JPWO2024090442A5 - - Google Patents

Info

Publication number
JPWO2024090442A5
JPWO2024090442A5 JP2024553086A JP2024553086A JPWO2024090442A5 JP WO2024090442 A5 JPWO2024090442 A5 JP WO2024090442A5 JP 2024553086 A JP2024553086 A JP 2024553086A JP 2024553086 A JP2024553086 A JP 2024553086A JP WO2024090442 A5 JPWO2024090442 A5 JP WO2024090442A5
Authority
JP
Japan
Prior art keywords
groove
bearing device
hydrostatic gas
gas bearing
porous body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024553086A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024090442A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/038377 external-priority patent/WO2024090442A1/ja
Publication of JPWO2024090442A1 publication Critical patent/JPWO2024090442A1/ja
Publication of JPWO2024090442A5 publication Critical patent/JPWO2024090442A5/ja
Pending legal-status Critical Current

Links

JP2024553086A 2022-10-26 2023-10-24 Pending JPWO2024090442A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022171335 2022-10-26
PCT/JP2023/038377 WO2024090442A1 (ja) 2022-10-26 2023-10-24 静圧気体軸受装置

Publications (2)

Publication Number Publication Date
JPWO2024090442A1 JPWO2024090442A1 (https=) 2024-05-02
JPWO2024090442A5 true JPWO2024090442A5 (https=) 2025-07-22

Family

ID=90830837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024553086A Pending JPWO2024090442A1 (https=) 2022-10-26 2023-10-24

Country Status (3)

Country Link
JP (1) JPWO2024090442A1 (https=)
KR (1) KR20250075657A (https=)
WO (1) WO2024090442A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3106474B2 (ja) * 1990-02-21 2000-11-06 日本精工株式会社 静圧気体軸受
JPH0510330A (ja) 1991-06-29 1993-01-19 Canon Inc 静圧軸受装置
JP2003232352A (ja) * 2002-02-06 2003-08-22 Nikon Corp エアパッド、このエアパッドを用いたステージ装置及びこのステージ装置を備える露光装置
JP4992986B2 (ja) * 2010-01-22 2012-08-08 新東工業株式会社 静圧軸受装置および静圧軸受装置を備えたステージ
CN110848258A (zh) * 2019-12-16 2020-02-28 江苏集萃精凯高端装备技术有限公司 一种气体静压气浮垫及气浮导轨

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