JPWO2021149695A1 - - Google Patents

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Publication number
JPWO2021149695A1
JPWO2021149695A1 JP2021572748A JP2021572748A JPWO2021149695A1 JP WO2021149695 A1 JPWO2021149695 A1 JP WO2021149695A1 JP 2021572748 A JP2021572748 A JP 2021572748A JP 2021572748 A JP2021572748 A JP 2021572748A JP WO2021149695 A1 JPWO2021149695 A1 JP WO2021149695A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021572748A
Other versions
JP7452556B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021149695A1 publication Critical patent/JPWO2021149695A1/ja
Priority to JP2023198734A priority Critical patent/JP2024037732A/ja
Application granted granted Critical
Publication of JP7452556B2 publication Critical patent/JP7452556B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/057—Arrangements for discharging liquids or other fluent material without using a gun or nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/03—Discharge apparatus, e.g. electrostatic spray guns characterised by the use of gas, e.g. electrostatically assisted pneumatic spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/14—Plant for applying liquids or other fluent materials to objects specially adapted for coating continuously moving elongated bodies, e.g. wires, strips, pipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B05B14/30—Arrangements for collecting, re-using or eliminating excess spraying material comprising enclosures close to, or in contact with, the object to be sprayed and surrounding or confining the discharged spray or jet but not the object to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B16/00—Spray booths
    • B05B16/20—Arrangements for spraying in combination with other operations, e.g. drying; Arrangements enabling a combination of spraying operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/001—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means incorporating means for heating or cooling, e.g. the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/005—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means the high voltage supplied to an electrostatic spraying apparatus being adjustable during spraying operation, e.g. for modifying spray width, droplet size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/053—Arrangements for supplying power, e.g. charging power
    • B05B5/0533—Electrodes specially adapted therefor; Arrangements of electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/082—Plant for applying liquids or other fluent materials to objects characterised by means for supporting, holding or conveying the objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/082—Plant for applying liquids or other fluent materials to objects characterised by means for supporting, holding or conveying the objects
    • B05B5/084—Plant for applying liquids or other fluent materials to objects characterised by means for supporting, holding or conveying the objects the objects lying on, or being supported above conveying means, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/087—Arrangements of electrodes, e.g. of charging, shielding, collecting electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0012—Apparatus for achieving spraying before discharge from the apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus
    • B05B12/126—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus responsive to target velocity, e.g. to relative velocity between spray apparatus and target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653—Details
    • B05B17/0669—Excitation frequencies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Nozzles (AREA)
  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
JP2021572748A 2020-01-21 2021-01-20 ミスト成膜装置及びミスト成膜方法 Active JP7452556B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023198734A JP2024037732A (ja) 2020-01-21 2023-11-24 成膜装置、導電膜の製造装置、成膜方法および導電膜の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020007524 2020-01-21
JP2020007524 2020-01-21
PCT/JP2021/001749 WO2021149695A1 (ja) 2020-01-21 2021-01-20 ミスト成膜装置及びミスト成膜方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023198734A Division JP2024037732A (ja) 2020-01-21 2023-11-24 成膜装置、導電膜の製造装置、成膜方法および導電膜の製造方法

Publications (2)

Publication Number Publication Date
JPWO2021149695A1 true JPWO2021149695A1 (ja) 2021-07-29
JP7452556B2 JP7452556B2 (ja) 2024-03-19

Family

ID=76992986

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021572748A Active JP7452556B2 (ja) 2020-01-21 2021-01-20 ミスト成膜装置及びミスト成膜方法
JP2023198734A Pending JP2024037732A (ja) 2020-01-21 2023-11-24 成膜装置、導電膜の製造装置、成膜方法および導電膜の製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023198734A Pending JP2024037732A (ja) 2020-01-21 2023-11-24 成膜装置、導電膜の製造装置、成膜方法および導電膜の製造方法

Country Status (6)

Country Link
US (1) US20220355316A1 (ja)
JP (2) JP7452556B2 (ja)
KR (2) KR102691590B1 (ja)
CN (2) CN117983435A (ja)
TW (1) TW202144082A (ja)
WO (1) WO2021149695A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12030031B2 (en) * 2020-08-31 2024-07-09 Spraying Systems Co. Electrostatic spray dryer apparatus and method
WO2024044306A1 (en) * 2022-08-24 2024-02-29 Spraying Systems Co. Controllably providing a coating of nanoparticles on a conveyed substrate
CN118268185A (zh) * 2024-06-03 2024-07-02 昆山晟成光电科技有限公司 一种自下而上的超声波雾化镀膜工艺

Citations (6)

