JPWO2021176864A1 - - Google Patents

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Publication number
JPWO2021176864A1
JPWO2021176864A1 JP2022505011A JP2022505011A JPWO2021176864A1 JP WO2021176864 A1 JPWO2021176864 A1 JP WO2021176864A1 JP 2022505011 A JP2022505011 A JP 2022505011A JP 2022505011 A JP2022505011 A JP 2022505011A JP WO2021176864 A1 JPWO2021176864 A1 JP WO2021176864A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022505011A
Other versions
JP7169034B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021176864A1 publication Critical patent/JPWO2021176864A1/ja
Application granted granted Critical
Publication of JP7169034B2 publication Critical patent/JP7169034B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/414—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37371—Flow
JP2022505011A 2020-03-05 2021-01-19 流量制御装置および流量制御方法 Active JP7169034B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020038161 2020-03-05
JP2020038161 2020-03-05
PCT/JP2021/001601 WO2021176864A1 (ja) 2020-03-05 2021-01-19 流量制御装置および流量制御方法

Publications (2)

Publication Number Publication Date
JPWO2021176864A1 true JPWO2021176864A1 (ja) 2021-09-10
JP7169034B2 JP7169034B2 (ja) 2022-11-10

Family

ID=77614491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022505011A Active JP7169034B2 (ja) 2020-03-05 2021-01-19 流量制御装置および流量制御方法

Country Status (5)

Country Link
US (1) US20230129479A1 (ja)
JP (1) JP7169034B2 (ja)
KR (1) KR20220085799A (ja)
TW (1) TWI770792B (ja)
WO (1) WO2021176864A1 (ja)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000188894A (ja) * 1998-12-22 2000-07-04 Canon Inc モ―タ加速制御方法
JP2001092501A (ja) * 1999-09-17 2001-04-06 Toshiba Mach Co Ltd 自動制御方法
JP2001147723A (ja) * 2000-09-07 2001-05-29 Hitachi Metals Ltd 流量制御方法
WO2013115298A1 (ja) * 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2014236569A (ja) * 2013-05-31 2014-12-15 ローム株式会社 ボイスコイルモータの駆動回路および駆動方法ならびにそれらを用いたレンズモジュールおよび電子機器
WO2018180745A1 (ja) * 2017-03-28 2018-10-04 株式会社フジキン 圧力式流量制御装置および流量制御方法
WO2019163676A1 (ja) * 2018-02-26 2019-08-29 株式会社フジキン 流量制御装置および流量制御方法
WO2020004183A1 (ja) * 2018-06-26 2020-01-02 株式会社フジキン 流量制御方法および流量制御装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6272401B1 (en) * 1997-07-23 2001-08-07 Dresser Industries, Inc. Valve positioner system
JP4119109B2 (ja) 2001-10-17 2008-07-16 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
WO2004033956A1 (en) * 2002-10-11 2004-04-22 Saudi Arabian Oil Company Automatic valve characterization of digital valve positioners
JP2004301223A (ja) * 2003-03-31 2004-10-28 Washi Kosan Co Ltd 液体を媒体とした圧電駆動体とこれを用いた流量制御弁
US6971172B2 (en) * 2003-08-08 2005-12-06 Cummins Inc. Piezoelectric control valve adjustment method
JP4765746B2 (ja) * 2006-04-17 2011-09-07 日立金属株式会社 遮断弁装置及びこれを組み込んだ質量流量制御装置
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
JP6372998B2 (ja) 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
WO2017170174A1 (ja) * 2016-03-29 2017-10-05 株式会社フジキン 圧力式流量制御装置及び流量自己診断方法
WO2018062516A1 (ja) * 2016-09-29 2018-04-05 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
JP6793026B2 (ja) * 2016-12-13 2020-12-02 株式会社堀場エステック バルブ装置及びバルブ制御装置
WO2018123852A1 (ja) * 2016-12-26 2018-07-05 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
WO2019107215A1 (ja) * 2017-11-30 2019-06-06 株式会社フジキン 流量制御装置
JP7059053B2 (ja) * 2018-03-12 2022-04-25 株式会社堀場エステック 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
US11209298B2 (en) * 2018-04-27 2021-12-28 Hitachi Metals, Ltd. Thermal mass flow sensor with improved accuracy

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000188894A (ja) * 1998-12-22 2000-07-04 Canon Inc モ―タ加速制御方法
JP2001092501A (ja) * 1999-09-17 2001-04-06 Toshiba Mach Co Ltd 自動制御方法
JP2001147723A (ja) * 2000-09-07 2001-05-29 Hitachi Metals Ltd 流量制御方法
WO2013115298A1 (ja) * 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2014236569A (ja) * 2013-05-31 2014-12-15 ローム株式会社 ボイスコイルモータの駆動回路および駆動方法ならびにそれらを用いたレンズモジュールおよび電子機器
WO2018180745A1 (ja) * 2017-03-28 2018-10-04 株式会社フジキン 圧力式流量制御装置および流量制御方法
WO2019163676A1 (ja) * 2018-02-26 2019-08-29 株式会社フジキン 流量制御装置および流量制御方法
WO2020004183A1 (ja) * 2018-06-26 2020-01-02 株式会社フジキン 流量制御方法および流量制御装置

Also Published As

Publication number Publication date
TW202138948A (zh) 2021-10-16
JP7169034B2 (ja) 2022-11-10
TWI770792B (zh) 2022-07-11
US20230129479A1 (en) 2023-04-27
KR20220085799A (ko) 2022-06-22
WO2021176864A1 (ja) 2021-09-10

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