KR100209655B1 - Method of manufacturing x-ray lithographic mask - Google Patents
Method of manufacturing x-ray lithographic mask Download PDFInfo
- Publication number
- KR100209655B1 KR100209655B1 KR1019960060338A KR19960060338A KR100209655B1 KR 100209655 B1 KR100209655 B1 KR 100209655B1 KR 1019960060338 A KR1019960060338 A KR 1019960060338A KR 19960060338 A KR19960060338 A KR 19960060338A KR 100209655 B1 KR100209655 B1 KR 100209655B1
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- absorber
- membrane
- mask
- manufacturing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 45
- 239000006096 absorbing agent Substances 0.000 claims abstract description 44
- 239000012528 membrane Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 30
- 238000001015 X-ray lithography Methods 0.000 claims abstract description 20
- 238000005530 etching Methods 0.000 claims abstract description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 15
- 150000002500 ions Chemical class 0.000 claims abstract description 13
- 238000001312 dry etching Methods 0.000 claims abstract description 12
- 229910052786 argon Inorganic materials 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- -1 argon ions Chemical class 0.000 claims abstract description 3
- 238000005468 ion implantation Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 8
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 abstract description 13
- 238000002834 transmittance Methods 0.000 abstract description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007736 thin film deposition technique Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- OKTJSMMVPCPJKN-YPZZEJLDSA-N carbon-10 atom Chemical compound [10C] OKTJSMMVPCPJKN-YPZZEJLDSA-N 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
Abstract
X-선 리소그래피용 마스크 제조방법에 관한 것으로서, 기판상에 형성된 멤브레인 및 흡수체의 표면상에 멤브레인 및 흡수체보다 에칭 선택도가 낮은 제1및 제2포토레지스트를 형성하고 제1및 제2포토레지스트 표면내에 아르곤 이온을 주입(ion implatation)하여 에칭 선택도를 높여 멤브레인 및 흡수체와 에칭 선택도를 동일하게 하고, 제1 및 제2포토레지스트를 건식에칭하여 멤브레인 및 흡수체의 표면을 평탄화시킴으로써 멤브레인 및 흡수체의 표면 거칠기를 조절 및 개선할 수 있어 멤브레인의 가시광 투과도가 향상되어 X-선 리소그래피시에 정확하게 패턴을 정렬할 수 있으며, 흡수체의 표면 거칠기를 향상시켜 일렉트론 빔 라이팅(Writing) 시 비임의 산란을 줄여 정밀한 패턴을 그릴수 있다.A method of manufacturing a mask for X-ray lithography, the method comprising: forming first and second photoresists having lower etching selectivities than membranes and absorbers on surfaces of membranes and absorbers formed on a substrate; By implanting argon ions into the ion to increase the etching selectivity to the same etching selectivity with the membrane and absorber, dry etching the first and second photoresist to planarize the surface of the membrane and absorber The surface roughness can be adjusted and improved to improve the visible light transmittance of the membrane to precisely align the pattern during X-ray lithography. You can draw a pattern.
Description
본 발명은 X-선 리소그래피용 마스크에 관한 것으로서, 특히 멤브레인 및 흡수체의 표면 거칠기(Surface Roughness)를 개선하기 위한 X-선 리소그래피용 마스크 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to masks for X-ray lithography, and more particularly to a method for manufacturing masks for X-ray lithography for improving the surface roughness of membranes and absorbers.
일반적으로 X-선 리소그래피용 마스크의 제조방법은 흡수체를 형성한 후 일렉트론 빔(E-Beam) 레지스트상에 일렉트론 비임 리소그래피 기술을 이용하는 서브트랙티브(Subtrative) 방법과 또는 흡수체를 이미 형성되어 있는 포토레지스트상에 선택적으로 도금(Plating)하는 어디티브(Additivo)방법이 있다. 여기서 서브트랙티브 방법에 의해 X-선 리소그래피용 마스크를 제작할 경우 멤브레인 및 흡수체의 표면 거칠기가 매우 중요하다. 그러므로 X-선 리소그래피용 마스크의 멤브레인 및 흡수체의 표면 거칠기를 개선하기 위한 연마(polishing) 방법등이 연구되고 있다.In general, a method for manufacturing a mask for X-ray lithography includes a subtractive method using an electron beam lithography technique on an electron beam (E-Beam) resist after forming an absorber, or a photoresist in which an absorber is already formed. There is an Additivo method for selectively plating a phase. Here, when fabricating a mask for X-ray lithography by the subtractive method, the surface roughness of the membrane and the absorber is very important. Therefore, polishing methods for improving the surface roughness of the membrane and the absorber of the mask for X-ray lithography have been studied.
