JPWO2023157475A5 - - Google Patents

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Publication number
JPWO2023157475A5
JPWO2023157475A5 JP2024500998A JP2024500998A JPWO2023157475A5 JP WO2023157475 A5 JPWO2023157475 A5 JP WO2023157475A5 JP 2024500998 A JP2024500998 A JP 2024500998A JP 2024500998 A JP2024500998 A JP 2024500998A JP WO2023157475 A5 JPWO2023157475 A5 JP WO2023157475A5
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JP
Japan
Prior art keywords
metal film
forming
film
diffraction grating
photoresist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024500998A
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English (en)
Japanese (ja)
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JPWO2023157475A1 (https=
JP7756232B2 (ja
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Priority claimed from PCT/JP2022/047761 external-priority patent/WO2023157475A1/ja
Publication of JPWO2023157475A1 publication Critical patent/JPWO2023157475A1/ja
Publication of JPWO2023157475A5 publication Critical patent/JPWO2023157475A5/ja
Application granted granted Critical
Publication of JP7756232B2 publication Critical patent/JP7756232B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024500998A 2022-02-18 2022-12-23 回折格子の製造方法および回折格子 Active JP7756232B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022024158 2022-02-18
JP2022024158 2022-02-18
PCT/JP2022/047761 WO2023157475A1 (ja) 2022-02-18 2022-12-23 回折格子の製造方法および回折格子

Publications (3)

Publication Number Publication Date
JPWO2023157475A1 JPWO2023157475A1 (https=) 2023-08-24
JPWO2023157475A5 true JPWO2023157475A5 (https=) 2024-10-21
JP7756232B2 JP7756232B2 (ja) 2025-10-17

Family

ID=87578027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024500998A Active JP7756232B2 (ja) 2022-02-18 2022-12-23 回折格子の製造方法および回折格子

Country Status (2)

Country Link
JP (1) JP7756232B2 (https=)
WO (1) WO2023157475A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153051A (en) * 1978-05-22 1979-12-01 Nec Corp Scanning optical system
JPS55157705A (en) * 1979-05-29 1980-12-08 Nec Corp Production of blazed grating
JPS584173A (ja) * 1981-06-30 1983-01-11 Dainippon Printing Co Ltd ホログラム情報シ−トの製造法
JPH02244003A (ja) * 1989-03-16 1990-09-28 Nec Corp 反射型格子レンズ及びその製造方法
JP2002098820A (ja) * 2000-09-21 2002-04-05 Nippon Sheet Glass Co Ltd 反射型回折格子
JP2016065967A (ja) * 2014-09-24 2016-04-28 大日本印刷株式会社 光学部材用版の製造方法、光学部材用ロール版の製造方法
WO2016093039A1 (ja) * 2014-12-09 2016-06-16 コニカミノルタ株式会社 検出チップおよび検出方法

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