TW202326149A - 探針頭 - Google Patents

探針頭 Download PDF

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Publication number
TW202326149A
TW202326149A TW111141857A TW111141857A TW202326149A TW 202326149 A TW202326149 A TW 202326149A TW 111141857 A TW111141857 A TW 111141857A TW 111141857 A TW111141857 A TW 111141857A TW 202326149 A TW202326149 A TW 202326149A
Authority
TW
Taiwan
Prior art keywords
hole
plunger
tapered
horizontal direction
vertical direction
Prior art date
Application number
TW111141857A
Other languages
English (en)
Chinese (zh)
Inventor
清水祐輔
佐藤勝彦
奥野剛欣
Original Assignee
日商友華股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商友華股份有限公司 filed Critical 日商友華股份有限公司
Publication of TW202326149A publication Critical patent/TW202326149A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW111141857A 2021-12-21 2022-11-02 探針頭 TW202326149A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021206915 2021-12-21
JP2021-206915 2021-12-21

Publications (1)

Publication Number Publication Date
TW202326149A true TW202326149A (zh) 2023-07-01

Family

ID=86902033

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111141857A TW202326149A (zh) 2021-12-21 2022-11-02 探針頭

Country Status (5)

Country Link
US (1) US20250060393A1 (https=)
JP (1) JPWO2023119897A1 (https=)
CN (1) CN118382811A (https=)
TW (1) TW202326149A (https=)
WO (1) WO2023119897A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7734517B2 (ja) * 2021-06-24 2025-09-05 株式会社ヨコオ ソケット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
US8493085B2 (en) * 2009-03-27 2013-07-23 Essai, Inc. Spring contact pin for an ic test socket and the like
KR101415722B1 (ko) * 2010-06-25 2014-07-25 니혼 하츠쵸 가부시키가이샤 콘택트 프로브 및 프로브 유닛
WO2015122472A1 (ja) * 2014-02-13 2015-08-20 日本発條株式会社 プローブユニット
JP2020165803A (ja) * 2019-03-29 2020-10-08 山一電機株式会社 コンタクトプローブ及びこれを備えた検査用ソケット
JP7335507B2 (ja) * 2019-12-10 2023-08-30 山一電機株式会社 検査用ソケット
JP7602112B2 (ja) * 2020-11-17 2024-12-18 山一電機株式会社 検査用ソケット
JP7734517B2 (ja) * 2021-06-24 2025-09-05 株式会社ヨコオ ソケット
JP7605717B2 (ja) * 2021-09-02 2024-12-24 山一電機株式会社 プローブ及び検査用ソケット

Also Published As

Publication number Publication date
WO2023119897A1 (ja) 2023-06-29
US20250060393A1 (en) 2025-02-20
JPWO2023119897A1 (https=) 2023-06-29
CN118382811A (zh) 2024-07-23

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