JPWO2023007687A1 - - Google Patents

Info

Publication number
JPWO2023007687A1
JPWO2023007687A1 JP2023537877A JP2023537877A JPWO2023007687A1 JP WO2023007687 A1 JPWO2023007687 A1 JP WO2023007687A1 JP 2023537877 A JP2023537877 A JP 2023537877A JP 2023537877 A JP2023537877 A JP 2023537877A JP WO2023007687 A1 JPWO2023007687 A1 JP WO2023007687A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023537877A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023007687A1 publication Critical patent/JPWO2023007687A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2023537877A 2021-07-30 2021-07-30 Pending JPWO2023007687A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/028244 WO2023007687A1 (ja) 2021-07-30 2021-07-30 スピン偏極走査電子顕微鏡

Publications (1)

Publication Number Publication Date
JPWO2023007687A1 true JPWO2023007687A1 (ja) 2023-02-02

Family

ID=85086540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023537877A Pending JPWO2023007687A1 (ja) 2021-07-30 2021-07-30

Country Status (2)

Country Link
JP (1) JPWO2023007687A1 (ja)
WO (1) WO2023007687A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5223208B2 (ja) * 2007-03-01 2013-06-26 株式会社日立製作所 透過型電子顕微鏡
JP4977629B2 (ja) * 2007-03-05 2012-07-18 株式会社日立製作所 荷電粒子スピン検出器、顕微鏡、及び光電子分光装置
JP2010003450A (ja) * 2008-06-18 2010-01-07 Hitachi Ltd 走査電子顕微鏡
JP6516327B2 (ja) * 2015-06-11 2019-05-22 国立大学法人名古屋大学 反射電子を検出する走査電子顕微鏡
JP6469222B2 (ja) * 2015-06-23 2019-02-13 株式会社日立製作所 荷電粒子装置、荷電粒子の照射方法、および分析装置
WO2019186736A1 (ja) * 2018-03-27 2019-10-03 株式会社日立ハイテクノロジーズ 走査電子顕微鏡及び２次電子スピン偏極度を解析する方法
JP6914438B2 (ja) * 2018-05-22 2021-08-04 株式会社日立ハイテク スピン分析装置

Also Published As

Publication number Publication date
WO2023007687A1 (ja) 2023-02-02

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231024