KR0150988B1 - Rotation and up-down apparatus - Google Patents

Abstract

The present invention relates to a rotating and elevating device driven for the rotation and lifting of an object.

A frame member, a support member rotatably and elevating to the frame and supporting an object, an actuator fixed to the frame having a rotating axis of rotation, a rotating means for rotating the support member selectively receiving power from the actuator; The rotating and elevating device according to the present invention, characterized in that it is provided with a lifting means for elevating the support member by receiving power selectively from the actuator, the device can rotate and elevate the object by one actuator, It is possible to reduce the size and the cost of manufacturing.

Description

Rotary and elevating device

1 is a schematic cross-sectional view of a conventional rotating and elevating device.

Figure 2 schematically shows a rotating and elevating device according to the present invention, a schematic cross-sectional view of a state before the object is rotated and raised.

3 is a schematic plan view showing an extract of the cam member in the rotating and elevating device in the state shown in FIG.

4 is a schematic cross-sectional view of a rotating and elevating device showing a state in which an object is rotated and raised from the state shown in FIG.

FIG. 5 is a schematic plan view showing an extract of a cam member in a rotating and elevating device in the state shown in FIG.

FIG. 6 is an enlarged half sectional view of the electronic clutch portion of the rotating and elevating apparatus shown in FIG.

* Explanation of symbols for main parts of the drawings

100: rotating and elevating device 10: actuator

11: rotating shaft 20: support member

21: spline shaft 30: the first pulley

31: first belt 35: first electromagnetic clutch

40: second pulley 41: second belt

45: second electromagnetic clutch 50: cam member

51: cam face 60: spline boss

70: cam follower 72: slope

79: compression coil spring 80: rotary support member

90: frame

The present invention relates to a rotating and elevating device driven for the rotation and lifting of an object.

The apparatus for rotating and elevating an object may be configured in various forms. In FIG. 1, as an example of such an apparatus for rotating and elevating, an apparatus for rotating and elevating a wafer for inspecting a wafer for semiconductors is schematically shown. have.

Referring to the drawings, the wafer inspection apparatus 9 is provided with a chuck 1 for chucking the wafer W, and a nut housing 2 is fixed to the lower portion of the chuck 1 by a bolt 1a. The lower end of the nut housing 2 is coupled to the frame 8 so as to be elevated and rotatable. The nut member 3 is fixed inside the nut housing 2. The nut member 3 is screwed at one end of the lead screw 4 rotatably provided via the bearing 8a to the frame 8, and at the other end of the lead screw 4 at the pulley 4a. Is combined. The worm gear member 5 is rotatably coupled to the upper end of the nut housing 2 via the bearing 5a. The other side of the pin P, one side of which is fixed to the chuck gear 5, is fixed to the chuck 1. On the other hand, the lifting motor 7 is fixed to the frame 8, and the pulley 7a is fixed to the shaft of the lifting motor 7, and the pulley 7a and the lead screw 4 The belt 7b is caught by the pulley 4a provided in the edge part. And, on the outer circumference of the worm gear member 5, the worm 6a coupled to the shaft of the rotating motor 6 is gear-coupled.

In the wafer rotation and elevating device 9 having such a structure, the chuck 1 is chucked and the chuck 1 rotates by rotating the rotary motor 6 and the elevating motor 7. And the wafer (W) is lifted and chucked thereon is rotated and lifted. Looking at the process as follows.

First, when the rotary motor 6 is operated, the worm 6a fixed to the shaft of the motor 6 rotates, and the worm gear member 5 geared with the worm 6a is connected to the nut housing 2. It rotates while sliding about the outer circumferential surface of). Accordingly, the chuck 1 is rotated by the worm gear member 5 and the pin P fixed to the chuck 1, and the wafer W chucked to the chuck 1 is also rotated. Will rotate together.

When the lifting motor 7 is operated, the lead screw 4 is rotated by receiving the rotational force of the lifting motor 7 through the pulleys 4a, 7a and the belt 7b. Accordingly, since the worm gear member 5 and the nut housing 2 cannot be rotated if the rotation motor 6 is not operated, the nut member 3 and the nut member 3 screwed to the lead screw 4 may not be rotated. 3) The nut housing 2 fixedly coupled is raised or lowered (elevation is determined according to the rotation direction of the lifting motor), and the chuck 1 and the chuck 1 fixed to the upper part of the nut housing 2 are fixed. The wafer W chucked in 1) is raised or lowered together.

As described above, the conventional rotating and elevating apparatus 9 requires two motors, that is, the rotating motor 6 and the elevating motor 7, in order to rotate and elevate an object such as a wafer. Was not only complicated but also costly. In addition, since the rotation and the lifting motion are not simultaneously required in the wafer inspection process, it is not necessary to provide two motors and related transmission devices separately to increase the size of the device and to increase the cost.

