KR100223265B1 - Method for forming a contact of a semiconductor device - Google Patents

Method for forming a contact of a semiconductor device Download PDF

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KR100223265B1
KR100223265B1 KR1019960064644A KR19960064644A KR100223265B1 KR 100223265 B1 KR100223265 B1 KR 100223265B1 KR 1019960064644 A KR1019960064644 A KR 1019960064644A KR 19960064644 A KR19960064644 A KR 19960064644A KR 100223265 B1 KR100223265 B1 KR 100223265B1
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South Korea
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contact hole
forming
oxide film
semiconductor device
cvd oxide
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KR1019960064644A
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Korean (ko)
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KR19980046321A (en
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조광철
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김영환
현대전자산업주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks

Abstract

본 발명은 반도체 소자의 콘택홀 형성방법을 제공하는 것으로, C2F6계열의 가스를 이용하여 헬리칼 플라즈마에 의한 이방성 식각방법으로 콘택홀을 형성한 후 O2계열의 가스를 이용하여 콘택홀을 형성하기 위한 감광막 패턴의 등방성 식각과 동시에 C2F6계열의 이온가스에 의한 CVD산화막의 과도식각에 의해 콘택홀의 상부면에 경사를 갖도록 형성하므로써 후속공정의 금속층 증착공정시 스텝커버리지를 향상시켜 공극의 발생을 방지할 수 있는 효과가 있다.The present invention provides a method for forming a contact hole in a semiconductor device, wherein the contact hole is formed by an anisotropic etching method using a helical plasma using a C 2 F 6 -based gas and then a contact hole using an O 2 -based gas. In addition to the isotropic etching of the photosensitive film pattern for forming the film, the CVD oxide film is formed to have an inclination on the upper surface of the contact hole by the transient etching of the CVD oxide film by the C 2 F 6 series ion gas, thereby improving the step coverage during the metal layer deposition process of the subsequent process. There is an effect that can prevent the occurrence of voids.

Description

반도체 소자의 콘택홀 형성방법Contact hole formation method of semiconductor device

본 발명은 콘택홀 형성방법에 관한 것으로 특히, 콘택홀 형성시 콘택홀의 상부면에 경사를 가지도록 하는 반도체 소자의 콘택홀 형성방법에 관한 것이다.The present invention relates to a method of forming a contact hole, and more particularly, to a method of forming a contact hole in a semiconductor device such that the contact hole is inclined at an upper surface of the contact hole.

일반적으로 반도체 소자가 고집적화 됨에 따라 미세 패턴의 크기가 점점 작아지며 이는 공정상에 여러 가지의 문제점이 유발한다. 대표적인 예로서 금속 증착 공정에서의 스텝 커버리지의 불량을 들 수 있다. 금속 증착공정의 배선 공정인 콘택홀 식각공정은 패턴의 미세화에 따라 습식 및 건식 식각공정에서 건식 식각 공정만을 사용하는 형태로 바뀌었다. 이에 따라 콘택홀의 형상비(Aspect Ratio)가 1 대 1 이상의 값을 갖게되어 스퍼터링에 의한 알루미늄 증착시에 스텝 커버리지의 불량으로 인하여 콘택홀 내에 공극이 형성되므로써 콘택홀 내에서 금속배선의 단선을 유발하게 되었다. 이 문제를 해결하기 위해서 일반적으로 화학 기상증착방법(CVD)을 이용하여 텅스텐(W)을 콘택홀의 플러그로 사용하는 방법을 도 1a 내지 1c에 도시하였다.In general, as the semiconductor devices are highly integrated, the size of the fine patterns becomes smaller and smaller, which causes various problems in the process. As a representative example, a defect of step coverage in a metal deposition process may be mentioned. The contact hole etching process, which is a wiring process of the metal deposition process, has been changed from wet and dry etching processes to only dry etching processes as the pattern is miniaturized. As a result, the aspect ratio of the contact hole has a value of 1 to 1 or more, so that voids are formed in the contact hole due to poor step coverage during aluminum deposition by sputtering, thereby causing disconnection of the metal wiring in the contact hole. . In order to solve this problem, a method of generally using tungsten (W) as a plug of a contact hole using chemical vapor deposition (CVD) is illustrated in FIGS. 1A to 1C.

