JPWO2022123633A1 - - Google Patents
Info
- Publication number
- JPWO2022123633A1 JPWO2022123633A1 JP2022567907A JP2022567907A JPWO2022123633A1 JP WO2022123633 A1 JPWO2022123633 A1 JP WO2022123633A1 JP 2022567907 A JP2022567907 A JP 2022567907A JP 2022567907 A JP2022567907 A JP 2022567907A JP WO2022123633 A1 JPWO2022123633 A1 JP WO2022123633A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
- H10B10/125—Static random access memory [SRAM] devices comprising a MOSFET load element the MOSFET being a thin film transistor [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/025—Manufacture or treatment of FETs having insulated gates [IGFET] of vertical IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/63—Vertical IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6735—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes having gates fully surrounding the channels, e.g. gate-all-around
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6728—Vertical TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/10—Integrated device layouts
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/045497 WO2022123633A1 (ja) | 2020-12-07 | 2020-12-07 | 柱状半導体メモリ装置とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022123633A1 true JPWO2022123633A1 (https=) | 2022-06-16 |
| JPWO2022123633A5 JPWO2022123633A5 (https=) | 2023-08-23 |
Family
ID=81973304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022567907A Ceased JPWO2022123633A1 (https=) | 2020-12-07 | 2020-12-07 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230337410A1 (https=) |
| JP (1) | JPWO2022123633A1 (https=) |
| TW (1) | TWI815229B (https=) |
| WO (1) | WO2022123633A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003188281A (ja) * | 2001-12-17 | 2003-07-04 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2007317742A (ja) * | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| WO2009128337A1 (ja) * | 2008-04-16 | 2009-10-22 | 日本電気株式会社 | 半導体装置およびその製造方法 |
| WO2020202554A1 (ja) * | 2019-04-05 | 2020-10-08 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 柱状半導体装置と、その製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102535448B1 (ko) * | 2018-12-21 | 2023-05-26 | 유니산티스 일렉트로닉스 싱가포르 프라이빗 리미티드 | 3 차원 반도체 장치의 제조 방법 |
-
2020
- 2020-12-07 WO PCT/JP2020/045497 patent/WO2022123633A1/ja not_active Ceased
- 2020-12-07 JP JP2022567907A patent/JPWO2022123633A1/ja not_active Ceased
-
2021
- 2021-11-30 TW TW110144617A patent/TWI815229B/zh active
-
2023
- 2023-06-06 US US18/330,064 patent/US20230337410A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003188281A (ja) * | 2001-12-17 | 2003-07-04 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2007317742A (ja) * | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| WO2009128337A1 (ja) * | 2008-04-16 | 2009-10-22 | 日本電気株式会社 | 半導体装置およびその製造方法 |
| WO2020202554A1 (ja) * | 2019-04-05 | 2020-10-08 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 柱状半導体装置と、その製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI815229B (zh) | 2023-09-11 |
| US20230337410A1 (en) | 2023-10-19 |
| TW202230751A (zh) | 2022-08-01 |
| WO2022123633A1 (ja) | 2022-06-16 |
Similar Documents
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