JPWO2022264275A1 - - Google Patents
Info
- Publication number
- JPWO2022264275A1 JPWO2022264275A1 JP2023528813A JP2023528813A JPWO2022264275A1 JP WO2022264275 A1 JPWO2022264275 A1 JP WO2022264275A1 JP 2023528813 A JP2023528813 A JP 2023528813A JP 2023528813 A JP2023528813 A JP 2023528813A JP WO2022264275 A1 JPWO2022264275 A1 JP WO2022264275A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2323/00—Polyalkenes
- B32B2323/04—Polyethylene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2021/022718 WO2022264275A1 (ja) | 2021-06-15 | 2021-06-15 | 感光性エレメント及び感光性エレメントの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022264275A1 true JPWO2022264275A1 (ja) | 2022-12-22 |
Family
ID=84526378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023528813A Pending JPWO2022264275A1 (ja) | 2021-06-15 | 2021-06-15 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20230393476A1 (ja) |
EP (1) | EP4357852A1 (ja) |
JP (1) | JPWO2022264275A1 (ja) |
KR (1) | KR20240021138A (ja) |
CN (1) | CN117083568A (ja) |
TW (1) | TW202303282A (ja) |
WO (1) | WO2022264275A1 (ja) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06156882A (ja) * | 1992-11-18 | 1994-06-03 | Hitachi Chem Co Ltd | 感光性エレメントの保護フィルム巻き取り用巻芯、該巻芯を備えたラミネーター及びラミネート方法 |
JP2001013681A (ja) | 1999-06-28 | 2001-01-19 | Hitachi Chem Co Ltd | 感光性エレメント、レジストパターンの製造法及びプリント配線板の製造法 |
JP2004191648A (ja) * | 2002-12-11 | 2004-07-08 | Hitachi Chem Co Ltd | 感光性エレメント、これを用いたレジストパターンの形成方法及びプリント配線板の製造方法 |
JP2014074764A (ja) | 2012-10-03 | 2014-04-24 | Hitachi Chemical Co Ltd | 感光性エレメント及びこれを用いたレジストパターンの形成方法、プリント配線板の製造方法 |
US9971244B2 (en) | 2013-04-24 | 2018-05-15 | Hitachi Chemical Company, Ltd. | Photosensitive element, photosensitive element roll, method for producing resist pattern, and electronic component |
JP6673197B2 (ja) * | 2014-05-23 | 2020-03-25 | 日立化成株式会社 | レジストパターンの形成方法、プリント配線板の製造方法、投影露光用感光性樹脂組成物及び感光性エレメント |
JP6690776B2 (ja) * | 2017-03-09 | 2020-04-28 | 日立化成株式会社 | 感光性エレメント、半導体装置及びレジストパターンの形成方法 |
WO2020012651A1 (ja) * | 2018-07-13 | 2020-01-16 | 日立化成株式会社 | センシングデバイス用感光性フィルムロールの製造方法及びセンシングデバイス用感光性フィルムロール |
JPWO2020066351A1 (ja) * | 2018-09-28 | 2021-05-20 | 富士フイルム株式会社 | パターン付き基材の製造方法、回路基板の製造方法及びタッチパネルの製造方法 |
-
2021
- 2021-06-15 CN CN202180055255.6A patent/CN117083568A/zh active Pending
- 2021-06-15 US US18/020,874 patent/US20230393476A1/en active Pending
- 2021-06-15 WO PCT/JP2021/022718 patent/WO2022264275A1/ja active Application Filing
- 2021-06-15 JP JP2023528813A patent/JPWO2022264275A1/ja active Pending
- 2021-06-15 KR KR1020237005194A patent/KR20240021138A/ko active Search and Examination
- 2021-06-15 EP EP21943326.5A patent/EP4357852A1/en active Pending
-
2022
- 2022-06-06 TW TW111120821A patent/TW202303282A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2022264275A1 (ja) | 2022-12-22 |
KR20240021138A (ko) | 2024-02-16 |
US20230393476A1 (en) | 2023-12-07 |
TW202303282A (zh) | 2023-01-16 |
CN117083568A (zh) | 2023-11-17 |
EP4357852A1 (en) | 2024-04-24 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240417 |