이하, 서브트랙티브 방법에 의한 종래 기술에 따른 X-선 리소그래피용 마스크를 도1을 참조하여 설명하면 다음과 같다.Hereinafter, a mask for X-ray lithography according to the prior art by the subtractive method will be described with reference to FIG.
X-선 리소그래피용 마스크는 실리콘(silicon) 기판(1)위에 실리콘 카바이드(SiC), 실리콘 나이트 라이드(SiN) 또는 다이아몬드(diamond)와 같은 얇은 재질의 멤브레인(2)이 형성되고, 멤브레인(2) 상에 스퍼터링등의 박막 증착기술을 이용하여 X-선 흡수체(3)가 형성된다. 이때, X-선 흡수체(3)는 X-선 흡수율이 높은 텅스텐(W), 탄탈륨(Ta) 및 텅스텐 타이타늄(W-Ti) 중 어느 하나로 형성된다.A mask for X-ray lithography is formed on a silicon substrate 1 on which a membrane 2 of thin material such as silicon carbide (SiC), silicon nitride (SiN) or diamond is formed, and the membrane (2) The X-ray absorber 3 is formed on the substrate using thin film deposition techniques such as sputtering. At this time, the X-ray absorber 3 is formed of any one of tungsten (W), tantalum (Ta), and tungsten titanium (W-Ti) having a high X-ray absorption rate.
그리고, 흡수체(3)상에 일렉트론 비임 레지스트(도시되지 않음)를 증착하고 일렉트론 비임 리소그래피(e-beam lithography) 기술을 이용하여 소정의 형태로 패터닝한다. 이렇게 패터닝된 일렉트론 비임 레지스트를 마스크로 흡수체(3)를 건식 에칭하여 마스크를 제작한다.Then, an electron beam resist (not shown) is deposited on the absorber 3 and patterned into a predetermined shape using an electron beam lithography technique. The mask is fabricated by dry etching the absorber 3 using the patterned electron beam resist as a mask.
종래 기술에 따른 X-선 리소그래피용 마스크의 제조방법은 실리콘 기판위에 멤브레인 및 X-선 흡수체를 형성한 후 일렉트론 비임 리소그래피를 진행하는데 실리콘 카바이드(SiC)를 이용한 멤브레인은 결정성 조직을 갖기 때문에 표면 거칠기가 50∼100Å으로 매우 커서 가시광을 이용한 패턴정렬 과정에서 빛의 산란등에 의해 가시광의 투과도를 저하시키므로 정확한 패턴 정렬이 어려운 문제점이 있고 멤브레인 위에 성막되는 흡수체의 표면 거칠기를 악화시킨다. 또한, 흡수체의 표면 거칠기(50∼100Å)가 크면 일렉트론 비임 라이팅(E-Beam writing) 과정에서 일렉트론 산란(scattering)으로 인해 의도한 흡수체의 패턴을 얻을 수 없는 문제점도 있다.According to the prior art, a method for manufacturing a mask for X-ray lithography is performed by forming a membrane and an X-ray absorber on a silicon substrate and then performing electron beam lithography.Since the membrane using silicon carbide (SiC) has a crystalline structure, surface roughness It is 50 to 100 매우 so large that the visible light transmittance is degraded by scattering of light in the pattern alignment process using visible light, so that accurate pattern alignment is difficult, and the surface roughness of the absorber deposited on the membrane is deteriorated. In addition, when the surface roughness (50 to 100 Pa) of the absorber is large, there is a problem in that the intended absorber pattern cannot be obtained due to scattering of electrons during the electron beam writing process.
따라서, 본 발명은 기판상에 형성된 멤브레인 및 흡수체의 표면을 평탄화시킴으로써 표면 거칠기를 개선하기 위한 X-선 리소그래피용 마스크 제조방법을 제공함에 그 목적이 있다.Accordingly, an object of the present invention is to provide a method for manufacturing a mask for X-ray lithography for improving the surface roughness by planarizing the surfaces of the membrane and the absorber formed on the substrate.