SUMMARY OF THE INVENTION The present invention has been made in view of this point, and an object of the present invention is to provide an improved rotation and elevating apparatus for rotating and elevating an object by one actuator for miniaturization and cost reduction.

In order to achieve the above object, the rotating and elevating device of the present invention, for rotating and elevating an object, a frame, a support member rotatably and elevating to the frame and supporting the object, and a rotating shaft for rotating And one actuator fixed to the frame, a rotation means for selectively receiving power from the one actuator to rotate the support member, and selectively receiving power from the one actuator to support the support member. It is characterized in that it is provided with a lifting means for lifting.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 and 4 show an example of a rotating and elevating device according to the present invention as a schematic partial cross-sectional view, in which FIG. 2 shows the state before the object rotates and ascends, and FIG. 4 shows how the object rotates and ascends. It shows the state after. 3 and 5, the cam member is taken from the rotating and elevating apparatus in the state shown in FIG.

Referring to the drawings, for example, a support member 20 for chucking and supporting an object W such as a semiconductor wafer or the like is installed on the frame 90 so as to be rotatable and liftable. As an actuator for generating power, a rotating motor 10 having a rotating shaft 11 is fixed to the frame 90. Then, the rotating means for rotating the object (W) supported on the upper portion of the support member 20 by using the rotational force of the motor 10, and the support member 20 by lifting up and down by using the rotational force of the motor 10. Lifting means is provided to make it easy.

In this embodiment, as the rotation means, the spline shaft 21 is provided with the spline shaft 21 provided on the lower side of the support member 20 to be slid in the longitudinal direction of the spline shaft 21 and rotates together with the spline shaft 21 during rotation. A spline boss (60) installed so that the spline boss (60) rotates, and a first control means for transmitting or blocking the rotational force of the motor (10) so that the spline boss (60) rotates. The first interlocking means has a first pulley 30 whose inner peripheral surface is spaced apart from the outer peripheral surface of the rotating shaft 11 of the motor 10 so as to be relatively rotatable with the rotating shaft 11 of the motor 10, and the first pulley. 30 and the first belt 31 which is caught on the outer circumferential surface of the spline boss 60 and the first electrons fixed to the first pulley 30 and selectively rotated together with the rotary shaft 11 by the application of power. The clutch 35 is provided. The first electronic clutch 35 is commonly used to control power in various devices, and as shown schematically in FIG. 6, the moving body is formed by the interaction of the coils 451 and 452 upon application of power. The 450 is in close contact with the rotating shaft 11 of the motor 10 to allow the body to interlock with the rotating shaft 11.

In the present embodiment, the cam member 50 is rotatably installed by the rotational force of the motor 10 and has a plurality of aligned cam surfaces 51 formed in a direction away from the center of rotation thereof. It is installed on the frame 90 so as to reciprocate in the radial direction of the cam member 50, one side 71 is elastically biased in the direction in contact with the cam surface 51 of the cam member 50 by the compression coil spring (79) And the cam follower 70 on which the inclined surface 72 is formed in the radial direction of the cam member 50, and the support member 20 rotates while slidingly contacting the inclined surface 72 of the cam follower 70. It is provided with a rotation support member 80 which can support it, and the 2nd control means for transmitting or interrupting the power generated from the said motor 10 to the said cam member 50. A bearing (not shown) is preferably provided between the cam follower 70 and the frame 80 so that the sliding motion of the cam follower 70 can be smoothly performed. On the other hand, the second control means, like the first pulley 30, the second pulley 40, the second pulley 40 and the cam is installed on the rotating shaft 11 of the motor 10 so as to be relatively rotatable. Like the first electromagnetic clutch 35, the second belt 41 and the second pulley 40 caught on the outer circumferential surface of the member 50 are selectively fixed together with the rotary shaft 11 by the application of power. The second electromagnetic clutch 45 to be rotated is provided.

Reference numerals 25, 75, and 85 are bearing members for smoothing the relative movement of the members, and 29 is a support member 20 that compensates for the weight of the support member 20 when the support member 20 is raised. Both ends are compressed coil springs installed in contact with the frame 90 and the rotation support member 80, respectively.

In the rotating and elevating apparatus 100 according to the present invention having such a structure, a process of rotating and elevating the object W supported by the supporting member 20 is as follows.

First, in the state shown in FIG. 2, power is applied to the first electromagnetic clutch 35 so that the first electromagnetic clutch 35 can be rotated together with the rotation shaft 11 of the motor 10. When the 11 is rotated, the first electromagnetic clutch 35 and the first pulley 30 to which the first electromagnetic clutch 35 is fixed rotate together with the rotation shaft 11 of the motor 10, and the first belt The spline boss 60 connected to the first pulley 30 is rotated by the 31. Accordingly, the support member 20 coupled with the spline boss 60 rotates, and the object W supported by the support member 20 rotates.

