JPWO2023228940A1 - - Google Patents

Info

Publication number
JPWO2023228940A1
JPWO2023228940A1 JP2024523305A JP2024523305A JPWO2023228940A1 JP WO2023228940 A1 JPWO2023228940 A1 JP WO2023228940A1 JP 2024523305 A JP2024523305 A JP 2024523305A JP 2024523305 A JP2024523305 A JP 2024523305A JP WO2023228940 A1 JPWO2023228940 A1 JP WO2023228940A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024523305A
Other languages
Japanese (ja)
Other versions
JPWO2023228940A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023228940A1 publication Critical patent/JPWO2023228940A1/ja
Publication of JPWO2023228940A5 publication Critical patent/JPWO2023228940A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/019Manufacture or treatment of bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W80/00Direct bonding of chips, wafers or substrates
    • H10W80/011Manufacture or treatment of pads or other interconnections to be direct bonded
    • H10W80/031Changing or setting shapes of the pads
    • H10W80/037Changing or setting shapes of the pads by mechanical treatment, e.g. by cutting, pressing or stamping
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W80/00Direct bonding of chips, wafers or substrates
    • H10W80/301Bonding techniques, e.g. hybrid bonding
    • H10W80/312Bonding techniques, e.g. hybrid bonding characterised by the direct bonding of electrically conductive pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W80/00Direct bonding of chips, wafers or substrates
    • H10W80/301Bonding techniques, e.g. hybrid bonding
    • H10W80/327Bonding techniques, e.g. hybrid bonding characterised by the direct bonding of insulating parts, e.g. of silicon oxide layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W80/00Direct bonding of chips, wafers or substrates
    • H10W80/301Bonding techniques, e.g. hybrid bonding
    • H10W80/331Bonding techniques, e.g. hybrid bonding characterised by the application of energy for connecting
    • H10W80/333Compression bonding
    • H10W80/334Thermocompression bonding
JP2024523305A 2022-05-25 2023-05-23 Pending JPWO2023228940A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2022/021410 WO2023228321A1 (ja) 2022-05-25 2022-05-25 半導体装置の製造方法
PCT/JP2023/019135 WO2023228940A1 (ja) 2022-05-25 2023-05-23 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023228940A1 true JPWO2023228940A1 (https=) 2023-11-30
JPWO2023228940A5 JPWO2023228940A5 (https=) 2025-04-23

Family

ID=88918697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024523305A Pending JPWO2023228940A1 (https=) 2022-05-25 2023-05-23

Country Status (5)

Country Link
US (1) US20250336881A1 (https=)
JP (1) JPWO2023228940A1 (https=)
CN (1) CN119110986A (https=)
TW (1) TW202401532A (https=)
WO (2) WO2023228321A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121909226A (zh) * 2024-08-08 2026-04-21 株式会社力森诺科 混合键合用硬化性树脂组合物及制造电路连接体的方法
WO2026078823A1 (ja) * 2024-10-09 2026-04-16 株式会社レゾナック 半導体装置の製造方法
WO2026078824A1 (ja) * 2024-10-09 2026-04-16 株式会社レゾナック 半導体装置の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021131080A1 (ja) * 2019-12-27 2021-07-01 ボンドテック株式会社 接合方法、被接合物および接合装置
JP7543712B2 (ja) * 2020-06-12 2024-09-03 株式会社レゾナック 半導体装置の製造方法
WO2022070362A1 (ja) * 2020-09-30 2022-04-07 昭和電工マテリアルズ株式会社 樹脂組成物、半導体装置の製造方法、硬化物及び半導体装置

Also Published As

Publication number Publication date
CN119110986A (zh) 2024-12-10
WO2023228321A1 (ja) 2023-11-30
US20250336881A1 (en) 2025-10-30
TW202401532A (zh) 2024-01-01
WO2023228940A1 (ja) 2023-11-30

Similar Documents

Publication Publication Date Title
JPWO2023181637A1 (https=)
CL2025003573A1 (es) Sistemas y métodos para la extracción de litio a partir de materias primas acuosas
CA3240172A1 (https=)
JPWO2024150722A1 (https=)
BY13167U (https=)
BY13174U (https=)
CN307047982S (https=)
CN307047927S (https=)
CN307046748S (https=)
CN307046284S (https=)
CN307045629S (https=)
CN307044791S (https=)
CN307044686S (https=)
CN307044337S (https=)
CN307049201S (https=)
CN307049328S (https=)
BY23963C1 (https=)
BY13176U (https=)
BY13175U (https=)
BY13164U (https=)
BY13172U (https=)
BY13170U (https=)
BY13169U (https=)
BY13168U (https=)
BY13158U (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250415

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20260402

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20260402