KR100248460B1 - Processing system - Google Patents

Processing system Download PDF

Info

Publication number
KR100248460B1
KR100248460B1 KR1019980710832A KR19980710832A KR100248460B1 KR 100248460 B1 KR100248460 B1 KR 100248460B1 KR 1019980710832 A KR1019980710832 A KR 1019980710832A KR 19980710832 A KR19980710832 A KR 19980710832A KR 100248460 B1 KR100248460 B1 KR 100248460B1
Authority
KR
South Korea
Prior art keywords
enclosure parts
workpiece
processing system
enclosed
vacuum chamber
Prior art date
Application number
KR1019980710832A
Other languages
English (en)
Inventor
Andrew Isaac Jeffryes
Gordon Robert Green
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Application granted granted Critical
Publication of KR100248460B1 publication Critical patent/KR100248460B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Polarising Elements (AREA)
  • Press Drives And Press Lines (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Electron Beam Exposure (AREA)
  • Treatment Of Fiber Materials (AREA)
KR1019980710832A 1991-10-25 1998-12-30 Processing system KR100248460B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB919122676A GB9122676D0 (en) 1991-10-25 1991-10-25 Processing system
PCT/GB1992/001940 WO1993008591A1 (en) 1991-10-25 1992-10-22 Processing system
KR19947001364 1994-04-25

Publications (1)

Publication Number Publication Date
KR100248460B1 true KR100248460B1 (en) 2000-03-15

Family

ID=10703527

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1019940701364A KR100209182B1 (ko) 1991-10-25 1992-10-22 워크피스 처리 시스템 및 그 처리 방법
KR1019980710832A KR100248460B1 (en) 1991-10-25 1998-12-30 Processing system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1019940701364A KR100209182B1 (ko) 1991-10-25 1992-10-22 워크피스 처리 시스템 및 그 처리 방법

Country Status (8)

Country Link
US (2) US5518771A (ko)
EP (2) EP0609327B1 (ko)
JP (2) JP2879833B2 (ko)
KR (2) KR100209182B1 (ko)
AT (1) ATE176835T1 (ko)
DE (1) DE69228441T2 (ko)
GB (1) GB9122676D0 (ko)
WO (1) WO1993008591A1 (ko)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9324002D0 (en) * 1993-11-22 1994-01-12 Electrotech Ltd Processing system
KR960026249A (ko) * 1994-12-12 1996-07-22 윌리엄 이. 힐러 고압, 저온 반도체 갭 충진 프로세스
US5857368A (en) * 1995-10-06 1999-01-12 Applied Materials, Inc. Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion
JP3955340B2 (ja) * 1996-04-26 2007-08-08 株式会社神戸製鋼所 高温高圧ガス処理装置
GB2333136B (en) * 1996-08-01 2001-01-17 Trikon Equip Ltd A high pressure seal
GB9616214D0 (en) * 1996-08-01 1996-09-11 Electrotech Ltd A high pressure seal
JP4246804B2 (ja) * 1997-03-26 2009-04-02 株式会社神戸製鋼所 加熱・加圧処理装置
US6140235A (en) * 1997-12-05 2000-10-31 Applied Materials, Inc. High pressure copper fill at low temperature
TW489827U (en) 1998-04-09 2002-06-01 Kobe Steel Ltd Apparatus for high-temperature and high-pressure treatment of semiconductor substrates
US6642140B1 (en) * 1998-09-03 2003-11-04 Micron Technology, Inc. System for filling openings in semiconductor products
CN1440564A (zh) * 2000-07-07 2003-09-03 应用材料有限公司 锁料室
US20040096300A1 (en) * 2001-06-30 2004-05-20 Ilya Perlov Loadlock chamber
US20030026677A1 (en) * 2001-08-03 2003-02-06 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) High-pressure process apparatus
US20080264443A1 (en) * 2002-02-05 2008-10-30 Novellus Systems, Inc. Apparatus and methods for increasing the rate of solute concentration evolution in a supercritical process chamber
US6848458B1 (en) 2002-02-05 2005-02-01 Novellus Systems, Inc. Apparatus and methods for processing semiconductor substrates using supercritical fluids
JP3836765B2 (ja) 2002-08-02 2006-10-25 株式会社神戸製鋼所 高圧処理装置
US7153388B2 (en) * 2003-03-31 2006-12-26 Lam Research Corporation Chamber for high-pressure wafer processing and method for making the same
DE102004020915B4 (de) * 2004-04-28 2008-12-11 Centrotherm Photovoltaics Ag Druckmessvorrichtung für Vakuumanlagen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3599601A (en) * 1968-05-28 1971-08-17 Nippon Carbon Co Ltd Internally heated autoclave for metal impregnation
SE399527B (sv) * 1974-05-06 1978-02-20 Arvidsson K E Metod att temporert eller permanent fylla halrum i ett material, vars skrymdensitet er legre en dess materialdensitet, med ett lettflyktigt kolvete samt ett mindre lettflyktigt kolvete, sasom fotogen eller tjera
US4534816A (en) * 1984-06-22 1985-08-13 International Business Machines Corporation Single wafer plasma etch reactor
JPH04503734A (ja) * 1988-12-01 1992-07-02 ボック、エドワード 脈動、浮遊状態で搬送、処理する改良された装置
US5194406A (en) * 1988-12-01 1993-03-16 Edward Bok Installation for transport and processing under a pulsating double-floating condition
NL8900003A (nl) * 1989-01-02 1990-08-01 Imec Inter Uni Micro Electr Inrichting en werkwijze voor het behandelen van een of meer plakken materiaal.
US5182424A (en) * 1989-10-31 1993-01-26 Vlastimil Frank Module encapsulation by induction heating

Also Published As

Publication number Publication date
EP0764973A2 (en) 1997-03-26
EP0609327A1 (en) 1994-08-10
JPH07502376A (ja) 1995-03-09
US5575850A (en) 1996-11-19
KR940703075A (ko) 1994-09-17
EP0764973A3 (en) 1998-05-20
US5518771A (en) 1996-05-21
DE69228441D1 (de) 1999-03-25
JPH11246970A (ja) 1999-09-14
WO1993008591A1 (en) 1993-04-29
ATE176835T1 (de) 1999-03-15
DE69228441T2 (de) 2000-08-03
JP2879833B2 (ja) 1999-04-05
KR100209182B1 (ko) 1999-07-15
GB9122676D0 (en) 1991-12-11
EP0609327B1 (en) 1999-02-17

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A107 Divisional application of patent
A201 Request for examination
E902 Notification of reason for refusal
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Payment date: 20110119

Year of fee payment: 12

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