제1도는 종래 기술에 따른 X-선 리소그래피용 마스크의 제조공정을 보여주는 공정단면도.1 is a cross-sectional view showing a manufacturing process of a mask for X-ray lithography according to the prior art.
제2a도 내지 제2h도는 본 발명에 따른 X-선 리소그래피용 마스크의 제조공정을 보여주는 공정단면도.2A to 2H are cross-sectional views showing a manufacturing process of a mask for X-ray lithography according to the present invention.
제3도는 제1포토레지스트의 이온 주입조건에 따른 제1포토레지스트와 실리콘 카바이드 멤브레인과의 선택도를 보여주는 그래프.3 is a graph showing the selectivity of the first photoresist and the silicon carbide membrane according to the ion implantation conditions of the first photoresist.
제4도는 제2포토레지스트의 이온 주입조건에 따른 제2포토레지스트와 텅스텐 흡수체와의 선택도를 보여주는 그래프이다.4 is a graph showing the selectivity of the tungsten absorber and the second photoresist according to the ion implantation conditions of the second photoresist.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
10 : 실리콘 기판 11 : 멤브레인10 silicon substrate 11 membrane
12 : 제1포토레지스트 13 : 흡수체12: first photoresist 13: absorber
14 : 제2포토레지스트14: second photoresist
본 발명에 따른 X-선 마스크 제조방법은 기판상에 형성된 멤브레인 및 흡수체의 표면상에 멤브레인 및 흡수체보다 에칭 선택도가 낮은 제1및 제2포토레지스트를 형성하고 제1및 제2포토레지스트 표면내에 아르곤 이온을 이온 주입(ion implatation)하여 에칭 선택도를 높여 멤브레인 및 흡수체와 에칭 선택도를 동일하게 하고, 제1 및 제2포토레지스트를 건식에칭하여 멤브레인 및 흡수체의 표면을 평탄화시킴에 그 특징이 있다.The method of manufacturing an X-ray mask according to the present invention forms first and second photoresists having lower etching selectivities than membranes and absorbers on surfaces of membranes and absorbers formed on a substrate and in the first and second photoresist surfaces. The ion implatation of argon ions increases the etching selectivity to make the etching selectivity the same as that of the membrane and the absorber, and the surface of the membrane and the absorber is planarized by dry etching the first and second photoresists. have.
이하, 본 발명에 따른 X-선 리소그래피용 마스크의 제조방법을 첨부도면을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, a method of manufacturing a mask for X-ray lithography according to the present invention will be described in detail with reference to the accompanying drawings.
제2도는 본 발명에 따른 X-선 리소그래피용 마스크의 제조공정을 보여주는 공정단면도이다.2 is a cross-sectional view showing a manufacturing process of a mask for X-ray lithography according to the present invention.
제2a도에서와 같이 실리콘 기판(10)위에 실리콘 카바이드(SiC)와 같은 얇은 재질의 멤브레인(11)을 형성하는데, 이때, 멤브레인(11)의 표면 거칠기는 50∼100Å이다. 이어, 제2b도에서와 같이 멤브레인(11)상에 제1포토레지스트(12)를 형성한다. 여기서, 제1포토레지스트(12)는 실리콘 카바이드 멤브레인(11)과의 에칭 선택도(selectivity)가 1이하의 물질이고 스핀 코팅(spin coating)방법에 의해 표면을 균일하게 형성한다.As shown in FIG. 2A, a thin film membrane 11 such as silicon carbide (SiC) is formed on the silicon substrate 10, wherein the surface roughness of the membrane 11 is 50 to 100 GPa. Next, as shown in FIG. 2B, the first photoresist 12 is formed on the membrane 11. Here, the first photoresist 12 is a material having an etching selectivity of 1 or less with the silicon carbide membrane 11 and uniformly forms a surface by a spin coating method.
