KR100250857B1 - Vapor deposition device and method of aluminum layer for crt - Google Patents

Abstract

PURPOSE: A device for laying an aluminum film for a negative tube and a method for laying thereof are provided to improve the efficiency of the progress and to lay an even aluminum film by reducing the time of the laying progress. CONSTITUTION: In a device for laying an aluminum film for a negative tube and a method for laying thereof, a chamber(4), a frame(2), a vacuum instrument(6), a side portion(82) and a panel(8) etc. are included. The chamber(4) is supported by the frame(2). The vacuum instrument(6) forms the inside of the chamber(4) with vacuum. A panel supporting instrument is installed on the upper face of the chamber(4) and lays the side portion(82) of the panel(8). A spraying instrument is installed on the inside of the chamber(4) and sprays aluminum of the condition of vapor and inactive gas. A heating instrument heats the spraying instrument. A vacuum maintaining instrument is installed on a face of the chamber(4) and separates or unites the chamber(4) and the inside of the panel(8). An air injecting instrument injects air between the chamber(4) and the inside of the panel(8).

Description

Aluminum film deposition apparatus and deposition method for cathode ray tube

The present invention relates to a cathode ray tube, and more particularly, by depositing an aluminum film formed on the back of the screen using a supersonic injector to improve the brightness of the screen, it is possible to shorten the number of processes and the time required for the aluminum film deposition process. The present invention relates to an aluminum film deposition apparatus and a deposition method for a cathode ray tube.

In general, the cathode ray tube forms a screen on the inner surface of the panel, and emits an electron beam controlled by a screen signal from an electron gun mounted on the rear body of the cathode ray tube, and scans the screen to generate an image while the phosphor of the screen receiving the electron beam emits light. will be.

An aluminum film is deposited on the back surface of the screen to induce scattering and reflection of the electron beam to improve brightness of the screen and to bypass electrons remaining in the fluorescent film.

The aluminum film generally has a thickness of 1000 to 3000 Pa and shows an energy transmittance of 90 to 95%, thereby improving the brightness of the screen by about 2 times.

The formation of such an aluminum film is a method of heating aluminum in a vacuum to form a vapor state, and then evaporating and diffusing the inner surface of the panel. This is called vacuum evaporation. The purpose of the vacuum is a probability of colliding with other molecules during evaporation. This is because it can reduce evaporation rate and increase the evaporation rate, and it can prevent chemical oxidation or nitriding by removing oxygen and nitrogen as atmospheric components.

The vacuum deposition method is to form a high vacuum (typically 4 × 10 ^-4 Torr or less) in the chamber of the vacuum deposition apparatus to drop the melting point of aluminum, and to lower the boiling point to evaporate and diffuse with a high temperature heater, using the deposition method of the aluminum film using the same Looking more specifically as follows.

FIG. 6 is a flowchart of an aluminum film deposition process according to the prior art, in which an aluminum pallet is first placed in a Bornite heater (hereinafter referred to as BN-heater) (S1), and then a panel treated with a fluorescent film in a slurry process is deposited on a deposition apparatus. (S2), the cylinder is driven to connect the exhaust port of the chamber to the flow pump for preliminary exhaust (S3), and the cylinder is driven to connect the exhaust port of the chamber to the diffusion pump to exhaust up to 10 ^-6 Torr. (S4)

After preheating the aluminum introduced into the BN heater (S5), the aluminum is melted and evaporated and diffused to the inner surface of the panel (S6), the exhaust is stopped, the heating temperature of the BN-heater is cooled (S7), and the residual vacuum is released. After the step (S8) of taking out the panel by injecting air into the chamber and converting it into preliminary exhaust, the aluminum film deposition process is completed.

However, the conventional aluminum film deposition apparatus and deposition method for the cathode ray tube has to repeatedly perform the entire process from the aluminum input process (S1) to the auxiliary exhaust process (S8) for each panel, the back of the screen for one panel The time required for depositing the aluminum film is about 30 minutes.

The time required for the deposition process is a process other than the exhaust process (S3, S4), that is, the aluminum input process (S1) and the panel is loaded (S2) by heating the BN-heater (S5) to evaporate aluminum diffusion (S6) It is time to cool the BN-heater again (S7) and take out the finished panel (S8). These processes are not only long but also require a large amount of energy. have.

