JP3384438B2 - Linear motion device - Google Patents

Linear motion device

Info

Publication number
JP3384438B2
JP3384438B2 JP18675197A JP18675197A JP3384438B2 JP 3384438 B2 JP3384438 B2 JP 3384438B2 JP 18675197 A JP18675197 A JP 18675197A JP 18675197 A JP18675197 A JP 18675197A JP 3384438 B2 JP3384438 B2 JP 3384438B2
Authority
JP
Japan
Prior art keywords
screw shaft
moving member
screw
nut member
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP18675197A
Other languages
Japanese (ja)
Other versions
JPH1133946A (en
Inventor
英治 善甫
健生 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP18675197A priority Critical patent/JP3384438B2/en
Publication of JPH1133946A publication Critical patent/JPH1133946A/en
Application granted granted Critical
Publication of JP3384438B2 publication Critical patent/JP3384438B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、例えばロボット等
の上下軸あるいは走行軸に好適に用いられ、ネジ軸とナ
ット部材とのネジ作用によって、移動部材に所要の直線
動作をさせる直線動作装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motion device which is preferably used for a vertical shaft or a traveling shaft of a robot or the like and which causes a moving member to perform a required linear motion by a screw action of a screw shaft and a nut member. .

【0002】[0002]

【従来の技術】従来直線動作装置として、ネジ軸とナッ
ト部とのネジ作用によって、移動体に所要の直線動作を
させるものがある。ネジ軸は、外周に雄ネジ部を形成さ
れており、プーリ及びタイミングベルト等を介して、モ
ータ等によって回転駆動される。ナット部は、貫通孔内
面に雌ネジ部を形成されており、雌ネジ部にネジ軸の雄
ネジ部を螺合される。移動体は、ナット部に固定され
る。
2. Description of the Related Art Conventionally, there is a linear motion device which causes a moving body to perform a required linear motion by a screw action of a screw shaft and a nut portion. The screw shaft has a male screw portion formed on the outer periphery thereof, and is rotationally driven by a motor or the like via a pulley, a timing belt, or the like. The nut portion has a female screw portion formed on the inner surface of the through hole, and the male screw portion of the screw shaft is screwed into the female screw portion. The moving body is fixed to the nut portion.

【0003】[0003]

【発明が解決しようとする課題】上述した従来の直線動
作装置では、ネジ軸のナット部の長さ、及びネジ軸の固
定部の長さ等、直線動作可能なストローク量とは直接関
係のない長さ分の装置寸法が、ストローク量と比較して
大きい。したがって、装置の収納状態における全長がス
トローク量より長くなってしまい、デッドスペースが生
じてしまうという問題があった。換言すれば、所定のス
トローク量を得るためには、ストローク量以上の長さを
装置スペースとして確保する必要がある。このため、特
に寸法の制約されたスペースにおいて、ストローク量を
確保することは、極めて困難であった。本発明は、直線
動作可能なストローク量を、装置の収納状態における全
長よりも長くすることができ、これにより特に寸法の制
約されたスペースにおいて、デッドスペースを最小限に
抑えつつ、最大限のストローク量を確保することができ
る直線動作装置を提供することを目的としている。
In the above-described conventional linear motion device, the length of the nut portion of the screw shaft and the length of the fixed portion of the screw shaft are not directly related to the stroke amount capable of linear motion. The device dimension for the length is large compared to the stroke amount. Therefore, there is a problem that the total length of the device in the housed state becomes longer than the stroke amount and a dead space occurs. In other words, in order to obtain a predetermined stroke amount, it is necessary to secure a length equal to or larger than the stroke amount as a device space. For this reason, it is extremely difficult to secure the stroke amount, especially in a space with limited dimensions. INDUSTRIAL APPLICABILITY According to the present invention, the stroke amount capable of linear movement can be made longer than the total length of the device in the housed state, so that the dead space can be minimized and the maximum stroke can be achieved especially in a space having limited dimensions. It is an object of the present invention to provide a linear motion device that can secure the amount.

