention, in each of the above-mentioned pest removal devices, instead of having an inlet at one end and having an outlet at the other end, an outlet is provided at one end and an outlet at the one end thereof, In addition to the above action of each pest removal device, the installation space is further reduced or the attachment of each pest removal device is facilitated by providing a passage communicating with the outlet of one end at the outlet side of the processing gas. It has action.

EXAMPLE

Hereinafter, the pest removal apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

In FIG. 1 and FIG. 2, this harmful substance removal apparatus is filled with the hazardous substance treatment material 42 in the casing 41, This casing 41 has an inlet 43 at the upper end, and it exits at the lower end. (44), the inlet (43) is connected to a noxious substance source that generates exhaust gas containing noxious substances.

The source of the harmful substance is not particularly limited as long as it generates exhaust gas containing the harmful substance. For example, the thin film used in the vapor phase growth chamber, the plasma vapor phase growth chamber, and the element formation process used in the semiconductor pillar forming step in the semiconductor manufacturing process. Typical examples thereof include a formation treatment chamber, a doping treatment chamber, an etching treatment chamber, a plasma etching treatment chamber, a cleaning treatment chamber used for each step or a cleaning step between steps.

The inlet 43 may be in direct contact with these source of harmful substances, but when the source of harmful substances generates dust at the same time, it is possible to prevent clogging caused by dust or dust attached to the harmful substances through the harmful substance removing device. desirable.

Therefore, the inlet 43 of this harmful substance removal device 4 is connected to the harmful substance generation source 1 via the dust collector 3 and the pump 2, for example as shown in FIG.

In addition, although the outlet 44 of this harmful substance removal apparatus 4 may be made to communicate with air through a separate harmful substance removal apparatus, this embodiment can fully acquire the harmful substance removal effect by the 1st stage harmful substance removal apparatus 4. Therefore, they communicate directly with the atmosphere.

The shape of the casing 41 may be a cylindrical shape, for example, polygonal cylindrical, elliptical cylindrical, etc., such as 4, 6, 8, etc., but may be deteriorated evenly where the harmful treatment material 42 may be deteriorated. To this end, the cylindrical center is formed in a uniform cylindrical shape in all directions, and the inlet 43 and the outlet 44 are provided coaxially with the casing 41.

Although the material of the casing 41 is not particularly limited, it is preferable to have airtightness, chemical resistance, acid resistance, alkali resistance, weather resistance, and sufficient mechanical strength, for example, fiber reinforced synthetic resin, corrosion resistance such as rubber lining on the inner surface. It is possible to use a metal such as iron, a steel containing stainless steel. In this embodiment, the casing 41 is formed by using stainless steel which is easy or unnecessary to process, such as internal and external cleaning among these.

The support frame 45 which serves as a reinforcement of the casing is fixed to the lower portion of the inner circumferential surface of the casing 41, and the circumferential edge portion of the support plate 46 is supported by the support frame 45.

As shown in the enlarged cross-sectional view of FIG. 2, this support plate 46 consists of the perforated plate 47 and the foot 48 fixed to the upper surface.

The foot 48 needs to be formed so that the pest treatment material 42 can be detached from the hole plate 47 so that the size of the eye is smaller than the particle size of the pest treatment material, in this case in particular, 1 to 12 mm. Is set to a degree. The foot 48 may be a lattice in a plane, but in this embodiment, the foot 48 is formed in a stripe shape to simplify the configuration and to reduce cost.

In addition, it is necessary to set the height of the foot 48 so that the hazardous substance treatment material 42 can be detached from the hole plate 47, and it is preferable to set it as about 3-30 mm.

When the height of the foot 48 is less than 3 mm, it is necessary to make the eyes of the foot 48 small, and it is not preferable because the flow path resistance is significantly increased. On the other hand, when the height of the foot 48 exceeds 30 mm, the foot The flow path aggregation effect by (48) never reaches the limit and is not increased any more. In addition, the material cost of the foot 48 is high, which is not preferable.

It is sufficient that the above-mentioned hazardous substance treatment material 42 has been used conventionally, and for example, a material in which a treatment agent is supported on granular or lumpy substrates is used.

Although the substrate itself may be one that does not have the ability to adsorb or adsorb the harmful substances, it is preferable to use one having the ability to adsorb or adsorb the harmful substances in itself, in terms of enhancing the treatment capacity.

As a base material which has the ability to adsorb | suck a pest or adsorb | sucks a harmful substance, activated carbon, ceramics, a zeolite, alumina, an acidic clay, etc. are mentioned, for example.