In this way, the power applied to the first electromagnetic clutch 35 is cut off while the object W is rotated by a desired angle, and the rotating of the first pulley 30 is stopped by stopping the rotating first electronic clutch 35. This stops and the object W does not rotate. At this time, when power is applied to the second electromagnetic clutch 45 so that the second electromagnetic clutch 45 rotates together with the rotation shaft 11 of the motor 10, the second electromagnetic clutch 45 is fixed to the upper portion thereof. The second pulley 40 is rotated. Then, the cam member 50 connected to the second pulley 40 by the second belt 41 is rotated in the arrow direction (R). As the cam member 50 rotates as described above, the cam follower 70 having one end portion 71 in contact with the cam surface 51 gradually approaching the rotation center direction of the cam member 50 via the bearing 75. ) Moves in the center direction of the cam member 50. In this process, the compression coil spring 79 is pressed by the cam follower 70 has a restoring force. Then, the rotary support member 80, which is slidably raised via the bearing member 85 on the inclined surface 72 of the cam follower 70, slides with respect to the inclined surface 72 of the cam member 50 to be moved. , Pushed up. Accordingly, the support member 20 mounted on the upper portion of the rotary support member 80 also slides with respect to the spline boss 60 and rises while the rotation is constrained. Therefore, the object W supported by the support member 20 is eventually raised. ) Will rise. At this time, when the power applied to the second electronic clutch 45 is cut off, the object W stops at a predetermined angle rotated and raised to maintain the state as shown in FIGS. 4 and 5.

In this state, after the work such as the inspection of the object W is completed, when the second electronic clutch 45 is again supplied with power, the cam follower 70 makes a boundary 52 of the cam member 50. It is moved by the restoring force of the compressed compression coil spring 79 in a direction away from the center of rotation of the cam member 50 by riding. Accordingly, the support member 20 and the object W are lowered while the members are moved as opposed to the above-described ascending process, so that the rotation and lifting of the object can be repeated by maintaining the state as shown in FIG. do.

On the other hand, for the description of the present embodiment has been described with respect to the process of raising the object W after the rotation, by changing the order of applying power to the electronic clutch (35, 45), raising the object (W) Of course, it can also be rotated.

In the present embodiment, in order to lower the object W, the cam 10 is continuously rotated in the same direction so that the cam follower 70 contacts the boundary 52 of the cam member 50 while the cam member 50 is rotated. However, the cam follower 70 moves along the cam surface 52 of the cam member 50 which reversely rotates the motor 10 and thereby reverses the motor 10. While contacting the cam surface 51 may be moved in a direction away from the center of rotation of the cam member 50.

As described above, since the rotating and elevating device according to the present invention is capable of rotating and elevating an object by one actuator, not only the device can be miniaturized but also the cost of manufacturing is reduced.

Claims (5)

A rotating and elevating apparatus for rotating and elevating an object, the apparatus comprising: a frame, a support member rotatably mounted on the frame and supporting the object, and an actuator fixed to the frame and having a rotating axis of rotation; And a rotating means for rotating the support member by receiving power selectively from the one actuator and a lifting means for lifting the supporting member by selectively receiving power from the one actuator. Rotating and elevating device characterized by. According to claim 1, The rotating means is rotatably installed is rotatably coupled to the support member, the rotation member for restraining the relative rotation of the support member, and transmits the power generated from the actuator to rotate the rotating member Rotating and elevating device, characterized in that provided with a first control means for blocking or blocking. According to claim 2, wherein the first control means is fixed to the first pulley, the first belt to be caught by the first pulley and the rotating member, the first pulley is installed on the rotary shaft of the actuator to be relatively rotatable Rotating and elevating device, characterized in that provided with a first electromagnetic clutch that is selectively rotated with the rotary shaft by the application of power. The cam member according to any one of claims 1 to 3, wherein the elevating means is rotatably installed by receiving power from the actuator, and has a cam member having a plurality of aligned cam surfaces formed in a direction away from the center of rotation thereof. The cam follower is installed to be reciprocally movable in the radial direction of the cam member and reciprocates in the radial direction by interference with the cam surface of the cam member and has an inclined surface formed in the radial direction of the cam member on one side, and the cam follower. And a rotation support member slidably contacting the inclined surface of the wore and rotatably supporting the support member, and second interrupting means for transmitting or interrupting the power generated from the actuator to the cam member. Rotating and hoisting. The method of claim 4, wherein the second control means is fixed to the second pulley, which is installed on the rotary shaft of the actuator so as to be relatively rotatable, the second belt to be caught by the second pulley and the cam member, and the second pulley And a second electromagnetic clutch which is selectively rotated together with the rotation shaft by the application of power.