JPWO2022024186A1 - - Google Patents

Info

Publication number
JPWO2022024186A1
JPWO2022024186A1 JP2022539807A JP2022539807A JPWO2022024186A1 JP WO2022024186 A1 JPWO2022024186 A1 JP WO2022024186A1 JP 2022539807 A JP2022539807 A JP 2022539807A JP 2022539807 A JP2022539807 A JP 2022539807A JP WO2022024186 A1 JPWO2022024186 A1 JP WO2022024186A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022539807A
Other versions
JP7494913B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022024186A1 publication Critical patent/JPWO2022024186A1/ja
Application granted granted Critical
Publication of JP7494913B2 publication Critical patent/JP7494913B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
JP2022539807A 2020-07-27 2020-07-27 吸着パッド Active JP7494913B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/028720 WO2022024186A1 (ja) 2020-07-27 2020-07-27 吸着パッド

Publications (2)

Publication Number Publication Date
JPWO2022024186A1 true JPWO2022024186A1 (ja) 2022-02-03
JP7494913B2 JP7494913B2 (ja) 2024-06-04

Family

ID=80037824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022539807A Active JP7494913B2 (ja) 2020-07-27 2020-07-27 吸着パッド

Country Status (4)

Country Link
JP (1) JP7494913B2 (ja)
KR (1) KR20230041717A (ja)
CN (1) CN115867415A (ja)
WO (1) WO2022024186A1 (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187143U (ja) * 1984-05-23 1985-12-11 丸山　一郎 吸着具
JP2006089235A (ja) 2004-09-24 2006-04-06 Kao Corp 物品の移動装置
JP2006142441A (ja) 2004-11-22 2006-06-08 Koganei Corp 真空吸着具
KR100555726B1 (ko) 2005-01-11 2006-03-03 세크론 주식회사 반도체 패키지 흡착용 진공패드
JP2008238306A (ja) 2007-03-26 2008-10-09 Stella Giken Kk 真空吸着パッド
JP5756956B2 (ja) 2010-11-22 2015-07-29 Smc株式会社 真空吸着装置

Also Published As

Publication number Publication date
JP7494913B2 (ja) 2024-06-04
KR20230041717A (ko) 2023-03-24
WO2022024186A1 (ja) 2022-02-03
CN115867415A (zh) 2023-03-28

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