JPWO2022024820A1 - - Google Patents

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Publication number
JPWO2022024820A1
JPWO2022024820A1 JP2022540189A JP2022540189A JPWO2022024820A1 JP WO2022024820 A1 JPWO2022024820 A1 JP WO2022024820A1 JP 2022540189 A JP2022540189 A JP 2022540189A JP 2022540189 A JP2022540189 A JP 2022540189A JP WO2022024820 A1 JPWO2022024820 A1 JP WO2022024820A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022540189A
Other languages
Japanese (ja)
Other versions
JP7771956B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022024820A1 publication Critical patent/JPWO2022024820A1/ja
Application granted granted Critical
Publication of JP7771956B2 publication Critical patent/JP7771956B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/11Separation of active layers from substrates
    • H10P95/112Separation of active layers from substrates leaving a reusable substrate, e.g. epitaxial lift off
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02Inorganic compounds
    • C11D7/04Water-soluble compounds
    • C11D7/06Hydroxides
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02Inorganic compounds
    • C11D7/04Water-soluble compounds
    • C11D7/10Salts
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22Organic compounds
    • C11D7/32Organic compounds containing nitrogen
    • C11D7/3218Alkanolamines or alkanolimines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/80Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • H10K77/111Flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00Grinding, lapping or polishing of wafers, substrates or parts of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00Cleaning of wafers, substrates or parts of devices
    • H10P70/10Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/15Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00Cleaning of wafers, substrates or parts of devices
    • H10P70/40Cleaning for reclaiming
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP2022540189A 2020-07-29 2021-07-16 フレキシブル電子デバイスの製造方法 Active JP7771956B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2020128548 2020-07-29
JP2020128549 2020-07-29
JP2020128548 2020-07-29
JP2020128550 2020-07-29
JP2020128549 2020-07-29
JP2020128550 2020-07-29
PCT/JP2021/026826 WO2022024820A1 (ja) 2020-07-29 2021-07-16 フレキシブル電子デバイスの製造方法

Publications (2)

Publication Number Publication Date
JPWO2022024820A1 true JPWO2022024820A1 (https=) 2022-02-03
JP7771956B2 JP7771956B2 (ja) 2025-11-18

Family

ID=80036391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022540189A Active JP7771956B2 (ja) 2020-07-29 2021-07-16 フレキシブル電子デバイスの製造方法

Country Status (5)

Country Link
JP (1) JP7771956B2 (https=)
KR (1) KR20230044351A (https=)
CN (1) CN115668460A (https=)
TW (1) TW202243915A (https=)
WO (1) WO2022024820A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115939263A (zh) * 2023-03-09 2023-04-07 浙江晶科能源有限公司 太阳能电池制备方法、太阳能电池及光伏组件
CN115835740A (zh) 2022-12-13 2023-03-21 浙江晶科能源有限公司 太阳能电池制备方法、太阳能电池及叠层太阳能电池