Accordingly, an object of the present invention is to reduce the process time and improve the process efficiency by replacing the energy-consuming and time-consuming processes with less energy-consuming and faster processes can be deposited and the deposition process for the aluminum film deposition apparatus for cathode ray tubes To provide a method.

In order to achieve the above object, the present invention is a vacuum device for forming a vacuum inside the chamber having a chamber supported by the frame, a flow pump and a diffusion pump connected to the exhaust pipe of the chamber, and one side of the chamber Panel support means mounted to the side wall of the panel; and injection means for injecting aluminum vapor and inert gas into the inner surface of the panel installed in the chamber and mounted in the chamber; and aluminum provided in the injection means. Heating means for forming a vapor state, and vacuum holding means for separating opening / closing between the chamber and the inner surface of the chamber and maintaining a vacuum inside the chamber, the panel being mounted to be opened and closed to one surface of the chamber facing the panel supporting means; It is provided to the support means for injecting air to the inner surface of the panel separated from the chamber by the vacuum holding means Provided is an aluminum film deposition apparatus for a cathode ray tube including air injection means.

The present invention also provides a panel mounting step of mounting a panel treated with a fluorescent film in a slurry process to a panel support, a chamber opening step of opening a chamber by transferring a chamber separation membrane of a vacuum holding means to the outside of the chamber, and a vacuum device. A main exhaust process for evacuating the inside of the chamber by driving the vacuum chamber; and a spraying process for forming an aluminum film by injecting aluminum vapor and an inert gas to the inner surface of the panel during the predetermined time by opening and closing the nozzle of the injection means for a predetermined time; A chamber sealing step of sealing the chamber by transferring the chamber separation membrane of the means to the chamber; an air injection step of injecting air into the space inside the panel separated from the chamber by the air injection means; and taking out the panel to take out the panel from the panel support. It provides a method for depositing an aluminum film of a cathode ray tube including a step.

The aluminum film deposition method includes a heater heating step of heating a spraying means at a constant temperature by driving a wire heater before the panel mounting process, and vacuuming the interior of the panel and the chamber inside before the main exhaust panel It provides a method for depositing an aluminum film of a cathode ray tube to add a preliminary exhaust process.

This replaces the aluminum input process and heater heating process for each panel with a supersonic spray process with aluminum steam corresponding to multiple panel capacities, reducing the time required and the amount of energy required, and always evacuating the chamber. It is possible to shorten the exhaust process performed each time the individual panels are completed, thereby reducing the overall process time and improving the process efficiency.

1 is a partial cross-sectional front view of an aluminum film deposition apparatus for a cathode ray tube according to the present invention.

2 is a cross-sectional view of the injection means according to the present invention.

Figure 3 is a front view of the injection means and heating means according to the present invention.

4 is a process flowchart showing the first step of the aluminum film deposition method for a cathode ray tube according to the present invention.

5 is a process flowchart showing a second step of the aluminum film deposition method for a cathode ray tube according to the present invention;

Figure 6 is a flow chart of the aluminum film deposition process for the cathode ray tube according to the prior art.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view of an aluminum film deposition apparatus for a cathode ray tube according to the present invention, a chamber 4 supported by a frame 2, a vacuum device 6 for vacuum forming the inside of the chamber 4, and the chamber ( A panel support means installed on the upper surface of 4) to seat the side surface 82 of the panel 8, spraying means installed in the chamber 4 to inject vaporized aluminum and inert gas at a supersonic speed, and A heating means provided to the injection means for heating the injection means, and a vacuum which is mounted to be opened and closed to one surface of the chamber 4 facing the panel support means to separate or coincide between the chamber 4 and the inner surface of the panel 8. An aluminum film deposition apparatus for a cathode ray tube is shown which includes a holding means and air injecting means provided to the panel supporting means to inject air into the inner surface of the panel 8 separated from the chamber 4 by the vacuum holding means.

The chamber 4 is a vacuum chamber that forms a constant high vacuum (typically 4 × 10 ^-4 Torr or less) therein. In order to maintain such a high vacuum, the chamber 4 is made of a material having high mechanical strength and excellent airtightness. It must be structured.