【0004】[0004]

【課題を解決するための手段】本発明の上記目的は、外
周に雄ネジ部形成され、基端部のみがベース部材に固
定された第1のネジ軸と、貫通孔内面に形成された雌ネ
ジ部に、前記第1のネジ軸の雄ネジ部が螺合される第1
のナット部材と、前記第1のナット部材に相対回転可能
に支持され、前記第1のナット部材の回転に伴う前記第
1のナット部材と前記第1のネジ軸とのネジ作用によ
り、前記第1のネジ軸に沿って移動される第1の移動部
材と、外周に雄ネジ部形成され、基端部のみが前記第
1の移動部材に固定されて前記第1の移動部材に相対回
転可能に支持される第2のネジ軸と、貫通孔内面に形成
された雌ネジ部に、前記第2のネジ軸の雄ネジ部が螺合
される第2のナット部材と、前記第2のナット部材に固
定され、前記第2のネジ軸の回転に伴う前記第2のネジ
軸と前記第2のナット部材とのネジ作用により、前記第
2のネジ軸に沿って移動される第2の移動部材と、モー
タの回転軸に固定された駆動プーリの回転をベルトを介
して前記第1のナット部材に固定された従動プーリに伝
えるとともに、前記モータの回転軸に固定された駆動プ
ーリの回転をベルトを介して前記第2のネジ軸に固定さ
れた従動プーリに伝えることで、前記第1のナット部材
及び前記第2のネジ軸を同期して回転させる駆動手段と
を備えた直線動作装置により達成される。上記直線動作
装置には、前記第1の移動部材に固定され、前記ベース
部材に対して相対移動可能であるとともに、前記第2の
移動部材と相対移動可能に連結されたガイド部材を備え
ることが好ましい。前記ガイド部材は、前記第1の移動
部材の前記第1のネジ軸に沿う移動に伴って、前記第1
の移動部材に連動して同方向に移動するとともに、前記
第2の移動部材の前記第2のネジ軸に沿う移動に伴っ
て、前記第2の移動部材を相対移動させる。本発明に係
る直線動作装置において、第1のナット部材及び第2の
ネジ軸は、駆動手段によって同期して回転される。第1
のナット部材は、駆動手段による回転に伴って、第1の
ネジ軸との間にネジ作用を生じる。これにより第1の移
動部材は、第1のネジ軸に沿って移動される。また第2
のネジ軸は、駆動手段による回転に伴って、第2のナッ
ト部材との間にネジ作用を生じる。これにより第2の移
動部材は、第2のネジ軸に沿って移動される。ガイド部
材は、第1の移動部材の第1のネジ軸に沿う移動に伴っ
て、第1の移動部材に連動して同方向に移動するととも
に、第2の移動部材の第2のネジ軸に沿う移動に伴っ
て、第2の移動部材を相対移動させて案内する。
The above object of the present invention is to form a male screw portion on the outer circumference and to form a first screw shaft having only a base end portion fixed to a base member and an inner surface of a through hole. A first screw shaft to which the male screw portion of the first screw shaft is screwed
Of the first nut member and the first nut member are rotatably supported by the first nut member, and the first nut member and the first screw shaft are screwed together by the screw action of the first nut member and the first screw member. A first moving member that is moved along a screw axis of 1 and a male screw portion is formed on the outer periphery, and only a base end portion is fixed to the first moving member and relatively rotated with respect to the first moving member. A second nut member that is movably supported, a second nut member in which a male screw portion of the second screw shaft is screwed into a female screw portion formed on the inner surface of the through hole, and the second nut member. A second screw shaft fixed to the nut member and moved along the second screw shaft by a screw action of the second screw shaft and the second nut shaft accompanying the rotation of the second screw shaft. The rotation of the moving member and the drive pulley fixed to the rotating shaft of the motor is rotated by a belt to rotate the first pulley. By transmitting the rotation of the drive pulley fixed to the rotation shaft of the motor to the driven pulley fixed to the second screw shaft through the belt while transmitting the rotation to the driven pulley fixed to the member, This is achieved by a linear motion device provided with a nut member and a drive means for rotating the second screw shaft in synchronization. The linear motion device may include a guide member that is fixed to the first moving member, is relatively movable with respect to the base member, and is connected to the second moving member so as to be relatively movable. preferable. The guide member moves along with the movement of the first moving member along the first screw axis to cause the first moving member to move.
Of the second moving member in the same direction, and the second moving member is moved relative to the second moving member along the second screw axis. In the linear motion device according to the present invention, the first nut member and the second screw shaft are rotated synchronously by the driving means. First
The nut member causes a screw action between the nut member and the first screw shaft as the nut member rotates. Thereby, the first moving member is moved along the first screw shaft. The second
The screw shaft causes a screw action with the second nut member as the drive shaft rotates. Thereby, the second moving member is moved along the second screw shaft. The guide member moves in the same direction in conjunction with the first moving member along with the movement of the first moving member along the first screw shaft, and also moves on the second screw shaft of the second moving member. The second moving member is relatively moved and guided along with the movement.

