JPWO2023167083A5 - - Google Patents

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Publication number
JPWO2023167083A5
JPWO2023167083A5 JP2024504650A JP2024504650A JPWO2023167083A5 JP WO2023167083 A5 JPWO2023167083 A5 JP WO2023167083A5 JP 2024504650 A JP2024504650 A JP 2024504650A JP 2024504650 A JP2024504650 A JP 2024504650A JP WO2023167083 A5 JPWO2023167083 A5 JP WO2023167083A5
Authority
JP
Japan
Prior art keywords
wiring
nanosheet
gate
device structure
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024504650A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023167083A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/006559 external-priority patent/WO2023167083A1/ja
Publication of JPWO2023167083A1 publication Critical patent/JPWO2023167083A1/ja
Publication of JPWO2023167083A5 publication Critical patent/JPWO2023167083A5/ja
Pending legal-status Critical Current

Links

JP2024504650A 2022-03-02 2023-02-22 Pending JPWO2023167083A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022031872 2022-03-02
PCT/JP2023/006559 WO2023167083A1 (ja) 2022-03-02 2023-02-22 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPWO2023167083A1 JPWO2023167083A1 (https=) 2023-09-07
JPWO2023167083A5 true JPWO2023167083A5 (https=) 2024-11-06

Family

ID=87883588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024504650A Pending JPWO2023167083A1 (https=) 2022-03-02 2023-02-22

Country Status (4)

Country Link
US (1) US20240421148A1 (https=)
JP (1) JPWO2023167083A1 (https=)
CN (1) CN118805257A (https=)
WO (1) WO2023167083A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7640861B2 (ja) * 2019-10-18 2025-03-06 株式会社ソシオネクスト 半導体集積回路装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5662257B2 (ja) * 2011-06-15 2015-01-28 株式会社東芝 半導体装置
JP6700565B2 (ja) * 2016-06-10 2020-05-27 株式会社ソシオネクスト 半導体装置
CN113841228B (zh) * 2019-05-23 2024-12-27 株式会社索思未来 半导体装置

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