JPH09254059A - Slide mechanism of slide arm for circular cylindrical coordinate robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a horizontal slide mechanism for a cylindrical coordinate robot which reduces a required occupied area and a linear motion error at start/stop time. SOLUTION: By a first drive timing pulley 21a arranged in a base plate 12, through a first timing belt 26 partly fixed to the base plate 12, each pulley arranged in a first elide base 14 is rotated, so that a timing pulley arranged in the first slide base 14, while rotated at a rotational speed 1/2 the first drive timing belt, makes the first slide base slide. Further, by a second timing pulley, a second timing belt party fixed to a second slide is driven, so as to slide the second slide base further with the same slide amount to the first slide bas in the first slide base.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding mechanism of a cylindrical coordinate type robot arm, and more particularly to a sliding mechanism of an arm of a robot for transferring a wafer and a liquid crystal glass substrate.

[0002]

2. Description of the Related Art Cylindrical coordinate type robots are widely used as robots for transferring wafers for semiconductors and liquid crystal glass substrates, and a horizontal slide joint is driven by a ball screw or a timing belt by a servomotor. Drive using a belt or chain, an electric linear motor, drive using a pneumatic cylinder or a hydraulic cylinder, and the like.

[0003]

As described above, the conventional horizontal slide mechanism of the cylindrical coordinate type robot has a single slide unit, and the horizontal slide distance is limited to the range of the length of the slide mechanism in the slide direction. Therefore, the length of the sliding mechanism in the sliding direction is greater than the horizontal sliding distance, and the minimum turning radius during turning is limited by the length of the sliding mechanism in the sliding direction. However, there is a problem that the required occupation area becomes large.

Further, although the link type special cylindrical coordinate type robot occupies a small area, the rotary motion is converted into a linear motion by a link mechanism and the transmission system is a non-rigid body such as a timing belt. There is a problem that a linear motion error occurs when starting and stopping.

An object of the present invention is to reduce the required occupation area,
An object of the present invention is to provide a horizontal slide mechanism of a cylindrical coordinate type robot which has a small linear motion error at the time of starting and stopping.

[0006]

According to the present invention, a slide mechanism of a slide arm of a cylindrical coordinate type robot according to the present invention includes a base plate fixed to a robot main body and one base on the base plate.
A first slide base having a degree of freedom in the axial linear direction,
A second slide base having a degree of freedom in a one-axis linear direction in the same direction as the first slide base in the same direction as the first slide base, and a second slide base coupled to a joint ahead of the first slide base; And the base plate are connected via a first belt drive mechanism, the first slide base and the second slide base are connected by a second belt drive mechanism, and the first belt drive mechanism is fixed to the base plate. A first driving pulley that is driven and rotated in combination with the driving motor,
A plurality of pulleys rotatably held at both ends in the sliding direction of the first slide base and a guide pulley for changing a belt driving direction, and a first pulley engaged with these pulleys and fixed to a base plate at a predetermined position. The pulleys are arranged so that the main part of the first belt is parallel to the sliding direction of the first slide base, and the rotation of the first drive pulley causes the pulley to rotate through the first belt. A plurality of pulleys rotatably held at both ends in the sliding direction of the first slide base are rotated and the first slide base is slid, and the second belt driving mechanism is configured to slide both ends of the first slide base in the sliding direction. Of the pulleys rotatably held by the first portion, the pulleys are rotated at a half rotation speed in the same direction as the rotation of the first driving pulley, and are rotated in the same direction. And a pulley rotatably held at an end of the first slide base opposite to the second drive pulley, which engages with these pulleys, and engages these pulleys at a predetermined position. The second belt is fixed to the second slide base, the pulleys are arranged so that the main part of the second belt is parallel to the sliding direction of the first slide base, and the rotation of the second drive pulley is rotated. To slide the second slide base via the second belt.

It is preferable that the belt driving mechanism is a timing belt mechanism including a timing belt, a timing pulley and a guide pulley, and the first timing belt mechanism is connected to a driving motor fixed to a base plate to drive and rotate. A first drive timing pulley and one rotatable guide pulley, two timing pulleys rotatably held at one end of the first slide base in the sliding direction, and a rotation at an opposite end. One timing pulley arbitrarily held and a closed-type first timing belt engaged with these pulleys and fixed to a base plate at a predetermined position, and the second timing belt mechanism includes a second timing belt mechanism. It is rotatably held coaxially with five timing pulleys of one timing belt mechanism. A plurality of timing pulleys and guide pulleys, and a second timing belt engaged with these pulleys and fixed to a second slide base at a predetermined position, in the same direction as the rotation of the first drive timing pulley. The timing pulley of the first timing belt mechanism, which rotates at half the rotation speed, and the timing pulley of the second timing mechanism, which is held coaxially, are fixed to each other and perform the same rotation, and the second drive timing A pulley may be formed, and the second slide base may be slid via the second timing belt.