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036323A (ja) * 1983-08-09 1985-02-25 Ube Ind Ltd 水酸化カリウム水溶液の精製法
JPH05283839A (ja) * 1992-01-23 1993-10-29 Minnesota Mining & Mfg Co <3M> フレキシブル回路の作製方法
JP2001277424A (ja) * 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd 金属化ポリイミドフィルムおよびその製造方法
JP2002290013A (ja) * 2001-03-26 2002-10-04 Toray Eng Co Ltd 金属回路パターン形成方法
JP2006063201A (ja) * 2004-08-27 2006-03-09 Sanyo Chem Ind Ltd 洗浄剤
JP2007141888A (ja) * 2005-11-14 2007-06-07 Muromachi Chemical Kk ポリイミド膜除去用洗浄液および洗浄方法
JP2009051958A (ja) * 2007-08-28 2009-03-12 Toyobo Co Ltd ポリイミドの分解・回収方法
JP2009114268A (ja) * 2007-11-02 2009-05-28 Nagase Chemtex Corp ポリイミド用剥離剤
JP2017126728A (ja) * 2016-01-15 2017-07-20 東洋紡株式会社 フレキシブル電子デバイスの製造方法
JP2017124586A (ja) * 2016-01-15 2017-07-20 東洋紡株式会社 フレキシブル電子デバイスの製造方法
WO2017126554A1 (ja) * 2016-01-22 2017-07-27 富士フイルム株式会社 処理液
JP2018137346A (ja) * 2017-02-22 2018-08-30 東洋紡株式会社 デバイス形成用仮支持基板およびデバイスの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161748A (en) 1979-05-31 1980-12-16 Ricoh Co Ltd Method of controlling collator
JPS5891446A (ja) 1981-11-26 1983-05-31 Dainippon Printing Co Ltd 軟x線リソグラフイ−用フイルムの製造法
JP4619461B2 (ja) 1996-08-27 2011-01-26 セイコーエプソン株式会社 薄膜デバイスの転写方法、及びデバイスの製造方法
JP2000243943A (ja) 1999-02-23 2000-09-08 Seiko Epson Corp 半導体装置の製造方法
JP2007157750A (ja) * 2005-11-30 2007-06-21 Tokyo Electron Ltd 洗浄装置及び洗浄方法
JP5152104B2 (ja) 2009-06-08 2013-02-27 東洋紡株式会社 積層体およびその製造方法
JP5862238B2 (ja) 2011-05-27 2016-02-16 東洋紡株式会社 積層体とその製造方法及びそれを用いたデバイス構造体の製造方法
TWI524991B (zh) 2013-02-04 2016-03-11 東洋紡股份有限公司 A laminated body, a method for producing a laminated body, and a method for manufacturing the flexible electronic device
JP2015199350A (ja) 2014-03-31 2015-11-12 新日鉄住金化学株式会社 フレキシブルデバイスの製造方法、フレキシブルデバイス製造装置、フレキシブルデバイス及び液状組成物

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036323A (ja) * 1983-08-09 1985-02-25 Ube Ind Ltd 水酸化カリウム水溶液の精製法
JPH05283839A (ja) * 1992-01-23 1993-10-29 Minnesota Mining & Mfg Co <3M> フレキシブル回路の作製方法
JP2001277424A (ja) * 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd 金属化ポリイミドフィルムおよびその製造方法
JP2002290013A (ja) * 2001-03-26 2002-10-04 Toray Eng Co Ltd 金属回路パターン形成方法
JP2006063201A (ja) * 2004-08-27 2006-03-09 Sanyo Chem Ind Ltd 洗浄剤
JP2007141888A (ja) * 2005-11-14 2007-06-07 Muromachi Chemical Kk ポリイミド膜除去用洗浄液および洗浄方法
JP2009051958A (ja) * 2007-08-28 2009-03-12 Toyobo Co Ltd ポリイミドの分解・回収方法
JP2009114268A (ja) * 2007-11-02 2009-05-28 Nagase Chemtex Corp ポリイミド用剥離剤
JP2017126728A (ja) * 2016-01-15 2017-07-20 東洋紡株式会社 フレキシブル電子デバイスの製造方法
JP2017124586A (ja) * 2016-01-15 2017-07-20 東洋紡株式会社 フレキシブル電子デバイスの製造方法
WO2017126554A1 (ja) * 2016-01-22 2017-07-27 富士フイルム株式会社 処理液
JP2018137346A (ja) * 2017-02-22 2018-08-30 東洋紡株式会社 デバイス形成用仮支持基板およびデバイスの製造方法

Also Published As

Publication number Publication date
KR20230044351A (ko) 2023-04-04
CN115668460A (zh) 2023-01-31
JP7771956B2 (ja) 2025-11-18
WO2022024820A1 (ja) 2022-02-03
TW202243915A (zh) 2022-11-16

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