JPWO2022074949A1 - - Google Patents

Info

Publication number
JPWO2022074949A1
JPWO2022074949A1 JP2022555293A JP2022555293A JPWO2022074949A1 JP WO2022074949 A1 JPWO2022074949 A1 JP WO2022074949A1 JP 2022555293 A JP2022555293 A JP 2022555293A JP 2022555293 A JP2022555293 A JP 2022555293A JP WO2022074949 A1 JPWO2022074949 A1 JP WO2022074949A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022555293A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022074949A1 publication Critical patent/JPWO2022074949A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/087—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices for sensing other physical parameters, e.g. electrical or chemical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B25J13/089—Determining the position of the robot with reference to its environment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1612—Programme controls characterised by the hand, wrist, grip control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Numerical Control (AREA)
JP2022555293A 2020-10-09 2021-08-23 Pending JPWO2022074949A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/067,423 US11554498B2 (en) 2020-10-09 2020-10-09 Wafer jig, robot system, communication method, and robot teaching method
PCT/JP2021/030881 WO2022074949A1 (ja) 2020-10-09 2021-08-23 ウエハ治具、ロボットシステム、通信方法、及びロボット教示方法

Publications (1)

Publication Number Publication Date
JPWO2022074949A1 true JPWO2022074949A1 (ja) 2022-04-14

Family

ID=81079432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022555293A Pending JPWO2022074949A1 (ja) 2020-10-09 2021-08-23

Country Status (6)

Country Link
US (1) US11554498B2 (ja)
JP (1) JPWO2022074949A1 (ja)
KR (1) KR20230056771A (ja)
CN (1) CN116325111A (ja)
TW (1) TWI795940B (ja)
WO (1) WO2022074949A1 (ja)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3306398B2 (ja) * 1999-11-29 2002-07-24 大日本スクリーン製造株式会社 基板搬送装置および搬送教示システム
KR100763096B1 (ko) * 2001-09-07 2007-10-04 가부시키가이샤 야스카와덴키 웨이퍼 위치 교시 방법 및 교시용 치구
JP2003165078A (ja) * 2001-11-27 2003-06-10 Kawasaki Heavy Ind Ltd 自動教示システム
JP4501102B2 (ja) * 2003-10-14 2010-07-14 株式会社安川電機 教示治具およびそれを使って教示されるロボットおよびそのロボットの教示方法
JP4501103B2 (ja) * 2003-10-17 2010-07-14 株式会社安川電機 半導体ウェハ搬送ロボットのキャリブレーション方法およびそれを備えた半導体ウェハ搬送ロボット、ウェハ搬送装置
JP4285204B2 (ja) * 2003-11-04 2009-06-24 株式会社安川電機 ウェハ位置教示方法およびウェハ搬送ロボット
JP4506255B2 (ja) * 2004-04-19 2010-07-21 株式会社安川電機 ウェハ位置教示方法およびそのロボット
KR20080009745A (ko) * 2005-07-15 2008-01-29 가부시키가이샤 야스카와덴키 웨이퍼 위치 교시 방법 및 교시 치구 장치
CN102046338B (zh) * 2008-05-27 2014-05-07 日商乐华股份有限公司 输送装置、位置示教方法以及传感器夹具
JP5347466B2 (ja) 2008-12-09 2013-11-20 株式会社安川電機 教示治具によって教示する基板搬送用マニピュレータ
JP6384195B2 (ja) * 2014-08-20 2018-09-05 株式会社安川電機 ロボットシステムおよびロボット教示方法
JP6522325B2 (ja) * 2014-12-08 2019-05-29 日本電産サンキョー株式会社 産業用ロボットおよび産業用ロボットの教示方法

Also Published As

Publication number Publication date
US11554498B2 (en) 2023-01-17
WO2022074949A1 (ja) 2022-04-14
CN116325111A (zh) 2023-06-23
KR20230056771A (ko) 2023-04-27
US20220111534A1 (en) 2022-04-14
TWI795940B (zh) 2023-03-11
TW202214402A (zh) 2022-04-16

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230406