JPWO2023127152A1 - - Google Patents

Info

Publication number
JPWO2023127152A1
JPWO2023127152A1 JP2023570624A JP2023570624A JPWO2023127152A1 JP WO2023127152 A1 JPWO2023127152 A1 JP WO2023127152A1 JP 2023570624 A JP2023570624 A JP 2023570624A JP 2023570624 A JP2023570624 A JP 2023570624A JP WO2023127152 A1 JPWO2023127152 A1 JP WO2023127152A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023570624A
Other languages
Japanese (ja)
Other versions
JPWO2023127152A5 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023127152A1 publication Critical patent/JPWO2023127152A1/ja
Publication of JPWO2023127152A5 publication Critical patent/JPWO2023127152A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2023570624A 2021-12-28 2021-12-28 Pending JPWO2023127152A1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/048971 WO2023127152A1 (ja) 2021-12-28 2021-12-28 光学装置および検査方法

Publications (2)

Publication Number Publication Date
JPWO2023127152A1 true JPWO2023127152A1 (enExample) 2023-07-06
JPWO2023127152A5 JPWO2023127152A5 (enExample) 2024-12-06

Family

ID=86998482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023570624A Pending JPWO2023127152A1 (enExample) 2021-12-28 2021-12-28

Country Status (5)

Country Link
US (1) US20250155236A1 (enExample)
EP (1) EP4459269A4 (enExample)
JP (1) JPWO2023127152A1 (enExample)
CN (1) CN118451317A (enExample)
WO (1) WO2023127152A1 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404247A (en) * 1993-08-02 1995-04-04 International Business Machines Corporation Telecentric and achromatic f-theta scan lens system and method of use
JP2004301619A (ja) * 2003-03-31 2004-10-28 Railway Technical Res Inst 画像読取装置
JP2005291859A (ja) * 2004-03-31 2005-10-20 Nec Compound Semiconductor Devices Ltd 微細構造測定方法、微細構造測定装置、および、微細構造解析システム
JP2014240782A (ja) * 2013-06-11 2014-12-25 富士ゼロックス株式会社 計測装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069539A (ja) * 1983-09-26 1985-04-20 Toshiba Corp 表面欠陥検査装置
JPS62235511A (ja) * 1986-03-11 1987-10-15 Kobe Steel Ltd 表面状態検査装置
JP2570010B2 (ja) * 1991-06-30 1997-01-08 日本電気株式会社 表面溝方向判定方法及び装置
JPH05157527A (ja) * 1991-12-09 1993-06-22 I N R Kenkyusho:Kk ２次元又は３次元形状測定装置
US5389794A (en) * 1992-11-25 1995-02-14 Qc Optics, Inc. Surface pit and mound detection and discrimination system and method
JP2005283190A (ja) * 2004-03-29 2005-10-13 Hitachi High-Technologies Corp 異物検査方法及びその装置
JP2008032669A (ja) * 2006-07-27 2008-02-14 Oputouea Kk 光走査式平面外観検査装置
RU2506188C2 (ru) 2008-08-05 2014-02-10 Алкоа Инк. Металлические листы и пластины с текстурированными поверхностями, уменьшающими трение, и способы их изготовления
US8678316B2 (en) 2009-01-29 2014-03-25 The Boeing Company Amorphous metal riblets
US8413928B2 (en) 2009-09-25 2013-04-09 The Boeing Company Structurally designed aerodynamic riblets
DE102010031227A1 (de) 2010-07-12 2012-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Prüfung von Mikrostrukturierungsqualität
US20130146217A1 (en) 2011-12-09 2013-06-13 Nicholas Joseph Kray Method of Applying Surface Riblets to an Aerodynamic Surface
US20140272237A1 (en) 2013-03-15 2014-09-18 Prc-Desoto International, Inc. Strippable film assembly and coating for drag reduction
US10258982B2 (en) 2014-04-23 2019-04-16 Japan Science And Technology Agency Combined-blade open flow path device and joined body thereof
US9751618B2 (en) 2015-05-06 2017-09-05 The Boeing Company Optical effects for aerodynamic microstructures
EP3362855B1 (en) 2015-10-13 2022-11-30 MicroTau IP Pty Ltd Microstructure patterns
WO2018139049A1 (ja) 2017-01-24 2018-08-02 株式会社日立製作所 流体機器
JP7363894B2 (ja) * 2019-04-24 2023-10-18 株式会社ニコン 加工システム及び検査システム
US11614106B2 (en) 2019-08-21 2023-03-28 Lockheed Martin Corporation Partially submerged periodic riblets

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404247A (en) * 1993-08-02 1995-04-04 International Business Machines Corporation Telecentric and achromatic f-theta scan lens system and method of use
JP2004301619A (ja) * 2003-03-31 2004-10-28 Railway Technical Res Inst 画像読取装置
JP2005291859A (ja) * 2004-03-31 2005-10-20 Nec Compound Semiconductor Devices Ltd 微細構造測定方法、微細構造測定装置、および、微細構造解析システム
JP2014240782A (ja) * 2013-06-11 2014-12-25 富士ゼロックス株式会社 計測装置

Also Published As

Publication number Publication date
US20250155236A1 (en) 2025-05-15
CN118451317A (zh) 2024-08-06
EP4459269A1 (en) 2024-11-06
WO2023127152A1 (ja) 2023-07-06
EP4459269A4 (en) 2025-10-29

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Legal Events

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