And the chamber 4 is equipped with a panel support means to the upper surface, the opening portion (4a) is formed in the upper surface of the chamber 4 facing the panel support means, the opening portion (4a) is vacuum Opening and closing by the holding means is made to coincide with or separate from the internal space of the panel 8 on which the panel support means is mounted.

In addition, the chamber 4 is equipped with an injection means for injecting aluminum vapor therein, the injection means is a panel (using the difference in the pressure in the injection means and the pressure in the injection means to the aluminum contained in the injection means) 8) It is sprayed to the inside.

The vacuum device 6 is provided at the lower end of the chamber 4 formed as described above. The vacuum device 6 includes a flow pump 12 and a diffusion pump connected to the exhaust pipe 10 of the chamber 4. 14) to form a vacuum inside the chamber (4).

The exhaust pipe 10 of the chamber 4 is connected with the fluid direction switching valve 16 therein, and the fluid direction switching valve 16 forms a three-way four-port valve as an example thereof according to the valve control. The exhaust pipe 10 of the chamber 4 is connected to any one of the flow pump 12 and the diffusion pump 14 and the air flow thereof.

The flow pump 12 is a pump used for preliminary exhaust and forms a medium vacuum (1 to 10 ^-3 Torr) inside the chamber 4, and the diffusion pump 14 is used for the main exhaust chamber 4 The interior is formed with high vacuum (10 ^-3 to 10 ^-5 Torr).

In this way, the panel supporting means is mounted to the upper surface of the chamber 4 which maintains the vacuum therein by the vacuum apparatus 6, and the panel supporting means is formed at a predetermined height and the panel 8 is to be seated. The panel support 18 is formed of a panel support 18 having the same square shape as the side surface 82 of the panel 8.

The panel support 18 forms a transfer hole 20 to one side as shown, so that the vacuum holding means for opening and closing the opening 4a of the chamber 4 can be transferred, and to the other side. An air inlet 22 is formed, which is connected to the air inlet means to receive air.

In addition, the injection means installed in the chamber 4 to inject aluminum vapor contains aluminum therein, which is connected to the gas tank 24 to inject aluminum vapor together with the gas to the inner surface of the panel 8. It is to let.

Looking at the injection means in more detail as shown in FIG. 2, the body 28 for receiving the aluminum 26 therein, the nozzle 30 which is a spray hole provided in the body 28, the inside of the body 28 It is mounted on the solenoid valve 32 is transferred to the electrical signal to open and close the nozzle 30, the gas inlet 34 provided on one side of the body 28, the gas inlet 34 is connected to the body ( 28) a gas tank 24 for supplying an inert gas therein.

The aluminum 26 is stored in the body 28 in a solid state to form a vapor state by heating means provided to the outside of the body 28, and the amount of the aluminum 26 accommodated is a plurality of aluminum films on the panels 8. Store in an amount sufficient to deposit.

In addition, the inert gas uses nitrogen (N ₂ ) gas as an example. The use of the inert gas does not react with the aluminum 26 molecules because the inert gas does not cause a chemical reaction well, and the material is easily supplied. Because it has one advantage.

In this way, by supplying the inert gas into the body 28, the pressure of the gas inside the body 28 supplied from the gas tank 24 to the body 28 by opening and closing the nozzle 30 provided in the body 28. By using the difference in the vacuum pressure inside the chamber 4 and the aluminum 26 vapor in the body 28 is to be injected with the inert gas.

The opening and closing of the nozzle 30 is performed by operating the solenoid valve 32. The solenoid valve 32 is composed of a main spool 38 and a sub spool 40, and an electric signal to the main spool 38. When the main spool 38 moves the sub spool 40 up and down, the nozzle 30 and the sub spool 40 are contacted / separated to open and close the nozzle 30.

The injection means made as described above provides a heating means to its outer surface, and the heating means includes a wire heater 42 and a wire heater 42 mounted to the outer surface of the body 28 of the injection means as shown in FIG. It consists of a heater power supply 44 for driving.