Further, the first timing belt mechanism includes:
A first drive timing pulley that is driven and rotated in combination with a drive motor fixed to the base plate, and two rotatable holding pulleys; and a rotatably held at one end of the first slide base in the sliding direction. One timing pulley and one guide pulley rotatably held at the opposite end, and an open type second engagement with these pulleys, wherein both ends of the belt are fixed to a base plate at predetermined positions. 1 timing belt,
The second timing belt mechanism rotates the first drive timing pulley at a rotation speed of 回 転 in the same direction as the rotation of the first drive timing pulley.
The second drive timing pulley of the second timing mechanism, which is held and fixed coaxially with the timing pulley of the timing belt mechanism and performs the same rotation, and one rotatably held at the opposite end of the first slide base. A timing pulley, a closed type second timing belt engaged with these pulleys and fixed to a second slide base at a predetermined position, and the second timing pulley is rotated by rotation of the second drive timing pulley. The second slide base may be slid via a belt.

Further, a base plate fixed to the robot body, a first slide base having a degree of freedom in a uniaxial linear direction on the base plate, and a first slide base on the same direction as the first slide base. Has a degree of freedom in a uniaxial linear direction, and has a second slide base that is coupled to a joint at the tip thereof, and the first slide base and the base plate are coupled via a first chain drive mechanism, The first slide base and the second slide base are coupled by a second chain drive mechanism, and the first chain drive mechanism is coupled to a drive motor fixed to a base plate to be driven and rotated by a first drive chain. A wheel, a plurality of chain wheels rotatably held at both ends of the first slide base in the sliding direction, and a gear for changing the chain driving direction. And a first chain engaged with these wheels and fixed to a base plate at a predetermined position, and a main part of the first chain is parallel to the sliding direction of the first slide base. And a plurality of chain wheels rotatably held at both ends in the sliding direction of the first slide base via the first chain by rotating the first drive chain wheel. The first slide base is slid, and the second chain drive mechanism is provided in a chain wheel rotatably held at both ends in the sliding direction of the first slide base.
1/2 in the same direction as the rotation of the first drive chain wheel
A second drive chain wheel and a first drive chain wheel, which are fixed to the chain wheel rotating at a rotational speed of
And a chain wheel rotatably held at an end of the slide base opposite to the second drive chain wheel, engages with these chain wheels, and is fixed to the second slide base at a predetermined position. The chain wheel is arranged such that a main part of the second chain is parallel to the sliding direction of the first slide base, and the second chain is rotated by rotation of the second drive chain wheel. , The second slide base may be slid.

A first drive pulley or wheel disposed on the base plate rotates a pulley or wheel disposed on the first slide base via a first belt or chain partially fixed to the base plate. Therefore, the pulley or wheel disposed on the first slide base slides the first slide base while rotating at half the rotation speed of the first drive pulley or wheel.

Further, a second belt or a chain mechanism of a second belt or chain mechanism which is coaxial with the pulley or wheel which slides while rotating at half the rotation speed of the first drive pulley or wheel and is fixed to the pulley or wheel. The drive pulley or wheel drives the second belt or chain, part of which is fixed to the second slide base,
The second slide base is on the first slide base,
The slide is further performed by the same amount as the slide amount of the first slide base.

Therefore, the next joint attached to the second slide base slides about twice as long as the one-stage slide mechanism even if the slide mechanism has the same length in the slide direction.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the present invention will be described with reference to the drawings, taking a timing belt mechanism as an example. FIG. 1 is a schematic exploded perspective view of a horizontal slide arm of the cylindrical coordinate robot according to the first embodiment of the present invention, and FIG. 2 is a horizontal slide arm of the cylindrical coordinate robot according to the first embodiment of the present invention. FIGS. 3A and 3B are side views of the arm, wherein FIG. 3A shows a state in which a second slide base is located at the center, and FIG.
1A is a schematic top view of a horizontal slide arm of a cylindrical coordinate robot according to a first embodiment of the present invention, and FIG.
(B) shows a state in which the second slide base is slid to the end.