도 1a는 필드 산화막(2)이 형성된 실리콘 기판(1) 상의 소정부분에 게이트 전극(3) 및 접합영역(4)을 형성하고, 그 전체 상부면에 CVD산화막(5)을 형성한 후 콘택홀을 형성하기 위하여 CVD산화막(5)상에 감광막 패턴(6)을 형성한 상태를 도시한다.FIG. 1A shows a gate electrode 3 and a junction region 4 formed in a predetermined portion on a silicon substrate 1 having a field oxide film 2 formed thereon, and a CVD oxide film 5 formed on the entire upper surface thereof. The state where the photosensitive film pattern 6 was formed on the CVD oxide film 5 to form a film is shown.

도 1b는 감광막 패턴(6)을 마스크로 이용하여 게이트 전극(3)과 접합영역(4)이 노출되도록 CVD산화막(5)을 건식 식각방법으로 식각하여 콘택홀(10)을 형성한 상태를 도시한다.FIG. 1B illustrates a state in which the contact hole 10 is formed by etching the CVD oxide film 5 by a dry etching method using the photoresist pattern 6 as a mask to expose the gate electrode 3 and the junction region 4. do.

도 1c는 콘택홀(10)이 매립되도록 텅스텐 플러그(7)를 형성한 후 텅스텐 플러그(7)와 접촉되도록 금속층 패턴(8)을 형성한 상태를 도시한다. 상기 텅스텐 플러그(7)는 화학 기상증착 방법으로 형성된다. 이때, 0.25㎛급 이상의 반도체 소자에서 건식 식각방법에 의해 형성되는 콘택홀(10)은 그 형상비가 2 대 1 이상의 값을 가지므로 텅스텐 플러그(7) 형성시 콘택홀(10) 하부에 화살표 A로 도시된 바와같은 공극(Void)이 형성된다.FIG. 1C illustrates a state in which the metal layer pattern 8 is formed to contact the tungsten plug 7 after the tungsten plug 7 is formed to fill the contact hole 10. The tungsten plug 7 is formed by a chemical vapor deposition method. At this time, the contact hole 10 formed by the dry etching method in the semiconductor element of 0.25㎛ class or more has a value of 2 to 1 or more, so as the arrow A below the contact hole 10 when the tungsten plug 7 is formed. Voids are formed as shown.

따라서 본 발명은 C2F6계열의 가스를 이용하여 헬리칼(Helical) 플라즈마에 의한 이방성 식각방법으로 콘택홀을 형성한 후 O2계열의 가스를 이용하여 콘택홀을 형성하기 위한 감광막 패턴의 등방성 식각과 동시에 C2F6계열의 이온가스에 의한 CVD산화막의 과도식각에 의해 상부면에 경사를 갖는 콘택홀을 형성할 수 있는 반도체 소자의 콘택홀 형성방법을 제공하는 것을 그 목적으로 한다.Therefore, in the present invention, the contact hole is formed using an anisotropic etching method using a helical plasma using a C 2 F 6 series gas, and the isotropic film pattern for forming the contact hole using an O 2 series gas. It is an object of the present invention to provide a method for forming a contact hole in a semiconductor device capable of forming an inclined contact hole on an upper surface by over-etching a CVD oxide film by C 2 F 6 -based ion gas simultaneously with etching.

