JPWO2022024820A1 - - Google Patents
Info
- Publication number
- JPWO2022024820A1 JPWO2022024820A1 JP2022540189A JP2022540189A JPWO2022024820A1 JP WO2022024820 A1 JPWO2022024820 A1 JP WO2022024820A1 JP 2022540189 A JP2022540189 A JP 2022540189A JP 2022540189 A JP2022540189 A JP 2022540189A JP WO2022024820 A1 JPWO2022024820 A1 JP WO2022024820A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
- H10P95/11—Separation of active layers from substrates
- H10P95/112—Separation of active layers from substrates leaving a reusable substrate, e.g. epitaxial lift off
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/06—Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3218—Alkanolamines or alkanolimines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/40—Cleaning for reclaiming
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020128548 | 2020-07-29 | ||
| JP2020128549 | 2020-07-29 | ||
| JP2020128548 | 2020-07-29 | ||
| JP2020128550 | 2020-07-29 | ||
| JP2020128549 | 2020-07-29 | ||
| JP2020128550 | 2020-07-29 | ||
| PCT/JP2021/026826 WO2022024820A1 (ja) | 2020-07-29 | 2021-07-16 | フレキシブル電子デバイスの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022024820A1 true JPWO2022024820A1 (https=) | 2022-02-03 |
| JP7771956B2 JP7771956B2 (ja) | 2025-11-18 |
Family
ID=80036391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022540189A Active JP7771956B2 (ja) | 2020-07-29 | 2021-07-16 | フレキシブル電子デバイスの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7771956B2 (https=) |
| KR (1) | KR20230044351A (https=) |
| CN (1) | CN115668460A (https=) |
| TW (1) | TW202243915A (https=) |
| WO (1) | WO2022024820A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115939263A (zh) * | 2023-03-09 | 2023-04-07 | 浙江晶科能源有限公司 | 太阳能电池制备方法、太阳能电池及光伏组件 |
| CN115835740A (zh) | 2022-12-13 | 2023-03-21 | 浙江晶科能源有限公司 | 太阳能电池制备方法、太阳能电池及叠层太阳能电池 |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6036323A (ja) * | 1983-08-09 | 1985-02-25 | Ube Ind Ltd | 水酸化カリウム水溶液の精製法 |
| JPH05283839A (ja) * | 1992-01-23 | 1993-10-29 | Minnesota Mining & Mfg Co <3M> | フレキシブル回路の作製方法 |
| JP2001277424A (ja) * | 2000-04-03 | 2001-10-09 | Mitsubishi Shindoh Co Ltd | 金属化ポリイミドフィルムおよびその製造方法 |
| JP2002290013A (ja) * | 2001-03-26 | 2002-10-04 | Toray Eng Co Ltd | 金属回路パターン形成方法 |
| JP2006063201A (ja) * | 2004-08-27 | 2006-03-09 | Sanyo Chem Ind Ltd | 洗浄剤 |
| JP2007141888A (ja) * | 2005-11-14 | 2007-06-07 | Muromachi Chemical Kk | ポリイミド膜除去用洗浄液および洗浄方法 |
| JP2009051958A (ja) * | 2007-08-28 | 2009-03-12 | Toyobo Co Ltd | ポリイミドの分解・回収方法 |
| JP2009114268A (ja) * | 2007-11-02 | 2009-05-28 | Nagase Chemtex Corp | ポリイミド用剥離剤 |
| JP2017126728A (ja) * | 2016-01-15 | 2017-07-20 | 東洋紡株式会社 | フレキシブル電子デバイスの製造方法 |
| JP2017124586A (ja) * | 2016-01-15 | 2017-07-20 | 東洋紡株式会社 | フレキシブル電子デバイスの製造方法 |