그리고, 제2c도에서와 같이 제1포토레지스트(12) 표면내에 아르곤(Ar)이온을 주입시킨다. 이때, 아르곤 이온주입은 제1포토레지스트(12)의 에칭 선택도를 높여 실리콘 카바이드의 멤브레인(11)과 에칭 선택도가 동일하게 되는 조건으로 한다. 즉, 첨부도면 제3도를 참조하여 설명하면, 제3도는 제1포토레지스트의 이온 주입조건에 따른 제1포토레지스트와 실리콘 카바이드 멤브레인과의 선택도를 보여주는 그래프로써, 이온 주입전(no implatation)에는 에칭 선택도가 1이하인 제1포토레지스트(12)에 에너지량 100keV, 도즈량(Dose) 5×1015(ion/)의 조건으로 이온주입하는 것이 가장 적합하다.As shown in FIG. 2C, argon (Ar) ions are implanted into the surface of the first photoresist 12. In this case, argon ion implantation is a condition in which the etching selectivity of the first photoresist 12 is increased to make the etching selectivity the same as that of the silicon carbide membrane 11. That is, referring to FIG. 3, FIG. 3 is a graph showing the selectivity between the first photoresist and the silicon carbide membrane according to the ion implantation conditions of the first photoresist. In the first photoresist 12 having an etching selectivity of 1 or less, an amount of energy of 100 keV and a dose of 5 × 10 15 (ion / It is most suitable to ion implant under the conditions of).
이어 제2d도에서와 같이 제1포토레지스트(12) 및 멤브레인(11)의 일부가 제거될 때까지 건식 에칭하여 표면이 평탄화되어 10Å 이하의 양호한 표면 거칠기를 얻을 수 있는 멤브레인(11)이 형성된다. 이때, 건식에칭은 반응성 이온 에칭법(RIE)을 이용하고 에칭 가스(gas)로 90%의 불화 탄소(CF4)와 10%의 아르곤(Ar)의 혼합가스를 사용한다.Subsequently, as shown in FIG. 2d, the surface is flattened by dry etching until the first photoresist 12 and a part of the membrane 11 are removed to form a membrane 11 having a good surface roughness of 10 kPa or less. . In this case, the dry etching uses a reactive ion etching method (RIE) and a mixed gas of 90% carbon fluoride (CF 4 ) and 10% argon (Ar) as an etching gas.
그리고, 제2e도에서와 같이 멤브레인(11)상에 스퍼터링(Sputtering) 등의 박막 증착기술을 이용하여 텅스텐(W), 탄탈륨(Ta), 텅스텐 타이타늄(W-Ti)중 어느 하나를 증착하여 X-선 흡수체(13)를 형성한다. 이때, X-선 흡수체(13)는 낮은 잔류 응력을 갖는 조건에서 형성하면 주상정(Columnar Stracture)을 갖기 때문에 형성된 X-선 흡수체(13)의 표면 거칠기는 50∼100Å로 매우 크다.As shown in FIG. 2E, any one of tungsten (W), tantalum (Ta), and tungsten titanium (W-Ti) is deposited on the membrane 11 using a thin film deposition technique such as sputtering. A line absorber 13 is formed. At this time, when the X-ray absorber 13 is formed under a condition having a low residual stress, the surface roughness of the formed X-ray absorber 13 is very large, such as 50 to 100 GPa, since it has a columnar extract.
이어, 제2f도와 같이 X-선 흡수체(13)상에 2포토레지스트(14)를 형성한다. 이때, 제2포토레지스트(14)는 X-선 흡수체(13)와의 에칭 선택비가 1이하인 물질로 스핀 코팅(spin coating) 방법에 의해 표면을 균일하게 형성한다. 그리고, 제2g도에서와 같이 제2포토레지스트(14) 표면내에 아르곤(Ar) 이온을 주입시킨다. 이때, 아르곤 이온주입은 제2포토레지스트(14)의 에칭 선택도를 높여 텅스텐 박막을 이용한 X-선 흡수체(13)와의 건식에칭 선택비가 동일하게 되는 조건으로 한다. 즉, 첨부도면 제4도를 참조하여 설명하면, 제4도는 제2포토레지스트의 이온 주입조건에 따른 제2포토레지스트와 텅스텐 흡수체와의 선택도를 보여주는 그래프로써, 이온 주입전(no implatation)에는 에칭 선택도가 1이하인 제2포토레지스트(14)에 에너지량 100keV, 도즈량(Dose) 5×1015(ion/)의 조건으로 이온주입하는 것이 가장 적합하다.Next, as shown in FIG. 2F, two photoresists 14 are formed on the X-ray absorber 13. At this time, the second photoresist 14 is formed of a material having an etching selectivity with respect to the X-ray absorber 13 of 1 or less, and uniformly forms a surface by a spin coating method. As shown in FIG. 2G, argon (Ar) ions are implanted into the surface of the second photoresist 14. In this case, argon ion implantation is a condition in which the etching selectivity of the second photoresist 14 is increased to make the dry etching selectivity with the X-ray absorber 13 using the tungsten thin film the same. That is, referring to FIG. 4, FIG. 4 is a graph showing the selectivity between the tungsten absorber and the second photoresist according to the ion implantation conditions of the second photoresist. The amount of energy 100keV and the dose 5 × 10 15 (ion /) in the second photoresist 14 having an etching selectivity of 1 or less. It is most suitable to ion implant under the conditions of).
