JPWO2023119897A1 - - Google Patents

Info

Publication number
JPWO2023119897A1
JPWO2023119897A1 JP2023569133A JP2023569133A JPWO2023119897A1 JP WO2023119897 A1 JPWO2023119897 A1 JP WO2023119897A1 JP 2023569133 A JP2023569133 A JP 2023569133A JP 2023569133 A JP2023569133 A JP 2023569133A JP WO2023119897 A1 JPWO2023119897 A1 JP WO2023119897A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023569133A
Other languages
Japanese (ja)
Other versions
JPWO2023119897A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023119897A1 publication Critical patent/JPWO2023119897A1/ja
Publication of JPWO2023119897A5 publication Critical patent/JPWO2023119897A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2023569133A 2021-12-21 2022-11-02 Pending JPWO2023119897A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021206915 2021-12-21
PCT/JP2022/040970 WO2023119897A1 (ja) 2021-12-21 2022-11-02 プローブヘッド

Publications (2)

Publication Number Publication Date
JPWO2023119897A1 true JPWO2023119897A1 (https=) 2023-06-29
JPWO2023119897A5 JPWO2023119897A5 (https=) 2025-10-21

Family

ID=86902033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023569133A Pending JPWO2023119897A1 (https=) 2021-12-21 2022-11-02

Country Status (5)

Country Link
US (1) US20250060393A1 (https=)
JP (1) JPWO2023119897A1 (https=)
CN (1) CN118382811A (https=)
TW (1) TW202326149A (https=)
WO (1) WO2023119897A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7734517B2 (ja) * 2021-06-24 2025-09-05 株式会社ヨコオ ソケット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
US8493085B2 (en) * 2009-03-27 2013-07-23 Essai, Inc. Spring contact pin for an ic test socket and the like
KR101415722B1 (ko) * 2010-06-25 2014-07-25 니혼 하츠쵸 가부시키가이샤 콘택트 프로브 및 프로브 유닛
WO2015122472A1 (ja) * 2014-02-13 2015-08-20 日本発條株式会社 プローブユニット
JP2020165803A (ja) * 2019-03-29 2020-10-08 山一電機株式会社 コンタクトプローブ及びこれを備えた検査用ソケット
JP7335507B2 (ja) * 2019-12-10 2023-08-30 山一電機株式会社 検査用ソケット
JP7602112B2 (ja) * 2020-11-17 2024-12-18 山一電機株式会社 検査用ソケット
JP7734517B2 (ja) * 2021-06-24 2025-09-05 株式会社ヨコオ ソケット
JP7605717B2 (ja) * 2021-09-02 2024-12-24 山一電機株式会社 プローブ及び検査用ソケット

Also Published As

Publication number Publication date
WO2023119897A1 (ja) 2023-06-29
TW202326149A (zh) 2023-07-01
US20250060393A1 (en) 2025-02-20
CN118382811A (zh) 2024-07-23

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251010

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20251010