| WO2017126554A1 (ja) * | 2016-01-22 | 2017-07-27 | 富士フイルム株式会社 | 処理液 |
| JP2018137346A (ja) * | 2017-02-22 | 2018-08-30 | 東洋紡株式会社 | デバイス形成用仮支持基板およびデバイスの製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55161748A (en) | 1979-05-31 | 1980-12-16 | Ricoh Co Ltd | Method of controlling collator |
| JPS5891446A (ja) | 1981-11-26 | 1983-05-31 | Dainippon Printing Co Ltd | 軟x線リソグラフイ−用フイルムの製造法 |
| JP4619461B2 (ja) | 1996-08-27 | 2011-01-26 | セイコーエプソン株式会社 | 薄膜デバイスの転写方法、及びデバイスの製造方法 |
| JP2000243943A (ja) | 1999-02-23 | 2000-09-08 | Seiko Epson Corp | 半導体装置の製造方法 |
| JP2007157750A (ja) * | 2005-11-30 | 2007-06-21 | Tokyo Electron Ltd | 洗浄装置及び洗浄方法 |
| JP5152104B2 (ja) | 2009-06-08 | 2013-02-27 | 東洋紡株式会社 | 積層体およびその製造方法 |
| JP5862238B2 (ja) | 2011-05-27 | 2016-02-16 | 東洋紡株式会社 | 積層体とその製造方法及びそれを用いたデバイス構造体の製造方法 |
| TWI524991B (zh) | 2013-02-04 | 2016-03-11 | 東洋紡股份有限公司 | A laminated body, a method for producing a laminated body, and a method for manufacturing the flexible electronic device |
| JP2015199350A (ja) | 2014-03-31 | 2015-11-12 | 新日鉄住金化学株式会社 | フレキシブルデバイスの製造方法、フレキシブルデバイス製造装置、フレキシブルデバイス及び液状組成物 |
-
2021
- 2021-07-16 JP JP2022540189A patent/JP7771956B2/ja active Active
- 2021-07-16 CN CN202180036802.6A patent/CN115668460A/zh active Pending
- 2021-07-16 WO PCT/JP2021/026826 patent/WO2022024820A1/ja not_active Ceased
- 2021-07-16 KR KR1020227016119A patent/KR20230044351A/ko active Pending
- 2021-07-28 TW TW110127671A patent/TW202243915A/zh unknown
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6036323A (ja) * | 1983-08-09 | 1985-02-25 | Ube Ind Ltd | 水酸化カリウム水溶液の精製法 |
| JPH05283839A (ja) * | 1992-01-23 | 1993-10-29 | Minnesota Mining & Mfg Co <3M> | フレキシブル回路の作製方法 |
| JP2001277424A (ja) * | 2000-04-03 | 2001-10-09 | Mitsubishi Shindoh Co Ltd | 金属化ポリイミドフィルムおよびその製造方法 |
| JP2002290013A (ja) * | 2001-03-26 | 2002-10-04 | Toray Eng Co Ltd | 金属回路パターン形成方法 |
| JP2006063201A (ja) * | 2004-08-27 | 2006-03-09 | Sanyo Chem Ind Ltd | 洗浄剤 |
| JP2007141888A (ja) * | 2005-11-14 | 2007-06-07 | Muromachi Chemical Kk | ポリイミド膜除去用洗浄液および洗浄方法 |
| JP2009051958A (ja) * | 2007-08-28 | 2009-03-12 | Toyobo Co Ltd | ポリイミドの分解・回収方法 |
| JP2009114268A (ja) * | 2007-11-02 | 2009-05-28 | Nagase Chemtex Corp | ポリイミド用剥離剤 |
| JP2017126728A (ja) * | 2016-01-15 | 2017-07-20 | 東洋紡株式会社 | フレキシブル電子デバイスの製造方法 |
| JP2017124586A (ja) * | 2016-01-15 | 2017-07-20 | 東洋紡株式会社 | フレキシブル電子デバイスの製造方法 |
| WO2017126554A1 (ja) * | 2016-01-22 | 2017-07-27 | 富士フイルム株式会社 | 処理液 |
| JP2018137346A (ja) * | 2017-02-22 | 2018-08-30 | 東洋紡株式会社 | デバイス形成用仮支持基板およびデバイスの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230044351A (ko) | 2023-04-04 |
| CN115668460A (zh) | 2023-01-31 |
| JP7771956B2 (ja) | 2025-11-18 |
| WO2022024820A1 (ja) | 2022-02-03 |
| TW202243915A (zh) | 2022-11-16 |
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