이어, 제2h도에서와 같이 제2포토레지스트(14) 및 X-선 흡수체(13)의 일부가 제거되도록 건식에칭하여 표면이 평탄화되어 10Å이하인 양호한 표면 거칠기를 갖는 흡수체(13)가 형성된다. 이때, 건식 에칭방법은 반응성 이온 에칭법(RIE)을 이용하고, 에칭가스로 80%의 불화황(SF6)과 20%의 아르곤(Ar)의 혼합가스를 사용한다.Subsequently, as in FIG. 2h, dry etching is performed to remove a portion of the second photoresist 14 and the X-ray absorber 13, thereby forming an absorber 13 having a good surface roughness of 10 kPa or less. In this case, the dry etching method uses a reactive ion etching method (RIE), and uses a mixed gas of 80% sulfur fluoride (SF 6 ) and 20% argon (Ar) as an etching gas.
그리고, 평탄화된 X-선 흡수체(13)를 소정의 형태로 패터닝하여 X-선 리소그래피용 마스크의 제작을 완료한다.Then, the flattened X-ray absorber 13 is patterned in a predetermined form to complete the preparation of the mask for X-ray lithography.
본 발명에 따른 X-선 리소그래피용 마스크 제조방법은 멤브레인 및 흡수체와 제1및 제2포토레지시트의 건식에칭 선택비가 동일해지도록 이온주입하여 건식에칭을 함으로써 멤브레인 및 흡수체의 표면 거칠기가 개선되어 가시광에 의한 X-선 리소그래피 공정에서 패턴을 정확하게 정렬시킬 수 있는 효과가 있다. 또한, 흡수체의 비임 라이팅과정에서 산란(scattering) 현상을 줄여 의도한대로 흡수체의 패턴을 얻을 수 있는 효과도 있다.In the method for manufacturing a mask for X-ray lithography according to the present invention, the surface roughness of the membrane and the absorber is improved by performing ion etching by dry implantation so that the dry etching selectivity of the membrane and the absorber and the first and second photoresist sheets are the same. There is an effect that can accurately align the pattern in the X-ray lithography process. In addition, there is an effect of reducing the scattering phenomenon in the beam writing process of the absorber to obtain a pattern of the absorber as intended.