In the drawing, reference numeral 10 is a slide arm, 10a is an upper mechanism of the slide arm, 10b is a lower mechanism of the slide arm, 11 is a driving motor, 12 is a base plate, 12a is a belt fixing bracket, 13a, 13b, 13
c and 13d are linear guide bearings provided on the base plate 12, 14 is the first slide base, 15
a, 15b are lower linear guide rails, 16a, 16
b is an upper linear guide rail, 17a and 17b are support walls, 18 is a second slide base, 18a is a belt fixing bracket, 19a, 19b, 19c and 19d are linear guide bearings provided on the second slide base 18. , 2
1, 22, 23, 24, 25 are the pulley shafts, 21a is the first
Drive timing pulley, 24b is a second drive timing pulley, 21b, 23a, 23b, 24a, 25a,
25b is a timing pulley, 22a and 22b are guide pulleys, 26 is a first timing belt, and 27 is a second timing belt.

The slide arm 10 is largely composed of a base plate 12 group, a first slide base 14 group, and a second slide base 18 group.
The internal mechanism includes a lower mechanism 10b of a slide arm that relates the relative movement between the base plate 12 and the first slide base 14 via a first timing belt 26, and a first slide via a second timing belt 27. An upper mechanism 10a of a slide arm for relating the relative movement between the base 14 and the second slide base 18 is provided.

The base plate 12 includes a driving motor 11
And four linear guide bearings 13a to 13d slidably arranged with the two lower linear guide rails 15a and 15b on the lower side of the first slide base, timing pulleys 21a and 21b, and guide pulleys 22a and 22b. When,
A pulley shaft 21 provided on an extension of the shaft of the motor 11 for rotating the first drive timing pulley 21a integrally with the motor 11 and rotatably holding the timing pulley 21b.
A pulley shaft 22 for rotatably holding the guide pulley 22a and the guide pulley 22b; and a belt fixing bracket 12a for fixing the first timing belt 26 to the base plate 12.

The first slide base is composed of two lower linear guide rails 15a, 15 which slide on four linear guide bearings 13a to 13d of the base plate 12.
b, two upper linear guide rails 16a, 16b sliding on the four linear guide bearings 19a to 19d of the second slide base 18, the linear guide rails 15a, 15b, 16a, 16b and the pulley shaft 23. , 2
And pulleys 23a, 23b, 24a, and 24.
b, 25a, 25b and pulley shafts 23, 24, 25 for rotatably holding these timing pulleys.
The timing pulley 24a and the timing pulley 24b are fixed so as to rotate integrally, and drive the second drive timing pulley 24b.

The second slide base 18 is composed of two linear guide rails 16a on the upper side of the first slide base.
16b, four linear guide bearings 19a to 19d slidably disposed with the second timing belt 27,
To a second slide base 18.

The first timing belt 26 of the closed type is provided with each pulley 21a, 23a, 24a, 25
a and 22a in this order, and is fixed to the base plate 12 at a predetermined position via a belt fixing bracket 12a.
The second timing belt 27 is connected to each pulley 21b, 23
b, 24b, 25b, and 22b in this order, and are fixed to the second slide base 18 at predetermined positions via a belt fixing bracket 18a. Next, the operation of the slide mechanism of the slide arm 10 will be described with reference to FIGS. First, in the lower mechanism 10b of the slide arm, the timing pulley 21 coaxially fixed by the motor 11
a rotates clockwise as viewed from above, the remaining three timing pulleys 23a, 24a, and 25a rotate in the same direction except for the guide pulley 22a by the first timing belt 26, and the first timing belt 26 rotates. Is pulled out from the timing pulley 25a in the direction of the timing pulley 21a. However, since the timing belt 26 is fixed to the base plate 12 at an intermediate position between the timing pulley 25a and the timing pulley 24a, the timing pulley 25a, together with the first slide base 14, is の of the drawing length of the timing belt 26. Slide in the same direction by L (FIG. 3). The timing pulleys 23a and 24a held on the first slide base also slide in the same direction by the same length. Since this sliding distance is の of the pull-out amount of the timing pulley 21a, the timing pulley 24a is 1 / １ ／ of the rotation angle of the timing pulley 21a.
Two rotations in the same direction.

