JPWO2022249822A1 - - Google Patents

Info

Publication number
JPWO2022249822A1
JPWO2022249822A1 JP2023523362A JP2023523362A JPWO2022249822A1 JP WO2022249822 A1 JPWO2022249822 A1 JP WO2022249822A1 JP 2023523362 A JP2023523362 A JP 2023523362A JP 2023523362 A JP2023523362 A JP 2023523362A JP WO2022249822 A1 JPWO2022249822 A1 JP WO2022249822A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023523362A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022249822A1 publication Critical patent/JPWO2022249822A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
JP2023523362A 2021-05-28 2022-04-22 Pending JPWO2022249822A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021090474 2021-05-28
PCT/JP2022/018605 WO2022249822A1 (ja) 2021-05-28 2022-04-22 光偏向器

Publications (1)

Publication Number Publication Date
JPWO2022249822A1 true JPWO2022249822A1 (ja) 2022-12-01

Family

ID=84228723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023523362A Pending JPWO2022249822A1 (ja) 2021-05-28 2022-04-22

Country Status (3)

Country Link
US (1) US20240094524A1 (ja)
JP (1) JPWO2022249822A1 (ja)
WO (1) WO2022249822A1 (ja)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3526318B2 (ja) * 1993-11-17 2004-05-10 オリンパス株式会社 光走査装置
JP2002040354A (ja) * 2000-07-27 2002-02-06 Olympus Optical Co Ltd 光スキャナ
JP4285725B2 (ja) * 2002-07-04 2009-06-24 株式会社リコー 光走査装置
KR100707179B1 (ko) * 2005-02-07 2007-04-13 삼성전자주식회사 광스캐너 패키지 및 그 제조방법
JP4988655B2 (ja) * 2008-06-25 2012-08-01 パナソニック株式会社 半導体機械構造体
JP2010122412A (ja) * 2008-11-19 2010-06-03 Panasonic Corp 光学反射素子ユニット
JP2015225205A (ja) * 2014-05-28 2015-12-14 京セラドキュメントソリューションズ株式会社 光偏向器及び該光偏向器を備えた画像形成装置
JP2018185446A (ja) * 2017-04-27 2018-11-22 セイコーエプソン株式会社 反射防止膜、光デバイスおよび反射防止膜の製造方法
JPWO2020045152A1 (ja) * 2018-08-31 2021-08-26 パナソニックＩｐマネジメント株式会社 光学反射素子

Also Published As

Publication number Publication date
US20240094524A1 (en) 2024-03-21
WO2022249822A1 (ja) 2022-12-01

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