상술한 목적을 실현하기 위한 본 발명의 콘택홀 형성방법은 소정의 공정을 거쳐 필드 산화막이 형성된 실리콘 기판 상의 소정부분에 게이트 전극 및 접합영역을 형성하고, 그 전체 상부면에 CVD산화막을 형성한 후 콘택홀을 형성하기 위하여 CVD산화막 상에 감광막 패턴을 형성하는 단계와, 감광막 패턴을 마스크로 이용하여 게이트 전극과 접합영역이 노출되도록 CVD 산화막을 이방성 식각공정으로 콘택홀을 형성하는 단계와, 상기 실리콘 기판의 전체 상부면에 등방성 및 이방성 식각공정을 실시하여 콘택홀의 상부면에 경사를 갖도록 하는 단계와, 상기 감광막 패턴을 제거하는 단계로 이루어진다.In the contact hole forming method of the present invention for realizing the above object, a gate electrode and a junction region are formed on a predetermined portion on a silicon substrate on which a field oxide film is formed through a predetermined process, and a CVD oxide film is formed on the entire upper surface thereof. Forming a photoresist pattern on the CVD oxide film to form a contact hole; forming a contact hole by anisotropic etching the CVD oxide film using the photoresist pattern as a mask to expose a gate electrode and a junction region; and Isotropic and anisotropic etching is performed on the entire upper surface of the substrate to have a slope on the upper surface of the contact hole, and the step of removing the photoresist pattern.

제 1a도 내지 제 1c도는 종래 반도체 소자의 콘택홀 형성방법을 설명하기 위한 소자의 단면도.1A to 1C are cross-sectional views of a device for explaining a method of forming a contact hole in a conventional semiconductor device.

제 2a도 내지 제2c도는 본 발명에 따른 반도체 소자의 콘택홀 형성방법을 설명하기 위한 소자의 단면도.2A to 2C are cross-sectional views of a device for explaining a method for forming a contact hole in a semiconductor device according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 및 11 : 실리콘기판 2 및 12 : 필드 산화막1 and 11: silicon substrate 2 and 12: field oxide film

3 및 13 : 게이트 전극 4 및 14 : 접합영역3 and 13: gate electrode 4 and 14: junction region

5 및 15 : CVD산화막 6 및 16 : 감광막 패턴5 and 15: CVD oxide films 6 and 16: photoresist pattern

7 : 텅스텐 플러그 8 : 금속층 패턴7: tungsten plug 8: metal layer pattern

10 및 20 : 콘택홀 A : 공극(void)10 and 20: contact hole A: void

이하, 본 발명에 따른 콘택홀 형성방법을 첨부도면을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, a method of forming a contact hole according to the present invention will be described in detail with reference to the accompanying drawings.

도 2a 내지 2c는 콘택홀 형성방법을 설명하기 위한 소자의 단면도로서, 도 2A는 필드 산화막(12)이 형성된 실리콘 기판(11) 상의 소정부분에 게이트 전극(13) 및 접합영역(14)을 형성하고, 그 전체 상부면에 CVD산화막(15)을 형성한 후 콘택홀을 형성하기 위하여 CVD산화막(15)상에 감광막 패턴(16)을 형성한 상태를 도시한다.2A to 2C are cross-sectional views of devices for explaining a method of forming a contact hole, and FIG. 2A shows a gate electrode 13 and a junction region 14 formed on a predetermined portion on a silicon substrate 11 on which a field oxide film 12 is formed. The photoresist film pattern 16 is formed on the CVD oxide film 15 to form contact holes after the CVD oxide film 15 is formed on the entire upper surface thereof.

도 2b는 감광막 패턴(16)을 마스크로 이용하여 게이트 전극(13)과 접합영역(14)이 노출되도록 CVD산화막(15)을 이방성 식각공정으로 식각하여 콘택홀(20)을 형성한 상태를 도시한다. 상기 이방성 식각공정은 분당 40 내지 50CC의 C2F6또는 C3F8가스가 챔버 내로 공급되며 챔버내의 압력은 8 내지 12mTorr, 소스 전력은 2800 내지 3000W, 바이어스 전력은 600 내지 750W의 조건으로 실시된다. 이때, 이방성 식각공정으로 콘택홀(20)의 하부에는 CVD산화막(16)이 20 내지 100Å의 두께가 남도록 식각된다.FIG. 2B illustrates a state in which the contact hole 20 is formed by etching the CVD oxide film 15 by an anisotropic etching process using the photoresist pattern 16 as a mask to expose the gate electrode 13 and the junction region 14. do. In the anisotropic etching process, 40 to 50 cc of C 2 F 6 or C 3 F 8 gas is supplied into the chamber, and the pressure in the chamber is 8 to 12 mTorr, source power is 2800 to 3000 W, and bias power is 600 to 750 W. do. At this time, the CVD oxide film 16 is etched so that the thickness of 20 to 100 Å remains in the lower portion of the contact hole 20 by the anisotropic etching process.

