JPWO2025041254A1 - - Google Patents

Info

Publication number
JPWO2025041254A1
JPWO2025041254A1 JP2024510732A JP2024510732A JPWO2025041254A1 JP WO2025041254 A1 JPWO2025041254 A1 JP WO2025041254A1 JP 2024510732 A JP2024510732 A JP 2024510732A JP 2024510732 A JP2024510732 A JP 2024510732A JP WO2025041254 A1 JPWO2025041254 A1 JP WO2025041254A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024510732A
Other versions
JP7691578B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2025041254A1 publication Critical patent/JPWO2025041254A1/ja
Application granted granted Critical
Publication of JP7691578B1 publication Critical patent/JP7691578B1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2024510732A 2023-08-22 2023-08-22 半導体製造装置用部材 Active JP7691578B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/030114 WO2025041254A1 (ja) 2023-08-22 2023-08-22 半導体製造装置用部材

Publications (2)

Publication Number Publication Date
JPWO2025041254A1 true JPWO2025041254A1 (ja) 2025-02-27
JP7691578B1 JP7691578B1 (ja) 2025-06-11

Family

ID=94689006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024510732A Active JP7691578B1 (ja) 2023-08-22 2023-08-22 半導体製造装置用部材

Country Status (4)

Country Link
US (1) US20250069929A1 (ja)
JP (1) JP7691578B1 (ja)
TW (1) TW202510181A (ja)
WO (1) WO2025041254A1 (ja)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008135737A (ja) * 2006-11-01 2008-06-12 Ngk Insulators Ltd 静電チャック及び静電チャックの製造方法
JP5674192B2 (ja) * 2010-08-10 2015-02-25 コバレントマテリアル株式会社 静電チャックおよびその製造方法。
JP5591627B2 (ja) * 2010-08-24 2014-09-17 太平洋セメント株式会社 セラミックス部材及びその製造方法
JP5348439B2 (ja) * 2011-09-30 2013-11-20 Ｔｏｔｏ株式会社 静電チャック
JP2017103389A (ja) * 2015-12-03 2017-06-08 新光電気工業株式会社 静電チャック及び半導体製造装置
WO2021075240A1 (ja) * 2019-10-18 2021-04-22 京セラ株式会社 構造体および加熱装置
JP7372271B2 (ja) * 2021-01-06 2023-10-31 日本碍子株式会社 半導体製造装置用部材及びその製法
JP7429208B2 (ja) * 2021-08-17 2024-02-07 日本碍子株式会社 ウエハ載置台
JP7514805B2 (ja) * 2021-08-17 2024-07-11 日本碍子株式会社 ウエハ載置台

Also Published As

Publication number Publication date
JP7691578B1 (ja) 2025-06-11
US20250069929A1 (en) 2025-02-27
WO2025041254A1 (ja) 2025-02-27
TW202510181A (zh) 2025-03-01

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