JPWO2024075385A1 - - Google Patents

Info

Publication number
JPWO2024075385A1
JPWO2024075385A1 JP2024555636A JP2024555636A JPWO2024075385A1 JP WO2024075385 A1 JPWO2024075385 A1 JP WO2024075385A1 JP 2024555636 A JP2024555636 A JP 2024555636A JP 2024555636 A JP2024555636 A JP 2024555636A JP WO2024075385 A1 JPWO2024075385 A1 JP WO2024075385A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024555636A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024075385A1 publication Critical patent/JPWO2024075385A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2024555636A 2022-10-05 2023-08-04 Pending JPWO2024075385A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022160869 2022-10-05
PCT/JP2023/028558 WO2024075385A1 (ja) 2022-10-05 2023-08-04 表面粗さ計算装置

Publications (1)

Publication Number Publication Date
JPWO2024075385A1 true JPWO2024075385A1 (https=) 2024-04-11

Family

ID=90607934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024555636A Pending JPWO2024075385A1 (https=) 2022-10-05 2023-08-04

Country Status (4)

Country Link
US (1) US20250207913A1 (https=)
JP (1) JPWO2024075385A1 (https=)
DE (1) DE112023004143T5 (https=)
WO (1) WO2024075385A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120412857B (zh) * 2025-07-02 2025-09-16 北京特思迪半导体设备有限公司 粗糙表面生成方法及设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6105987B2 (ja) * 2013-03-15 2017-03-29 キヤノン株式会社 画像処理装置及びその制御方法
US9797716B2 (en) * 2015-01-09 2017-10-24 Ricoh Company, Ltd. Estimating surface properties using a plenoptic camera
JP2017071476A (ja) * 2015-10-07 2017-04-13 三菱レイヨン株式会社 ロールおよびウェブ搬送装置
JP7488224B2 (ja) * 2021-06-08 2024-05-21 住友重機械工業株式会社 表面粗さ測定方法、表面粗さ測定装置、及びプログラム

Also Published As

Publication number Publication date
WO2024075385A1 (ja) 2024-04-11
DE112023004143T5 (de) 2025-07-24
US20250207913A1 (en) 2025-06-26

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20260213