TW202448781A - 基板收納容器 - Google Patents

基板收納容器 Download PDF

Info

Publication number
TW202448781A
TW202448781A TW113121297A TW113121297A TW202448781A TW 202448781 A TW202448781 A TW 202448781A TW 113121297 A TW113121297 A TW 113121297A TW 113121297 A TW113121297 A TW 113121297A TW 202448781 A TW202448781 A TW 202448781A
Authority
TW
Taiwan
Prior art keywords
substrate
substrate support
guide surface
cover
substrates
Prior art date
Application number
TW113121297A
Other languages
English (en)
Chinese (zh)
Inventor
久保田幸二
Original Assignee
日商未來兒股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商未來兒股份有限公司 filed Critical 日商未來兒股份有限公司
Publication of TW202448781A publication Critical patent/TW202448781A/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW113121297A 2023-06-09 2024-06-07 基板收納容器 TW202448781A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2023/021559 WO2024252672A1 (ja) 2023-06-09 2023-06-09 基板収納容器
WOPCT/JP2023/021559 2023-06-09

Publications (1)

Publication Number Publication Date
TW202448781A true TW202448781A (zh) 2024-12-16

Family

ID=93795858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113121297A TW202448781A (zh) 2023-06-09 2024-06-07 基板收納容器

Country Status (5)

Country Link
JP (1) JPWO2024252672A1 (enExample)
KR (1) KR20260020094A (enExample)
CN (1) CN121100400A (enExample)
TW (1) TW202448781A (enExample)
WO (1) WO2024252672A1 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062272Y2 (ja) * 1988-02-25 1994-01-19 信越ポリマー株式会社 ウェーハ容器の上部緩衝板
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
JP5072067B2 (ja) * 2006-11-27 2012-11-14 信越ポリマー株式会社 基板収納容器
WO2018185894A1 (ja) * 2017-04-05 2018-10-11 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
JPWO2024252672A1 (enExample) 2024-12-12
CN121100400A (zh) 2025-12-09
KR20260020094A (ko) 2026-02-10
WO2024252672A1 (ja) 2024-12-12

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