* Cited by examiner, † Cited by third party
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US4143962A (en) * 1977-06-09 1979-03-13 Eastman Kodak Company Electrographic imaging apparatus and method
JP2002289803A (ja) * 2001-03-26 2002-10-04 Seiko Epson Corp 強誘電体薄膜の形成方法、強誘電体薄膜形成装置および強誘電体メモリの製造方法
JP2012196623A (ja) * 2011-03-22 2012-10-18 Sharp Corp 成膜装置
US20130164452A1 (en) * 2010-06-21 2013-06-27 Beneq Oy Apparatus and method for coating glass substrate
JP2015029971A (ja) * 2013-08-06 2015-02-16 東レエンジニアリング株式会社 エレクトロスプレー装置
JP2016114400A (ja) * 2014-12-12 2016-06-23 株式会社島津製作所 マトリックス膜形成装置

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US4060648A (en) * 1974-10-15 1977-11-29 Union Carbide Corporation Surface coating process
DE3827629A1 (de) * 1988-08-16 1990-03-15 Hoechst Ag Verfahren und vorrichtung zur oberflaechenvorbehandlung von ein- oder mehrschichtigem formmaterial mittels einer elektrischen koronaentladung
US5271970A (en) * 1988-08-16 1993-12-21 Hoechst Aktiengesellschaft Process for passing a hydrophobic substrate through a corona discharge zone and simultaneously introducing an adhesive promoting aerosol
US5063085A (en) * 1989-08-01 1991-11-05 Mazda Motor Corporation Coating method
DE3925539A1 (de) * 1989-08-02 1991-02-07 Hoechst Ag Verfahren und vorrichtung zum beschichten eines schichttraegers
KR100721504B1 (ko) * 2001-08-02 2007-05-23 에이에스엠지니텍코리아 주식회사 플라즈마 강화 원자층 증착 장치 및 이를 이용한 박막형성방법
US7320814B2 (en) * 2003-12-19 2008-01-22 Kimberly-Clark Worldwide, Inc. Methods for applying a liquid to a web
US9139912B2 (en) * 2008-07-24 2015-09-22 Ok Ryul Kim Apparatus and method for continuous powder coating
KR20140089373A (ko) * 2011-10-12 2014-07-14 1366 테크놀로지 인코포레이티드 기판 상에 레지스트 박층을 증착하기 위한 장치 및 공정
JP2015003301A (ja) * 2013-06-21 2015-01-08 東レエンジニアリング株式会社 エレクトロスプレー装置
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KR102307190B1 (ko) * 2014-01-21 2021-09-30 카티바, 인크. 전자 장치 인캡슐레이션을 위한 기기 및 기술
KR101657643B1 (ko) * 2014-03-14 2016-09-19 주식회사 알란텀 정전식 금속 다공체 형성장치 및 이를 이용한 정전식 금속 다공체 형성방법
CN107250429B (zh) * 2015-02-18 2020-08-14 株式会社尼康 薄膜制造装置和薄膜制造方法
KR102344403B1 (ko) * 2016-03-11 2021-12-29 가부시키가이샤 니콘 미스트 발생장치, 성막장치, 미스트 발생 방법, 성막 방법, 및 디바이스 제조 방법
KR102011456B1 (ko) * 2018-01-26 2019-08-16 한국표준과학연구원 결정화된 반도체 입자의 증착을 위한 반도체 소자 제조 장치 및 방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4143962A (en) * 1977-06-09 1979-03-13 Eastman Kodak Company Electrographic imaging apparatus and method
JP2002289803A (ja) * 2001-03-26 2002-10-04 Seiko Epson Corp 強誘電体薄膜の形成方法、強誘電体薄膜形成装置および強誘電体メモリの製造方法
US20130164452A1 (en) * 2010-06-21 2013-06-27 Beneq Oy Apparatus and method for coating glass substrate
JP2012196623A (ja) * 2011-03-22 2012-10-18 Sharp Corp 成膜装置
JP2015029971A (ja) * 2013-08-06 2015-02-16 東レエンジニアリング株式会社 エレクトロスプレー装置
JP2016114400A (ja) * 2014-12-12 2016-06-23 株式会社島津製作所 マトリックス膜形成装置

Also Published As

Publication number Publication date
KR20220112838A (ko) 2022-08-11
KR102691590B1 (ko) 2024-08-05
JP2024037732A (ja) 2024-03-19
CN115003418A (zh) 2022-09-02
WO2021149695A1 (ja) 2021-07-29
KR20240122581A (ko) 2024-08-12
CN117983435A (zh) 2024-05-07
TW202144082A (zh) 2021-12-01
US20220355316A1 (en) 2022-11-10
JP7452556B2 (ja) 2024-03-19

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