Moreover, you may use what formed the processing agent mentioned later in granular form or lump form as a base material.

As the treatment agent, metal phosphates such as aluminum phosphate, alkali metal silicates, aluminosilicates, platinum catalysts and the like are often used.

Moreover, the following are mentioned as the other processing agent as the example.

That is, as an oxide of group I, group II, group III, or group IV of the periodic table such as Na ₂ O, K ₂ O, CaO, MgO, CuO, Ag ₂ O, alumina, zirconium oxide, or a compound containing these oxides , (Mc ₁ ) x (Mc ₂ ) y (O) z, and the like are used.

However, Mc ₁ is Group I, Group II or Group III, and Mc ₂ is Group IV such as aluminum (Al), silicon (Si), titanium (Ti), zirconium (Zr) and the like. Group V elements, such as group, phosphorus (P), and vanadium (V), O is oxygen, and x, y, and z are integers, respectively.

In this harmful substance removal device 4, an appropriate space is provided between the inlet 43 of the casing 41 and the filling part (shown by hatching) of the processing material in which the hazardous substance treatment material 42 is filled. And the inlet obstruction plate 49 are provided at appropriate distances from the charging section of the processing material, respectively, and at the upper part of the upper or upper charging part or the lower part of the processing material. Peripheral disturbance plates 50 and 51 protruding from the inner circumferential surface of the casing into the filling portion of the processing material are provided.

It is necessary for the inlet obstruction plate 49 to cover the inlet 43 of the casing 41 from the inside, and it is not necessary to cover the inlet 43 entirely, but in this embodiment a larger diameter than the inlet 43 is required. It is formed so that the flow of exhaust gas flowing from the inlet 43 can be reliably dispersed radially from the center of the casing 41.

In addition, the shape of the inlet obstruction plate 49 is not particularly limited, and may be formed in a net shape, a polygon or an ellipse when viewed from the inlet 43 side. In this embodiment, the inlet is uniformly dispersed to exhaust gas. 43 is formed in concentric circles.

Further, the entrance barrier plate 49 may be, for example, a three-dimensional plate such as a cone or a seat plate, but in this embodiment, the entrance barrier plate 49 is formed in a flat plate shape that can simplify the shape and reduce the cost.

However, by providing the inlet obstruction plate 49, the exhaust gas flowing from the inlet 43 is dispersed in the circumferential direction, but is formed between the hazardous materials in the middle of the treatment material because the inner circumferential surface of the casing 41 is smooth. A flow path having a smaller flow resistance is formed between the inner circumferential surface of the casing 41 and the pest treatment material than the flow path being formed, and exhaust gas flows through the flow path between the inner circumferential surface of the casing having the small flow resistance and the pesticide treatment material, thereby processing efficiency. At the same time as this decreases, there is a fear that the periphery of the treatment material filling part is likely to be destroyed within a short time.

In this case, a peripheral disturbance plate 50 protruding from the inner circumferential surface of the casing 41 in the filling portion of the processing material is installed on the upper portion of the filling portion of the processing material in the casing 41, and the flow of exhaust gas along the inner circumferential surface of the casing 41 is increased. It is guided in the charging section.

In this case, as shown in FIG. 1, the peripheral disturbance plate 50 is preferably obliquely downward from the base end to the tip, that is, the exhaust gas is directed toward the inside of the treatment material. In the above, α is preferably in the range of 15 to 80 degrees, in particular 30 to 60 degrees, and is formed at 45 degrees in this embodiment.

If the α is less than 15 degrees, the effect is insufficient and meaningless. On the other hand, if α is more than 80 degrees, the flow of exhaust gas may be inhibited, which is not preferable.

In addition, a peripheral barrier plate 51 formed of a reinforcement fixed to the inner circumferential surface of the casing 41 is provided at an intermediate portion of the filling portion of the processing material, and the peripheral barrier plate 51 is also exactly the same as the upper peripheral barrier plate 50 of the upper portion. Granting role.

In this harmful substance removal device, the flow of the exhaust gas flowing from the inlet 43 abuts against the inlet obstruction plate 49 and is widened radially in the casing 41.

In addition, since a suitable distance is provided between the inlet obstruction plate 49 and the charging portion of the treatment material, a part of the flow of exhaust gas expanded in the radial direction flows to the rear of the inlet obstruction plate 49, and the end face of the charging portion of the treatment material. The exhaust gas flows in evenly throughout.

