JPWO2021235407A1 - - Google Patents

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Publication number
JPWO2021235407A1
JPWO2021235407A1 JP2022524473A JP2022524473A JPWO2021235407A1 JP WO2021235407 A1 JPWO2021235407 A1 JP WO2021235407A1 JP 2022524473 A JP2022524473 A JP 2022524473A JP 2022524473 A JP2022524473 A JP 2022524473A JP WO2021235407 A1 JPWO2021235407 A1 JP WO2021235407A1
Authority
JP
Japan
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Application number
JP2022524473A
Other versions
JPWO2021235407A5 (ja
JP7185099B2 (ja
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Publication of JP7185099B2 publication Critical patent/JP7185099B2/ja
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/587—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Furnace Charging Or Discharging (AREA)
JP2022524473A 2020-05-19 2021-05-17 セラミック板の製造方法、セッターの製造方法、及びセッターの再生方法 Active JP7185099B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020087479 2020-05-19
JP2020087479 2020-05-19
PCT/JP2021/018676 WO2021235407A1 (ja) 2020-05-19 2021-05-17 セラミック板の製造方法、セッターの製造方法、及びセッターの再生方法

Publications (3)

Publication Number Publication Date
JPWO2021235407A1 true JPWO2021235407A1 (ja) 2021-11-25
JPWO2021235407A5 JPWO2021235407A5 (ja) 2022-08-10
JP7185099B2 JP7185099B2 (ja) 2022-12-06

Family

ID=78708530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022524473A Active JP7185099B2 (ja) 2020-05-19 2021-05-17 セラミック板の製造方法、セッターの製造方法、及びセッターの再生方法

Country Status (2)

Country Link
JP (1) JP7185099B2 (ja)
WO (1) WO2021235407A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7282279B1 (ja) * 2021-09-13 2023-05-26 デンカ株式会社 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000044349A (ja) * 1998-07-30 2000-02-15 Denki Kagaku Kogyo Kk 六方晶窒化硼素焼結体及びその製造方法
JP2005213117A (ja) * 2004-01-30 2005-08-11 Tdk Corp セラミック基板の製造方法
JP2011178598A (ja) * 2010-03-01 2011-09-15 Hitachi Metals Ltd 窒化珪素基板の製造方法および窒化珪素基板

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254962A (ja) * 2007-04-04 2008-10-23 Inax Corp セッターの平坦化処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000044349A (ja) * 1998-07-30 2000-02-15 Denki Kagaku Kogyo Kk 六方晶窒化硼素焼結体及びその製造方法
JP2005213117A (ja) * 2004-01-30 2005-08-11 Tdk Corp セラミック基板の製造方法
JP2011178598A (ja) * 2010-03-01 2011-09-15 Hitachi Metals Ltd 窒化珪素基板の製造方法および窒化珪素基板

Also Published As

Publication number Publication date
JP7185099B2 (ja) 2022-12-06
WO2021235407A1 (ja) 2021-11-25

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