JPWO2023209815A1 - - Google Patents

Info

Publication number
JPWO2023209815A1
JPWO2023209815A1 JP2023542692A JP2023542692A JPWO2023209815A1 JP WO2023209815 A1 JPWO2023209815 A1 JP WO2023209815A1 JP 2023542692 A JP2023542692 A JP 2023542692A JP 2023542692 A JP2023542692 A JP 2023542692A JP WO2023209815 A1 JPWO2023209815 A1 JP WO2023209815A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023542692A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023209815A1 publication Critical patent/JPWO2023209815A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Chemical Vapour Deposition (AREA)
JP2023542692A 2022-04-26 2022-04-26 Pending JPWO2023209815A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/018929 WO2023209815A1 (ja) 2022-04-26 2022-04-26 基板処理装置及び基板処理方法

Publications (1)

Publication Number Publication Date
JPWO2023209815A1 true JPWO2023209815A1 (ja) 2023-11-02

Family

ID=88518232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023542692A Pending JPWO2023209815A1 (ja) 2022-04-26 2022-04-26

Country Status (3)

Country Link
JP (1) JPWO2023209815A1 (ja)
CN (1) CN117321733A (ja)
WO (1) WO2023209815A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4467266B2 (ja) * 2003-08-13 2010-05-26 大日本スクリーン製造株式会社 基板加熱装置および基板加熱方法
JP4199213B2 (ja) * 2005-04-26 2008-12-17 株式会社東芝 基板処理方法
JP2008186934A (ja) * 2007-01-29 2008-08-14 Dainippon Screen Mfg Co Ltd 熱処理装置および熱処理方法
JP7208813B2 (ja) * 2019-02-08 2023-01-19 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP7413164B2 (ja) * 2020-06-26 2024-01-15 東京エレクトロン株式会社 熱処理ユニット、基板処理装置、熱処理方法、及び記憶媒体

Also Published As

Publication number Publication date
WO2023209815A1 (ja) 2023-11-02
CN117321733A (zh) 2023-12-29

Similar Documents

Publication Publication Date Title
BR102023014872A2 (ja)
BR102023012440A2 (ja)
BR102023010976A2 (ja)
BR102023009641A2 (ja)
BR102023008688A2 (ja)
BR102023007252A2 (ja)
BR102023001987A2 (ja)
BR102023001877A2 (ja)
BR102023000289A2 (ja)
BR202022009269U2 (ja)
JPWO2023209815A1 (ja)
BR202022005961U2 (ja)
BR202022001779U2 (ja)
BR202022000931U2 (ja)
BY13156U (ja)
BY13136U (ja)
BY13152U (ja)
BY13151U (ja)
BY13150U (ja)
BY13149U (ja)
BY13148U (ja)
BY13147U (ja)
BY13146U (ja)
BY13145U (ja)
BY13144U (ja)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230713

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240312

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240501