【0005】[0005]

【発明の実施の形態】以下、本発明の実施の形態を図示
を参照して説明する。図1は、本発明の一実施形態であ
る直線動作装置の収納状態を示す側面図であり、図2
は、図1の直線動作装置の伸長状態を示す側面図であ
る。これらの図において、第1のナット部材21及び第
2のネジ軸30は、モータ40によって同期して回転さ
れ、第1のナット部材21と第1のネジ軸20との間、
及び第2のネジ軸30と第2のナット部材32との間に
ネジ作用を生じる。これにより第1の移動部材23が、
第1のネジ軸20に沿って移動されるとともに、第2の
移動部材34が、第2のネジ軸30に沿って移動され、
所定の収納位置(図1に示す位置)から伸長位置(図2
に示す位置)、又は伸長位置から収納位置に直線動作が
行われる。第1のネジ軸20は、外周に雄ネジ部(図示
しない)を形成されており、基端部をベース部材である
収納ケース10の底部11に固定される。第1のナット
部材21は、貫通孔22内面に形成された雌ネジ部(図
示しない)に、第1のネジ軸20の雄ネジ部を螺合され
る。第1のナット部材21には、第1の移動部材23
が、軸受24を介して相対回転可能に支持される。第1
の移動部材23は、例えば平板状に形成されており、第
1のナット部材21の回転に伴う第1のナット部材21
と第1のネジ軸20とのネジ作用により、所定の収納位
置から伸長位置、又は伸長位置から収納位置まで、第1
のネジ軸20に沿って図中上下方向に移動される。第2
のネジ軸30は、外周に雄ネジ部(図示しない)を形成
されており、第1のネジ軸20と略平行に、第1の移動
部材23に軸受31を介して相対回転可能に支持され
る。第2のナット部材32は、貫通孔33内面に形成さ
れた雌ネジ部(図示しない)に、第2のネジ軸30の雄
ネジ部を螺合される。第2のナット部材32は、第2の
移動部材34の嵌合溝35に嵌合されることにより、第
2の移動部材34を固定する。第2の移動部材34は、
例えば立方体状に形成されており、第2のネジ軸30の
回転に伴う第2のネジ軸30と第2のナット部材32と
のネジ作用により、所定の収納位置から伸長位置、又は
伸長位置から収納位置まで、第2のネジ軸30に沿って
図中上下方向に移動される。第2の移動部材34の図中
上面には、ロボットアーム36が取り付けられる。ロボ
ットアーム36は、第2の移動部材34の伸長位置にお
いて、例えばロボットの上下軸として動作する。第1の
ナット部材21及び第2のネジ軸30は、従動プーリ4
2,45、駆動プーリ44,47及びタイミングベルト
43,46を介して、モータ40によって同期して所定
の方向に回転駆動される。モータ40は、第1の移動部
材23における図中略中央に、回転軸41を図中下向き
の状態で固定されている。すなわち第1のナット部材2
1は、従動プーリ42、タイミングベルト43及び駆動
プーリ44を介して、モータ40に連動される。従動プ
ーリ42は、第1のナット部材21の図中下端部に固定
される。駆動プーリ44は、モータ40の回転軸41に
固定される。タイミングベルト43は、従動プーリ42
と駆動プーリ44との間に渡って巻回される。また第2
のネジ軸30は、従動プーリ45、タイミングベルト4
6及び駆動プーリ47を介して、モータ40に連動され
る。従動プーリ45は、第2のネジ軸30の図中下端部
に固定される。駆動プーリ47は、前記駆動プーリ44
と一体に形成されており、モータ40の回転軸41に固
定される。タイミングベルト46は、従動プーリ45と
駆動プーリ47との間に渡って巻回される。第1の移動
部材23の外周部25における図中左端部上面には、リ
ニアガイド50の図中下端部が固定される。リニアガイ
ド50は、図中左右両側面にガイド溝51,53をそれ
ぞれ形成されており、各ガイド溝51,53には、収納
ケース10及び第2の移動部材34がそれぞれ、軸受5
2,54を介して相対移動可能に取り付けられる。すな
わちリニアガイド50は、図中左側面のガイド溝51及
び軸受52を介して、収納ケース10の図中左内側面に
図中上下方向に相対移動可能に支持されており、かつ、
図中右側面のガイド溝53及び軸受54を介して、第2
の移動部材34を相対移動可能に支持している。リニア
ガイド50は、第1の移動部材23の第1のネジ軸20
に沿う図中上下方向の移動に伴って、第1の移動部材2
3に連動して同方向に移動する。またリニアガイド50
は、第2の移動部材34の第2のネジ軸30に沿う図中
上下方向の移動に伴って、第2の移動部材34を図中上
下方向に相対移動させて案内する。以下、本実施形態の
作用を説明する。第1及び第2の移動部材23,34
が、例えば図1に示す所定の収納位置から、図2に示す
所定の伸長位置まで直線動作(伸長動作)される際、第
1のナット部材21及び第2のネジ軸30は、モータ4
0の正転によって同期して所定の方向に回転される。す
なわち第1のナット部材21は、モータ40による所定
の方向への回転に伴って、第1のネジ軸20との間にネ
ジ作用を生じる。これにより第1の移動部材23は、第
1のネジ軸20に沿って図中上方に移動される。また第
2のネジ軸30は、モータ40による所定の方向への回
転に伴って、第2のナット部材32との間にネジ作用を
生じる。これにより第2の移動部材34は、第2のネジ
軸30に沿って図中上方に移動される。この際、リニア
ガイド50は、第1の移動部材23の第1のネジ軸20
に沿う図中上方への移動に伴って、第1の移動部材23
に連動して同方向に移動するとともに、第2の移動部材
34の第2のネジ軸30に沿う図中上方への移動に伴っ
て、第2の移動部材34を図中上方に相対移動させて案
内する。第1及び第2の移動部材23,34が、所定の
伸長位置まで直線動作された状態において、第2の移動
部材34に取り付けられたロボットアーム36が、例え
ばロボットの上下軸として動作する。また第1及び第2
の移動部材23,34が、例えば図2に示す所定の伸長
位置から、図1に示す所定の収納位置まで直線動作(収
納動作)される際、第1のナット部材21及び第2のネ
ジ軸30は、モータ40の逆転によって、伸長動作の場
合と逆方向(以下、単に逆方向という)に同期して回転
される。第1のナット部材21は、モータ40による逆
方向への回転に伴って、第1のネジ軸20との間に逆方
向のネジ作用を生じる。これにより第1の移動部材23
は、第1のネジ軸20に沿って図中下方に移動される。
また第2のネジ軸30は、モータ40による逆方向への
回転に伴って、第2のナット部材32との間に逆方向の
ネジ作用を生じる。これにより第2の移動部材34は、
第2のネジ軸30に沿って図中下方に移動される。この
際、リニアガイド50は、第1の移動部材23の第1の
ネジ軸20に沿う図中下方への移動に伴って、第1の移
動部材23に連動して同方向に移動するとともに、第2
の移動部材34の第2のネジ軸30に沿う図中下方への
移動に伴って、第2の移動部材34を図中下方に相対移
動させて案内する。第1及び第2の移動部材23,34
が、所定の収納位置まで戻された状態において、ロボッ
トアーム36を除く各構成要素は、収納ケース10内に
収納される。以上のように上記実施形態によれば、第1
のナット部材21と第1のネジ軸20との間、及び第2
のネジ軸30と第2のナット部材32との間に生じるネ
ジ作用により、第1の移動部材23が、第1のネジ軸2
0に沿って移動されるとともに、第2の移動部材34
が、第2のネジ軸30に沿って移動される。すなわち、
2本のネジ軸20,30及び2個の移動部材23,34
による2段伸長構造とし、各段にそれぞれ直線動作可能
なストローク量Aの略半分ずつを受け持たせた。したが
って、直線動作可能なストローク量Aを、装置の収納状
態における全長Bよりも長くすることができる(ストロ
ーク量A>収納状態における全長B)。これにより、特
に寸法の制約された狭いスペースにおいて、デッドスペ
ースを最小限に抑えつつ、最大限のストローク量Aを確
保することができる。またリニアガイド50は、第1の
移動部材23の第1のネジ軸20に沿う移動に伴って、
第1の移動部材23に連動して同方向に移動するととも
に、第2の移動部材34の第2のネジ軸30に沿う移動
に伴って、第2の移動部材34を相対移動させて案内す
る。したがって、2段伸長構造としたことに伴う各部の
ガタツキ等を、確実に防止することができる。近年、例
えばクリーンロボット等のクリーンルーム内に設置され
る機器においては、コンパクト性と広い動作範囲の両立
を要求されている。本実施形態の装置によれば、このよ
うな相反する要求を満たすことができる。なお上記実施
形態では、リニアガイド50と収納ケース10との間、
及びリニアガイド50と第2の移動部材34との間に、
それぞれ軸受52,54を介在させる構造とした。しか
し、装置の大きさ及び重量等によっては、軸受52,5
4のみでは、各部材間の相互支持が不安定となり、各部
材間に相対的に傾き等が生じるおそれがある。このよう
な場合を考えると、各部材を案内する別のガイド部材
(図示しない)を用い、各部材間の相互支持を確実に行
う構造とすることも可能である。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is a side view showing a housed state of a linear motion device according to an embodiment of the present invention.
[Fig. 2] is a side view showing an extended state of the linear motion device of Fig. 1. In these drawings, the first nut member 21 and the second screw shaft 30 are synchronously rotated by the motor 40, and between the first nut member 21 and the first screw shaft 20,
Also, a screw action is generated between the second screw shaft 30 and the second nut member 32. Thereby, the first moving member 23,
While being moved along the first screw shaft 20, the second moving member 34 is moved along the second screw shaft 30,
From the predetermined storage position (the position shown in Fig. 1) to the extended position (Fig. 2)