도 2c는 실리콘 기판(11)의 전체 상부면에 등방성 및 이방성 식각을 실시하여 콘택홀(20)의 상부면에 경사를 갖도록 한 상태를 도시한다. 상기 등방성 및 이방성 식각공정은 분당 30 내지 40CC의 C2F6또는 C3F8가스 및 5 내지 10CC의 O2가스가 챔버 내로 공급되며 챔버내의 압력은 8 내지 12mTorr, 소수 전력은 2600 내지 2800W, 바이어스 전력은 500 내지 600W의 조건으로 실시된다. 상기 O2가스는 라디칼의 형태로 감광막 패턴(16)을 등방성 식각하며, C2F6또는 C2F8가스는 이온의 형태로 CVD산화막(15)에 대해 이방성 식각을 하게 되므로 화살표 B로 도시된 바와 같이 콘택홀의 상부면은 경사진 형태로 된다. 이때, 상기 이방성 식각공정은 CVD 산화막에 대해 4000 내지 5000Å을 타켓으로 과도식각 되므로써 경사각은 70 내지 80° 정도로 형성되며 이후 CVD산화막(15) 상에 남아있는 감광막 패턴(16)을 제거하므로써 콘택홀(20)을 완성한다. 이는 후속공정의 텅스텐 플러그 또는 금속층 증착공정시 스텝 커버리지를 양호하게하여 콘택홀의 하부에 공극이 형성되는 것을 방지한다.FIG. 2C illustrates a state in which isotropic and anisotropic etching is performed on the entire upper surface of the silicon substrate 11 to have an inclination on the upper surface of the contact hole 20. In the isotropic and anisotropic etching process, 30 to 40CC C 2 F 6 or C 3 F 8 gas and 5 to 10CC O 2 gas are supplied into the chamber, the pressure in the chamber is 8 to 12 mTorr, the fractional power is 2600 to 2800 W, The bias power is carried out under the conditions of 500 to 600W. The O 2 gas is isotropically etched the photosensitive film pattern 16 in the form of radicals, and the C 2 F 6 or C 2 F 8 gas is anisotropically etched against the CVD oxide film 15 in the form of ions, as shown by arrow B. As shown, the upper surface of the contact hole is inclined. At this time, the anisotropic etching process is inclined angle of about 70 to 80 ° by over-etching 4000 to 5000 대해 relative to the CVD oxide film and then contact hole (by removing the photoresist pattern 16 remaining on the CVD oxide film 15 Complete 20). This improves the step coverage during the subsequent tungsten plug or metal layer deposition process and prevents the formation of voids in the lower portion of the contact hole.

상술한 바와같이 본 발명에 의하면 C2F6계열의 가스를 이용하여 헬리칼 플라즈마에 의한 이방성 식각방법으로 콘택홀을 형성한 후 O2계열의 가스를 이용하여 콘택홀을 형성하기 위한 감광막 패턴의 등방성 식각과 동시에 C2F6계열의 이온가스에 의한 CVD산화막의 과도식각에 의해 콘택홀의 상부면에 경사를 갖도록 형성하므로써 후속공정의 금속층 증착공정시 스텝커버리지를 향상시켜 공극의 발생을 방지할 수 있는 효과가 있다.As described above, according to the present invention, a contact hole is formed using an anisotropic etching method using a helical plasma using a C 2 F 6 series gas, and then a photoresist pattern for forming a contact hole using an O 2 series gas. By forming an inclination on the upper surface of the contact hole by isotropic etching and etching the CVD oxide film by the C 2 F 6 series ion gas, it is possible to improve the step coverage in the subsequent metal layer deposition process and prevent the occurrence of voids. It has an effect.

