JPWO2023176192A1 - - Google Patents
Info
- Publication number
- JPWO2023176192A1 JPWO2023176192A1 JP2023535854A JP2023535854A JPWO2023176192A1 JP WO2023176192 A1 JPWO2023176192 A1 JP WO2023176192A1 JP 2023535854 A JP2023535854 A JP 2023535854A JP 2023535854 A JP2023535854 A JP 2023535854A JP WO2023176192 A1 JPWO2023176192 A1 JP WO2023176192A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/03—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2
- C07C29/04—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2 by hydration of carbon-to-carbon double bonds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
- C07C29/76—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment
- C07C29/80—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment by distillation
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
- C07C29/76—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment
- C07C29/80—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment by distillation
- C07C29/82—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment by distillation by azeotropic distillation
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C31/00—Saturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
- C07C31/02—Monohydroxylic acyclic alcohols
- C07C31/10—Monohydroxylic acyclic alcohols containing three carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/264—Aldehydes; Ketones; Acetals or ketals
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022041318 | 2022-03-16 | ||
| JP2022041318 | 2022-03-16 | ||
| PCT/JP2023/003901 WO2023176192A1 (ja) | 2022-03-16 | 2023-02-07 | 半導体洗浄液および半導体洗浄液の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023176192A1 true JPWO2023176192A1 (https=) | 2023-09-21 |
| JP7402385B1 JP7402385B1 (ja) | 2023-12-20 |
| JPWO2023176192A5 JPWO2023176192A5 (https=) | 2024-02-22 |
Family
ID=88022808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023535854A Active JP7402385B1 (ja) | 2022-03-16 | 2023-02-07 | 半導体洗浄液および半導体洗浄液の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250171718A1 (https=) |
| JP (1) | JP7402385B1 (https=) |
| KR (1) | KR20240163660A (https=) |
| CN (1) | CN118742996A (https=) |
| DE (1) | DE112023001404T5 (https=) |
| TW (1) | TW202344677A (https=) |
| WO (1) | WO2023176192A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20260021637A (ko) * | 2023-06-13 | 2026-02-13 | 가부시키가이샤 도쿠야마 | 반도체 약액 및 반도체 약액의 제조방법 |
| CN121752541A (zh) * | 2023-09-07 | 2026-03-27 | 株式会社德山 | 纯化异丙醇水溶液的制造方法 |
| JP2026505851A (ja) * | 2023-11-15 | 2026-02-18 | エルジー・ケム・リミテッド | イソプロピルアルコールの精製方法 |
| WO2025105774A1 (ko) * | 2023-11-15 | 2025-05-22 | 주식회사 엘지화학 | 이소프로필 알코올의 제조방법 |
| JP7651784B1 (ja) * | 2023-11-28 | 2025-03-26 | 株式会社トクヤマ | 精製イソプロピルアルコールの製造方法 |
| WO2025115528A1 (ja) * | 2023-11-28 | 2025-06-05 | 株式会社トクヤマ | 精製イソプロピルアルコールの製造方法 |
| JP7695493B1 (ja) * | 2023-12-01 | 2025-06-18 | 株式会社トクヤマ | 精製イソプロピルアルコールの製造方法および製造装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4754058B2 (ja) * | 2000-10-16 | 2011-08-24 | 三井化学株式会社 | イソプロピルアルコールの製造方法 |
| WO2009037953A1 (ja) * | 2007-09-19 | 2009-03-26 | Mitsui Chemicals, Inc. | アルコールの製造方法および酸処理ラネー触媒 |
| KR102313108B1 (ko) * | 2016-06-17 | 2021-10-15 | 가부시키가이샤 도쿠야마 | 이소프로필 알코올의 제조 방법 및 불순물이 저감된 이소프로필 알코올 |
| JP7118898B2 (ja) * | 2017-01-23 | 2022-08-16 | 株式会社トクヤマ | イソプロピルアルコール組成物及びイソプロピルアルコールの製造方法 |
| KR102333873B1 (ko) * | 2018-10-03 | 2021-12-02 | 가부시키가이샤 도쿠야마 | 고순도 이소프로필 알코올 및 그 제조 방법 |
| JP6980952B1 (ja) * | 2020-04-02 | 2021-12-15 | 株式会社トクヤマ | 半導体処理液及びその製造方法 |
-
2023
- 2023-02-07 US US18/842,549 patent/US20250171718A1/en active Pending
- 2023-02-07 DE DE112023001404.3T patent/DE112023001404T5/de active Pending
- 2023-02-07 CN CN202380022672.XA patent/CN118742996A/zh active Pending
- 2023-02-07 KR KR1020247033182A patent/KR20240163660A/ko active Pending
- 2023-02-07 JP JP2023535854A patent/JP7402385B1/ja active Active
- 2023-02-07 WO PCT/JP2023/003901 patent/WO2023176192A1/ja not_active Ceased
- 2023-02-10 TW TW112104703A patent/TW202344677A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN118742996A (zh) | 2024-10-01 |
| DE112023001404T5 (de) | 2024-12-24 |
| KR20240163660A (ko) | 2024-11-19 |
| TW202344677A (zh) | 2023-11-16 |
| JP7402385B1 (ja) | 2023-12-20 |
| US20250171718A1 (en) | 2025-05-29 |
| WO2023176192A1 (ja) | 2023-09-21 |
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