(The position shown in FIG. 2) or from the extended position to the stored position. A male screw portion (not shown) is formed on the outer periphery of the first screw shaft 20, and the base end portion is fixed to the bottom portion 11 of the storage case 10 which is a base member. In the first nut member 21, the male screw portion of the first screw shaft 20 is screwed into a female screw portion (not shown) formed on the inner surface of the through hole 22. The first nut member 21 includes a first moving member 23.
Are rotatably supported by bearings 24. First
The moving member 23 of the first nut member 21 is formed in a flat plate shape, for example, and is rotated by the rotation of the first nut member 21.
By the screw action of the first screw shaft 20 and the first screw shaft 20, the first retracted position to the extended position, or the extended position to the retracted position, the first
The screw shaft 20 is moved in the vertical direction in the figure. Second
The screw shaft 30 has a male screw portion (not shown) formed on the outer periphery thereof, and is supported by the first moving member 23 via a bearing 31 so as to be relatively rotatable substantially parallel to the first screw shaft 20. It In the second nut member 32, the male screw portion of the second screw shaft 30 is screwed into a female screw portion (not shown) formed on the inner surface of the through hole 33. The second nut member 32 fixes the second moving member 34 by being fitted into the fitting groove 35 of the second moving member 34. The second moving member 34 is
For example, it is formed in a cubic shape, and due to the screw action of the second screw shaft 30 and the second nut member 32 accompanying the rotation of the second screw shaft 30, from the predetermined storage position to the extended position or from the extended position. It is moved up and down in the figure along the second screw shaft 30 to the storage position. A robot arm 36 is attached to the upper surface of the second moving member 34 in the figure. The robot arm 36 operates, for example, as a vertical axis of the robot at the extended position of the second moving member 34. The first nut member 21 and the second screw shaft 30 are driven by the driven pulley 4
2, 45, drive pulleys 44 and 47, and timing belts 43 and 46, the motor 40 is synchronously driven to rotate in a predetermined direction. The motor 40 is fixed to the center of the first moving member 23 in the drawing with the rotating shaft 41 facing downward in the drawing. That is, the first nut member 2
1 is interlocked with the motor 40 via a driven pulley 42, a timing belt 43, and a drive pulley 44. The driven pulley 42 is fixed to the lower end of the first nut member 21 in the figure. The drive pulley 44 is fixed to the rotating shaft 41 of the motor 40. The timing belt 43 is driven by the driven pulley 42.
And the drive pulley 44. The second
The screw shaft 30 of the driven pulley 45, the timing belt 4
6 and the drive pulley 47, and is linked with the motor 40. The driven pulley 45 is fixed to the lower end of the second screw shaft 30 in the figure. The drive pulley 47 is the drive pulley 44.
It is integrally formed with and is fixed to the rotating shaft 41 of the motor 40. The timing belt 46 is wound around the driven pulley 45 and the drive pulley 47. The lower end of the linear guide 50 in the figure is fixed to the upper surface of the left end in the figure of the outer peripheral portion 25 of the first moving member 23. The linear guide 50 has guide grooves 51 and 53 formed on both left and right side surfaces in the drawing, and the storage case 10 and the second moving member 34 are provided in the guide grooves 51 and 53, respectively.
2, 54 are attached so as to be movable relative to each other. That is, the linear guide 50 is supported on the inner left side surface of the storage case 10 in the drawing through the guide groove 51 and the bearing 52 on the left side surface of the drawing so as to be relatively movable in the vertical direction in the drawing, and
Second through the guide groove 53 and the bearing 54 on the right side in the drawing
Of the moving member 34 of FIG. The linear guide 50 includes the first screw shaft 20 of the first moving member 23.
Along with the movement in the vertical direction in the drawing, the first moving member 2
Move in the same direction in conjunction with 3. Also linear guide 50
Guides the second moving member 34 by moving the second moving member 34 in the vertical direction in the drawing relative to the movement of the second moving member 34 in the vertical direction in the drawing along the second screw shaft 30. The operation of this embodiment will be described below. First and second moving members 23, 34
However, for example, when the linear movement (extension operation) is performed from the predetermined storage position shown in FIG. 1 to the predetermined extension position shown in FIG. 2, the first nut member 21 and the second screw shaft 30 move the motor 4