Next, the upper mechanism 10a of the slide arm will be described. Since the second drive timing pulley 24b is fixed to the timing pulley 24a, the first timing belt 2
6 while being slid in the same direction by 1/2 of the drawer length, and rotated in the same direction by の of the rotation angle of the first drive timing pulley 21a. Therefore, the second slide base 18 fixed to the second timing belt 27 by the belt fixing bracket 18a is connected to the first slide base 14.
Further, the first timing belt 26 is further slid in the same direction by L which is １ ／ of the drawn length. Therefore, the slide distance of the second slide base 18 is 2L.

Since the slide distance of the slide base of the conventional slide arm is L in the single-stage slide mechanism, the slide arm of the two-stage slide mechanism of the present invention uses a single motor and has the same sliding direction when stored as in the conventional case. , The sliding distance 2L can be doubled, in other words, if the sliding distance is the same, the length in the sliding direction at the time of storage can be reduced to about half, and the minimum turning radius can be reduced. Thus, the occupied area can be reduced.

Next, a second embodiment will be described with reference to FIG. FIG. 4 is a schematic top view of a horizontal slide arm of a cylindrical coordinate robot according to a second embodiment of the present invention, in which (a) shows a state in which the second slide base is at the center,
(B) shows a state where the second slide base has slid to the end.

In the drawing, reference numeral 40a denotes an upper mechanism of the slide arm, 40b denotes a lower mechanism of the slide arm, 42 denotes a base plate, 42a and 42b denote belt fixing brackets, 44 denotes a first slide base, and 48 denotes a second slide base. 4
8a is a belt fixing bracket, 51a, 52a, 52b, 53
b indicates a timing pulley, 53a indicates a guide pulley, 54 indicates a holding pulley, and 56 and 57 indicate timing belts.

The second embodiment has the same basic configuration as the first embodiment, and includes a pulley shaft, a timing pulley,
Since the structure and arrangement of the timing belt are different, description of the common parts will be omitted.

A first drive timing pulley 51a fixed to the motor shaft is provided on the base plate 42, and a first timing belt 56 is provided on the first drive timing pulley 51a.
A pulley 54 for giving a wrap angle of two, and two belt fixing brackets 42a for fixing both ends of an open type timing belt 56 to the base plate 42;
42b is provided. The first slide base 44 has timing pulleys 52a, 52b, 53b, guide pulleys 53a, and three pulleys for rotatably holding the pulleys.
And a plurality of pulley shafts. Timing pulley 5
2a and the second drive timing pulley 52b are fixed so as to rotate integrally.

The open type timing belt 56 of the lower mechanism 40b of the slide arm has both ends fixed to the base plate 42, and pulleys 53a, 51a, 52
a of the upper mechanism 4 of the slide arm.
0a closed type second timing belt 57
Is engaged between the timing pulleys 52b and 53b, and is fixed to the second slide base 48 via a belt fixing bracket 48a in the middle.

Next, the operation of the slide mechanism of the slide arm will be described with reference to FIG. First, in the lower mechanism 40b of the slide arm, when the first drive timing pulley 41a coaxially fixed by the motor rotates counterclockwise as viewed from above, the first timing belt 46
As a result, the timing pulley 52a rotates in the same direction and the guide pulley 53a rotates in the opposite direction, and the first timing belt 46 moves from the guide pulley 53a to the timing pulley 51a.
It is pulled out in the direction of a. Since the front end of the timing belt 56 in the same direction is fixed to the base plate at an intermediate position between the guide pulley 53a and the timing pulley 52a, the timing pulley 53a is provided with the first slide base 44 and the first timing belt 46. Slide in the same direction by L (Fig. 4), which is 1/2 the pull-out length.
The timing pulley 52a held on the first slide base also slides by the same length in the same direction. This sliding distance is one of the pull-out amount of the timing pulley 51a.
/ 2, the timing pulley 52a rotates in the same direction by half the rotation angle of the timing pulley 51a.

Next, the upper mechanism 10a of the slide arm will be described. Since the timing pulley 52b is fixed to the timing pulley 52a, the timing pulley 52b is slid together with the first slide base 54 in the same direction by L, which is 引 き 出 し of the drawing length of the timing belt 56, and
Is rotated in the same direction by half the rotation angle of the drive timing pulley 51a. Therefore, the second slide base 48 fixed to the timing belt 57 by the belt fixing bracket 18a.
Is further slid on the first slide base 44 in the same direction by L which is の of the pullout length of the first timing belt 56. Therefore, the slide distance of the second slide base 58 is 2L.

