JPWO2023163018A1 - - Google Patents

Info

Publication number
JPWO2023163018A1
JPWO2023163018A1 JP2024503197A JP2024503197A JPWO2023163018A1 JP WO2023163018 A1 JPWO2023163018 A1 JP WO2023163018A1 JP 2024503197 A JP2024503197 A JP 2024503197A JP 2024503197 A JP2024503197 A JP 2024503197A JP WO2023163018 A1 JPWO2023163018 A1 JP WO2023163018A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024503197A
Other languages
Japanese (ja)
Other versions
JPWO2023163018A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023163018A1 publication Critical patent/JPWO2023163018A1/ja
Publication of JPWO2023163018A5 publication Critical patent/JPWO2023163018A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers
    • G01B9/02091Tomographic interferometers, e.g. based on optical coherence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007Two or more frequencies or sources used for interferometric measurement
    • G01B9/02008Two or more frequencies or sources used for interferometric measurement by using a frequency comb
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2024503197A 2022-02-24 2023-02-22 Pending JPWO2023163018A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022026953 2022-02-24
PCT/JP2023/006392 WO2023163018A1 (ja) 2022-02-24 2023-02-22 光計測装置

Publications (2)

Publication Number Publication Date
JPWO2023163018A1 true JPWO2023163018A1 (https=) 2023-08-31
JPWO2023163018A5 JPWO2023163018A5 (https=) 2026-03-10

Family

ID=87766049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024503197A Pending JPWO2023163018A1 (https=) 2022-02-24 2023-02-22

Country Status (3)

Country Link
US (1) US20240418634A1 (https=)
JP (1) JPWO2023163018A1 (https=)
WO (1) WO2023163018A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120559314B (zh) * 2025-07-28 2025-09-26 南京航空航天大学 基于多通道光路鉴相的微波频率测量方法及装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69111432T2 (de) * 1991-05-24 1996-02-29 Hewlett Packard Co Heterodyn-Interferometer Einrichtung.
JP3564373B2 (ja) * 2000-09-08 2004-09-08 独立行政法人 科学技術振興機構 光計測システム
DE102008062879B4 (de) * 2008-10-10 2010-10-28 Universität Stuttgart Verfahren und Anordnung zur skalierbaren Interferometrie
JP2010230653A (ja) * 2009-03-03 2010-10-14 Canon Inc 光波干渉計測装置
JP5764566B2 (ja) * 2009-10-02 2015-08-19 イムラ アメリカ インコーポレイテッド モード同期レーザによる光信号処理
ES2461188T3 (es) * 2012-01-26 2014-05-19 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Procedimiento para medir longitudes absolutas y dispositivo para medir longitudes
JP6136356B2 (ja) * 2013-02-25 2017-05-31 セイコーエプソン株式会社 測定装置
JP6193644B2 (ja) * 2013-06-28 2017-09-06 株式会社ミツトヨ 変位測定装置及び変位測定方法
JP6820020B2 (ja) * 2016-03-02 2021-01-27 国立大学法人電気通信大学 形状測定方法及び形状測定装置
WO2019167476A1 (ja) * 2018-03-02 2019-09-06 国立大学法人電気通信大学 干渉信号強度取得方法及び干渉信号強度取得装置
EP3916365A1 (en) * 2020-05-25 2021-12-01 Aragon Photonics Labs, S.L.U. Method and system for interrogating optical fibers
EP4174569B1 (en) * 2020-06-26 2026-03-11 Panasonic Intellectual Property Management Co., Ltd. Dual optical frequency comb generation device and measurement device
CN114544521B (zh) * 2022-03-08 2025-09-26 北京航空航天大学 刻蚀气体监测系统及气体状态分析方法
WO2023243365A1 (ja) * 2022-06-14 2023-12-21 パナソニックIpマネジメント株式会社 レーザ装置

Also Published As

Publication number Publication date
WO2023163018A1 (ja) 2023-08-31
US20240418634A1 (en) 2024-12-19

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