The wire heater 42 is mounted while winding the outer surface of the body 28 of the spraying means a predetermined number of times, and is heated to a constant temperature to maintain the temperature of the spraying means while maintaining the aluminum 26 inside the body 28. Form in the vapor phase.

Thus, the chamber (4) for mounting the injection means and heating means therein provides a vacuum holding means for opening and closing the opening (4a) to maintain the interior of the chamber (4) in a vacuum, the vacuum holding means is a panel support ( The chamber separation membrane 46 which is inserted into the transfer hole 20 formed in 18 and then transferred to open and close the opening 4a of the chamber 4 and the chamber separation membrane 46 in combination with the chamber separation membrane 46 to transfer the chamber separation membrane 46. It consists of a conveying member 48 and a drive unit 50 for driving the conveying member 48.

The chamber separator 46 is transported to isolate the inside of the panel 8 where the aluminum film deposition is completed from the inside of the chamber 4 to close the opening 4a of the chamber 4 (shown by the broken line), When the panel 8 is mounted on the panel support 18, it is transferred in the opposite direction to open the chamber opening 4a so that the chamber 4 and the inside of the panel 8 coincide.

Accordingly, the chamber separation membrane 46 functions to maintain a constant degree of vacuum in the chamber 4.

In addition, as described above, an air injection means is provided on one side of the panel support 18, and the air injection means is connected to the air inlet 22 of the panel support 18 to supply air to the air injection pipe 52. And a control valve 54 provided to the air injection pipe 52 to control air injection.

The control valve 54 transfers the chamber separation membrane 46 of the vacuum holding means after the deposition of the aluminum film on the panel 8 to seal the opening 4a of the chamber 4. Air is injected into the air inlet 22 to easily take out the panel 8 on which the aluminum film is deposited.

When the aluminum film deposition method is newly implemented using an aluminum film deposition apparatus having such a configuration as follows.

FIG. 4 is a process flowchart showing the aluminum film deposition method according to the present invention, showing a first process performed on a panel to be first input.

As shown in the drawing, the heater heating step P1 for driving the wire heater 42 to heat the injection means at a constant temperature, and the panel 8 treated with the fluorescent film in the slurry step from the transfer device to the panel support 18. The panel mounting step (P2) to be mounted, the preliminary exhaust step (P3) and the main exhaust step (P4) for evacuating the inner spaces of the panel 8 and the chamber 4, and the nozzle 30 of the injection means are opened. An injection step (P5) for injecting the aluminum (26) vapor and an inert gas in the injection means, a chamber sealing step (P6) for transferring the chamber separation membrane (46) of the vacuum holding means to seal the chamber (4), and air An air injection step P7 for injecting air into the injection means, and a panel takeout step P8 for taking out the panel 8 from the panel support 18.

The heater heating step P1 operates the heater power supply 44 to heat the wire heater 42 to form the aluminum 26 in the spray means body 28 in a vapor state, and then the wire heater 42 is formed. Maintain constant at this temperature.

In addition, the panel mounting step (P2) is a process of mounting the panel support 18, which is transferred from the transfer apparatus to the panel 8, the fluorescent film treatment and filming liquid coating is completed in the slurry process, the coating film coating Serves to uniformly form the uneven fluorescent film in order to deposit a flat aluminum film.

In this way, the panel 8 is mounted on the panel support 18 and then subjected to a preliminary exhaust process (P3), which operates the drive cylinder of the fluid direction switching valve 16 to operate the exhaust pipe 10 of the chamber 4. It is connected to the flow pump 12 and the flow pump 12 is operated to form the inside of the panel 8 and the chamber 4 with a medium vacuum (1 to 10 ^-3 Torr).

Then, the operation cylinder of the fluid direction switching valve 16 is operated to connect the exhaust pipe 10 of the chamber 4 to the diffusion pump 14 so that the panel 8 and the inside of the chamber 4 are high vacuum (4 ×). 10 ^-4 Torr or less), followed by the main exhaust process (P4).

The injection step P5 performed after the main exhaust step P4 is performed by driving the solenoid valve 32 mounted inside the injection means body 28 to open and close the nozzle 30 which is the injection hole for a predetermined time in the gas tank 24. It is a process of spraying aluminum vapor which is heated by the supplied inert gas and the wire heater 42 and forms a vapor state to the inner surface of the panel 8.

