JPWO2022209571A1 - - Google Patents

Info

Publication number
JPWO2022209571A1
JPWO2022209571A1 JP2023510718A JP2023510718A JPWO2022209571A1 JP WO2022209571 A1 JPWO2022209571 A1 JP WO2022209571A1 JP 2023510718 A JP2023510718 A JP 2023510718A JP 2023510718 A JP2023510718 A JP 2023510718A JP WO2022209571 A1 JPWO2022209571 A1 JP WO2022209571A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023510718A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022209571A1 publication Critical patent/JPWO2022209571A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765Method using an image detector and processing of image signal
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8023Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/809Constructional details of image sensors of hybrid image sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
JP2023510718A 2021-03-30 2022-03-04 Pending JPWO2022209571A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021058329 2021-03-30
PCT/JP2022/009275 WO2022209571A1 (ja) 2021-03-30 2022-03-04 光検出装置および電子機器

Publications (1)

Publication Number Publication Date
JPWO2022209571A1 true JPWO2022209571A1 (https=) 2022-10-06

Family

ID=83458573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023510718A Pending JPWO2022209571A1 (https=) 2021-03-30 2022-03-04

Country Status (5)

Country Link
US (1) US20240175802A1 (https=)
EP (1) EP4318591A4 (https=)
JP (1) JPWO2022209571A1 (https=)
CN (1) CN116998017A (https=)
WO (1) WO2022209571A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024038808A (ja) * 2022-09-08 2024-03-21 キヤノン株式会社 光電変換装置、機器および光電変換装置の製造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002043502A (ja) * 2000-07-25 2002-02-08 Toshiba Corp マルチチップ半導体装置、ならびにマルチチップ半導体装置用チップ及びその製造方法
JP2006019455A (ja) * 2004-06-30 2006-01-19 Nec Electronics Corp 半導体装置およびその製造方法
US20090085143A1 (en) * 2007-10-01 2009-04-02 Samsung Electronics Co., Ltd. Image sensor and method of manufacturing the same
JP2012033894A (ja) * 2010-06-30 2012-02-16 Canon Inc 固体撮像装置
JP2012064709A (ja) * 2010-09-15 2012-03-29 Sony Corp 固体撮像装置及び電子機器
JP2012084609A (ja) * 2010-10-07 2012-04-26 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP2013187360A (ja) * 2012-03-08 2013-09-19 Sony Corp 固体撮像装置、及び、電子機器
JP2013251539A (ja) * 2012-05-30 2013-12-12 Samsung Electronics Co Ltd シリコン貫通ビアの構造物およびその形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6353354B2 (ja) * 2014-12-12 2018-07-04 ルネサスエレクトロニクス株式会社 撮像装置およびその製造方法
KR102430496B1 (ko) 2017-09-29 2022-08-08 삼성전자주식회사 이미지 센싱 장치 및 그 제조 방법
KR102636443B1 (ko) * 2018-12-12 2024-02-15 에스케이하이닉스 주식회사 노이즈 차단 구조를 포함하는 이미지 센싱 장치

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002043502A (ja) * 2000-07-25 2002-02-08 Toshiba Corp マルチチップ半導体装置、ならびにマルチチップ半導体装置用チップ及びその製造方法
JP2006019455A (ja) * 2004-06-30 2006-01-19 Nec Electronics Corp 半導体装置およびその製造方法
US20090085143A1 (en) * 2007-10-01 2009-04-02 Samsung Electronics Co., Ltd. Image sensor and method of manufacturing the same
JP2012033894A (ja) * 2010-06-30 2012-02-16 Canon Inc 固体撮像装置
JP2012064709A (ja) * 2010-09-15 2012-03-29 Sony Corp 固体撮像装置及び電子機器
JP2012084609A (ja) * 2010-10-07 2012-04-26 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP2013187360A (ja) * 2012-03-08 2013-09-19 Sony Corp 固体撮像装置、及び、電子機器
JP2013251539A (ja) * 2012-05-30 2013-12-12 Samsung Electronics Co Ltd シリコン貫通ビアの構造物およびその形成方法

Also Published As

Publication number Publication date
CN116998017A (zh) 2023-11-03
US20240175802A1 (en) 2024-05-30
WO2022209571A1 (ja) 2022-10-06
EP4318591A4 (en) 2024-12-18
TW202247441A (zh) 2022-12-01
EP4318591A1 (en) 2024-02-07

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