It is rotated in a predetermined direction in synchronization with the normal rotation of 0. That is, the first nut member 21 causes a screw action with the first screw shaft 20 as the motor 40 rotates in a predetermined direction. As a result, the first moving member 23 is moved upward in the drawing along the first screw shaft 20. Further, the second screw shaft 30 causes a screw action with the second nut member 32 as the motor 40 rotates in a predetermined direction. As a result, the second moving member 34 is moved upward in the drawing along the second screw shaft 30. At this time, the linear guide 50 uses the first screw shaft 20 of the first moving member 23.
Along with the upward movement in the drawing, the first moving member 23
In the same direction as the second moving member 34 moves upward in the drawing along the second screw shaft 30 and the second moving member 34 moves relatively upward in the drawing. To guide you. In a state where the first and second moving members 23 and 34 are linearly moved to a predetermined extension position, the robot arm 36 attached to the second moving member 34 operates, for example, as a vertical axis of the robot. The first and second
When the moving members 23 and 34 are linearly moved (stored) from the predetermined extended position shown in FIG. 2 to the predetermined stored position shown in FIG. 1, the first nut member 21 and the second screw shaft The reverse rotation of the motor 40 causes the motor 30 to rotate in a direction opposite to that of the extension operation (hereinafter, simply referred to as reverse direction). The first nut member 21 causes a reverse screw action with the first screw shaft 20 as the motor 40 rotates in the reverse direction. As a result, the first moving member 23
Are moved downward in the figure along the first screw shaft 20.
Further, the second screw shaft 30 causes a reverse screw action with the second nut member 32 as the motor 40 rotates in the reverse direction. Thereby, the second moving member 34 is
It is moved downward in the figure along the second screw shaft 30. At this time, the linear guide 50 moves in the same direction in conjunction with the first moving member 23 as the first moving member 23 moves downward in the drawing along the first screw shaft 20, and Second
The second moving member 34 is relatively moved downward and guided along with the movement of the moving member 34 downward along the second screw shaft 30 in the drawing. First and second moving members 23, 34
However, each component except the robot arm 36 is stored in the storage case 10 in a state where it is returned to the predetermined storage position. As described above, according to the above embodiment, the first
Between the nut member 21 and the first screw shaft 20 and the second
Of the first moving member 23 by the screw action generated between the screw shaft 30 and the second nut member 32 of the first screw shaft 2.
0 along with the second moving member 34
Are moved along the second screw shaft 30. That is,
Two screw shafts 20 and 30 and two moving members 23 and 34
By adopting a two-stage extension structure as described above, each stage is responsible for approximately half of the stroke amount A capable of linear movement. Therefore, the stroke amount A capable of linear operation can be made longer than the total length B of the device in the stored state (stroke amount A> total length B in the stored state). This makes it possible to secure the maximum stroke amount A while minimizing the dead space, especially in a narrow space of which dimensions are restricted. Further, the linear guide 50 moves along with the movement of the first moving member 23 along the first screw shaft 20,
While moving in the same direction in conjunction with the first moving member 23, the second moving member 34 is relatively moved and guided along with the movement of the second moving member 34 along the second screw shaft 30. . Therefore, it is possible to reliably prevent rattling and the like of each part due to the two-stage extension structure. In recent years, for devices installed in a clean room such as a clean robot, compactness and a wide operating range are required to be compatible. The device of the present embodiment can meet such conflicting requirements. In the above embodiment, between the linear guide 50 and the storage case 10,
And between the linear guide 50 and the second moving member 34,
The bearings 52 and 54 are respectively interposed. However, depending on the size and weight of the device, the bearings 52, 5
If only 4, the mutual support between the respective members becomes unstable, and there is a risk that relative inclination or the like may occur between the respective members. Considering such a case, it is also possible to use another guide member (not shown) for guiding each member so as to ensure a mutual support between the members.