Since the slide distance of the slide base of the conventional slide arm is L in the one-step slide mechanism, the slide arm of the two-step slide mechanism of the present invention uses a single motor and slides in the same storing direction as the conventional one. It is possible to obtain a double sliding distance 2L despite its length, in other words, with the same sliding distance, the length in the sliding direction during storage can be halved, and the minimum turning radius can be reduced. Therefore, the occupied area can be reduced.

Although the embodiment has been described with reference to the timing belt mechanism, a belt drive mechanism using a flat belt, a V-belt, or a driving wire, or a chain drive mechanism using a chain and a chain wheel may be used. No problem.

[0031]

As described above, according to the present invention, the horizontal slide arm in the conventional cylindrical coordinate type robot is provided with two slide arms.
By adopting the step motion, the minimum turning radius of the slide arm can be reduced to about half even with the same sliding distance without deteriorating the linearity, and the stroke can be increased with a small occupied area.

[Brief description of drawings]

FIG. 1 is a schematic exploded perspective view of a horizontal slide arm of a cylindrical coordinate robot according to a first embodiment of the present invention.

FIG. 2 is a side view of a horizontal slide arm of the cylindrical coordinate robot according to the first embodiment of the present invention. (A) is the second
Shows a state in which the slide base is located at the center. (B) shows a state where the second slide base has slid to the end.

FIG. 3 is a schematic top view of a horizontal slide arm of the cylindrical coordinate robot according to the first embodiment of the present invention. (A)
Indicates a state in which the second slide base is at the center.
(B) shows a state where the second slide base has slid to the end.

FIG. 4 is a schematic top view of a horizontal slide arm of a cylindrical coordinate robot according to a second embodiment of the present invention. (A)
Indicates a state in which the second slide base is at the center.
(B) shows a state where the second slide base has slid to the end.

[Explanation of symbols]

Reference Signs List 10 Slide arm 10a, 40a Upper mechanism of slide arm 10b, 40b Lower mechanism of slide arm 11 Drive motor 12, 42 Base plate 12a, 42a, 42b Belt fixing bracket 13a, 13b, 13c, 13d Lower linear guide bearing 14 , 44 First slide bases 15a, 15b Lower linear guide rails 16a, 16b Upper linear guide rails 17a, 17b Support wall 18, 48 Second slide base 18a, 48b Belt fixing brackets 19a, 19b, 19c, 19d Upper linear guide bearings 21, 22, 23, 24, 25 Pulley shafts 21a, 51a First drive timing pulleys 24b, 52b Second drive timing pulleys 21b, 23a, 23b, 24a, 25a, 25b, 5
1a, 52a, 53b Timing pulley 22a, 22b, 53a Guide pulley 54 Restraining pulley 26, 27, 56, 57 Timing belt

Claims (5)