The injection is caused by the pressure difference between the gas pressure in the body 28 supplied from the gas tank 24 and the vacuum pressure in the chamber 4 to inject aluminum 26 vapor in the body 28 out of the body 28. As a result, the pressure of the gas tank 24 is usually composed of the pressure in the atmospheric pressure region.

In addition, an electric signal is applied to the main spool 38 of the solenoid valve 32 to reciprocate the sub spool 40 so as to open and close the nozzle 30, that is, the nozzle injection time is preferably about 0.01 seconds. The speed is preferably made up of an area of the sonic speed at supersonic speed.

Injecting the aluminum (26) vapor and the inert gas at the supersonic speed uses a phenomenon in which the velocity distribution is uniform by preventing collision between atoms because the distance of constituent atoms becomes constant in the supersonic zone, and according to the uniform speed distribution The film is deposited with a uniform thickness over the entire panel 8.

As described above, an aluminum film is deposited on the inner surface of the panel 8 through the spraying step P5 performed at a supersonic speed, and then subjected to a chamber sealing step P6. The chamber sealing step P6 is performed by a chamber separation membrane of a vacuum holding means ( As shown by the broken line 46, the chamber 4 is moved to the left side to seal the opening 4a to separate the space between the inside of the chamber 4 and the inner surface of the panel 8.

As the chamber separation membrane 46 is transferred to seal the chamber 4, the chamber 4 maintains the vacuum degree formed in the preliminary exhaust process P3 and the main exhaust process P4.

And then through the air injection process (P7), which is the chamber by opening the air injection pipe 52 connected to the air inlet 22 formed in the panel support 18 to the atmosphere by operating the control valve 54 The air is injected into the inner surface of the panel 4 separated from the inside of the chamber 4 due to the separator 46.

In this way, air is blown out to release the vacuum on the inner surface of the panel 8, so that the panel 8 can be easily taken out.

Next, the panel 8 having the aluminum film deposited thereon is transferred to the next step through the panel taking-out process P8 for taking out the panel 8 in which the vacuum is released.

As described above, when the first process including the above process is performed on the firstly input panel, the second process including the following process is repeatedly performed on the subsequently introduced panel, and FIG. 5 shows the second process. It is a process flowchart shown.

As shown in the drawing, the second step includes a panel mounting step A1 for mounting the panel 8 treated with the fluorescent film in the slurry step to the panel support 18, and the chamber separation membrane 46 of the vacuum holding means. (4) A chamber opening step (A2) for opening the opening portion (4a), a main exhaust step (A3) for evacuating the space inside the integrated panel (8) and the chamber (4), and the nozzle of the injection means. 30 to open the injection chamber (A4) for injecting the aluminum (26) vapor and the inert gas in the injection means, and to transfer the chamber separation membrane (46) of the vacuum holding means to open the chamber (4) opening (4a) A chamber sealing step (A5) for sealing, an air injection step (A6) for injecting air into the air injection means, and a panel taking-out step (A7) for taking out the panel from the panel support.

Since the jetting means maintains a constant heating temperature by the wire heater 42, it is not necessary to operate the heating means for the individual panels 8, so that the heater heating step P1 can be omitted, and the sealed chamber 4 When the new panel 8 is mounted on the upper part and the chamber 4 opening 4a is opened, the vacuum inside the chamber 4 and the panel 8 and the space inside the panel 8 are maintained. As a result, the inside of the chamber 4 forms a medium vacuum, and thus the inside of the chamber 4 is formed at a high vacuum through the main exhaust process A3 without passing through the preliminary exhaust process P3 for forming atmospheric pressure into the medium vacuum.

In the aluminum film deposition process formed as described above, the entire process takes about 5 minutes or less.

As such, the present invention can shorten the time required for deposition as well as uniform aluminum film deposition by injecting aluminum vapor and inert gas at supersonic speed, and heating the heater to each panel by keeping the temperature of the wire heater constant. The process can be omitted.

