JPWO2022013918A5 - - Google Patents

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Publication number
JPWO2022013918A5
JPWO2022013918A5 JP2022535998A JP2022535998A JPWO2022013918A5 JP WO2022013918 A5 JPWO2022013918 A5 JP WO2022013918A5 JP 2022535998 A JP2022535998 A JP 2022535998A JP 2022535998 A JP2022535998 A JP 2022535998A JP WO2022013918 A5 JPWO2022013918 A5 JP WO2022013918A5
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JP
Japan
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mode
sample
charged particle
particle beam
beam device
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JP2022535998A
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English (en)
Japanese (ja)
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JPWO2022013918A1 (https=
JP7392155B2 (ja
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Priority claimed from PCT/JP2020/027252 external-priority patent/WO2022013918A1/ja
Publication of JPWO2022013918A1 publication Critical patent/JPWO2022013918A1/ja
Publication of JPWO2022013918A5 publication Critical patent/JPWO2022013918A5/ja
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Publication of JP7392155B2 publication Critical patent/JP7392155B2/ja
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JP2022535998A 2020-07-13 2020-07-13 荷電粒子線装置、およびスキャン波形生成方法 Active JP7392155B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/027252 WO2022013918A1 (ja) 2020-07-13 2020-07-13 荷電粒子線装置、およびスキャン波形生成方法

Publications (3)

Publication Number Publication Date
JPWO2022013918A1 JPWO2022013918A1 (https=) 2022-01-20
JPWO2022013918A5 true JPWO2022013918A5 (https=) 2023-03-07
JP7392155B2 JP7392155B2 (ja) 2023-12-05

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ID=79555267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022535998A Active JP7392155B2 (ja) 2020-07-13 2020-07-13 荷電粒子線装置、およびスキャン波形生成方法

Country Status (3)

Country Link
US (1) US12476070B2 (https=)
JP (1) JP7392155B2 (https=)
WO (1) WO2022013918A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756787B2 (ja) * 1988-03-17 1995-06-14 日本電子テクニクス株式会社 走査電子顕微鏡の自動焦点制御装置
JPH02236936A (ja) * 1989-03-08 1990-09-19 Mitsubishi Electric Corp 荷電ビーム装置
US6703623B1 (en) * 2000-09-27 2004-03-09 Leepl Corporation Electron beam proximity exposure apparatus
JP2003151484A (ja) * 2001-11-15 2003-05-23 Jeol Ltd 走査型荷電粒子ビーム装置
JP4801518B2 (ja) 2006-07-07 2011-10-26 株式会社日立ハイテクノロジーズ 荷電粒子線顕微方法および荷電粒子線装置
US8384048B2 (en) * 2007-06-25 2013-02-26 Multibeam Corporation Charged particle beam deflection method with separate stage tracking and stage positional error signals
JP2015133267A (ja) * 2014-01-15 2015-07-23 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置
US9793091B1 (en) * 2016-06-28 2017-10-17 Ngr Inc. Image generation apparatus
JP6770482B2 (ja) 2017-05-22 2020-10-14 日本電子株式会社 荷電粒子線装置および走査像の歪み補正方法

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