Claims (6)

반도체 소자의 콘택홀 형성방법에 있어서,In the method of forming a contact hole of a semiconductor device, 소정의 공정을 거쳐 필드 산화막이 형성된 실리콘 기판 상의 소정부분에 게이트 전극 및 접합영역을 형성하고, 그 전체 상부면에 CVD산화막을 형성한 후 콘택홀을 형성하기 위하여 CVD산화막 상에 감광막 패턴을 형성하는 단계와,Forming a gate electrode and a junction region in a predetermined portion on the silicon substrate on which the field oxide film is formed through a predetermined process, forming a CVD oxide film on the entire upper surface thereof, and then forming a photoresist pattern on the CVD oxide film to form contact holes Steps, 감광막 패턴을 마스크로 이용하여 게이트 전극과 접합영역이 노출되도록 CVD산화막을 이방성 식각공정으로 콘택홀을 형성하는 단계와,Forming a contact hole by an anisotropic etching process of the CVD oxide film using the photoresist pattern as a mask to expose the gate electrode and the junction region; 상기 실리콘 기판의 전체 상부면에 등방성 및 이방성 식각공정을 실시하여 상기 콘택홀의 상부면에 경사를 갖도록 하는 단계와,Performing an isotropic and anisotropic etching process on the entire upper surface of the silicon substrate to have an inclination on the upper surface of the contact hole; 상기 감광막 패턴을 제거하는 단계로 이루어지는 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.And removing the photosensitive film pattern. 제 1 항에 있어서,The method of claim 1, 상기 이방성 식각공정은 분당 40 내지 50CC의 C2F6또는 C3F8가스가 챔버 내로 공급되며 상기 챔버내의 압력은 8 내지 12mTorr, 소스 전력은 2800 내지 3000W, 바이어스 전력은 600 내지 750W의 조건으로 실시되는 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.In the anisotropic etching process, 40 to 50 cc of C 2 F 6 or C 3 F 8 gas is supplied into the chamber, and the pressure in the chamber is 8 to 12 mTorr, source power is 2800 to 3000 W, and bias power is 600 to 750 W. A contact hole forming method of a semiconductor device, characterized in that carried out. 제 1 항에 있어서,The method of claim 1, 상기 이방성 식각공정은 콘택홀의 하부에 CVD산화막이 20 내지 100Å의 두께 가 남도록 식각되는 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.The anisotropic etching process is a method for forming a contact hole in a semiconductor device, characterized in that the CVD oxide film is etched so that the thickness of 20 to 100Åm remain below the contact hole. 제 1 항에 있어서,The method of claim 1, 상기 이방성 식각공정은 CVD산화막에 대해 4000 내지 5000Å을 타켓으로 과도식각 되는 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.The anisotropic etching process is a method for forming a contact hole of a semiconductor device, characterized in that the etched over-etched with a target of 4000 to 5000Å for the CVD oxide film. 제 1 항에 있어서,The method of claim 1, 상기 등방성 및 이방성 식각공정은 분당 30 내지 40CC의 C2F6또는 C3F8가스 및 5 내지 10CC의 O2가스가 챔버 내로 공급되며 상기 챔버내의 압력은 8 내지 12mTorr, 소스 전력은 2600 내지 2800W, 바이어스 전력은 500 내지 600W의 조건으로 실시되는 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.In the isotropic and anisotropic etching process, 30 to 40 cc of C 2 F 6 or C 3 F 8 gas and 5 to 10 cc of O 2 gas are supplied into the chamber, the pressure in the chamber is 8 to 12 mTorr, and the source power is 2600 to 2800 W. The bias power is a contact hole forming method of a semiconductor device, characterized in that carried out under the condition of 500 to 600W. 제 1 항에 있어서,The method of claim 1, 상기 경사는 70 내지 80° 인 것을 특징으로 하는 반도체 소자의 콘택홀 형성방법.The inclination is a contact hole forming method of a semiconductor device, characterized in that 70 to 80 °.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100425100B1 (en) * 2001-08-27 2004-03-30 엘지전자 주식회사 fabrication method for groove by dry-etching and optic communication device using the Method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100425100B1 (en) * 2001-08-27 2004-03-30 엘지전자 주식회사 fabrication method for groove by dry-etching and optic communication device using the Method

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