[Claims] 1. A slide mechanism for a slide arm of a cylindrical coordinate type robot, comprising: a base plate fixed to the robot body; and a first plate having a degree of freedom in one axis linear direction on the base plate.
And a second slide base, which has a degree of freedom in one axis linear direction in the same direction as the first slide base on the first slide base and is connected to a joint therebelow. The first slide base and the base plate are coupled via a first belt drive mechanism, the first slide base and the second slide base are coupled by a second belt drive mechanism, The first belt driving mechanism includes a first driving pulley that is driven and rotated in combination with a driving motor fixed to the base plate, and a plurality of pulleys rotatably held at both ends in the sliding direction of the first slide base. A guide pulley for changing the belt driving direction, and a first belt engaged with these pulleys and fixed to the base plate at a predetermined position. The pulleys are arranged such that a main part of the first belt is parallel to a sliding direction of the first slide base, and the first driving pulley rotates to rotate the pulley via the first belt. First
Rotating the plurality of pulleys rotatably held at both ends in the sliding direction of the slide base and sliding the first slide base, wherein the second belt driving mechanism slides the first slide base. One of the pulleys rotatably held at both ends in the same direction as the rotation of the first driving pulley.
A second driving pulley fixed to a pulley rotating at a rotational speed of / 2 and performing the same rotation, and rotatably held at an end of the first slide base opposite to the second driving pulley. And a second belt engaged with these pulleys and fixed to the second slide base at a predetermined position, and a main portion of the second belt is formed of the first slide base. Wherein the pulleys are arranged so as to be parallel to a sliding direction, and the second slide base is slid via the second belt by rotation of the second drive pulley, wherein a cylindrical coordinate type is provided. The slide mechanism of the slide arm of the robot. 2. The slide mechanism of a slide arm of the cylindrical coordinate type robot according to claim 1, wherein the belt driving mechanism is a timing belt mechanism including a timing belt, a timing pulley, and a guide pulley. The slide mechanism of the slide arm of the robot. 3. The slide mechanism of a slide arm of a cylindrical coordinate type robot according to claim 2, wherein the first timing belt mechanism is driven and rotated in combination with a drive motor fixed to a base plate. Drive pulley and one rotatable guide pulley, two timing pulleys rotatably held at one end of the first slide base in the sliding direction, and rotatably held at the opposite end. One timing pulley, and a closed-type first timing belt that is engaged with these pulleys and fixed to the base plate at a predetermined position. Five timing pulleys and guides rotatably held coaxially with five timing pulleys of one timing belt mechanism. A pulley, and a second timing belt engaged with the pulleys and fixed to the second slide base at a predetermined position, and are halved in the same direction as the rotation of the first drive timing pulley. The timing pulley of the first timing belt mechanism rotating at the number of rotations and the timing pulley of the second timing mechanism held coaxially are fixed to each other and perform the same rotation to form a second drive timing pulley. And a slide mechanism of a slide arm of the cylindrical coordinate type robot that slides a second slide base via the second timing belt. 4. The slide mechanism of a slide arm of a cylindrical coordinate robot according to claim 2, wherein the first timing belt mechanism is driven and rotated in combination with a drive motor fixed to a base plate. Drive pulley and two rotatable holding pulleys, one timing pulley rotatably held at one end of the first slide base in the sliding direction, and rotatably held at the opposite end. One guide pulley and an open-type first timing belt engaged with these pulleys, and both ends of the belt are fixed to the base plate at predetermined positions. The second timing belt mechanism Is the timing of the first timing belt mechanism that rotates at a rotation speed of に in the same direction as the rotation of the first drive timing pulley. A second drive timing pulley of a second timing mechanism which is held and fixed coaxially with the pulley and performs the same rotation, and one timing pulley rotatably held at the opposite end of the first slide base; A closed type second timing belt that is engaged with a pulley and fixed to the second slide base at a predetermined position is formed through the second timing belt by rotation of the second drive timing pulley. A slide mechanism of a slide arm of a cylindrical coordinate type robot that slides a second slide base. 5. A slide mechanism for a slide arm of a cylindrical coordinate type robot, comprising: a base plate fixed to the robot main body; and a first plate having a degree of freedom in a one-axis linear direction on the base plate.
And a second slide base, which has a degree of freedom in one axis linear direction in the same direction as the first slide base on the first slide base and is connected to a joint therebelow. The first slide base and the base plate are coupled via a first chain drive mechanism, the first slide base and the second slide base are coupled by a second chain drive mechanism, The first chain drive mechanism includes a first drive chain wheel that is driven and rotated in combination with a drive motor fixed to the base plate, and a plurality of rotatably held at both ends in the sliding direction of the first slide base. A chain wheel and a guide wheel for changing the chain driving direction, and engaging with these wheels, fixed to the base plate at predetermined positions. The first wheel is arranged so that a main part of the first chain is parallel to the sliding direction of the first slide base, and the rotation of the first drive chain wheel Accordingly, the plurality of chain wheels rotatably held at both ends in the sliding direction of the first slide base via the first chain are rotated, and the first slide base is slid. Of the chain wheels rotatably held at both ends in the sliding direction of the first slide base, the rotation speed of the chain drive mechanism is ２ in the same direction as the rotation of the first drive chain wheel. A second drive chain wheel fixed to a chain wheel rotating at the same time and performing the same rotation, and the first slide A chain wheel rotatably held at an end of the base opposite to the second driving chain wheel, and engaged with these chain wheels, and fixed to the second slide base at a predetermined position. A second chain, wherein the chain wheels are arranged such that a main part of the second chain is parallel to a sliding direction of the first slide base, and by rotation of the second drive chain wheel, A slide mechanism for a slide arm of a cylindrical coordinate type robot, wherein the second slide base is slid via the second chain.