As a result, the exhaust gas can be brought into contact with the entire pest treatment material 42 evenly, thereby increasing the processing efficiency and preventing the partial pest treatment material 42 from being deteriorated, thereby extending the breakdown time, thereby increasing the service life. Can be.

In addition, at the exit side of the filling layer of the pesticide treatment material, since the filling part of the processing material is supported by the foot 48 from the hole plate 47, most of the flow path formed in the filling part of the processing material is formed in the hole plate 47. Opened and collected between the eyes of the foot 48 without being blocked by the openings, the exhaust gas flows on the whole of the filling portion of the treatment material without being partially blocked in the filling portion of the treatment material.

As a result, even exhaust gas can be brought into contact with the entire pesticide treatment material 42, thereby improving treatment efficiency and preventing the partial pesticide treatment material 42 from deteriorating, thereby further extending the breakthrough time. Can extend the service life.

In addition, the synergistic effect of the same amount of pesticide treatment material 42 as that of the conventional example is obtained with a smaller amount of the pesticide treatment material 42 than in the prior art. It is 100 times longer.

Further, in this embodiment, since the exhaust gas is introduced above the casing 41, there is no fear that the harmful treatment material will be lifted upward by the pressure of the exhaust gas, but the outlet 44 and the inlet 43 are replaced with the casing ( Even if the exhaust gas flows in from below 41, the harmful treatment material 42 is prevented from rising by the peripheral disturbance plate 51 and the upper and peripheral disturbance plate 50 of the upper and lower middle portions, so that there is no problem at all.

3 shows another embodiment of the pest removal device of the present invention, in which the pest removal device has an inlet 43 at one end and an outlet 44 at the other end instead of having an outlet 44 at the other end. In addition to having an inlet 43 at the same time, an outlet 44 is provided at one end thereof, and a passage 54 communicating with the outlet 44 at one end at the outlet side 53 of the processing gas is provided at the filling part of the processing material. In addition to the above effects of the respective harmful substances removing apparatus, the installation space can be further reduced, or the harmful substance removing apparatus can be placed on the installation surface so as to be easily attached.

Further, as shown in FIG. 3, the inlet barrier plate 49 does not necessarily need to be installed in the center of the casing 41.

That is, even if it is comprised in this way, the flow of the exhaust gas which flows in from the inlet 43 contacts with the inlet obstruction plate 49, expands in the radial direction in the casing 41, and is processed by the resistance of the charging part of a process material. The exhaust gas flows evenly over the entire end face of the ash fill section.

The harmful substance removing apparatus of the present invention is not limited to the above embodiments, and various combinations can be made without departing from the technical spirit of the present invention by combining the above components, and the harmful substance removing apparatus can be used. Two or more of them may be combined, for example, in series or in parallel, in parallel and in parallel to further eliminate the harmful substances, or may be configured so that the apparatus can be used for a longer period of time.

[Effects of the Invention]

In the apparatus for removing harmful substances of the present invention, the inlet obstruction plate and the charging portion of the treatment material include harmful substances by having a peripheral interference plate protruding into the charging portion of the treatment material from the inner circumferential surface of the casing on at least an upper portion thereof, an upper middle portion, or a lower portion thereof. Since the exhaust gas can be distributed to the entire charging part of the treatment material, the contact between the hazardous substance treatment material and the exhaust gas can be effectively performed, resulting in higher utilization of the hazardous substance treatment material, and at the same time, high processing capacity and long life can be realized. It has an effect.

In the apparatus for removing harmful substances of the present invention, a support plate receiving a hazardous substance treatment material is disposed in the lower portion of the casing, and the support plate has a foot that protrudes upward from the perforated plate and its upper surface, and the filling portion of the treatment material is disposed from the perforated plate to the foot. Since most of the flow path formed in the filling part of the processing material is not blocked by the non-opening part of the perforated plate, but is opened and collected between the eyes of the foot (euro aggregation effect), and the exhaust gas enters the filling part of the processing material. As a result, the outflow of the exhaust gas from the filling section of the treating material is not blocked, and the exhaust gas can flow on the entire filling section of the treating material, resulting in an increase in the utilization rate of the harmful treatment material. It has an effect that can be realized.

In the apparatus for removing harmful substances of the present invention, in particular, an inlet obstruction plate covering the inlet is provided at the inlet of the casing, and a support plate for receiving a pest treatment material at the lower part of the casing is disposed, and the support plate is a perforated plate and an upper surface thereof. By providing the protruding foot, the synergistic effect makes it possible to further distribute the exhaust gas containing the harmful substances to the entire charging portion of the treatment material, so that the contact between the exhaust gas and the hazardous material treatment material becomes better and the harmful substances are efficiently removed. As a result, it is possible to increase the utilization rate of the hazardous substance treatment material and at the same time have the effect of realizing high treatment capacity and long life.

