JPWO2022186004A1 - - Google Patents
Info
- Publication number
- JPWO2022186004A1 JPWO2022186004A1 JP2023503740A JP2023503740A JPWO2022186004A1 JP WO2022186004 A1 JPWO2022186004 A1 JP WO2022186004A1 JP 2023503740 A JP2023503740 A JP 2023503740A JP 2023503740 A JP2023503740 A JP 2023503740A JP WO2022186004 A1 JPWO2022186004 A1 JP WO2022186004A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/48—Protective coatings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021032542 | 2021-03-02 | ||
| PCT/JP2022/007287 WO2022186004A1 (ja) | 2021-03-02 | 2022-02-22 | 多層反射膜付き基板、反射型マスクブランク、反射型マスク、及び半導体装置の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022186004A1 true JPWO2022186004A1 (ja) | 2022-09-09 |
Family
ID=83154389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023503740A Pending JPWO2022186004A1 (ja) | 2021-03-02 | 2022-02-22 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240231214A9 (ja) |
| JP (1) | JPWO2022186004A1 (ja) |
| KR (1) | KR20230148328A (ja) |
| TW (1) | TW202248742A (ja) |
| WO (1) | WO2022186004A1 (ja) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004342867A (ja) * | 2003-05-16 | 2004-12-02 | Hoya Corp | 反射型マスクブランクス及び反射型マスク |
| JP4946296B2 (ja) * | 2006-03-30 | 2012-06-06 | 凸版印刷株式会社 | 反射型フォトマスクブランク及びその製造方法、反射型フォトマスク、並びに、半導体装置の製造方法 |
| US7771895B2 (en) * | 2006-09-15 | 2010-08-10 | Applied Materials, Inc. | Method of etching extreme ultraviolet light (EUV) photomasks |
| JP5194547B2 (ja) * | 2007-04-26 | 2013-05-08 | 凸版印刷株式会社 | 極端紫外線露光用マスク及びマスクブランク |
| JP4998082B2 (ja) * | 2007-05-17 | 2012-08-15 | 凸版印刷株式会社 | 反射型フォトマスクブランク及びその製造方法、反射型フォトマスク、並びに、半導体装置の製造方法 |
| JP6377361B2 (ja) | 2013-02-11 | 2018-08-22 | Hoya株式会社 | 多層反射膜付き基板及びその製造方法、反射型マスクブランクの製造方法、反射型マスクの製造方法、並びに半導体装置の製造方法 |
| WO2015012151A1 (ja) | 2013-07-22 | 2015-01-29 | Hoya株式会社 | 多層反射膜付き基板、ｅｕｖリソグラフィー用反射型マスクブランク、ｅｕｖリソグラフィー用反射型マスク及びその製造方法、並びに半導体装置の製造方法 |
-
2022
- 2022-02-22 US US18/277,648 patent/US20240231214A9/en active Pending
- 2022-02-22 WO PCT/JP2022/007287 patent/WO2022186004A1/ja active Application Filing
- 2022-02-22 JP JP2023503740A patent/JPWO2022186004A1/ja active Pending
- 2022-02-22 KR KR1020237026284A patent/KR20230148328A/ko unknown
- 2022-03-02 TW TW111107514A patent/TW202248742A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230148328A (ko) | 2023-10-24 |
| WO2022186004A1 (ja) | 2022-09-09 |
| US20240134265A1 (en) | 2024-04-25 |
| US20240231214A9 (en) | 2024-07-11 |
| TW202248742A (zh) | 2022-12-16 |