JPWO2023090349A1 - - Google Patents

Info

Publication number
JPWO2023090349A1
JPWO2023090349A1 JP2023562369A JP2023562369A JPWO2023090349A1 JP WO2023090349 A1 JPWO2023090349 A1 JP WO2023090349A1 JP 2023562369 A JP2023562369 A JP 2023562369A JP 2023562369 A JP2023562369 A JP 2023562369A JP WO2023090349 A1 JPWO2023090349 A1 JP WO2023090349A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023562369A
Other languages
Japanese (ja)
Other versions
JPWO2023090349A5 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023090349A1 publication Critical patent/JPWO2023090349A1/ja
Publication of JPWO2023090349A5 publication Critical patent/JPWO2023090349A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2023562369A 2021-11-16 2022-11-16 Pending JPWO2023090349A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021186532 2021-11-16
PCT/JP2022/042514 WO2023090349A1 (ja) 2021-11-16 2022-11-16 ジャイロセンサ素子

Publications (2)

Publication Number Publication Date
JPWO2023090349A1 true JPWO2023090349A1 (enrdf_load_stackoverflow) 2023-05-25
JPWO2023090349A5 JPWO2023090349A5 (enrdf_load_stackoverflow) 2024-08-01

Family

ID=86397082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023562369A Pending JPWO2023090349A1 (enrdf_load_stackoverflow) 2021-11-16 2022-11-16

Country Status (2)

Country Link
JP (1) JPWO2023090349A1 (enrdf_load_stackoverflow)
WO (1) WO2023090349A1 (enrdf_load_stackoverflow)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156395A (ja) * 2003-11-27 2005-06-16 Kyocera Kinseki Corp 慣性センサ素子
JP2006266784A (ja) * 2005-03-23 2006-10-05 Seiko Epson Corp 圧電振動ジャイロ素子および圧電振動片
JP2017085341A (ja) * 2015-10-28 2017-05-18 セイコーエプソン株式会社 電子部品の製造方法、振動デバイス、電子機器、および移動体
WO2018139396A1 (ja) * 2017-01-24 2018-08-02 京セラ株式会社 センサ素子、角速度センサおよび多軸角速度センサ
JP6450059B1 (ja) * 2017-07-24 2019-01-09 京セラ株式会社 センサ素子および角速度センサ
JP2019095368A (ja) * 2017-11-27 2019-06-20 京セラ株式会社 圧電素子、圧電デバイスおよび圧電素子の製造方法
JP2021067701A (ja) * 2017-08-29 2021-04-30 京セラ株式会社 角速度センサおよびセンサ素子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP5131491B2 (ja) * 2010-02-24 2013-01-30 セイコーエプソン株式会社 ジャイロモジュール
JP5772286B2 (ja) * 2011-06-24 2015-09-02 セイコーエプソン株式会社 屈曲振動片及び電子機器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156395A (ja) * 2003-11-27 2005-06-16 Kyocera Kinseki Corp 慣性センサ素子
JP2006266784A (ja) * 2005-03-23 2006-10-05 Seiko Epson Corp 圧電振動ジャイロ素子および圧電振動片
JP2017085341A (ja) * 2015-10-28 2017-05-18 セイコーエプソン株式会社 電子部品の製造方法、振動デバイス、電子機器、および移動体
WO2018139396A1 (ja) * 2017-01-24 2018-08-02 京セラ株式会社 センサ素子、角速度センサおよび多軸角速度センサ
JP6450059B1 (ja) * 2017-07-24 2019-01-09 京セラ株式会社 センサ素子および角速度センサ
JP2021067701A (ja) * 2017-08-29 2021-04-30 京セラ株式会社 角速度センサおよびセンサ素子
JP2019095368A (ja) * 2017-11-27 2019-06-20 京セラ株式会社 圧電素子、圧電デバイスおよび圧電素子の製造方法

Also Published As

Publication number Publication date
WO2023090349A1 (ja) 2023-05-25

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