【0006】[0006]

【発明の効果】以上のように本発明によれば、第1のナ
ット部材及び第2のネジ軸が、駆動手段によって同期し
て回転され、第1のナット部材と第1のネジ軸との間、
及び第2のネジ軸と第2のナット部材との間にネジ作用
を生じる。これにより、第1の移動部材が、第1のネジ
軸に沿って移動されるとともに、第2の移動部材が、第
2のネジ軸に沿って移動される。したがって、直線動作
可能なストローク量を、装置の収納状態における全長よ
りも長くすることができる。これにより、特に寸法の制
約されたスペースにおいて、デッドスペースを最小限に
抑えつつ、最大限のストローク量を確保することができ
る。またガイド部材は、第1の移動部材の第1のネジ軸
に沿う移動に伴って、第1の移動部材に連動して同方向
に移動するとともに、第2の移動部材の第2のネジ軸に
沿う移動に伴って、第2の移動部材を相対移動させる。
したがって、各移動部材の移動に伴う各部のガタツキ等
を確実に防止することができる。
As described above, according to the present invention, the first nut member and the second screw shaft are rotated in synchronization with each other by the drive means, and the first nut member and the first screw shaft are rotated. while,
And a screw action is generated between the second screw shaft and the second nut member. As a result, the first moving member is moved along the first screw shaft and the second moving member is moved along the second screw shaft. Therefore, the stroke amount capable of linear movement can be made longer than the total length of the device in the housed state. As a result, it is possible to secure the maximum stroke amount while minimizing the dead space, particularly in a space with limited dimensions. In addition, the guide member moves in the same direction in conjunction with the first moving member along with the movement of the first moving member along the first screw shaft, and also the second screw shaft of the second moving member. The second moving member is relatively moved along with the movement along.
Therefore, it is possible to reliably prevent rattling and the like of each part due to the movement of each moving member.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施形態である直線動作装置の収納
状態を示す側面図である。
FIG. 1 is a side view showing a housed state of a linear motion device according to an embodiment of the present invention.