In addition, since the chamber membrane seals the chamber opening to maintain the vacuum inside the chamber, a preliminary exhaust process can be omitted when a new panel is added, and the time required for the deposition of the aluminum film is about 5 minutes, which takes about 30 minutes. Since the deposition process time can be significantly shortened, there is an effect of improving the process efficiency as well as depositing a uniform aluminum film.

Claims (14)

A chamber supported by the frame; A vacuum apparatus including a flow pump and a diffusion pump connected to an exhaust pipe of the chamber to vacuum the inside of the chamber; Panel support means installed on one surface of the chamber to seat a panel side portion; Spraying means installed in the chamber and spraying aluminum vapor and an inert gas to an inner surface of the panel mounted to the panel supporting means; Heating means provided to the injection means to form aluminum in the injection means in a vapor state; Vacuum holding means mounted on one surface of the chamber facing the panel support means to separate / match between the chamber and the inner surface of the chamber and to maintain a vacuum inside the chamber; And an air injecting means provided in the panel supporting means to inject air into the panel inner surface separated from the chamber by the vacuum holding means. The apparatus for depositing an aluminum film for cathode ray tubes according to claim 1, wherein the panel support means comprises a panel support formed at the same height as the panel side portion. The apparatus for depositing an aluminum film for cathode ray tube according to claim 2, wherein the panel support forms a transport hole to transport the vacuum holding means to one side thereof. The apparatus for depositing an aluminum film for a cathode ray tube according to claim 2, wherein the panel support forms an air injection hole connected to the air injection means on one side thereof. According to claim 1, wherein the injection means and the body for receiving aluminum therein; A nozzle which is an injection hole provided in the body; A solenoid valve mounted inside the body and transferred by an electrical signal to open and close the nozzle; A gas inlet provided on one side of the body; And a gas tank connected to the gas inlet and supplying an inert gas into the body. The aluminum film deposition apparatus according to claim 1, wherein the inert gas is made of nitrogen (N ₂ ) gas. According to claim 1, wherein the heating means and the wire heater mounted to the outer surface of the body of the injection means; Cathode ray tube aluminum film deposition apparatus comprising a heater power source for driving the wire heater. 8. The apparatus for depositing an aluminum film for a cathode ray tube according to claim 7, wherein the wire heater is mounted while winding the outer surface of the body of the spraying means a predetermined number of times. The apparatus of claim 1, wherein the vacuum holding means comprises: a chamber separation membrane inserted into a transfer hole formed in a panel support and then transferred to open and close the chamber; A transfer member coupled to the chamber separator to transfer the chamber separator; Aluminum film deposition apparatus for a cathode ray tube comprising a drive unit for driving the conveying member. According to claim 1, The air injection means is connected to the air inlet of one end of the panel support and the air injection pipe for supplying air; The aluminum film deposition apparatus for a cathode ray tube comprising a control valve provided to the air injection pipe to control the air injection. A panel mounting step of mounting the panel treated with the fluorescent film in the slurry process from the transfer device to the panel support; A chamber opening step of opening the chamber by transferring the chamber separation membrane of the vacuum holding means to the outside of the chamber; A main exhaust step of driving the vacuum apparatus to vacuum the inside of the chamber; An injection process of opening and closing the nozzle of the injection means for a predetermined time to inject aluminum vapor and an inert gas to the inner surface of the panel during the time to form an aluminum film; A chamber sealing step of closing the chamber by transferring the chamber separation membrane of the vacuum holding means to the inside of the chamber; An air injection step of injecting air into the space inside the panel separated from the chamber by the air injection means; An aluminum film deposition method of a cathode ray tube comprising a panel take-out step of taking out a panel from a panel support. 12. The heating apparatus according to claim 11, further comprising: a wire heater heating step of heating a spray means at a constant temperature by driving a wire heater before the panel mounting step; A method of depositing an aluminum film of a cathode ray tube, wherein a preliminary exhaust process of evacuating a panel and a space inside a chamber before the main exhaust process is added. 12. The method of claim 11, wherein the spraying step operates the solenoid valve of the spraying means with an electrical signal to open and close the nozzle while the solenoid valve is in contact with and separated from the nozzle. 12. The method of claim 11, wherein the spraying speed of the spraying step comprises a sonic speed region.

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