In the harmful substance removing device of the present invention, in particular, the filling portion of the treatment material of the harmful substance includes a peripheral disturbance plate protruding into the filling portion of the treatment material from the inner circumferential surface of the casing on at least an upper portion thereof, an upper middle portion, or a lower portion thereof, and a harmful substance on the lower portion of the casing. The support plate receiving the treatment material is disposed, and the support plate is formed by installing the perforated plate and the foot protruding upward from the upper surface thereof, and by the synergistic effect, the exhaust gas containing harmful substances can be further distributed throughout the treatment material. As a result, the contact between the exhaust gas and the pest treatment material becomes better, and the pests can be efficiently removed. As a result, the utilization rate of the pest treatment material can be increased, and high treatment capacity and long life can be realized.

In the apparatus for removing harmful substances of the present invention, the inlet obstruction plate covering the inlet at the inlet of the casing and the treatment material filling part protrude into the filling part of the treatment material on the inner circumferential surface of the casing at least at the upper part, the upper and lower middle part, or the lower part thereof. In the lower part of the casing and the support plate receiving the harmful treatment material is disposed and the support plate has a foot protruding upward from the perforated plate and its upper surface, and by their synergistic effect, the exhaust gas containing further harmful substances Since the gas can be distributed throughout the charging section of the treatment material, the contact between the exhaust gas and the pest treatment material is particularly good, and the removal of harmful substances can be carried out more efficiently, resulting in a higher utilization rate of the pest treatment material. It has the effect of realizing the ability and long life.

In the harmful substance removing device of the present invention, in each of the harmful substance removing devices, instead of having an inlet at one end and having an outlet at the other end, an inlet is provided at one end and an outlet at the corresponding end is provided at the filling portion of the treatment material. By installing a passage communicating from the outlet side of the processing gas to the outlet of the one end, in addition to the above effects of the respective harmful removal device, the installation space is further reduced or attached to the installation surface by placing each harmful removal device on the installation surface. It is possible to have an effect that can be easily provided.

Claims (6)

A noxious substance removal device comprising an ordinary casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or lump-like processing material filled in the casing and adsorbing or decomposing harmful substances at the same time. An inlet baffle covering the inlet from the inside, and at the same time, a filling baffle of the treatment material is provided with a surrounding baffle plate protruding into the filling part of the treatment material from the inner circumferential surface of the casing on at least an upper portion thereof, an upper middle portion or a lower portion thereof. Harmful removal device. A noxious substance removal device comprising a normal casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or lump-like processing material filled in the casing and adsorbing or decomposing harmful substances at the same time. And a support plate receiving a pest treatment material, the support plate having a perforated plate and a foot protruding upward from the upper surface thereof. A noxious substance removal device comprising an ordinary casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or lump-like processing material filled in the casing and adsorbing or decomposing harmful substances at the same time. An inlet obstruction plate covering the inlet from the inside, and a support plate receiving a pest treatment material at a lower portion of the casing, the support plate having a perforated plate and a foot protruding upward from the upper surface thereof. . A noxious substance removal device comprising an ordinary casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or lumped material which is filled in the casing and adsorbs or decomposes harmful substances at the same time. At least one of the upper or upper and lower middle portions or the lower portion of the casing is provided with a peripheral interference plate protruding from the inner circumferential surface of the casing into the treatment material filling portion and a support plate receiving the hazardous substance treatment material at the lower portion of the casing, and the perforated plate of the supporting plate and the upper surface thereof. Pest removal device, characterized in that having a foot protruding upward from the. A noxious substance removal device comprising an ordinary casing having an inlet at one end and an outlet at the other end, and a filling portion of granular or lump-like processing material filled in the casing and adsorbing or decomposing harmful substances at the same time. An inlet obstruction plate covering the inlet from the inside, and a periphery obstruction plate protruding from the inner circumferential surface of the casing into the charging part of the treatment material on at least an upper part of the upper, upper, middle, or lower part of the processing material, and a hazardous substance treatment on the lower part of the casing. A support plate receiving ash is disposed, the support plate having a perforated plate and a foot protruding upward from the upper surface thereof. The process according to any one of claims 1 to 5, wherein the inlet is provided at one end and the outlet is provided at one end instead of having the inlet at one end and the outlet at the other end. And a passage communicating with the outlet of the one end at the outlet side of the gas.