【図2】図1の直線動作装置の伸長状態を示す側面図で
ある。
FIG. 2 is a side view showing an extended state of the linear movement device of FIG.

【符号の説明】[Explanation of symbols]

10 ベース部材(収納ケース) 20 第1のネジ軸 21 第1のナット部材 23 第1の移動部材 24 軸受 30 第2のネジ軸 31、52、54 軸受 32 第2のナット部材 34 第2の移動部材 36 ロボットアーム 40 駆動手段(モータ) 41 駆動手段(回転軸) 42 駆動手段(従動プーリ) 43 駆動手段(タイミングベルト) 44 駆動手段(駆動プーリ) 45 駆動手段(従動プーリ) 46 駆動手段(タイミングベルト) 47 駆動手段(駆動プーリ) 50 ガイド部材(リニアガイド) 10 Base member (storage case) 20 First screw shaft 21 First Nut Member 23 First moving member 24 bearing 30 Second screw shaft 31, 52, 54 bearings 32 Second nut member 34 Second moving member 36 robot arm 40 Drive means (motor) 41 Drive means (rotating shaft) 42 Drive means (driven pulley) 43 Drive means (timing belt) 44 Drive means (drive pulley) 45 Drive means (driven pulley) 46 Drive means (timing belt) 47 Drive means (drive pulley) 50 Guide member (linear guide)

フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B25J 9/06 H01L 21/68 Front page continuation (58) Fields surveyed (Int.Cl. 7 , DB name) B25J 9/06 H01L 21/68

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 外周に雄ネジ部形成され、基端部のみ
ベース部材に固定された第1のネジ軸と、 貫通孔内面に形成された雌ネジ部に、前記第1のネジ軸
の雄ネジ部が螺合される第1のナット部材と、 前記第1のナット部材に相対回転可能に支持され、前記
第1のナット部材の回転に伴う前記第1のナット部材と
前記第1のネジ軸とのネジ作用により、前記第1のネジ
軸に沿って移動される第1の移動部材と、 外周に雄ネジ部形成され、基端部のみが前記第1の移
動部材に固定されて前記第1の移動部材に相対回転可能
に支持される第2のネジ軸と、 貫通孔内面に形成された雌ネジ部に、前記第2のネジ軸
の雄ネジ部が螺合される第2のナット部材と、 前記第2のナット部材に固定され、前記第2のネジ軸の
回転に伴う前記第2のネジ軸と前記第2のナット部材と
のネジ作用により、前記第2のネジ軸に沿って移動され
る第2の移動部材と、 モータの回転軸に固定された駆動プーリの回転をベルト
を介して前記第1のナット部材に固定された従動プーリ
に伝えるとともに、前記モータの回転軸に固定された駆
動プーリの回転をベルトを介して前記第2のネジ軸に固
定された従動プーリに伝えることで、前記第1のナット
部材及び前記第2のネジ軸を同期して回転させる駆動手
段とを備えたことを特徴とする直線動作装置。
1. A male screw portion is formed on the outer periphery, and only a base end portion is formed.
A first screw shaft fixed to the base member; a first nut member in which a male screw portion of the first screw shaft is screwed into a female screw portion formed on the inner surface of the through hole; 1 is rotatably supported by the first nut member, and the first nut member and the first screw shaft are screwed by the rotation of the first nut member. a first moving member moved, the male screw portion is formed on an outer periphery, the second only base end portion is rotatably supported on said first moving member is fixed to the first moving member A second nut member having a male screw portion of the second screw shaft screwed into a female screw portion formed on the inner surface of the through hole, and fixed to the second nut member, Due to the screw action of the second screw shaft and the second nut member accompanying the rotation of the second screw shaft, A second moving member that is moved along the screw shaft of No. 2, and the rotation of a drive pulley that is fixed to the rotation shaft of the motor, is transmitted to a driven pulley that is fixed to the first nut member via a belt, Synchronizing the first nut member and the second screw shaft by transmitting the rotation of the drive pulley fixed to the rotation shaft of the motor to the driven pulley fixed to the second screw shaft via the belt. And a driving means for rotating the linear movement device.
【請求項2】 前記第1の移動部材に固定され、前記
ベース部材に対して相対移動可能であるとともに、前記
第2の移動部材と相対移動可能に連結されたガイド部材
を備え、 前記ガイド部材は、前記第1の移動部材の前記第1のネ
ジ軸に沿う移動に伴って、前記第1の移動部材に連動し
て同方向に移動するとともに、前記第2の移動部材の前
記第2のネジ軸に沿う移動に伴って、前記第2の移動部
材を相対移動させることを特徴とする請求項1記載の直
線動作装置。
2. A guide member, which is fixed to the first moving member, is movable relative to the base member, and is connected to the second moving member so as to be relatively movable, Moves in the same direction in conjunction with the movement of the first moving member along the first screw axis in the same direction as the second moving member, and moves in the same direction as the second moving member. The linear movement device according to claim 1, wherein the second moving member is relatively moved along with the movement along the screw axis.
JP18675197A 1997-07-11 1997-07-11 Linear motion device Expired - Fee Related JP3384438B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18675197A JP3384438B2 (en) 1997-07-11 1997-07-11 Linear motion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18675197A JP3384438B2 (en) 1997-07-11 1997-07-11 Linear motion device

Publications (2)

Publication Number Publication Date
JPH1133946A JPH1133946A (en) 1999-02-09
JP3384438B2 true JP3384438B2 (en) 2003-03-10

Family

ID=16194016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18675197A Expired - Fee Related JP3384438B2 (en) 1997-07-11 1997-07-11 Linear motion device

Country Status (1)

Country Link
JP (1) JP3384438B2 (en)

Also Published As

Publication number Publication date
JPH1133946A (en) 1999-02-09

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