JPWO2024252672A5 - - Google Patents

Info

Publication number
JPWO2024252672A5
JPWO2024252672A5 JP2025525915A JP2025525915A JPWO2024252672A5 JP WO2024252672 A5 JPWO2024252672 A5 JP WO2024252672A5 JP 2025525915 A JP2025525915 A JP 2025525915A JP 2025525915 A JP2025525915 A JP 2025525915A JP WO2024252672 A5 JPWO2024252672 A5 JP WO2024252672A5
Authority
JP
Japan
Prior art keywords
lid
substrate support
container body
support portion
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025525915A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024252672A1 (enExample
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/021559 external-priority patent/WO2024252672A1/ja
Publication of JPWO2024252672A1 publication Critical patent/JPWO2024252672A1/ja
Publication of JPWO2024252672A5 publication Critical patent/JPWO2024252672A5/ja
Pending legal-status Critical Current

Links

JP2025525915A 2023-06-09 2023-06-09 Pending JPWO2024252672A1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/021559 WO2024252672A1 (ja) 2023-06-09 2023-06-09 基板収納容器

Publications (2)

Publication Number Publication Date
JPWO2024252672A1 JPWO2024252672A1 (enExample) 2024-12-12
JPWO2024252672A5 true JPWO2024252672A5 (enExample) 2026-04-06

Family

ID=93795858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025525915A Pending JPWO2024252672A1 (enExample) 2023-06-09 2023-06-09

Country Status (5)

Country Link
JP (1) JPWO2024252672A1 (enExample)
KR (1) KR20260020094A (enExample)
CN (1) CN121100400A (enExample)
TW (1) TW202448781A (enExample)
WO (1) WO2024252672A1 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062272Y2 (ja) * 1988-02-25 1994-01-19 信越ポリマー株式会社 ウェーハ容器の上部緩衝板
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
JP5072067B2 (ja) * 2006-11-27 2012-11-14 信越ポリマー株式会社 基板収納容器
WO2018185894A1 (ja) * 2017-04-05 2018-10-11 ミライアル株式会社 基板収納容器

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