Claims (9)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960060338A KR100209655B1 (en) | 1996-11-30 | 1996-11-30 | Method of manufacturing x-ray lithographic mask |
| TW086107917A TW388005B (en) | 1996-11-30 | 1997-06-07 | Method of fabrication x-ray mask |
| US08/877,657 US5824440A (en) | 1996-11-30 | 1997-06-17 | Method of fabricating X-ray mask |
| DE19743554A DE19743554C2 (en) | 1996-11-30 | 1997-10-01 | Method of making an x-ray mask |
| JP27100497A JP3087032B2 (en) | 1996-11-30 | 1997-10-03 | X-ray mask manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960060338A KR100209655B1 (en) | 1996-11-30 | 1996-11-30 | Method of manufacturing x-ray lithographic mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980041069A KR19980041069A (en) | 1998-08-17 |
| KR100209655B1 true KR100209655B1 (en) | 1999-07-15 |
Family
ID=19485001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960060338A KR100209655B1 (en) | 1996-11-30 | 1996-11-30 | Method of manufacturing x-ray lithographic mask |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5824440A (en) |
| JP (1) | JP3087032B2 (en) |
| KR (1) | KR100209655B1 (en) |
| DE (1) | DE19743554C2 (en) |
| TW (1) | TW388005B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100422958B1 (en) * | 1996-12-31 | 2004-06-11 | 주식회사 하이닉스반도체 | Method for forming fine pattern by argon ion implantation process |
| KR100447993B1 (en) * | 1998-12-28 | 2004-10-14 | 주식회사 하이닉스반도체 | Cell Projection Mask_ |
| JP2001307979A (en) * | 2000-04-20 | 2001-11-02 | Nec Corp | Membrane mask and its manufacturing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01161718A (en) * | 1987-12-18 | 1989-06-26 | Toshiba Corp | Manufacture of x-ray mask |
| US5482802A (en) * | 1993-11-24 | 1996-01-09 | At&T Corp. | Material removal with focused particle beams |
| US5413953A (en) * | 1994-09-30 | 1995-05-09 | United Microelectronics Corporation | Method for planarizing an insulator on a semiconductor substrate using ion implantation |
-
1996
- 1996-11-30 KR KR1019960060338A patent/KR100209655B1/en not_active IP Right Cessation
-
1997
- 1997-06-07 TW TW086107917A patent/TW388005B/en not_active IP Right Cessation
- 1997-06-17 US US08/877,657 patent/US5824440A/en not_active Expired - Lifetime
- 1997-10-01 DE DE19743554A patent/DE19743554C2/en not_active Expired - Fee Related
- 1997-10-03 JP JP27100497A patent/JP3087032B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3087032B2 (en) | 2000-09-11 |
| TW388005B (en) | 2000-04-21 |
| JPH10163106A (en) | 1998-06-19 |
| DE19743554A1 (en) | 1998-06-04 |
| KR19980041069A (en) | 1998-08-17 |
| DE19743554C2 (en) | 2000-10-12 |
| US5824440A (en) | 1998-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6812473B1 (en) | Electron beam drawing mask blank, electron beam drawing mask, and method of manufacturing the same | |
| KR20170135896A (en) | EUV tolerant trenches and hole patterning using dual frequency capacitively coupled plasma (CCP) | |
| KR100891247B1 (en) | Method of Forming Pattern of Semiconductor Device | |
| US20040259367A1 (en) | Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias | |
| US7479233B2 (en) | Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure | |
| KR102550498B1 (en) | Methods for reducing pattern transfer and lithography defects | |
| JP5264237B2 (en) | Nanostructure and method for producing nanostructure | |
| US6051346A (en) | Process for fabricating a lithographic mask | |
| KR100209655B1 (en) | Method of manufacturing x-ray lithographic mask | |
| DE10131139B4 (en) | Process for producing large-area membrane masks by dry etching | |
| US6365326B1 (en) | Pattern density tailoring for etching of advanced lithographic mask | |
| KR101015176B1 (en) | Method for manufacturing transfer mask substrate, transfer mask substrate and transfer mask | |
| JP4507775B2 (en) | Manufacturing method of stencil mask | |
| JP4635491B2 (en) | Stencil mask and pattern transfer method | |
| JP4729875B2 (en) | Stencil mask and pattern transfer method | |
| WO2005015308A2 (en) | Fabrication process for high resolution lithography masks using evaporated or plasma assisted electron sensitive resists with plating image reversal | |
| JP4792666B2 (en) | Stencil mask, manufacturing method thereof and exposure method | |
| Gruhle et al. | Deep-uv lithography mask fabrication with 200nm feature size using a liftoff technique | |
| US6838213B2 (en) | Process for fabricating a mask | |
| JPS5887821A (en) | Manufacture of mask for x-ray lithography | |
| JP2010206234A (en) | Method of manufacturing stencil mask and pattern transfer method thereof | |
| JPS5964778A (en) | Etching treatment | |
| JP2010183121A (en) | Method of manufacturing stencil mask, and method of transferring pattern therefor | |
| KR20030054070A (en) | Method for fabricating phase shift mask | |
| JPH0453951A (en) | Manufacture of mask |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20060324 Year of fee payment: 8 |
|
| LAPS | Lapse due to unpaid annual fee |